JP2016211021A5 - - Google Patents
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- Publication number
- JP2016211021A5 JP2016211021A5 JP2015093494A JP2015093494A JP2016211021A5 JP 2016211021 A5 JP2016211021 A5 JP 2016211021A5 JP 2015093494 A JP2015093494 A JP 2015093494A JP 2015093494 A JP2015093494 A JP 2015093494A JP 2016211021 A5 JP2016211021 A5 JP 2016211021A5
- Authority
- JP
- Japan
- Prior art keywords
- vaporizer
- liquid
- control device
- control valve
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 46
- 239000006200 vaporizer Substances 0.000 claims description 41
- 238000009834 vaporization Methods 0.000 claims description 10
- 230000008016 vaporization Effects 0.000 claims description 10
- 238000001514 detection method Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 8
- 239000002994 raw material Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015093494A JP6578125B2 (ja) | 2015-04-30 | 2015-04-30 | 気化供給装置 |
| PCT/JP2016/001967 WO2016174832A1 (ja) | 2015-04-30 | 2016-04-11 | 気化供給装置 |
| KR1020177017535A KR101962659B1 (ko) | 2015-04-30 | 2016-04-11 | 기화 공급 장치 |
| US15/565,696 US10646844B2 (en) | 2015-04-30 | 2016-04-11 | Vaporization supply apparatus |
| CN201680007156.XA CN107532298B (zh) | 2015-04-30 | 2016-04-11 | 气化供给装置 |
| TW105112439A TWI632609B (zh) | 2015-04-30 | 2016-04-21 | Gasification supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015093494A JP6578125B2 (ja) | 2015-04-30 | 2015-04-30 | 気化供給装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016211021A JP2016211021A (ja) | 2016-12-15 |
| JP2016211021A5 true JP2016211021A5 (enExample) | 2018-03-15 |
| JP6578125B2 JP6578125B2 (ja) | 2019-09-18 |
Family
ID=57199662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015093494A Active JP6578125B2 (ja) | 2015-04-30 | 2015-04-30 | 気化供給装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10646844B2 (enExample) |
| JP (1) | JP6578125B2 (enExample) |
| KR (1) | KR101962659B1 (enExample) |
| CN (1) | CN107532298B (enExample) |
| TW (1) | TWI632609B (enExample) |
| WO (1) | WO2016174832A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20200149162A1 (en) | 2017-07-25 | 2020-05-14 | Fujikin Incorporated | Fluid control device |
| CN110914470A (zh) * | 2017-07-25 | 2020-03-24 | 株式会社富士金 | 流体控制装置 |
| JP7137921B2 (ja) * | 2017-11-07 | 2022-09-15 | 株式会社堀場エステック | 気化システム及び気化システム用プログラム |
| US12121926B2 (en) | 2019-08-29 | 2024-10-22 | Fujikin Incorporated | Fluid supply system |
| US11976748B2 (en) | 2019-08-30 | 2024-05-07 | Fujikin Incorporated | Diaphragm valve |
| WO2021054135A1 (ja) * | 2019-09-19 | 2021-03-25 | 株式会社フジキン | 気化供給装置 |
| TWI846960B (zh) * | 2019-10-04 | 2024-07-01 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 低揮發性前驅物的供應系統 |
