JP2019176032A - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Abstract
Description
[プラズマ処理装置の構成]
図1は、一実施形態に係るプラズマ処理装置の構成を示す概略断面図である。プラズマ処理装置100は、気密に構成され、電気的に接地電位とされた処理容器1を有している。この処理容器1は、円筒状とされ、例えばアルミニウム等から構成されている。処理容器1は、プラズマが生成される処理空間を画成する。処理容器1内には、被処理体(work-piece)である半導体ウエハ(以下、単に「ウエハ」という。)Wを水平に支持する載置台2が設けられている。載置台2は、基材(ベース)2a及び静電チャック(ESC:Electrostatic chuck)6を含んで構成されている。基材2aは、導電性の金属、例えばアルミニウム等で構成されており、下部電極としての機能を有する。静電チャック6は、ウエハWを静電吸着するための機能を有する。載置台2は、支持台4に支持されている。支持台4は、例えば石英等からなる支持部材3に支持されている。また、載置台2の上方の外周には、例えば単結晶シリコンで形成されたフォーカスリング5が設けられている。さらに、処理容器1内には、載置台2及び支持台4の周囲を囲むように、例えば石英等からなる円筒状の内壁部材3aが設けられている。
次に、図2を参照して、載置台2の要部構成について説明する。図2は、一実施形態に係る載置台2の要部構成を示す概略断面図である。
図6及び図7を用いて、冷媒流路2dを通流する冷媒の流れ方向に対して90度よりも大きい角度θで傾斜するように導入流路2bを冷媒流路2dに接続したことよる冷媒の流速分布の変化を説明する。図6は、角度θと、冷媒流路2dの内壁のうち、接続部分2gに対向する領域と他の領域との間で発生する冷媒の流速の差との関係をシミュレーションするためのモデルの一例を示す図である。図7は、角度θと、冷媒流路2dのうち、内壁の接続部分2gに対向する領域と他の領域との間で発生する冷媒の流速の差との関係のシミュレーション結果の一例を示す図である。図7は、図6に示すモデルを用いたシミュレーションにより得られたものである。
2a 基材
2b 導入流路
2d 冷媒流路
2e 接続部分
6 静電チャック
6e 載置面
100 プラズマ処理装置
W ウエハ(被処理体)
Claims (3)
- プラズマ処理の対象となる被処理体が載置される載置面を有する載置台と、
前記載置台の載置面に沿って前記載置台の内部に形成された冷媒流路と、
前記冷媒流路に前記載置台の載置面に対する裏面側から接続され、前記冷媒流路に冷媒を導入する導入流路と、
を有し、
前記導入流路は、当該導入流路の延伸方向が前記冷媒流路を通流する冷媒の流れ方向に対して90度よりも大きい角度で傾斜するように前記載置台の載置面に対する裏面側から延伸し、前記冷媒流路に接続されることを特徴とするプラズマ処理装置。 - 前記角度は、135度以上で且つ180度以下の範囲内であることを特徴とする請求項1に記載のプラズマ処理装置。
- 前記導入流路は、当該導入流路の終端部の延伸方向が前記冷媒流路を通流する冷媒の流れ方向に対して90度よりも大きい角度で傾斜するように前記載置台の載置面に対する裏面側から螺旋状に延伸し、前記冷媒流路に接続されることを特徴とする請求項1又は2に記載のプラズマ処理装置。
Priority Applications (3)
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JP2018063605A JP7066479B2 (ja) | 2018-03-29 | 2018-03-29 | プラズマ処理装置 |
US16/367,588 US11133203B2 (en) | 2018-03-29 | 2019-03-28 | Plasma processing apparatus |
KR1020190036117A KR102661830B1 (ko) | 2018-03-29 | 2019-03-28 | 플라즈마 처리 장치 |
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JP2018063605A JP7066479B2 (ja) | 2018-03-29 | 2018-03-29 | プラズマ処理装置 |
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JP2019176032A true JP2019176032A (ja) | 2019-10-10 |
JP7066479B2 JP7066479B2 (ja) | 2022-05-13 |
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JP (1) | JP7066479B2 (ja) |
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Cited By (1)
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JP7364822B1 (ja) | 2022-09-27 | 2023-10-18 | 日本碍子株式会社 | ウエハ載置台 |
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JP2019176030A (ja) * | 2018-03-29 | 2019-10-10 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US11594401B2 (en) | 2020-02-25 | 2023-02-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure |
Citations (1)
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JP2016082206A (ja) * | 2014-10-22 | 2016-05-16 | 新光電気工業株式会社 | 静電チャック及びその静電チャックに使用されるベース部材 |
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JP2006261541A (ja) | 2005-03-18 | 2006-09-28 | Tokyo Electron Ltd | 基板載置台、基板処理装置および基板処理方法 |
DE102005049598B4 (de) | 2005-10-17 | 2017-10-19 | Att Advanced Temperature Test Systems Gmbh | Hybrid Chuck |
JP2011151055A (ja) | 2010-01-19 | 2011-08-04 | Tokyo Electron Ltd | 温度測定方法及び基板処理装置 |
JP5863582B2 (ja) | 2012-07-02 | 2016-02-16 | 東京エレクトロン株式会社 | プラズマ処理装置、及び温度制御方法 |
JP5980147B2 (ja) * | 2013-03-08 | 2016-08-31 | 日本発條株式会社 | 基板支持装置 |
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JP2016082206A (ja) * | 2014-10-22 | 2016-05-16 | 新光電気工業株式会社 | 静電チャック及びその静電チャックに使用されるベース部材 |
Cited By (2)
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JP7364822B1 (ja) | 2022-09-27 | 2023-10-18 | 日本碍子株式会社 | ウエハ載置台 |
WO2024069742A1 (ja) * | 2022-09-27 | 2024-04-04 | 日本碍子株式会社 | ウエハ載置台 |
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US11133203B2 (en) | 2021-09-28 |
KR102661830B1 (ko) | 2024-04-30 |
KR20190114870A (ko) | 2019-10-10 |
JP7066479B2 (ja) | 2022-05-13 |
US20190304815A1 (en) | 2019-10-03 |
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