TWI714562B - 銅合金接合線 - Google Patents
銅合金接合線 Download PDFInfo
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Abstract
【課題】本發明之目的在於提供一種藉由統一結晶粒徑、使其為無方向性,而使切斷端部不會從接合線的剖面積內伸出的銅合金接合線,本發明用以解決下述課題:在將銅合金接合線進行楔焊後向上拉起以切斷時,接合線的前端彎曲成J字形。
【構成】本發明之銅合金接合線,其特徵為:單位剖面積的晶粒為50~250個,其最大粒徑為接合線直徑的1/3以下,且為特定方向皆在40%以下的無方向性。
Description
本發明係關於一種銅合金接合線,其適用於將用於半導體裝置之IC晶片電極與外部引線架等的基板連接。
一般而言,在銅接合線與電極的第一接合之中,係使用稱為球焊的方式;在銅接合線與半導體用電路配線基板上之配線的楔形接合之中,係使用稱為楔焊的方式。第一接合,係以放電結球(EFO)方式從炬電極(torch electrode)對線材的前端施加熱電弧,藉此使線材的前端形成被稱為焊球(FAB)的正球。接著,一邊以焊針將該FAB按壓於經在150~300℃之範圍內加熱的鋁墊上,一邊施加超音波,以使接合線與鋁墊接合。
接著,一邊抽出接合線一邊使焊針上升,並一邊朝向引線架繪製迴路一邊將焊針移動至楔焊處。若以圖式進行說明,以焊針進行的楔焊則如第一圖所示,可將接合線(1)楔焊於引線架(3)。此時,經楔焊之接合線(1)的端部被焊針(2)的前端部壓扁,如第二圖所示,接合處的線材面積變為最小。再者,之後切除接合線(1)。若以位於焊針(2)上部的線材夾持器(wire cramp)(4)夾住接合線(1)並將其向上拉起,則如第三圖所示,在殘留之接合線(1)的前端部分,線材可簡單地被切斷。
接著,將焊針移動至第一接合處,此步驟在圖式中省略。接著,在放電炬(discharge torch)的位置進行火花放電,在接合線的前端形成熔
融焊球(FAB),以使接合線與鋁墊進行第一接合。重複這樣的接合循環,透過接合線(1)依序將墊片(pad)與引線架(3)之間連接。
接合線(1)被第一圖左側的焊針(2)之前端部壓扁,故被切斷之接合線(1)依照既定的楊氏係數而變形。該變形形狀在金(Au)的情況與銅(Cu)的情況會不同。金接合線的情況下,雖為軟質但細微結構牢固,故不會產生下述變形為J字形之形狀的問題。
具有雙重芯結構之貴金屬接合線的情況,同樣不會產生問題。再者,有人提出一種接合線,其係應用容易形成剖面結構為雙重芯之線材的性質。例如,日本特開昭59-48948號公報(下述專利文獻1)的請求項4中揭示了一種金接合線,其構成纖維組織(111)存在於線材芯部之中且纖維組織(100)存在於線材表層之中的態樣。
另一方面,由銅(Cu)的純金屬或銅(Cu)合金所構成的線材,若在連續鑄造後進行連續拉線,則會取決於總剖面減少率在外圍部與中心部形成不同的纖維組織,而容易形成剖面結構為雙重芯的線材。若總剖面減少率為96~99%,則優先方向變成<111>與<100>(1990年日本塑性加工學會編『拉伸加工』(下述非專利文獻1)85頁)。疊差能(stacking fault energy)對此發揮重要的作用(N.Brown Trans.Met.Soc.AIME,221卷(1961)236頁)。因此,由純銅或銅合金所構成的線材,一般將其進行中間退火。中間退火的時期很重要,一般認為1次拉線加工的容許界限大概為95%附近,且為了避免2次加工中在加工初期階段產生{hkl}<111>方向,插入中間退火步驟十分重要。(稻數直次等,日本金屬學會雜誌第47卷第3號(1983年)266頁(下述非專利文獻2))。
