JP2017045924A - 銅合金ボンディングワイヤ - Google Patents
銅合金ボンディングワイヤ Download PDFInfo
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Abstract
Description
図示によって説明すると、キャピラリによるウェッジ接合では、図1に示すように、ボンディングワイヤ(1)がリード(3)にウェッジ接合される。この際、ウェッジ接合されたボンディングワイヤ(1)の端部はキャピラリ(2)の先端部によって押し潰され、図2に示すように、接合箇所のワイヤの面積が最も小さくなる。さらに、その後ボンディングワイヤ(1)が切り離される。これは、キャピラリ(2)の上部にあるワイヤクランパ(4)によってボンディングワイヤ(1)を掴んで上方に引き上げると、図3に示すように、残ボンディングワイヤ(1)の先端部分でワイヤが簡単に切れるようになっている。
ボンディングワイヤの断面積あたりの結晶粒測定を以下のようにして行った。すなわち、イオンミリング装置(型式:日立ハイテクノロジーズ社製 IM4000)を用いて実施例1のボンディングワイヤを切断した。次いで、FE−SEM(日本電子社製 JSM−7800F)を用いてその断面を観察した。また、EBSD装置(ティー・エス・エル社製OIM Data Collectionシステム)を使用して断面積あたりの結晶粒の個数を数えた。この測定結果を表1右欄に示す。
ボンディングワイヤの方位測定は、FE−SEM(日本電子社製 JSM−7800F)、及び、EBSD装置(ティー・エス・エル社製OIM Data Collectionシステム)を用いて行った。この測定結果を表1右欄に示す。
ボンディングワイヤの屈曲試験は、以下のようにして行った。すなわち、ワイヤボンダー(新川社製 UTC−3000)を用い、25℃の周囲温度の銀(Ag)めっき銅(Cu)板に超音波出力 100mA、ボンド荷重90gfの条件で100本ウェッジ接合をした。そして、このウェッジ接合の終了後、図1に示すように、キャピラリ(2)を上昇させてキャピラリ(2)の先端にボンディングワイヤ(1)を繰り出し、その後ワイヤクランパ(4)を閉にした後、キャピラリ(2)とワイヤクランパ(4)とを一緒に上昇させることにより、キャピラリ(2)の先端に所定の長さのボンディングワイヤ(1)を延出させた状態でワイヤを切断した。これを千回行い、拡大投影機にてボンディングワイヤの屈曲本数を調べた。この測定結果を表1右欄に示す。
2 キャピラリ
3 リード
4 ワイヤクランパ
Claims (8)
- 断面積あたりの銅合金の結晶粒が50〜250個あり、その最大粒径はボンディングワイヤの直径の1/3以下であり、かつ、<100>等の特定方位がいずれも40%以下の無方位であることを特徴とする銅合金ボンディングワイヤ。
- 前記銅合金は金(Au)が100質量ppm以上3,000質量ppm以下、銀(Ag)が10質量ppm以上1,000質量ppm以下またはリン(P)が5質量ppm以上500質量ppm以下、その他の不純物元素の総量が100質量ppm以下および残部銅(Cu)からなることを特徴とする請求項1に記載の銅合金ボンディングワイヤ。
- 前記銅合金はニッケル(Ni)、パラジウム(Pd)または白金(Pt)が0.02質量%以上1質量%以下、リン(P)が5質量ppm以上500質量ppm以下、その他の不純物元素の総量が100質量ppm以下および残部銅(Cu)からなることを特徴とする請求項1に記載の銅合金ボンディングワイヤ。
- 前記銅合金の芯材にパラジウム(Pd)延伸層が被覆されていることを特徴とする請求項1に記載の銅合金ボンディングワイヤ。
- 前記銅合金の芯材にパラジウム(Pd)延伸層および金(Au)薄延伸層が被覆されていることを特徴とする請求項1に記載の銅合金ボンディングワイヤ。
- 前記結晶粒が80〜200個であることを特徴とする請求項1に記載の銅合金ボンディングワイヤ。
- 前記最大粒径はボンディングワイヤの直径の1/5以下であることを特徴とする請求項1に記載の銅合金ボンディングワイヤ。
- 前記特定方位がいずれも38%以下の無方位であることを特徴とする請求項1に記載の銅合金ボンディングワイヤ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015168713A JP6410692B2 (ja) | 2015-08-28 | 2015-08-28 | 銅合金ボンディングワイヤ |
TW105108645A TWI714562B (zh) | 2015-08-28 | 2016-03-21 | 銅合金接合線 |
SG10201603986XA SG10201603986XA (en) | 2015-08-28 | 2016-05-19 | Copper alloy bonding wire |
CN201610390155.XA CN106486447B (zh) | 2015-08-28 | 2016-06-03 | 铜合金接合线 |
