JP2016514376A5 - - Google Patents
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- JP2016514376A5 JP2016514376A5 JP2016501853A JP2016501853A JP2016514376A5 JP 2016514376 A5 JP2016514376 A5 JP 2016514376A5 JP 2016501853 A JP2016501853 A JP 2016501853A JP 2016501853 A JP2016501853 A JP 2016501853A JP 2016514376 A5 JP2016514376 A5 JP 2016514376A5
- Authority
- JP
- Japan
- Prior art keywords
- tray
- grip
- level
- sln
- camera
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000007246 mechanism Effects 0.000 description 32
- 239000012636 effector Substances 0.000 description 10
- 102100036790 Tubulin beta-3 chain Human genes 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 101000878595 Arabidopsis thaliana Squalene synthase 1 Proteins 0.000 description 1
- 101000713575 Homo sapiens Tubulin beta-3 chain Proteins 0.000 description 1
- 229910019250 POS3 Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/830,692 | 2013-03-14 | ||
| US13/830,692 US9545724B2 (en) | 2013-03-14 | 2013-03-14 | Tray engine with slide attached to an end effector base |
| PCT/US2014/025447 WO2014159916A2 (en) | 2013-03-14 | 2014-03-13 | Tray engine and methods for transferring trays to and from tools and in sorters |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020002759A Division JP7053689B2 (ja) | 2013-03-14 | 2020-01-10 | ツールへかつツールから及び選別機内でトレイを移送するためのトレイエンジン及び方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016514376A JP2016514376A (ja) | 2016-05-19 |
| JP2016514376A5 true JP2016514376A5 (https=) | 2017-04-20 |
| JP6678570B2 JP6678570B2 (ja) | 2020-04-08 |
Family
ID=51522729
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016501853A Active JP6678570B2 (ja) | 2013-03-14 | 2014-03-13 | トレイ移送装置、トレイを移送するための選別機及びトレイを移送するためのエンドエフェクタ |
| JP2020002759A Active JP7053689B2 (ja) | 2013-03-14 | 2020-01-10 | ツールへかつツールから及び選別機内でトレイを移送するためのトレイエンジン及び方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020002759A Active JP7053689B2 (ja) | 2013-03-14 | 2020-01-10 | ツールへかつツールから及び選別機内でトレイを移送するためのトレイエンジン及び方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (4) | US9545724B2 (https=) |
| JP (2) | JP6678570B2 (https=) |
| KR (3) | KR102196965B1 (https=) |
| CN (3) | CN107458796B (https=) |
| TW (1) | TWI629148B (https=) |
| WO (1) | WO2014159916A2 (https=) |
Families Citing this family (62)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6022285B2 (ja) * | 2012-09-28 | 2016-11-09 | シスメックス株式会社 | 標本収納装置、標本収納方法、及び標本検査システム |
| US9545724B2 (en) * | 2013-03-14 | 2017-01-17 | Brooks Automation, Inc. | Tray engine with slide attached to an end effector base |
| CN104276381B (zh) * | 2013-07-05 | 2016-08-24 | 鸿富锦精密工业(深圳)有限公司 | 储料机构及采用该储料机构的上料装置 |
| KR20170084240A (ko) | 2014-11-14 | 2017-07-19 | 마퍼 리쏘그라피 아이피 비.브이. | 리소그래피 시스템에서 기판을 이송하기 위한 로드 로크 시스템 및 방법 |
| JP6523336B2 (ja) * | 2015-04-29 | 2019-05-29 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 高速度回転ソータ |
| US10515834B2 (en) | 2015-10-12 | 2019-12-24 | Lam Research Corporation | Multi-station tool with wafer transfer microclimate systems |
| CN106711071B (zh) * | 2015-11-13 | 2020-06-19 | 北京北方华创微电子装备有限公司 | 装卸手 |