| KR102646603B1 (ko) | 2019-12-06 | 2024-03-12 | 가부시키가이샤 후지킨 | 유량 제어 장치의 이상 검지 방법 및 유량 감시 방법 |
| US20230002900A1 (en) * | 2019-12-16 | 2023-01-05 | Fujikin Incorporated | Vaporization supply method and vaporization supply device |
| JP7457522B2 (ja) * | 2020-02-20 | 2024-03-28 | 株式会社堀場エステック | 気化システム |
| EP4190939A4 (en) * | 2020-07-27 | 2024-09-25 | Jiangsu Favored Nanotechnology Co., Ltd. | RAW MATERIAL GASIFICATION DEVICE, FILM COATING DEVICE, FILM COATING APPARATUS AND FEEDING METHOD THEREFOR |
| JP7589890B2 (ja) * | 2020-10-07 | 2024-11-26 | 株式会社フジキン | 気化装置、ガス供給装置及びガス供給装置の制御方法 |
| KR102812621B1 (ko) * | 2020-10-31 | 2025-05-26 | 가부시키가이샤 후지킨 | 가스 공급 시스템 및 가스 공급 방법 |
| US20240101446A1 (en) * | 2021-03-11 | 2024-03-28 | Fujikin Incorporated | Vaporizer and vaporization supply device |
| US12398819B2 (en) | 2021-04-01 | 2025-08-26 | Fujikin Incorporated | Controller and vaporization supply device |
| CN217156914U (zh) * | 2021-06-11 | 2022-08-09 | 台湾东电化股份有限公司 | 驱动机构 |
| KR102774123B1 (ko) * | 2023-06-02 | 2025-03-04 | 주식회사 비투지홀딩스 | 질화갈륨 단결정 성장을 위한 하이드라이드 기상 증착 장비의 갈륨 공급 장치 및 이를 포함하는 하이드라이드 기상 증착 장비 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2814380B2 (ja) * | 1989-04-01 | 1998-10-22 | 東京エレクトロン東北株式会社 | 液体材料気化供給装置 |
| JP2000133644A (ja) * | 1998-10-28 | 2000-05-12 | Mitsubishi Electric Corp | 半導体装置の製造装置 |
| JP2005217089A (ja) * | 2004-01-29 | 2005-08-11 | Nec Kansai Ltd | 半導体製造装置および半導体製造方法 |
| JP3896594B2 (ja) * | 2004-10-01 | 2007-03-22 | 株式会社ユーテック | Ｃｖｄ用気化器、溶液気化式ｃｖｄ装置及びｃｖｄ用気化方法 |
| JP4263206B2 (ja) * | 2005-11-15 | 2009-05-13 | 東京エレクトロン株式会社 | 熱処理方法、熱処理装置及び気化装置 |
| JP5461786B2 (ja) * | 2008-04-01 | 2014-04-02 | 株式会社フジキン | 気化器を備えたガス供給装置 |
| JP5155895B2 (ja) * | 2009-01-27 | 2013-03-06 | 日本エア・リキード株式会社 | 充填容器内の液体材料の供給装置および該液体材料の供給装置における充填容器内の液面管理方法 |
| JP5350824B2 (ja) * | 2009-02-03 | 2013-11-27 | 株式会社フジキン | 液体材料の気化供給システム |
| JP5652960B2 (ja) * | 2011-08-01 | 2015-01-14 | 株式会社フジキン | 原料気化供給装置 |
| JP5913888B2 (ja) | 2011-09-30 | 2016-04-27 | 国立大学法人東北大学 | 気化器 |
| JP2014006151A (ja) | 2012-06-25 | 2014-01-16 | Taiyo Nippon Sanso Corp | 液体材料有無検知方法 |
| JP5837869B2 (ja) | 2012-12-06 | 2015-12-24 | 株式会社フジキン | 原料気化供給装置 |
| JP5548292B1 (ja) * | 2013-05-30 | 2014-07-16 | 株式会社堀場エステック | 加熱気化システムおよび加熱気化方法 |
-
2015
- 2015-04-30 JP JP2015093494A patent/JP6578125B2/ja active Active
-
2016
- 2016-04-11 US US15/565,696 patent/US10646844B2/en active Active
- 2016-04-11 CN CN201680007156.XA patent/CN107532298B/zh not_active Expired - Fee Related
- 2016-04-11 WO PCT/JP2016/001967 patent/WO2016174832A1/ja not_active Ceased
- 2016-04-11 KR KR1020177017535A patent/KR101962659B1/ko active Active
- 2016-04-21 TW TW105112439A patent/TWI632609B/zh active
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