再者,日本特開2013-139635號公報(下述專利文獻2)的請求項1中揭示了一種合金線材,其係由選自包含銀-金合金、銀-鈀合金及銀-金-鈀合金之群組中任一種的材料所構成,該合金線材具有面心立方晶格的多晶結構,且包含複數的晶粒,該合金線材的中心部包含細長的晶粒或等軸晶粒,該合金線材的其他部分由等軸晶粒所構成,包含退火雙晶之該晶粒的數量為該合金線材之該晶粒總量的20%以上。
再者,日本再公表專利2013/111642號公報(下述專利文獻3)的請求項1中亦揭示了一種接合線,其係具有以銅為主要成分的芯材及鈀延伸層的接合線,其特徵為:該芯材的中心具有銅在軸向上延伸的纖維狀組織。
再者,日本特開2004-31469號公報(下述專利文獻4)的請求項1中揭示了一種半導體裝置用金接合線,其特徵為:在接合線之長邊方向剖面的晶粒組織中,將線材的半徑作為R、將從該線材中心到R/2的部分作為中心部、將其外側作為外圍部時,針對「中心部中線材長邊方向的結晶方向之中,具有[111]方向之晶粒的面積相對於具有[100]方向之晶粒的面積的比例Rc」,及「外圍部中線材長邊方向的結晶方向之中,具有[111]方向之晶粒的面積相對於具有[100]方向之晶粒的面積的比例Rs」,兩者的差分(difference)比例的絕對值|1-Rc/Rs|×100(%)為30%以上。
再者,日本特開2009-140942號公報(下述專利文獻5)的請求項1中提出了一種半導體裝置用接合線,其係包含由導電性金屬所構成之芯材、及該芯材上以與芯材不同的金屬為主要成分之薄延伸層的半導體裝置用接合線,其特徵為:該薄延伸層的金屬為面心立方晶體,該薄延伸層表
面的結晶面中長邊方向的結晶方向<hkl>之中,<111>與<100>的佔有比例皆小於50%;日本特開2009-158931號公報(下述專利文獻6)的請求項1中提出了一種半導體裝置用接合線,其係包含由導電性金屬所構成之芯材、及該芯材上以與該芯材不同的金屬為主要成分之薄延伸層的半導體裝置用接合線,其特徵為:該薄延伸層的金屬為面心立方晶體,該薄延伸層表面的結晶面中長邊方向的結晶方向<hkl>之中,<111>的佔有比例為50%以上。
然而,若在將銅(Cu)接合線進行楔焊後將線材切斷,則如第四圖所示,具有稍微彎曲成J字形的問題。
此外,銅接合線中,線徑粗至25μm的情況下,亦幾乎很少看到變形成這種J字形的線材。然而若使接合線的線徑低至20μm,而使其變細且接合速度變快,則變形成J字形之線材開始出現。若接合線存在這樣的前端部分,則在繪製迴路時會導致迴路形狀歪斜。再者,其具有火花電流無法順利擊中接合線的前端,而成為使FAB變成扁平之異形焊球的原因的情況。再者,若J字形的變形太嚴重,則變成如以往所發現的Z字形的變形,而成為焊針阻塞的原因。
再者,由10~500ppm的磷(P)及剩餘部份為純度99.9%以上之銅(Cu)等所構成的銅合金接合線,磷(P)的濃化層容易在接合線表面偏析,而難以得到均質的機械特性,此為另一課題(日本特開平7-122564號公報)。
為了解決這些課題,以往係改良接合裝置應對,但這些做法並不順利。亦即,以往係先在楔焊後閉合線材夾持器並將接合線往上方稍微拉伸。藉此在使接合線上形成縮頸部分的狀態下,暫時鬆開線材夾持器。接著,閉合線材夾持器再次強力拉扯線材,藉此將接合線從該縮頸部分切
斷(日本特開2007-66991號公報(下述專利文獻7))。以往係藉由這種線材夾持器的操作來解決接合線之機械性質的缺陷。
然而,以往的接合裝置的改良,多餘的線材夾持器操作會延長一次接合循環的時間,因此特別在20μm以下的細徑接合線的情況下,接合的作業效率極差。
非專利文獻11990年日本塑性加工學會編『拉伸加工』202頁