| NL2015784B1 (en) * | 2015-11-13 | 2017-06-02 | Mapper Lithography Ip Bv | Load lock system and method for transferring substrates in a lithography system. |
| CN105522583B (zh) * | 2016-01-25 | 2017-10-31 | 南京大学 | 一种基于rfid技术的自动式图书智能盘点上架机器人 |
| US10566216B2 (en) | 2017-06-09 | 2020-02-18 | Lam Research Corporation | Equipment front end module gas recirculation |
| US12128448B2 (en) | 2017-07-31 | 2024-10-29 | Monsanto Technology Llc | Seed sorting |
| CN107638263A (zh) * | 2017-09-19 | 2018-01-30 | 湖南暄程科技有限公司 | 一种基于机器人的药物配送方法和系统 |
| CN108082821A (zh) * | 2017-12-29 | 2018-05-29 | 广东伽懋智能织造股份有限公司 | 一种固态样品储存机 |
| CN108414777A (zh) * | 2018-02-08 | 2018-08-17 | 前海瑞智捷自动化科技(深圳)有限公司 | 一种血样检验流水线及方法、出样设备 |
| MX2020009274A (es) | 2018-03-14 | 2020-10-01 | Monsanto Technology Llc | Imaginologia de semillas. |
| CN112074470B (zh) * | 2018-05-23 | 2022-07-15 | 株式会社大福 | 拣选系统 |
| CN108862092B (zh) * | 2018-05-31 | 2021-01-19 | 中航电测仪器股份有限公司 | 一种物流终端用小型圆柱坐标机器人 |
| CN110554536B (zh) * | 2018-05-31 | 2025-05-27 | 上海微电子装备(集团)股份有限公司 | 一种光配向设备以及光配向设备中灯管的更换方法 |
| US11724287B2 (en) * | 2018-06-11 | 2023-08-15 | Monsanto Technology Llc | Seed sorting |
| KR101986255B1 (ko) | 2018-07-19 | 2019-06-05 | 주식회사 에스엔티 | 칩 캐리어 덮개 자동 결합 장치 |
| US11348816B2 (en) * | 2018-07-31 | 2022-05-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for die container warehousing |
| US11488848B2 (en) | 2018-07-31 | 2022-11-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated semiconductor die vessel processing workstations |
| US10901328B2 (en) * | 2018-09-28 | 2021-01-26 | Applied Materials, Inc. | Method for fast loading substrates in a flat panel tool |
| TWI805823B (zh) * | 2018-10-31 | 2023-06-21 | 日商三星鑽石工業股份有限公司 | 基板供給系統及基板加工裝置 |
| KR102663462B1 (ko) * | 2018-11-07 | 2024-05-09 | (주)테크윙 | 핸들러 |
| WO2020131029A1 (en) * | 2018-12-18 | 2020-06-25 | Hewlett-Packard Development Company, L.P. | Tray installation |
| KR102673299B1 (ko) * | 2019-02-19 | 2024-06-10 | 현대자동차주식회사 | 구동 메커니즘과 이를 구비한 서비스 로봇 |
| JP7304709B2 (ja) * | 2019-02-19 | 2023-07-07 | 株式会社ディスコ | 被加工物の加工方法 |
| WO2020181231A2 (en) | 2019-03-07 | 2020-09-10 | Gen-Probe Incorporated | System and method for transporting and holding consumables in a processing instrument |
| CN110245539B (zh) * | 2019-07-09 | 2024-07-30 | 江苏安方电力科技有限公司 | 一种电力物资自动扫码系统 |
| CN110281064A (zh) * | 2019-07-19 | 2019-09-27 | 上海固华机械设备有限公司 | 自动上料机 |
| US11305949B1 (en) * | 2019-08-06 | 2022-04-19 | Amazon Technologies, Inc. | Automated tray handling systems and methods |
| CN110884879B (zh) * | 2019-10-18 | 2025-03-14 | 曾伟章 | 多餐盒投放器 |
| EP4058386A4 (en) * | 2019-11-13 | 2023-08-16 | Abb Schweiz Ag | LOADING AND UNLOADING DEVICE FOR AN AUTOMATIC VEHICLE |
| CN112849866B (zh) * | 2019-11-27 | 2024-06-25 | 株式会社大福 | 物品输送装置 |
| IL271654B2 (en) * | 2019-12-22 | 2024-10-01 | Bright Machines Ltd | Mechanism for pulling a tray |
| CN111099235B (zh) * | 2019-12-25 | 2021-04-23 | 广东电网有限责任公司 | 一种员工档案存取设备 |
| US11527425B2 (en) * | 2019-12-31 | 2022-12-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for tray cassette warehousing |
| CN111769064B (zh) * | 2020-06-18 | 2023-07-14 | 无锡先导智能装备股份有限公司 | 上下料装置 |
