JP2016100407A5 - - Google Patents

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Publication number
JP2016100407A5
JP2016100407A5 JP2014234724A JP2014234724A JP2016100407A5 JP 2016100407 A5 JP2016100407 A5 JP 2016100407A5 JP 2014234724 A JP2014234724 A JP 2014234724A JP 2014234724 A JP2014234724 A JP 2014234724A JP 2016100407 A5 JP2016100407 A5 JP 2016100407A5
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JP
Japan
Prior art keywords
distance
focus ring
measurement
sensor
consumption amount
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JP2014234724A
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English (en)
Japanese (ja)
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JP6383647B2 (ja
JP2016100407A (ja
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Priority to JP2014234724A priority Critical patent/JP6383647B2/ja
Priority claimed from JP2014234724A external-priority patent/JP6383647B2/ja
Priority to US14/941,925 priority patent/US10186402B2/en
Priority to TW104137809A priority patent/TWI677007B/zh
Priority to KR1020150161485A priority patent/KR102422345B1/ko
Publication of JP2016100407A publication Critical patent/JP2016100407A/ja
Publication of JP2016100407A5 publication Critical patent/JP2016100407A5/ja
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Publication of JP6383647B2 publication Critical patent/JP6383647B2/ja
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JP2014234724A 2014-11-19 2014-11-19 測定システムおよび測定方法 Active JP6383647B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014234724A JP6383647B2 (ja) 2014-11-19 2014-11-19 測定システムおよび測定方法
US14/941,925 US10186402B2 (en) 2014-11-19 2015-11-16 Measurement system and measurement method
TW104137809A TWI677007B (zh) 2014-11-19 2015-11-17 測定系統及測定方法
KR1020150161485A KR102422345B1 (ko) 2014-11-19 2015-11-18 측정 시스템 및 측정 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014234724A JP6383647B2 (ja) 2014-11-19 2014-11-19 測定システムおよび測定方法

Publications (3)

Publication Number Publication Date
JP2016100407A JP2016100407A (ja) 2016-05-30
JP2016100407A5 true JP2016100407A5 (enExample) 2017-09-21
JP6383647B2 JP6383647B2 (ja) 2018-08-29

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JP2014234724A Active JP6383647B2 (ja) 2014-11-19 2014-11-19 測定システムおよび測定方法

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US (1) US10186402B2 (enExample)
JP (1) JP6383647B2 (enExample)
KR (1) KR102422345B1 (enExample)
TW (1) TWI677007B (enExample)

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KR102147775B1 (ko) * 2019-03-11 2020-08-25 (주)드림솔 에지링 측정 장치
US11913777B2 (en) * 2019-06-11 2024-02-27 Applied Materials, Inc. Detector for process kit ring wear
KR102689653B1 (ko) * 2019-06-26 2024-07-31 삼성전자주식회사 센서 모듈 및 이를 구비하는 식각 장치
CN120663299A (zh) 2019-07-26 2025-09-19 朗姆研究公司 用于自动化晶片搬运机械手教导与健康检查的整合适应性定位系统及例程
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