非專利文獻2稻數直次等,日本金屬學會雜誌第47卷第3號(1983年)266頁
專利文獻1 日本特開昭59-48948號公報
專利文獻2 日本特開2013-139635號公報
專利文獻3 日本再公表專利2013/111642號公報
專利文獻4 日本特開2004-31469號公報
專利文獻5 日本特開2009-140942號公報
專利文獻6 日本特開2009-158931號公報
專利文獻7 日本特開2007-66991號公報
本發明係用以解決下述課題:在楔焊後將銅合金接合線直接
向上拉起以在最短時間內切斷這樣的第二接合的楔焊步驟中,線材前端變形成J字形。本發明之目的在於提供一種藉由統一結晶粒徑、使其無方向性,而使切斷端部不會變形成J字形的銅合金接合線。
以往變形成J字形的原因,可參照第一圖理解如下。在將接合線(1)楔焊於引線架(3)後,使焊針(2)上升。如此,可在焊針(2)的前端抽出接合線(1)。在成為使既定長度的接合線(1)延伸出焊針(2)前端的狀態後,將位於焊針(2)上方的線材夾持器(4)閉合以保持接合線(1),使線材夾持器(4)與焊針(2)一起上升。
如此,接合線(1)依照楊氏係數拉伸,藉由進一步上升,接合線(1)被扯斷。接合線(1)的彈性能因該切斷而釋放。此時若在線材夾持器(4)與切斷處之間的接合線(1)具有機械強度較弱的地方,則具有能量集中於該較弱的地方而使線材稍微彎曲成J字形的情況(回彈)。本案發明人等發現這是接合線(1)稍微彎曲成J字形的原因。
用以解決本發明之課題的銅合金接合線,其特徵為:單位剖面積的銅合金之晶粒為50~250個,其最大粒徑為接合線直徑的1/3以下,且為<111>或<100>等的特定方向皆在40%以下的無方向性。此處,本發明中的特定方向,係指相對某個方向的配向在±20°之容許角度內的情況。
本發明之一實施態樣,其特徵為該銅合金係由下述成分所構成:金(Au)為100質量ppm以上3,000質量ppm以下、銀(Ag)為10質量ppm以上1,000質量ppm以下、及/或磷(P)為5質量ppm以上500質量ppm以下、其他雜質元素的總量為100質量ppm以下及剩餘部份為銅(Cu)。
再者,本發明之另一實施態樣,其特徵為該銅合金係由下述成分所構成:鎳(Ni)、鈀(Pd)或鉑(Pt)為0.02質量%以上1質量%以下、磷(P)為5質量ppm以上500質量ppm以下、其他雜質元素的總量為100質量ppm以下及剩餘部份為銅(Cu)。
再者,本發明之另一實施態樣,其特徵為:該銅合金的芯材被鈀(Pd)延伸層所被覆。
再者,本發明之另一實施態樣,其特徵為:該銅合金的芯材被鈀(Pd)延伸層及金(Au)薄延伸層所被覆。
再者,本發明之另一實施態樣,其特徵為:該晶粒為80~200個。
再者,本發明之另一實施態樣,其特徵為:該最大粒徑為接合線直徑的1/5以下。
再者,本發明之另一實施態樣,其特徵為:其為該特定方向皆在38%以下的無方向性。
在本發明中,使單位剖面積的銅合金之晶粒為50~250個,是因為即使在接合線的長邊方向形成雙重芯結構的組織,在楔焊後接合線亦容易沿著晶粒邊界被扯斷。若晶粒小於50個,則在最終的調質熱處理中,容易在接合線中形成粗大的晶粒。再者,若晶粒超過250個,則接合線變硬,迴路形狀不穩定。晶粒較佳為80~240個。晶粒更佳為100~220個的範圍。
在本發明中,使晶粒的最大粒徑為接合線直徑的1/3以下,是因為若具有巨大的晶粒,則線材容易在該處彎曲。接合線的彎曲成為傾斜不良、迴路形成不良、或線材變形(wire deformation)的原因。最大粒徑較
佳為接合線直徑的1/5以下。更佳為1/8以下。