| USD946847S1 (en) | 2020-07-02 | 2022-03-22 | Gizmospring.com Dongguan Limited | Scrubber |
| US11688618B2 (en) * | 2020-12-10 | 2023-06-27 | Applied Materials, Inc. | Method and apparatus for continuous substrate cassette loading |
| US11955364B2 (en) * | 2021-01-22 | 2024-04-09 | Kimball Electronics Indiana, Inc. | Telescoping linear extension robot |
| CN113000405A (zh) * | 2021-02-04 | 2021-06-22 | 张传德 | 一种可自动回收且检测奶茶杯子的装置 |
| KR102641278B1 (ko) * | 2021-07-07 | 2024-02-27 | 세메스 주식회사 | 트레이 이송을 위한 승강 장치 및 이를 포함하는 테스트 핸들러 |
| US11945660B2 (en) | 2021-08-09 | 2024-04-02 | Applied Materials, Inc. | Linear sorter using vacuum belt |
| CN113680696B (zh) * | 2021-08-25 | 2023-08-22 | 重庆市天实精工科技有限公司 | 送料装置以及摄像头模组测试设备 |
| KR102448602B1 (ko) * | 2021-08-25 | 2022-09-29 | 최완해 | 트레이 선별 시스템 |
| WO2023063885A1 (en) * | 2021-10-11 | 2023-04-20 | Arumugam Shanmuga Sundaram | Mail dispenser system with sorters |
| CN114160433B (zh) * | 2021-11-24 | 2023-03-24 | 常州武进三晶自动化设备有限公司 | 一种用于端子加工的产品分拣装置 |
| US12362213B2 (en) * | 2021-11-30 | 2025-07-15 | Stmicroelectronics (Malta) Ltd | Tray carrier and corresponding method |
| TWI798049B (zh) * | 2022-04-11 | 2023-04-01 | 京元電子股份有限公司 | 料盤移載裝置以及具料盤移載裝置之作業設備 |
| TWI807784B (zh) * | 2022-04-18 | 2023-07-01 | 福懋科技股份有限公司 | 載板供應設備及其載板供應方法 |
| CN114914186B (zh) * | 2022-04-27 | 2024-01-05 | 智汇轩田智能系统(杭州)有限公司 | 一种dbc板夹紧定位机构 |
| KR102926940B1 (ko) * | 2022-05-27 | 2026-02-12 | (주)테크윙 | 핸들러 |
| CN114988006B (zh) * | 2022-06-29 | 2023-11-14 | 歌尔科技有限公司 | 物料自动存取设备 |
| CN117622799A (zh) * | 2022-08-19 | 2024-03-01 | 纬联电子科技(中山)有限公司 | 取放设备及搬运机台 |
| US12394647B2 (en) * | 2022-09-23 | 2025-08-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer shift detection |
| CN116275505B (zh) * | 2023-04-13 | 2026-01-23 | 中国电子科技集团公司第四十八研究所 | 一种全自动激光封焊设备 |
| CN116230818B (zh) * | 2023-05-05 | 2023-08-01 | 武汉精立电子技术有限公司 | 一种多台led分选机联机自动化作业系统及方法 |
| TWI906918B (zh) * | 2023-06-20 | 2025-12-01 | 南韓商泰克元有限公司 | 測試分選機及其控制方法 |
| WO2025117194A1 (en) * | 2023-11-28 | 2025-06-05 | Illiakova Maria | System for storage and sorting of surgical instruments |
| CN119882211B (zh) * | 2025-02-28 | 2025-12-05 | 武汉兰丁智能医学股份有限公司 | 紧凑型玻片自动扫描装置 |
Family Cites Families (84)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2547080A (en) | 1948-07-20 | 1951-04-03 | Edward S Hebeler | Spring clamp connector |
| EP0000877B1 (de) * | 1977-08-31 | 1983-05-18 | Grisebach, Hans-Theodor | Manipulator zum Positionieren von Werkstücken oder anderen Lasten |
| US4460826A (en) * | 1980-10-24 | 1984-07-17 | Diffracto Ltd. | Fiber optic based robot controls |
| USH65H (en) * | 1983-05-27 | 1986-05-06 | At&T Bell Laboratories | Dynamic optical sensing: Robotic system and manufacturing method utilizing same |
| US4758127A (en) * | 1983-06-24 | 1988-07-19 | Canon Kabushiki Kaisha | Original feeding apparatus and a cassette for containing the original |
| US4728137A (en) * | 1986-07-22 | 1988-03-01 | American Engineering And Trade, Inc. | Compound toggle robotic gripper |
| US5503516A (en) * | 1987-08-07 | 1996-04-02 | Canon Kabushiki Kaisha | Automatic article feeding system |
| WO1993002952A1 (en) * | 1991-08-05 | 1993-02-18 | Symtek Systems, Inc. | Input/output apparatus for electronic device handlers |
