JP2016139758A - 気密封止用蓋材および電子部品収容パッケージ - Google Patents
気密封止用蓋材および電子部品収容パッケージ Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 203
- 229910000640 Fe alloy Inorganic materials 0.000 claims abstract description 63
- 238000007789 sealing Methods 0.000 claims description 100
- 238000005219 brazing Methods 0.000 claims description 45
- 229910052709 silver Inorganic materials 0.000 claims description 42
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 41
- 239000004332 silver Substances 0.000 claims description 41
- 238000003860 storage Methods 0.000 claims description 22
- 229910000679 solder Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 181
- 230000007797 corrosion Effects 0.000 description 56
- 238000005260 corrosion Methods 0.000 description 56
- 229910045601 alloy Inorganic materials 0.000 description 34
- 239000000956 alloy Substances 0.000 description 34
- 239000010949 copper Substances 0.000 description 22
- 229910019589 Cr—Fe Inorganic materials 0.000 description 21
- 238000012360 testing method Methods 0.000 description 14
- 238000012986 modification Methods 0.000 description 13
- 230000004048 modification Effects 0.000 description 13
- 239000002344 surface layer Substances 0.000 description 13
- 238000003466 welding Methods 0.000 description 12
- 239000012535 impurity Substances 0.000 description 10
- 229910052759 nickel Inorganic materials 0.000 description 10
- 230000008646 thermal stress Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 150000003839 salts Chemical class 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910000990 Ni alloy Inorganic materials 0.000 description 4
- 229910020888 Sn-Cu Inorganic materials 0.000 description 4
- 229910019204 Sn—Cu Inorganic materials 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 229910017944 Ag—Cu Inorganic materials 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910000833 kovar Inorganic materials 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/06—Hermetically-sealed casings
- H05K5/066—Hermetically-sealed casings sealed by fusion of the joining parts without bringing material; sealed by brazing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
- B32B15/013—Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of an iron alloy or steel, another layer being formed of a metal other than iron or aluminium
- B32B15/015—Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of an iron alloy or steel, another layer being formed of a metal other than iron or aluminium the said other metal being copper or nickel or an alloy thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3006—Ag as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3053—Fe as the principal constituent
- B23K35/308—Fe as the principal constituent with Cr as next major constituent
- B23K35/3086—Fe as the principal constituent with Cr as next major constituent containing Ni or Mn
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
- B32B15/018—Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of a noble metal or a noble metal alloy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
- C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
- C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
- C22C38/52—Ferrous alloys, e.g. steel alloys containing chromium with nickel with cobalt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/06—Containers; Seals characterised by the material of the container or its electrical properties
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/03—Covers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/04—Tubular or hollow articles
- B23K2101/12—Vessels
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02984—Protection measures against damaging
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
【解決手段】この気密封止用蓋材1は、電子部品20を収納するための電子部品収納部材30を含む電子部品収容パッケージ100に用いられる気密封止用蓋材1であって、4質量%以上のCrを含有するFe合金により形成された基材層11と、基材層11の電子部品収納部材30側の下面11a上に対して、Cuにより形成された中間層12を介して接合された銀ろう層13とを備えるクラッド材10により形成される。
【選択図】図2
Description
(気密封止用蓋材の構造)
まず、図1および図2を参照して、本発明の第1実施形態による気密封止用蓋材1の構造を説明する。
次に、図3を参照して、本発明の第1実施形態による気密封止用蓋材1が用いられる電子部品収容パッケージ100の構造を説明する。
次に、図4を参照して、本発明の第1実施形態の変形例による気密封止用蓋材101について説明する。なお、第1実施形態と同一の構成については、同じ符号を付すとともに、その説明を省略している。
次に、図5を参照して、本発明の第2実施形態による気密封止用蓋材201について説明する。なお、第1実施形態と同一の構成については、同じ符号を付すとともに、その説明を省略している。
