JP2016207754A - 深紫外光を放射する半導体発光素子を備える発光モジュール - Google Patents
深紫外光を放射する半導体発光素子を備える発光モジュール Download PDFInfo
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- JP2016207754A JP2016207754A JP2015085410A JP2015085410A JP2016207754A JP 2016207754 A JP2016207754 A JP 2016207754A JP 2015085410 A JP2015085410 A JP 2015085410A JP 2015085410 A JP2015085410 A JP 2015085410A JP 2016207754 A JP2016207754 A JP 2016207754A
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- Prior art keywords
- light emitting
- emitting module
- emitting element
- semiconductor light
- deep ultraviolet
- Prior art date
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- 238000004382 potting Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
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- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- VGTPCRGMBIAPIM-UHFFFAOYSA-M sodium thiocyanate Chemical compound [Na+].[S-]C#N VGTPCRGMBIAPIM-UHFFFAOYSA-M 0.000 description 1
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 1
- 235000019345 sodium thiosulphate Nutrition 0.000 description 1
- DIIKAKPJAGLSOD-UHFFFAOYSA-M sodium;cyclohexanesulfonate Chemical compound [Na+].[O-]S(=O)(=O)C1CCCCC1 DIIKAKPJAGLSOD-UHFFFAOYSA-M 0.000 description 1
- WEXGSUVTGKSPGY-UHFFFAOYSA-M sodium;cyclohexylmethanesulfonate Chemical compound [Na+].[O-]S(=O)(=O)CC1CCCCC1 WEXGSUVTGKSPGY-UHFFFAOYSA-M 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- RBTVSNLYYIMMKS-UHFFFAOYSA-N tert-butyl 3-aminoazetidine-1-carboxylate;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)N1CC(N)C1 RBTVSNLYYIMMKS-UHFFFAOYSA-N 0.000 description 1
- MCZDHTKJGDCTAE-UHFFFAOYSA-M tetrabutylazanium;acetate Chemical compound CC([O-])=O.CCCC[N+](CCCC)(CCCC)CCCC MCZDHTKJGDCTAE-UHFFFAOYSA-M 0.000 description 1
- GTCDARUMAMVCRO-UHFFFAOYSA-M tetraethylazanium;acetate Chemical compound CC([O-])=O.CC[N+](CC)(CC)CC GTCDARUMAMVCRO-UHFFFAOYSA-M 0.000 description 1
- DDFYFBUWEBINLX-UHFFFAOYSA-M tetramethylammonium bromide Chemical compound [Br-].C[N+](C)(C)C DDFYFBUWEBINLX-UHFFFAOYSA-M 0.000 description 1
- MRYQZMHVZZSQRT-UHFFFAOYSA-M tetramethylazanium;acetate Chemical compound CC([O-])=O.C[N+](C)(C)C MRYQZMHVZZSQRT-UHFFFAOYSA-M 0.000 description 1