| JP3473116B2 (ja) * | 1994-07-12 | 2003-12-02 | ソニー株式会社 | トレイ引き出し装置 |
| US6322119B1 (en) * | 1999-07-09 | 2001-11-27 | Semitool, Inc. | Robots for microelectronic workpiece handling |
| KR200161974Y1 (ko) * | 1997-04-04 | 1999-12-01 | 윤종용 | 반도체 디바이스 테스트용 핸들러 시스템의 트레이 캐쳐 |
| KR19990035554A (ko) * | 1997-10-31 | 1999-05-15 | 윤종용 | 스토커 설비 구조 |
| WO1999028952A2 (en) * | 1997-11-28 | 1999-06-10 | Fortrend Engineering Corporation | Wafer-mapping load port interface |
| US6109677A (en) * | 1998-05-28 | 2000-08-29 | Sez North America, Inc. | Apparatus for handling and transporting plate like substrates |
| US6188323B1 (en) | 1998-10-15 | 2001-02-13 | Asyst Technologies, Inc. | Wafer mapping system |
| US6396072B1 (en) * | 1999-06-21 | 2002-05-28 | Fortrend Engineering Corporation | Load port door assembly with integrated wafer mapper |
| TW444260B (en) * | 2000-07-13 | 2001-07-01 | Ind Tech Res Inst | Wafer mapping method of wafer load port equipment |
| US6591162B1 (en) * | 2000-08-15 | 2003-07-08 | Asyst Technologies, Inc. | Smart load port with integrated carrier monitoring and fab-wide carrier management system |
| CA2420216A1 (en) * | 2000-08-23 | 2002-02-28 | University Of Virginia Patent Foundation | Automated storage and retrieval apparatus for freezers and related method thereof |
| US6592324B2 (en) * | 2001-02-26 | 2003-07-15 | Irm, Llc | Gripper mechanism |
| JP2002306348A (ja) * | 2001-04-16 | 2002-10-22 | Family-Service Eiko Co Ltd | 焼き網およびその使用方法 |
| US7054150B2 (en) * | 2001-08-29 | 2006-05-30 | Xyratex Technology Limited | Mounting for disk drive unit and method of handling |
| US7100340B2 (en) * | 2001-08-31 | 2006-09-05 | Asyst Technologies, Inc. | Unified frame for semiconductor material handling system |
| US7066707B1 (en) | 2001-08-31 | 2006-06-27 | Asyst Technologies, Inc. | Wafer engine |
| US20030077153A1 (en) * | 2001-10-19 | 2003-04-24 | Applied Materials, Inc. | Identification code reader integrated with substrate carrier robot |
| US6914233B2 (en) * | 2001-12-12 | 2005-07-05 | Shinko Electric Co., Ltd. | Wafer mapping system |
| TWI233913B (en) * | 2002-06-06 | 2005-06-11 | Murata Machinery Ltd | Automated guided vehicle system |
| US7677859B2 (en) * | 2002-07-22 | 2010-03-16 | Brooks Automation, Inc. | Substrate loading and uploading station with buffer |
| KR100566821B1 (ko) * | 2002-11-20 | 2006-04-03 | 미래산업 주식회사 | 트레이 이송장치 |
| US6984839B2 (en) * | 2002-11-22 | 2006-01-10 | Tdk Corporation | Wafer processing apparatus capable of mapping wafers |
| US20080000232A1 (en) | 2002-11-26 | 2008-01-03 | Rogers James E | System for adjusting energy generated by a space-based power system |
| KR20040090504A (ko) * | 2003-04-17 | 2004-10-26 | 삼성전자주식회사 | 로드락 챔버를 갖는 반도체 장비 |
| FI20030748A0 (fi) * | 2003-05-20 | 2003-05-20 | Jl Suunnittelu Lakome Oy | Menetelmä ja laitteisto monikehävarastointiin |
| US7192791B2 (en) * | 2003-06-19 | 2007-03-20 | Brooks Automation, Inc. | Semiconductor wafer having an edge based identification feature |
| JP2005255327A (ja) * | 2004-03-11 | 2005-09-22 | Hitachi Kiden Kogyo Ltd | 基板搬送用クレーンマストの防振装置 |
