JP2016195285A - 低温基板上の薄膜の側方熱処理を提供する方法 - Google Patents
低温基板上の薄膜の側方熱処理を提供する方法 Download PDFInfo
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Abstract
Description
本願は、米国特許法§119(e)(1)の下、2010年6月2日に出願された米国仮特許出願第61/350,765号への優先権を主張し、この米国仮特許出願の内容は、本明細書中に参考として援用される。
1.技術分野
本発明は、概して、基板上の薄膜を硬化させるための方法に関し、具体的には、低温基板上の薄膜を熱的に処理するための方法に関する。
一般に、熱処理とは、焼結、焼き鈍し、硬化、乾燥、結晶化、重合、化学反応開始および変調、ドーパント送り込み、ガス抜き等を包含する。半導体薄膜の熱処理は、典型的には、高温環境において行なわれる。例えば、非晶質シリコン(a−Si)は、1100℃で焼き鈍しされ、シリコンナノ粒子膜は、900℃で焼結される。したがって、処理半導体薄膜のための高温要件は、多くの場合、半導体薄膜を担持するための選択肢基板として、焼成セラミックまたは石英等、高温基板の使用を余儀なくする。
本発明の好ましい実施形態によると、離間した2つの吸収トレースが、基板の上部に位置する薄膜と接触される。パルス放射が、2つの吸収トレースを加熱するために利用され、2つの吸収トレースからの熱が、続いて、薄膜の平面において、2つの吸収トレース間の薄膜へと伝導され、薄膜を熱的に処理する。
本発明は、例えば、以下を提供する。
(項目1)
超薄膜を熱的に処理するための方法であって、
超薄膜の上部に2つの吸収トレースをパターン化するステップであって、上記薄膜は、基板の上部に位置する、ステップと、
少なくとも1つの電磁パルスで上記2つの吸収トレースを照射し、上記2つの吸収トレースを加熱するステップと、
上記2つの吸収トレースからの熱によって、上記超薄膜を熱的に処理するステップと、
を備える、方法。
(項目2)
上記基板は、450℃未満の最大作業温度を有する、項目1に記載の装置。
(項目3)
上記2つの吸収トレースは、上記超薄膜よりも上記電磁パルスに吸収性である材料から作製される、項目1に記載の方法。
(項目4)
上記2つの吸収トレースは、金属から作製される、項目1に記載の装置。
(項目5)
上記2つの吸収トレースは、セラミックから作製される、項目1に記載の方法。
(項目6)
上記超薄膜と上記基板との間に、熱拡散層を提供するステップをさらに含む、項目1に記載の方法。
(項目7)
上記電磁パルスは、閃光灯から提供される、項目1に記載の方法。
(項目8)
上記電磁パルスは、指向性プラズマアークから提供される、項目1に記載の方法。
(項目9)
薄膜トランジスタを加工するための方法であって、
超薄膜に隣接する2つの吸収トレースをパターン化するステップであって、上記薄膜は、基板の上部に位置する、ステップと、
少なくとも1つの電磁パルスで上記2つの吸収トレースを照射し、上記2つの吸収トレースを加熱し、上記2つの吸収トレースからの熱によって、上記超薄膜を熱的に処理するステップと、
上記2つの吸収トレースおよび上記超薄膜上に誘電層を堆積させるステップと、
上記誘電層の上部に伝導性トレースを堆積させることによって、ゲートを形成するステップと、
を備える、方法。
(項目10)
上記基板は、450℃未満の最大作業温度を有する、項目9に記載の方法。
(項目11)
上記2つの吸収トレースは、上記超薄膜よりも上記電磁パルスに吸収性である材料から作製される、項目9に記載の方法。
(項目12)
上記2つの吸収トレースは、金属から作製される、項目9に記載の方法。
(項目13)
上記2つの吸収トレースは、セラミックから作製される、項目9に記載の方法。
(項目14)
上記超薄膜と上記基板との間に、熱拡散層を提供するステップをさらに含む、項目9に記載の方法。
(項目15)
上記熱拡散層と上記基板との間に、高温低熱伝導性膜を提供するステップをさらに含む、項目14に記載の方法。
(項目16)
上記電磁パルスは、閃光灯から提供される、項目9に記載の方法。
(項目17)
上記電磁パルスは、指向性プラズマアークから提供される、項目9に記載の方法。
パルス放射熱処理技法を使用して、基板上の薄膜を熱的に処理する時、閃光灯、指向性プラズマアーク(DPA;directed plasma arc)、レーザ、マイクロ波、誘導加熱器、または電子ビームから放出されるパルス放射は、その基板にわたって、薄膜を選択的に加熱する能力を有する。加えて、基板の熱容量は、薄膜のものより遥かに大きく、加熱時間は、基板の熱平衡時間より遥かに短いため、基板は、熱処理直後に薄膜を急速冷却するために、放熱板としての役割を果たすことができる。
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