- PXJUBOLFJDSAQQ-UHFFFAOYSA-M tetrapropylazanium;acetate Chemical compound CC([O-])=O.CCC[N+](CCC)(CCC)CCC PXJUBOLFJDSAQQ-UHFFFAOYSA-M 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
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- PVFOMCVHYWHZJE-UHFFFAOYSA-N trichloroacetyl chloride Chemical compound ClC(=O)C(Cl)(Cl)Cl PVFOMCVHYWHZJE-UHFFFAOYSA-N 0.000 description 1
- 125000006000 trichloroethyl group Chemical group 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
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- 229940102001 zinc bromide Drugs 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229960001763 zinc sulfate Drugs 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Abstract
【解決手段】発光モジュール1は、深紫外光18を放射する半導体発光素子10と、半導体発光素子10を封止する液体50と、半導体発光素子10と液体50とを収容するパッケージ(30、40)とを備える。液体50は、深紫外光18に対して透明である。パッケージ(30、40)は、深紫外光18に対して透明な透明部材40を有する。
【選択図】図1
Description
図1を参照して、実施の形態1に係る発光モジュール1は、主に、深紫外光18を放射する半導体発光素子10と、半導体発光素子10を封止する液体50と、半導体発光素子10と液体50とを収容するパッケージ(30、40)とを備える。
ウエハの第1の面の上に、n型半導体層12、活性層13、及びp型半導体層14を含む半導体層を、有機金属化学気相成長法(MOCVD法)、有機金属気相成長法(MOVPE法)、分子線エピタキシー法(MBE法)、ハイドライド気相成長法(HVPE法)等の方法で、積層する(S12)。ウエハは、後のダイシング工程の後に、基板11となり、ウエハの第1の面は、後のダイシング工程の後に、基板11の第1の面11aとなる。n型半導体層12、活性層13、及びp型半導体層14を含む半導体層の一部を、エッチング等により部分的に除去し、メサ構造を形成する(S13)。このエッチングにより形成されたn型半導体層12の露出面に、真空蒸着法などの方法によって、n型電極15を形成する(S14)。n型半導体層12とn型電極15との間の電気的コンタクトを向上させるため、300℃以上1100℃以下の温度で、30秒以上3分間以下の時間、アニールすることが好ましい。それから、p型半導体層14の上に、真空蒸着法などの方法によって、p型電極16を形成する(S16)。p型半導体層14とp型電極16との間の電気的コンタクトを向上させるため、200℃以上800℃以下の温度で、30秒以上3分間以下の時間、アニールすることが好ましい。それから、ウエハをダイシングして(S18)、個片化された半導体発光素子10が得られる。
本実施の形態に係る発光モジュール1は、深紫外光18を放射する半導体発光素子10と、半導体発光素子10を封止する液体50と、半導体発光素子10と液体50とを収容するパッケージ(30、40)とを備える。液体50は、半導体発光素子10から放射される深紫外光18に対して透明である。パッケージ(30、40)は、半導体発光素子10から放射される深紫外光18に対して透明な透明部材40を有する。
図5を参照して、実施の形態2に係る発光モジュール1aを説明する。本実施の形態の発光モジュール1aは、基本的には、図1に示す実施の形態1の発光モジュール1と同様の構成を備え、同様の効果を得ることができるが、主に以下の点で異なる。
図8を参照して、実施の形態3に係る発光モジュール1bを説明する。本実施の形態の発光モジュール1bは、基本的には、図5に示す実施の形態2の発光モジュール1aと同様の構成を備え、同様の効果を得ることができるが、主に以下の点で異なる。
図9を参照して、実施の形態4に係る発光モジュール1cを説明する。本実施の形態の発光モジュール1cは、基本的には、図8に示す実施の形態3の発光モジュール1bと同様の構成を備え、同様の効果を得ることができるが、主に以下の点で異なる。
図10を参照して、実施の形態5に係る発光モジュール1dを説明する。本実施の形態の発光モジュール1dは、基本的には、図5に示す実施の形態2の発光モジュール1aと同様の構成を備え、同様の効果を得ることができるが、主に以下の点で異なる。
図11を参照して、実施の形態6に係る発光モジュール1eを説明する。本実施の形態の発光モジュール1eは、基本的には、図10に示す実施の形態5の発光モジュール1dと同様の構成を備え、同様の効果を得ることができるが、主に以下の点で異なる。