| CN101006554A (zh) * | 2004-10-29 | 2007-07-25 | 株式会社尼康 | 标线保护构件、标线运送装置、曝光装置及标线运送方法 |
| KR100656155B1 (ko) * | 2005-01-07 | 2006-12-13 | (주)제이티 | 트레이 이송장치 |
| US8821099B2 (en) | 2005-07-11 | 2014-09-02 | Brooks Automation, Inc. | Load port module |
| KR100740890B1 (ko) * | 2005-10-11 | 2007-08-31 | 주식회사 블루코드 | 웨이퍼 콜렉터 |
| KR100648920B1 (ko) * | 2005-12-15 | 2006-11-24 | (주)테크윙 | 테스트핸들러용 자세변환장치 및 테스트핸드러용동력전달장치 |
| KR20070069908A (ko) * | 2005-12-28 | 2007-07-03 | 동부일렉트로닉스 주식회사 | 웨이퍼의 안전한 이송을 위한 진공 카세트 |
| WO2007087546A2 (en) * | 2006-01-23 | 2007-08-02 | Nexus Biosystems, Inc. | Automated system for storing, retreiving and managing samples |
| KR100746877B1 (ko) * | 2006-03-30 | 2007-08-07 | 주식회사 유니테스트 | 반도체 컴포넌트의 오리엔테이션이 변경 가능한 반도체컴포넌트 테스터용 반도체 컴포넌트 이송 장치 |
| JP2007281095A (ja) * | 2006-04-04 | 2007-10-25 | Tokyo Seimitsu Co Ltd | ワーク搬送装置 |
| JP4333701B2 (ja) | 2006-06-14 | 2009-09-16 | 村田機械株式会社 | 搬送システム |
| TWI348988B (en) * | 2006-08-04 | 2011-09-21 | Hon Hai Prec Ind Co Ltd | Tray locating-device |
| KR100848572B1 (ko) * | 2006-08-31 | 2008-07-25 | 유정호 | 포드의 도어 오픈장치 |
| JP4569549B2 (ja) * | 2006-09-21 | 2010-10-27 | 村田機械株式会社 | 移載装置 |
| WO2008041326A1 (fr) | 2006-10-03 | 2008-04-10 | Ihi Corporation | système de transfert de substrats |
| JP2008100802A (ja) | 2006-10-18 | 2008-05-01 | Ihi Corp | 基板保管庫 |
| JP2010524201A (ja) * | 2007-03-22 | 2010-07-15 | クロッシング オートメイション, インコーポレイテッド | モジュラクラスタツール |
| DE112007003604B4 (de) * | 2007-08-02 | 2015-04-30 | Hirata Corp. | Vorrichtung zum Überführen von Komponenten |
| DE102008023762A1 (de) * | 2007-09-13 | 2009-03-19 | Multivac Sepp Haggenmüller Gmbh & Co. Kg | Vorrichtung zur Aufnahme und zum Transport eines Gutes |
| US8417373B2 (en) * | 2007-10-29 | 2013-04-09 | Hen S.R.L. | Automatic warehouse |
| KR100913504B1 (ko) * | 2007-11-09 | 2009-08-21 | 에이엠티 주식회사 | 트레이-트랜스퍼 유닛을 이용한 트레이 이송 장치 및 그방법 |
| US7861540B2 (en) * | 2008-01-25 | 2011-01-04 | Hamilton Storage Technologies, Inc. | Automated storage and retrieval system for storing biological or chemical samples at ultra-low temperatures |
| US20100034621A1 (en) * | 2008-04-30 | 2010-02-11 | Martin Raymond S | End effector to substrate offset detection and correction |
| US8365639B2 (en) * | 2008-11-19 | 2013-02-05 | Motoman, Inc. | Gripping devices and methods thereof |
| JP4285708B2 (ja) | 2008-12-19 | 2009-06-24 | 大日本スクリーン製造株式会社 | 基板検出装置 |
| CN201385922Y (zh) * | 2009-02-24 | 2010-01-20 | 太原艺星科技有限公司 | 自动联体提升货柜的货叉挂接机构 |
| JP5115501B2 (ja) | 2009-03-12 | 2013-01-09 | 株式会社Ihi | 基板仕分け装置及び基板仕分け方法 |
| US8851820B2 (en) * | 2009-05-18 | 2014-10-07 | Brooks Automation, Inc. | Substrate container storage system |
| JP4878639B2 (ja) * | 2009-10-29 | 2012-02-15 | 日特エンジニアリング株式会社 | パレット搬送装置及びパレット搬送方法 |
| JP2011134898A (ja) * | 2009-12-24 | 2011-07-07 | Tokyo Electron Ltd | 基板処理装置、基板処理方法及び記憶媒体 |
| JP5884267B2 (ja) * | 2010-04-01 | 2016-03-15 | 株式会社ニコン | 物体搬送装置、露光装置、デバイス製造方法、フラットパネルディスプレイの製造方法、及び物体搬送方法 |
| US20120061155A1 (en) * | 2010-04-09 | 2012-03-15 | Willow Garage, Inc. | Humanoid robotics system and methods |
| DE102010037814A1 (de) * | 2010-09-28 | 2012-03-29 | LCTech GmbH | Transport- und Manipulationshalterung |