在本發明中,成為特定方向皆在40%以下的無方向性,是為了避免接合線形成雙重芯結構。因為若<100>等在0°到小於20°之範圍的特定方向超過40%,則接合線的扯斷方式因有無特定方向而不同。特定方向較佳為38%以下。更佳為37%以下。此外,設定20°而非15°,是為了從細微的接合線盡量收集更多資訊量。
本發明中的銅合金較佳為由下述成分所構成:金(Au)為100質量ppm以上3,000質量ppm以下、銀(Ag)為10質量ppm以上1,000質量ppm以下或磷(P)為5質量ppm以上500質量ppm以下、其他雜質元素的總量為100質量ppm以下及剩餘部份為銅(Cu)。磷(P)的含量更佳為200質量ppm以下。藉由金(Au)與銀(Ag)的加乘效果將銅合金原料金屬中所包含的氧固定,且亦可防止磷(P)的表面偏析,故特佳為使3種元素共存。再者,既定量的金(Au),可提高銅合金的楊氏係數。
再者,本發明中的銅合金較佳為由下述成分所構成:鎳(Ni)、鈀(Pd)或鉑(Pt)為0.02質量%以上1質量%以下、磷(P)為5質量ppm以上500質量ppm以下、其他雜質元素的總量為100質量ppm以下及剩餘部份為銅(Cu)。磷(P)的含量更佳為200質量ppm以下。因為鎳(Ni)將銅合金原料金屬中所包含的氧固定,且亦可防止磷(P)的表面偏析。銅合金基質中的既定量之鎳(Ni)細微地分散,而將氧固定。再者,既定量的鎳(Ni),可提高銅合金的楊氏係數。
此處,使其他雜質元素的總量為100質量ppm以下,是為了防止在銅合金基質中形成卑金屬元素的氧化物。因為若在銅的晶粒邊界形
成卑金屬元素的氧化物,則回彈(springback)的接合線容易變形。其他雜質元素的總量較佳為50質量ppm以下,若忽略原料金屬價格,更佳為5質量ppm以下。例如,若使用公稱6N(99.9999質量%)以上之純度的銅原料金屬,則其他金屬元素的總量小於1質量ppm。此外,「其他雜質元素」係指硫(S)、氧(O)等。因為若存在超過10質量ppm的硫(S),則具有FAB變硬而在第一接合時發生晶片斷裂的情況。然而,一般的接合線用的銅合金中,不會包含超過10質量ppm的硫(S)。
此外,本發明之銅合金,可使用6N至4N的高純度銅合金母材。該母材中,一般含有0.2質量ppm以上50質量ppm以下的氧。該等氧量,即使將銅合金母材進行再溶解、鑄造、一次拉線、中間熱處理、二次拉線、最終熱處理、保管等,本發明之銅合金組成亦幾乎不會變化。若銅(Cu)基質中含有氧,則卑金屬元素容易形成氧化物,故較佳為盡量減少氧含量。此外,一般高純度銅合金中會除去氣體成分(青木庄司等,銅與銅合金雜誌,2003年1月,第42卷第1號21頁)。
再者,在本發明中,較佳為於銅合金的芯材被覆鈀(Pd)延伸層。再者,更佳為於被覆銅合金的芯材鈀(Pd)延伸層及金(Au)薄延伸層。這是因為在楔焊後接合線容易被扯斷。此處,「延伸層」及「薄延伸層」的表達,雖未必能正確地表達實際的表面形態,但其係將從接合線的表面檢測出鈀(Pd)及金(Au)之微粒子在深度方向的範圍作為理論上的膜厚,方便上以存在厚度的「層」來表達。本發明之接合線的膜厚極薄,故只要可藉由高頻感應耦合電漿原子發射光譜法(ICP-AES)從接合線的表面檢測出微粒子,則判定為存在「延伸層」及「薄延伸層」。
此外,在本發明之銅合金接合線中,即使其被覆鈀(Pd)延伸層、或是鈀(Pd)延伸層及金(Au)薄延伸層,因該等延伸層極薄,故幾乎不影響銅合金芯材的楊氏係數。鈀(Pd)延伸層具有延遲銅合金細線的氧化的效果。再者,在被覆金(Au)薄延伸層的情況下,具有下述效果:使從銅合金中表面析出的硫(S)等元素固定化,同時使電流流通不佳之鈀(Pd)延伸層的火花放電穩定化。