図12を参照して、実施の形態7に係る発光モジュール1fを説明する。本実施の形態の発光モジュール1fは、基本的には、図10に示す実施の形態5の発光モジュール1dと同様の構成を備え、同様の効果を得ることができるが、主に以下の点で異なる。
図13を参照して、実施の形態8に係る発光モジュール1gを説明する。本実施の形態の発光モジュール1gは、基本的には、図12に示す実施の形態7の発光モジュール1fと同様の構成を備え、同様の効果を得ることができるが、主に以下の点で異なる。
Claims (20)
- 深紫外光を放射する半導体発光素子と、
前記半導体発光素子を封止する液体とを備え、前記液体は、前記半導体発光素子から放射される前記深紫外光に対して透明であり、さらに、
前記半導体発光素子と前記液体とを収容するパッケージとを備え、前記パッケージは前記半導体発光素子から放射される前記深紫外光に対して透明な透明部材を有する、発光モジュール。 - 前記液体は、純水、液体有機化合物、塩溶液、及び微粒子分散液のいずれかから構成される、請求項1に記載の発光モジュール。
- 前記液体有機化合物は、飽和炭化水素化合物、芳香環を有しない有機溶媒、有機ハロゲン化物、シリコーン樹脂、シリコーンオイルのいずれかから構成される、請求項2に記載の発光モジュール。
- 前記塩溶液は、酸溶液、無機塩溶液、有機塩溶液のいずれかから構成される、請求項2に記載の発光モジュール。
- 前記液体は、前記半導体発光素子から放射される前記深紫外光の波長において、1.32以上の屈折率を有する、請求項1から請求項4のいずれか一項に記載の発光モジュール。
- 前記液体は、前記半導体発光素子から放射される前記深紫外光の波長において、1.40以上の屈折率を有する、請求項1から請求項4のいずれか一項に記載の発光モジュール。
- 前記液体は、前記半導体発光素子から放射される前記深紫外光の波長において、前記半導体発光素子の出射面よりも小さな屈折率を有し、かつ、前記透明部材よりも大きな屈折率を有する、請求項1から請求項6のいずれか一項に記載の発光モジュール。
- 前記液体は、前記半導体発光素子から放射される前記深紫外光の波長において、100μmの経路長当たり80%以上の透過率を有する材料から構成される、請求項1から請求項7のいずれか一項に記載の発光モジュール。
- 前記液体は、前記半導体発光素子から放射される前記深紫外光の波長において、60%以上の透過率を有する、請求項1から請求項8のいずれか一項に記載の発光モジュール。
- 前記液体は、前記半導体発光素子から放射される前記深紫外光の波長において、75%以上の透過率を有する、請求項1から請求項8のいずれか一項に記載の発光モジュール。
- 前記半導体発光素子は、前記半導体発光素子の活性層から放射される前記深紫外光を前記半導体発光素子の外部に取り出す効率を向上させる凹凸構造を含む、請求項1から請求項10のいずれか一項に記載の発光モジュール。
- 前記透明部材は、キャップである、請求項1から請求項11のいずれか一項に記載の発光モジュール。
- 前記透明部材は、半球殻、半楕円球殻、及び砲弾の形状を有する殻のいずれかの形状を有する、請求項1から請求項12のいずれか一項に記載の発光モジュール。
- 前記透明部材は、平板、レンズまたは表面にレンズが形成された透明板である、請求項1から請求項11のいずれか一項に記載の発光モジュール。
- 前記透明部材は、合成石英、石英ガラス、無アルカリガラス、サファイア、蛍石、及び樹脂のいずれかからなる、請求項1から請求項14のいずれか一項に記載の発光モジュール。
- 前記透明部材は、前記半導体発光素子から放射される前記深紫外光の波長において、100μmの経路長当たり80%以上の透過率を有する材料から構成される、請求項1から請求項15のいずれか一項に記載の発光モジュール。
- 前記透明部材は、前記半導体発光素子から放射される前記深紫外光の波長において、60%以上の透過率を有する、請求項1から請求項16のいずれか一項に記載の発光モジュール。
- 前記パッケージは、メタルパッケージ、樹脂パッケージ、セラミックパッケージのいずれかである、請求項1から請求項17のいずれか一項に記載の発光モジュール。
- 前記半導体発光素子から放射される前記深紫外光は、190〜350nmの間の波長を有する、請求項1から請求項18のいずれか一項に記載の発光モジュール。
- 前記半導体発光素子から放射される前記深紫外光は、200〜320nmの間の波長を有する、請求項1から請求項18のいずれか一項に記載の発光モジュール。
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2018181044A1 (ja) * | 2017-03-27 | 2018-10-04 | Dowaエレクトロニクス株式会社 | Iii族窒化物半導体発光素子およびその製造方法 |
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KR20200097766A (ko) | 2018-01-10 | 2020-08-19 | 애플 인크. | 이동가능한 렌즈를 갖는 접이식 광학체를 구비한 카메라 |
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