JP2016127170A - 載置台及び基板処理装置 - Google Patents
載置台及び基板処理装置 Download PDFInfo
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- JP2016127170A JP2016127170A JP2015000643A JP2015000643A JP2016127170A JP 2016127170 A JP2016127170 A JP 2016127170A JP 2015000643 A JP2015000643 A JP 2015000643A JP 2015000643 A JP2015000643 A JP 2015000643A JP 2016127170 A JP2016127170 A JP 2016127170A
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- 238000012545 processing Methods 0.000 title claims description 54
- 239000000758 substrate Substances 0.000 title claims description 7
- 239000000919 ceramic Substances 0.000 claims abstract description 140
- 238000012546 transfer Methods 0.000 claims abstract description 57
- 239000000853 adhesive Substances 0.000 claims description 14
- 230000001070 adhesive effect Effects 0.000 claims description 12
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 9
- 229910052721 tungsten Inorganic materials 0.000 claims description 9
- 239000010937 tungsten Substances 0.000 claims description 9
- 238000005259 measurement Methods 0.000 abstract description 32
- 239000010410 layer Substances 0.000 description 62
- 239000007789 gas Substances 0.000 description 32
- 230000002093 peripheral effect Effects 0.000 description 25
- 239000003507 refrigerant Substances 0.000 description 20
- 238000000034 method Methods 0.000 description 11
- 239000012212 insulator Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000009529 body temperature measurement Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- 238000007751 thermal spraying Methods 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
- H05B1/0233—Industrial applications for semiconductors manufacturing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2213/00—Aspects relating both to resistive heating and to induction heating, covered by H05B3/00 and H05B6/00
- H05B2213/06—Cook-top or cookware capable of communicating with each other
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- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
Abstract
【解決手段】一実施形態に係る載置台は、セラミック体と、セラミック体の内部に設けられたヒータと、セラミック体を支持する支持面を有する基台であり、少なくとも該支持面側に開口する空間であって温度センサを収容する該空間を提供する、該基台と、セラミック体内に設けられる一端と、空間の上方の位置であって一端よりも空間側の位置に設けられる他端との間で延在する伝熱体であり、該伝熱体の周囲におけるセラミック体の熱伝導率よりも高い熱伝導率を有する該伝熱体と、を備える。
【選択図】図3
Description
Claims (6)
- セラミック体と、
前記セラミック体の内部に設けられたヒータと、
前記セラミック体を支持する支持面を有する基台であり、少なくとも該支持面側に開口する空間であって温度センサを収容する該空間を提供する、該基台と、
前記セラミック体内に設けられる一端と、前記空間の上方の位置であって前記一端よりも前記空間側の位置に設けられる他端との間で延在する伝熱体であり、該伝熱体の周囲における前記セラミック体の熱伝導率よりも高い熱伝導率を有する該伝熱体と、
を備える、載置台。 - 前記セラミック体は、
接着剤を介して前記支持面上に設けられる第1のセラミック層と、
前記第1のセラミック層上に設けられる第2のセラミック層と、
を含み、
前記ヒータは、前記第2のセラミック層内に設けられ、
前記伝熱体は、前記第1のセラミック層内に設けられ、該第1のセラミック層の熱伝導率よりも高い熱伝導率を有している、
請求項1に記載の載置台。 - 前記第1のセラミック層は、前記第2のセラミック層側に配置される第1の面、及び、該第1の面の反対側の第2の面を有し、
前記伝熱体の前記一端は前記第1のセラミック層と前記第2のセラミック層との境界面上に設けられ、前記伝熱体の前記他端は前記一端よりも前記第2の面側に設けられている、請求項2に記載の載置台。 - 前記基台に対して前記セラミック体が設けられる方向に直交する方向において、前記伝熱体の前記一端と前記他端とが互いに異なる位置に配置されている、請求項1〜3の何れか一項に記載の載置台。
- 前記伝熱体は、タングステン焼結体から構成される、請求項1〜3の何れか一項に記載の載置台。
- 請求項1〜5の何れか一項に記載の載置台を備える基板処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015000643A JP6452449B2 (ja) | 2015-01-06 | 2015-01-06 | 載置台及び基板処理装置 |
US14/977,001 US10512125B2 (en) | 2015-01-06 | 2015-12-21 | Mounting table and substrate processing apparatus |
KR1020150186341A KR102383357B1 (ko) | 2015-01-06 | 2015-12-24 | 배치대 및 기판 처리 장치 |
TW105100008A TWI684238B (zh) | 2015-01-06 | 2016-01-04 | 載置台及基板處理裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015000643A JP6452449B2 (ja) | 2015-01-06 | 2015-01-06 | 載置台及び基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016127170A true JP2016127170A (ja) | 2016-07-11 |
JP6452449B2 JP6452449B2 (ja) | 2019-01-16 |
Family
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JP2015000643A Active JP6452449B2 (ja) | 2015-01-06 | 2015-01-06 | 載置台及び基板処理装置 |
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US (1) | US10512125B2 (ja) |
JP (1) | JP6452449B2 (ja) |
KR (1) | KR102383357B1 (ja) |
TW (1) | TWI684238B (ja) |
Cited By (5)
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KR20180125091A (ko) * | 2017-05-12 | 2018-11-22 | 세메스 주식회사 | 지지 유닛 및 이를 포함하는 기판 처리 장치 |
WO2019004620A1 (ko) * | 2017-06-27 | 2019-01-03 | 주식회사 미코 | 본딩 헤드 및 이를 갖는 본딩 장치 |
JP2019110253A (ja) * | 2017-12-20 | 2019-07-04 | 日本特殊陶業株式会社 | 保持装置 |
WO2023026908A1 (ja) * | 2021-08-27 | 2023-03-02 | 東京エレクトロン株式会社 | 基板支持器及び基板処理装置 |
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WO2019004620A1 (ko) * | 2017-06-27 | 2019-01-03 | 주식회사 미코 | 본딩 헤드 및 이를 갖는 본딩 장치 |
JP2019110253A (ja) * | 2017-12-20 | 2019-07-04 | 日本特殊陶業株式会社 | 保持装置 |
JP7077006B2 (ja) | 2017-12-20 | 2022-05-30 | 日本特殊陶業株式会社 | 保持装置 |
JP7477371B2 (ja) | 2020-06-02 | 2024-05-01 | 日本特殊陶業株式会社 | 保持装置 |
WO2023026908A1 (ja) * | 2021-08-27 | 2023-03-02 | 東京エレクトロン株式会社 | 基板支持器及び基板処理装置 |
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JP6452449B2 (ja) | 2019-01-16 |
US20160198528A1 (en) | 2016-07-07 |
US10512125B2 (en) | 2019-12-17 |
KR102383357B1 (ko) | 2022-04-07 |
TWI684238B (zh) | 2020-02-01 |
TW201635424A (zh) | 2016-10-01 |
KR20160084803A (ko) | 2016-07-14 |
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