JP2015530587A5 - - Google Patents

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Publication number
JP2015530587A5
JP2015530587A5 JP2015534420A JP2015534420A JP2015530587A5 JP 2015530587 A5 JP2015530587 A5 JP 2015530587A5 JP 2015534420 A JP2015534420 A JP 2015534420A JP 2015534420 A JP2015534420 A JP 2015534420A JP 2015530587 A5 JP2015530587 A5 JP 2015530587A5
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JP
Japan
Prior art keywords
optical module
optical
differential interferometer
measurement
axis differential
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JP2015534420A
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English (en)
Japanese (ja)
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JP6181189B2 (ja
JP2015530587A (ja
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Priority claimed from PCT/NL2013/050691 external-priority patent/WO2014051431A1/en
Publication of JP2015530587A publication Critical patent/JP2015530587A/ja
Publication of JP2015530587A5 publication Critical patent/JP2015530587A5/ja
Application granted granted Critical
Publication of JP6181189B2 publication Critical patent/JP6181189B2/ja
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JP2015534420A 2012-09-27 2013-09-26 多軸微分干渉計 Active JP6181189B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261706171P 2012-09-27 2012-09-27
US61/706,171 2012-09-27
PCT/NL2013/050691 WO2014051431A1 (en) 2012-09-27 2013-09-26 Multi-axis differential interferometer

Publications (3)

Publication Number Publication Date
JP2015530587A JP2015530587A (ja) 2015-10-15
JP2015530587A5 true JP2015530587A5 (enExample) 2016-11-17
JP6181189B2 JP6181189B2 (ja) 2017-08-16

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Family Applications (1)

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JP2015534420A Active JP6181189B2 (ja) 2012-09-27 2013-09-26 多軸微分干渉計

Country Status (6)

Country Link
US (1) US9551563B2 (enExample)
EP (1) EP2901216B1 (enExample)
JP (1) JP6181189B2 (enExample)
NL (1) NL2011504C2 (enExample)
TW (1) TW201413217A (enExample)
WO (1) WO2014051431A1 (enExample)

Families Citing this family (4)

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US10260941B2 (en) * 2016-10-04 2019-04-16 Precitec Optronik Gmbh Chromatic confocal distance sensor
IL273651B2 (en) * 2017-10-04 2024-06-01 Asml Netherlands Bv Interferometric positioning device
CN109738160B (zh) * 2018-12-29 2020-12-29 湖北航天技术研究院总体设计所 基于激光通信系统的多光轴一致性测试装置及方法
US11761750B1 (en) 2022-02-25 2023-09-19 Utah State University Space Dynamics Laboratory Multi-environment Rayleigh interferometer

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