JP2016154191A5 - - Google Patents
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- Publication number
- JP2016154191A5 JP2016154191A5 JP2015032001A JP2015032001A JP2016154191A5 JP 2016154191 A5 JP2016154191 A5 JP 2016154191A5 JP 2015032001 A JP2015032001 A JP 2015032001A JP 2015032001 A JP2015032001 A JP 2015032001A JP 2016154191 A5 JP2016154191 A5 JP 2016154191A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing
- film
- organic film
- pad electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 16
- 238000004519 manufacturing process Methods 0.000 claims 12
- 238000001312 dry etching Methods 0.000 claims 7
- 238000000034 method Methods 0.000 claims 6
- 238000003384 imaging method Methods 0.000 claims 5
- 238000005530 etching Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000001039 wet etching Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015032001A JP6562651B2 (ja) | 2015-02-20 | 2015-02-20 | 半導体装置の製造方法 |
| US15/046,369 US9647027B2 (en) | 2015-02-20 | 2016-02-17 | Method for manufacturing semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015032001A JP6562651B2 (ja) | 2015-02-20 | 2015-02-20 | 半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016154191A JP2016154191A (ja) | 2016-08-25 |
| JP2016154191A5 true JP2016154191A5 (enExample) | 2018-03-29 |
| JP6562651B2 JP6562651B2 (ja) | 2019-08-21 |
Family
ID=56693834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015032001A Expired - Fee Related JP6562651B2 (ja) | 2015-02-20 | 2015-02-20 | 半導体装置の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9647027B2 (enExample) |
| JP (1) | JP6562651B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102569936B1 (ko) * | 2018-02-06 | 2023-08-25 | 삼성디스플레이 주식회사 | 표시 패널 및 이의 제조 방법 |
| CN109904343B (zh) * | 2019-02-27 | 2021-10-26 | 昆山国显光电有限公司 | 一种显示装置及其制备方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62260360A (ja) * | 1986-05-06 | 1987-11-12 | Seiko Epson Corp | 固体撮像装置のパツシベ−シヨン層 |
| JPH03291929A (ja) * | 1990-04-09 | 1991-12-24 | Nippon Telegr & Teleph Corp <Ntt> | ドライエッチング方法 |
| US5022958A (en) * | 1990-06-27 | 1991-06-11 | At&T Bell Laboratories | Method of etching for integrated circuits with planarized dielectric |
| US5302547A (en) * | 1993-02-08 | 1994-04-12 | General Electric Company | Systems for patterning dielectrics by laser ablation |
| JP3264035B2 (ja) * | 1993-04-26 | 2002-03-11 | ソニー株式会社 | ドライエッチング方法 |
| JP3959790B2 (ja) * | 1997-08-26 | 2007-08-15 | ソニー株式会社 | 半導体装置の製造方法 |
| JP2000164836A (ja) * | 1998-11-25 | 2000-06-16 | Nikon Corp | 固体撮像装置等の半導体装置の製造方法 |
| JP2000340543A (ja) * | 1999-05-26 | 2000-12-08 | Sony Corp | ドライエッチング方法および装置 |
| DE10124631C1 (de) * | 2001-05-18 | 2002-11-21 | Atotech Deutschland Gmbh | Verfahren zum direkten elektrolytischen Metallisieren von elektrisch nichtleiteitenden Substratoberflächen |
| TWI249843B (en) * | 2002-05-14 | 2006-02-21 | Sony Corp | Semiconductor device and its manufacturing method, and electronic apparatus |
| TWI289905B (en) * | 2002-07-23 | 2007-11-11 | Fujitsu Ltd | Image sensor and image sensor module |
| JP2006351761A (ja) * | 2005-06-15 | 2006-12-28 | Fujifilm Holdings Corp | 固体撮像素子及びその製造方法 |
| KR101260599B1 (ko) * | 2008-12-26 | 2013-05-06 | 케이엔씨 래보러토리즈 컴패니, 리미티드 | 낮은 물 함량을 가지는 포토레지스트 박리제의 농축액을 제조하는 방법 |
| JP2013131613A (ja) * | 2011-12-21 | 2013-07-04 | Toppan Printing Co Ltd | カラー固体撮像素子の製造方法 |
| JP6108698B2 (ja) * | 2012-06-15 | 2017-04-05 | キヤノン株式会社 | 固体撮像装置の製造方法 |
| JP6178561B2 (ja) * | 2012-11-15 | 2017-08-09 | キヤノン株式会社 | 固体撮像装置の製造方法 |
| JP2015005577A (ja) * | 2013-06-19 | 2015-01-08 | キヤノン株式会社 | 半導体装置の製造方法 |
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2015
- 2015-02-20 JP JP2015032001A patent/JP6562651B2/ja not_active Expired - Fee Related
-
2016
- 2016-02-17 US US15/046,369 patent/US9647027B2/en not_active Expired - Fee Related