Applications Claiming Priority (1)
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Cited By (2)
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WO2019031497A1 (ja) * | 2017-08-09 | 2019-02-14 | 日鉄ケミカル&マテリアル株式会社 | 半導体装置用Cu合金ボンディングワイヤ |
WO2019031498A1 (ja) * | 2017-08-09 | 2019-02-14 | 日鉄ケミカル&マテリアル株式会社 | 半導体装置用Cu合金ボンディングワイヤ |
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JP7014003B2 (ja) * | 2018-03-28 | 2022-02-01 | 住友金属鉱山株式会社 | はんだ接合電極およびはんだ接合電極の被膜形成用銅合金ターゲット |
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JP2009140953A (ja) * | 2007-12-03 | 2009-06-25 | Nippon Steel Materials Co Ltd | 半導体装置用ボンディングワイヤ |
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WO2019031497A1 (ja) * | 2017-08-09 | 2019-02-14 | 日鉄ケミカル&マテリアル株式会社 | 半導体装置用Cu合金ボンディングワイヤ |
WO2019031498A1 (ja) * | 2017-08-09 | 2019-02-14 | 日鉄ケミカル&マテリアル株式会社 | 半導体装置用Cu合金ボンディングワイヤ |
CN110998814A (zh) * | 2017-08-09 | 2020-04-10 | 日铁化学材料株式会社 | 半导体装置用Cu合金接合线 |
KR20200039726A (ko) * | 2017-08-09 | 2020-04-16 | 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 | 반도체 장치용 Cu 합금 본딩 와이어 |
KR20200039714A (ko) * | 2017-08-09 | 2020-04-16 | 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 | 반도체 장치용 Cu 합금 본딩 와이어 |
TWI692822B (zh) * | 2017-08-09 | 2020-05-01 | 日商日鐵化學材料股份有限公司 | 半導體裝置用銅合金接合導線 |
US10790259B2 (en) | 2017-08-09 | 2020-09-29 | Nippon Steel Chemical & Material Co., Ltd. | Cu alloy bonding wire for semiconductor device |
KR102167481B1 (ko) | 2017-08-09 | 2020-10-19 | 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 | 반도체 장치용 Cu 합금 본딩 와이어 |
KR102167478B1 (ko) | 2017-08-09 | 2020-10-19 | 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 | 반도체 장치용 Cu 합금 본딩 와이어 |
CN110998814B (zh) * | 2017-08-09 | 2021-04-23 | 日铁化学材料株式会社 | 半导体装置用Cu合金接合线 |
US10991672B2 (en) | 2017-08-09 | 2021-04-27 | Nippon Steel Chemical & Material Co., Ltd. | Cu alloy bonding wire for semiconductor device |
Also Published As
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SG10201603986XA (en) | 2017-03-30 |
JP6410692B2 (ja) | 2018-10-24 |
TW201709363A (zh) | 2017-03-01 |
CN106486447B (zh) | 2020-03-03 |
TWI714562B (zh) | 2021-01-01 |
CN106486447A (zh) | 2017-03-08 |
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