在本發明中,為了得到單位剖面積的銅合金之晶粒為50~250個、最大粒徑為細線直徑的1/3以下、<111>或<100>等的特定方向皆在40%以下的無方向性的細線,可使用習知的製造技術。例如,昭和60年(西元1985年)7月1日近代編輯社股份有限公司發行的稻數直次著『金屬拉伸』第9章「再結晶纖維集合組織與二次加工中」的「9.3二次加工性與纖維組織」中詳細敘述了高純度銅的一次、二次拉線加工與中間退火的關係。接合線的拉線加工,此書中的最終縮面率為99%以上,於此施加調質熱處理。本發明中,只要使一次拉線加工率為95~99.99%以下並進行適當的中間退火,即可製造本發明之銅合金接合線。
根據本發明之銅合金接合線,其楔焊時從變得最細的接合線處被切斷,故具有可提供一種接合線的前端不會彎曲成J字形、切斷端部不會從接合線的剖面積內伸出的銅合金接合線的效果。再者,若接合線的形狀穩定,則亦具有第一接合時的FAB不會變成異形焊球的效果。再者,由於僅藉由將接合線往上拉起即可簡單地將接合線切斷,故具有縮短接合步驟時間的效果。再者,從20μm至15μm,線材徑越小越能發揮本發明之效果。
再者,根據本發明之實施態樣的銅合金接合線,銅基質中未分散卑金屬氧化物,故線材本身柔軟。再者,第一接合時的火花放電的位置亦為穩定,故即使鈀(Pd)延伸層、或是鈀(Pd)延伸層及金(Au)薄延伸層的被覆比以往薄,亦具有第一接合時的FAB穩定的效果。
再者,本發明之實施態樣的銅合金接合線,於線材最表面設置金(Au)延伸層的情況下,即使線材彼此多重捲繞而捲繞1萬公尺,線材彼此亦不會黏著。結果,線材的解捲性變佳。再者,作為附加效果,線材表面對焊針的滑動性變佳。再者,根據本發明之銅合金接合線,線材最表面的金(Au)微粒子不會從鈀(Pd)的延伸層剝離。因此,即使重複多次接合,銅(Cu)的氧化物亦不會附著於焊針,故焊針不會髒污。
1‧‧‧接合線
2‧‧‧焊針
3‧‧‧引線架
4‧‧‧線材夾持器
第一圖係由本發明之銅合金細線的楔焊所得到之接合線的剖面圖。
第二圖係顯示銅合金細線之楔焊步驟的立體圖。
第三圖係顯示由銅合金細線的楔焊所得到之接合狀態的剖面圖。
第四圖係彎曲成J字形之接合線的剖面圖。
芯材使用純度99.9998質量%(5N)的銅(Cu),並將磷(P)及鎳(Ni)、再者鈀(Pd)、鉑(Pt)金(Au)及銀(Ag)作為添加元素。作為卑金屬元素,選擇高純度銅一般含有的元素。亦即,適當選擇鉍(Bi)、硒(Se)、碲(Te)、鋅(Zn)、鐵(Fe)、鎳(Ni)及錫(Sn)。將在既定範圍內摻合該等金屬者作為實施
例1~實施例5。
接著,將其溶解並進行連續鑄造,之後,在使剖面減少率為95~99.99%以下的範圍內進行第一次拉線,得到被覆延伸材料前的粗線(直徑1.0mm)。接著,進行中間熱處理(300℃~600℃×0.5~3小時)(實施例4、實施例5)或不進行中間熱處理(實施例1~實施例3)。之後,因應需求設置金(Au)的薄延伸層(實施例4、實施例5)及鈀(Pd)的延伸層(實施例3~實施例5)。藉由鑽石拉線模以濕式將該等半成品線材連續進行剖面減少率99%以上的第二次拉線,並進行480℃×1秒的調質熱處理,最終得到直徑15μm的銅合金接合線。此外,平均縮徑率為6~20%,最終線速為100~1000m/分鐘。再者,金(Au)的純度為99.9999質量%以上,鈀(Pd)的純度為99.999質量%以上。
(晶粒測定)
接合線的單位剖面積的晶粒測定係以如下方式進行。亦即,使用離子銑裝置(型號:Hitachi High-Technologies公司製IM4000)將實施例1的接合線切斷。接著,使用FE-SEM(日本電子公司製JSM-7800F)觀察其剖面。再者,使用EBSD裝置(TSL公司製OIM Data Collection System)計算單位剖面積的晶粒個數。該測定結果顯示於表1右欄。
