JP2013214723A5 - - Google Patents

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Publication number
JP2013214723A5
JP2013214723A5 JP2013014548A JP2013014548A JP2013214723A5 JP 2013214723 A5 JP2013214723 A5 JP 2013214723A5 JP 2013014548 A JP2013014548 A JP 2013014548A JP 2013014548 A JP2013014548 A JP 2013014548A JP 2013214723 A5 JP2013214723 A5 JP 2013214723A5
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JP
Japan
Prior art keywords
substrate
holding member
state
detecting
determination
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JP2013014548A
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English (en)
Japanese (ja)
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JP6185722B2 (ja
JP2013214723A (ja
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Priority to JP2013014548A priority Critical patent/JP6185722B2/ja
Priority claimed from JP2013014548A external-priority patent/JP6185722B2/ja
Priority to TW102106036A priority patent/TWI611491B/zh
Priority to US13/788,896 priority patent/US9558976B2/en
Publication of JP2013214723A publication Critical patent/JP2013214723A/ja
Publication of JP2013214723A5 publication Critical patent/JP2013214723A5/ja
Application granted granted Critical
Publication of JP6185722B2 publication Critical patent/JP6185722B2/ja
Active legal-status Critical Current
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JP2013014548A 2012-03-08 2013-01-29 基板処理装置、基板移載方法及び半導体装置の製造方法並びに状態検知プログラム Active JP6185722B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013014548A JP6185722B2 (ja) 2012-03-08 2013-01-29 基板処理装置、基板移載方法及び半導体装置の製造方法並びに状態検知プログラム
TW102106036A TWI611491B (zh) 2012-03-08 2013-02-21 基板處理裝置、基板移載方法及半導體裝置的製造方法以及狀態檢測程式
US13/788,896 US9558976B2 (en) 2012-03-08 2013-03-07 Substrate processing apparatus, method of transferring substrate, method of manufacturing semiconductor device, and state detecting program

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012052046 2012-03-08
JP2012052046 2012-03-08
JP2013014548A JP6185722B2 (ja) 2012-03-08 2013-01-29 基板処理装置、基板移載方法及び半導体装置の製造方法並びに状態検知プログラム

Publications (3)

Publication Number Publication Date
JP2013214723A JP2013214723A (ja) 2013-10-17
JP2013214723A5 true JP2013214723A5 (enExample) 2016-03-10
JP6185722B2 JP6185722B2 (ja) 2017-08-23

Family

ID=49114791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013014548A Active JP6185722B2 (ja) 2012-03-08 2013-01-29 基板処理装置、基板移載方法及び半導体装置の製造方法並びに状態検知プログラム

Country Status (3)

Country Link
US (1) US9558976B2 (enExample)
JP (1) JP6185722B2 (enExample)
TW (1) TWI611491B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010041562A1 (ja) * 2008-10-07 2010-04-15 川崎重工業株式会社 基板搬送ロボットおよびシステム
JP6098217B2 (ja) * 2013-02-20 2017-03-22 株式会社村田製作所 回路基板およびその製造方法
CN107240564B (zh) 2016-03-29 2021-01-05 株式会社国际电气 处理装置、装置管理控制器、以及装置管理方法
JP6645993B2 (ja) 2016-03-29 2020-02-14 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 処理装置、装置管理コントローラ、及びプログラム並びに半導体装置の製造方法
CN105789082B (zh) * 2016-05-18 2018-04-06 上海柏凌电子科技有限公司 一种硅片隐裂检测系统
JP6610518B2 (ja) * 2016-11-30 2019-11-27 株式会社ダイフク 検査装置
TWI618165B (zh) * 2016-12-28 2018-03-11 中美矽晶製品股份有限公司 晶片檢測裝置及其檢測方法
JP6794880B2 (ja) * 2017-03-14 2020-12-02 東京エレクトロン株式会社 縦型熱処理装置及び縦型熱処理装置の運転方法
CN110945638B (zh) * 2017-07-28 2023-04-04 株式会社国际电气 半导体器件的制造方法、基板处理装置及记录介质
JP7336877B2 (ja) * 2019-05-21 2023-09-01 東京エレクトロン株式会社 基板処理装置および基板処理方法
CN112864035B (zh) * 2020-12-28 2024-07-09 天津爱旭太阳能科技有限公司 一种太阳能电池片自动下料机及其控制方法
CN117316861B8 (zh) * 2023-10-19 2025-09-23 同心县京南惠方农林科技有限公司 一种晶圆翻转机构

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5409348A (en) * 1992-05-15 1995-04-25 Tokyo Electron Limited Substrate transfer method
JP3100252B2 (ja) * 1992-05-26 2000-10-16 東京エレクトロン株式会社 被処理体用ボート及びそれを用いた被処理体の移し換え方法ならびに熱処理装置
KR100923263B1 (ko) * 2003-09-25 2009-10-23 가부시키가이샤 히다치 고쿠사이 덴키 기판 처리 장치, 반도체 디바이스의 제조 방법 및 기판의 이동 적재 방법
JP2005142244A (ja) 2003-11-05 2005-06-02 Hitachi Kokusai Electric Inc 基板処理装置
JP2007201417A (ja) * 2005-12-28 2007-08-09 Tokyo Electron Ltd 熱処理用ボート及び縦型熱処理装置
JP5131094B2 (ja) * 2008-08-29 2013-01-30 東京エレクトロン株式会社 熱処理装置及び熱処理方法並びに記憶媒体
JP5356956B2 (ja) * 2009-09-09 2013-12-04 株式会社日立国際電気 基板処理装置、基板処理方法および半導体装置の製造方法

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