次に、図2および図4〜図7を参照して、上記実施形態の効果を確認するために行った気密封止用蓋材に用いる基材層の検討について説明する。
ここで、気密封止用蓋材1(101、201)の基材層11(図2、図4および図5参照)を構成する耐食性を有する試験材(金属板)として、6種のNi−Cr−Fe合金と、1種のNi−Co−Cr−Fe合金と、1種のNi−Cr合金とを用いた。
まず、耐食性試験として、試験材の各々に対して、JIS C60068−2−11に従い、35±2℃の温度、5±1質量%の塩濃度、および、6.5以上7.2以下のpHの条件下で、塩水噴霧試験を48時間以上行った。そして、各々の試験材における腐食の度合いを観察した。ここで、24時間経過後と、48時間経過後とにおいて、耐食性を評価した。また、42Ni−4Cr−Fe合金の試験材については、72時間経過後における耐食性も評価した。また、42Ni−6Cr−Fe合金の試験材については、72時間経過後と、144時間経過後とにおける耐食性も評価した。
次に、上記した試験材の平均熱膨張係数に基づいて、本発明の基材層に適した金属について検討した。なお、ろう付け接合対象(図3の電子部品収納部材30)を構成するアルミナ(Al2O3)の熱膨張係数に近い熱膨張係数を有するFe合金が、基材層としてより適していると考えられる。
なお、今回開示された実施形態および実施例は、すべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施形態および実施例の説明ではなく特許請求の範囲によって示され、さらに特許請求の範囲と均等の意味および範囲内でのすべての変更(変形例)が含まれる。
10、110、210 クラッド材
11 基材層
11a 下面(表面)
12 中間層
13 銀ろう層
20 電子部品
30 電子部品収納部材
100 電子部品収容パッケージ
Claims (6)
- 電子部品を収納するための電子部品収納部材を含む電子部品収容パッケージに用いられる気密封止用蓋材であって、
4質量%以上のCrを含有するFe合金により形成された基材層と、
前記基材層の前記電子部品収納部材側の表面上に対して、Cuにより形成された中間層を介して接合されるか、または、直接的に接触した状態で接合された銀ろう層とを備えるクラッド材により形成される、気密封止用蓋材。 - 前記基材層は、4質量%以上20質量%以下のCrを含有するFe合金により形成されている、請求項1に記載の気密封止用蓋材。
- 前記基材層は、6質量%以上10質量%以下のCrを含有するFe合金により形成されている、請求項2に記載の気密封止用蓋材。
- 前記基材層は、4質量%以上のCrに加え、36質量%以上48質量%以下のNiをさらに含有するFe合金により形成されている、請求項1〜3のいずれか1項に記載の気密封止用蓋材。
- 前記基材層は、4質量%以上のCrおよび36質量%以上48質量%以下のNiに加え、6質量%以上18質量%以下のCoをさらに含有するFe合金により形成されている、請求項4に記載の気密封止用蓋材。
- 電子部品を収納するための電子部品収納部材と、
4質量%以上のCrを含有するFe合金により形成された基材層と、前記基材層の前記電子部品収納部材側の表面上に対して、Cuにより形成された中間層を介して接合されるか、または、直接的に接触した状態で接合された銀ろう層とを備えるクラッド材により形成され、前記電子部品収納部材に対して前記銀ろう層を介して接合される、気密封止用蓋材とを備える、電子部品収容パッケージ。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015015406A JP2016139758A (ja) | 2015-01-29 | 2015-01-29 | 気密封止用蓋材および電子部品収容パッケージ |
CN201680007753.2A CN107210266A (zh) | 2015-01-29 | 2016-01-20 | 气密密封用盖材和电子部件收纳封装体 |
US15/541,930 US20170367205A1 (en) | 2015-01-29 | 2016-01-20 | Hermetic sealing lid member and electronic component housing package |
EP16743190.7A EP3252807A4 (en) | 2015-01-29 | 2016-01-20 | Cover material for hermetic sealing and electronic component-containing package |
KR1020177017914A KR101941805B1 (ko) | 2015-01-29 | 2016-01-20 | 기밀 밀봉용 덮개재 및 전자 부품 수납 패키지 |
PCT/JP2016/051511 WO2016121586A1 (ja) | 2015-01-29 | 2016-01-20 | 気密封止用蓋材および電子部品収納パッケージ |
TW105102667A TWI608572B (zh) | 2015-01-29 | 2016-01-28 | Hermetically sealed cover material and electronic component storage package |
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JP2015015406A JP2016139758A (ja) | 2015-01-29 | 2015-01-29 | 気密封止用蓋材および電子部品収容パッケージ |
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US (1) | US20170367205A1 (ja) |
EP (1) | EP3252807A4 (ja) |
JP (1) | JP2016139758A (ja) |
KR (1) | KR101941805B1 (ja) |
CN (1) | CN107210266A (ja) |
TW (1) | TWI608572B (ja) |
WO (1) | WO2016121586A1 (ja) |
Citations (6)
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JP2000223606A (ja) * | 1999-01-29 | 2000-08-11 | Kyocera Corp | 電子部品装置 |
JP2003209197A (ja) * | 2001-11-12 | 2003-07-25 | Sumitomo Special Metals Co Ltd | 電子部品用パッケージ、その蓋体、その蓋体用の蓋材およびその蓋材の製造方法 |
JP2005142329A (ja) * | 2003-11-06 | 2005-06-02 | Daishinku Corp | 電子部品用パッケージ |
JP2013038188A (ja) * | 2011-08-05 | 2013-02-21 | Tanaka Kikinzoku Kogyo Kk | パッケージ封止用の蓋体 |
WO2014148457A1 (ja) * | 2013-03-21 | 2014-09-25 | 日本碍子株式会社 | セラミックパッケージ及び電子部品 |
JP5632563B2 (ja) * | 2012-11-12 | 2014-11-26 | 株式会社Neomaxマテリアル | 気密封止用蓋材および電子部品収納用パッケージ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0756886B2 (ja) * | 1989-05-17 | 1995-06-14 | 住友特殊金属株式会社 | 半導体パッケージの製造方法 |
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- 2016-01-20 EP EP16743190.7A patent/EP3252807A4/en not_active Withdrawn
- 2016-01-20 WO PCT/JP2016/051511 patent/WO2016121586A1/ja active Application Filing
- 2016-01-20 US US15/541,930 patent/US20170367205A1/en not_active Abandoned
- 2016-01-20 KR KR1020177017914A patent/KR101941805B1/ko active IP Right Grant
- 2016-01-28 TW TW105102667A patent/TWI608572B/zh not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
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WO2016121586A1 (ja) | 2016-08-04 |
CN107210266A (zh) | 2017-09-26 |
TWI608572B (zh) | 2017-12-11 |
EP3252807A4 (en) | 2018-08-08 |
KR20170091684A (ko) | 2017-08-09 |
EP3252807A1 (en) | 2017-12-06 |
US20170367205A1 (en) | 2017-12-21 |
TW201639084A (zh) | 2016-11-01 |
KR101941805B1 (ko) | 2019-01-23 |
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