(方向測定)
接合線的方向測定,係使用FE-SEM(日本電子公司製JSM-7800F)、及EBSD裝置(TSL公司製OIM Data Collection System)而進行。該測定結果顯示於表1右欄。
(接合線的彎曲試驗)
接合線的彎曲試驗係以如下方式進行。亦即,使用引線接合機(新川公司製UTC-3000),以超音波輸出100mA、接合載重90gf的條件,在周圍溫度25℃的鍍銀(Ag)銅(Cu)板上進行100條楔焊。接著,該楔焊結束後,如第一圖所示,使焊針(2)上升並從焊針(2)的前端抽出接合線(1),之後閉合線材夾持器(4)後,使焊針(2)與線材夾持器(4)一起上升,藉此在使既定長度的接合線(1)延伸出焊針(2)前端的狀態下切斷線材。進行一千次此試驗,並以放大投影機檢查接合線的彎曲條數。該測定結果顯示於表1右欄。
將表1所顯示之組成的接合線作為比較例1及2。該等比較例1及比較例2的線材,晶粒的個數偏離範圍,且分別具有固有的優先方向。亦即,比較例1的線材,其中間熱處理溫度高於實施例5的線材,故晶粒的個數為較少的13個,<100>的優先方向為整體的57%。再者,比較例2的線材,
其一次拉線加工的剖面減少率高於實施例3的線材,故未發現晶粒而標示為無數。再者,<111>的優先方向為整體的45%,<100>的優先方向為整體的10%。
與實施例相同地,對該等比較例1及2的接合線進行晶粒測定、方向測定、接合線的彎曲試驗及伸出試驗,得到表1右欄的結果。
由該等試驗結果明顯可知,本發明之全部實施例,其具有適當的晶粒,且無優先方向,故接合線的前端不會彎曲成J字形。另一方面,比較例1及2的線材,接合線前端彎曲成J字形的條數分別為8條及14條。因此可知比較例的線材亦對FAB造成影響。
本發明之銅合金接合線,可取代以往的金合金線材,除了通用IC、離散式積體電路(Discrete IC)、記憶體IC以外,亦具有用於高溫高濕且要求低成本之LED用的IC封裝、汽車半導體用IC封裝等的半導體用途。
1‧‧‧接合線
2‧‧‧焊針
3‧‧‧引線架
4‧‧‧線材夾持器
Claims (8)
- 一種線徑15μm以上20μm以下的銅合金接合線,其特徵為:包含雜質元素的總量為100質量ppm以下;及剩餘部份為銅(Cu);該雜質元素包含Bi、Se、Te、Zn、Fe、Ni及Sn的多種元素的總合為7質量ppm以上70質量ppm以下;單位剖面積的銅合金之晶粒為50~250個,其最大粒徑為接合線直徑的1/3以下,且為特定方向皆在40%以下的無方向性。
- 如申請專利範圍第1項之銅合金接合線,其中該銅合金係由下述成分所構成:金(Au)為100質量ppm以上3,000質量ppm以下、銀(Ag)為10質量ppm以上1,000質量ppm以下及/或磷(P)為5質量ppm以上500質量ppm以下。
- 如申請專利範圍第1項之銅合金接合線,其中該銅合金係由下述成分所構成:鎳(Ni)、鈀(Pd)或鉑(Pt)為0.02質量%以上1質量%以下;磷(P)為5質量ppm以上500質量ppm以下。
- 如申請專利範圍第1項之銅合金接合線,其中該銅合金的芯材被鈀(Pd)延伸層所被覆。
- 如申請專利範圍第1項之銅合金接合線,其中該銅合金的芯材被鈀(Pd)延伸層及金(Au)薄延伸層所被覆。
- 如申請專利範圍第1項之銅合金接合線,其中該晶粒為80~200個。
- 如申請專利範圍第1項之銅合金接合線,其中該最大粒徑為接合線直徑的1/5以下。
- 如申請專利範圍第1項之銅合金接合線,其中其係該特定方向皆在38%以下的無方向性。
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