| JP5874950B2 (ja) * | 2011-04-12 | 2016-03-02 | 株式会社東京精密 | ワーク搬送装置及びワーク加工装置 |
| JP6037372B2 (ja) * | 2011-08-03 | 2016-12-07 | 株式会社ディスコ | パッケージ基板分割装置 |
| CN202352718U (zh) * | 2011-10-13 | 2012-07-25 | 赵跃庆 | 一种夹料装置 |
| EP2812163B9 (en) | 2012-02-08 | 2025-06-18 | Vanrx Pharmasystems Inc. | Articulated arm apparatus and system |
| CN102658542A (zh) * | 2012-05-07 | 2012-09-12 | 上海电机学院 | 轨道式智能搬运机器车 |
| US9214375B2 (en) * | 2012-07-10 | 2015-12-15 | Lam Research Corporation | End effector having multiple-position contact points |
| CN103671386B (zh) * | 2012-08-31 | 2015-12-16 | 富鼎电子科技(嘉善)有限公司 | 贴泡棉装置及其使用的夹取机构 |
| US9156170B2 (en) * | 2013-03-05 | 2015-10-13 | Seiko Epson Corporation | Robot hand, robot, and holding method of holding object to be pinched by robot |
| US9545724B2 (en) * | 2013-03-14 | 2017-01-17 | Brooks Automation, Inc. | Tray engine with slide attached to an end effector base |
| TWI623994B (zh) * | 2013-07-08 | 2018-05-11 | 布魯克斯自動機械公司 | 具有即時基板定心的處理裝置 |
| US10115616B2 (en) * | 2013-07-18 | 2018-10-30 | Applied Materials, Inc. | Carrier adapter insert apparatus and carrier adapter insert detection methods |
| US9305816B2 (en) * | 2013-12-28 | 2016-04-05 | Intel Corporation | Methods and devices for securing and transporting singulated die in high volume manufacturing |
| KR20150088941A (ko) * | 2014-01-24 | 2015-08-04 | 삼성전자주식회사 | 습식 세정 장치 및 이를 사용한 습식 세정 방법 |
| JP6248788B2 (ja) * | 2014-04-28 | 2017-12-20 | シンフォニアテクノロジー株式会社 | ウエハマッピング装置およびそれを備えたロードポート |
| WO2016139249A1 (en) * | 2015-03-03 | 2016-09-09 | Lutz Rebstock | Inspection system |
| DE102015004404B4 (de) * | 2015-04-11 | 2016-11-24 | Günther Zimmer | Präzisionsgreifvorrichtung |
| JP6792431B2 (ja) * | 2016-11-28 | 2020-11-25 | シャープ株式会社 | 調理網および加熱調理用セット |
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2013
- 2013-03-14 US US13/830,692 patent/US9545724B2/en active Active
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2014
- 2014-03-13 CN CN201710499453.7A patent/CN107458796B/zh active Active
- 2014-03-13 CN CN201911256394.6A patent/CN111056199B/zh active Active
- 2014-03-13 JP JP2016501853A patent/JP6678570B2/ja active Active
- 2014-03-13 KR KR1020157028589A patent/KR102196965B1/ko active Active
- 2014-03-13 WO PCT/US2014/025447 patent/WO2014159916A2/en not_active Ceased
- 2014-03-13 KR KR1020207037172A patent/KR102298612B1/ko active Active
- 2014-03-13 CN CN201480021125.0A patent/CN105121309B/zh active Active
- 2014-03-13 KR KR1020217027447A patent/KR102395675B1/ko active Active
- 2014-03-14 TW TW103109731A patent/TWI629148B/zh active
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2016
- 2016-12-21 US US15/386,799 patent/US10092929B2/en active Active
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2018
- 2018-08-29 US US16/116,025 patent/US11077466B2/en active Active
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2020
- 2020-01-10 JP JP2020002759A patent/JP7053689B2/ja active Active
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2021
- 2021-07-22 US US17/382,858 patent/US20210346915A1/en not_active Abandoned
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