JP2015534283A5 - - Google Patents

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Publication number
JP2015534283A5
JP2015534283A5 JP2015539628A JP2015539628A JP2015534283A5 JP 2015534283 A5 JP2015534283 A5 JP 2015534283A5 JP 2015539628 A JP2015539628 A JP 2015539628A JP 2015539628 A JP2015539628 A JP 2015539628A JP 2015534283 A5 JP2015534283 A5 JP 2015534283A5
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JP
Japan
Prior art keywords
gas
injection device
process gas
adjustable
substrate
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JP2015539628A
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English (en)
Japanese (ja)
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JP6281958B2 (ja
JP2015534283A (ja
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Priority claimed from US14/047,047 external-priority patent/US20140137801A1/en
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Publication of JP2015534283A publication Critical patent/JP2015534283A/ja
Publication of JP2015534283A5 publication Critical patent/JP2015534283A5/ja
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JP2015539628A 2012-10-26 2013-10-08 カスタマイズ可能な流れの注入を伴うエピタキシャルチャンバ Active JP6281958B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261719009P 2012-10-26 2012-10-26
US61/719,009 2012-10-26
US14/047,047 2013-10-07
US14/047,047 US20140137801A1 (en) 2012-10-26 2013-10-07 Epitaxial chamber with customizable flow injection
PCT/US2013/063899 WO2014066033A1 (en) 2012-10-26 2013-10-08 Epitaxial chamber with customizable flow injection

Publications (3)

Publication Number Publication Date
JP2015534283A JP2015534283A (ja) 2015-11-26
JP2015534283A5 true JP2015534283A5 (enExample) 2016-12-01
JP6281958B2 JP6281958B2 (ja) 2018-02-21

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JP2015539628A Active JP6281958B2 (ja) 2012-10-26 2013-10-08 カスタマイズ可能な流れの注入を伴うエピタキシャルチャンバ

Country Status (7)

Country Link
US (2) US20140137801A1 (enExample)
JP (1) JP6281958B2 (enExample)
KR (1) KR102135229B1 (enExample)
CN (1) CN104756231B (enExample)
SG (2) SG11201502761RA (enExample)
TW (1) TWI628729B (enExample)
WO (1) WO2014066033A1 (enExample)

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US11469079B2 (en) * 2017-03-14 2022-10-11 Lam Research Corporation Ultrahigh selective nitride etch to form FinFET devices
US11077410B2 (en) * 2017-10-09 2021-08-03 Applied Materials, Inc. Gas injector with baffle
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JP7159986B2 (ja) * 2019-06-27 2022-10-25 株式会社Sumco エピタキシャル成長装置およびエピタキシャルウェーハの製造方法
US11032945B2 (en) * 2019-07-12 2021-06-08 Applied Materials, Inc. Heat shield assembly for an epitaxy chamber
CN111455458B (zh) * 2019-09-18 2021-11-16 北京北方华创微电子装备有限公司 外延装置及应用于外延装置的进气结构
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US12060651B2 (en) * 2021-05-11 2024-08-13 Applied Materials, Inc. Chamber architecture for epitaxial deposition and advanced epitaxial film applications
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