JP2015506834A - 反応器内の表面を補修及び／又は保護する方法 - Google Patents

反応器内の表面を補修及び／又は保護する方法 Download PDF

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Publication number
JP2015506834A
JP2015506834A JP2014554925A JP2014554925A JP2015506834A JP 2015506834 A JP2015506834 A JP 2015506834A JP 2014554925 A JP2014554925 A JP 2014554925A JP 2014554925 A JP2014554925 A JP 2014554925A JP 2015506834 A JP2015506834 A JP 2015506834A
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Prior art keywords
protective layer
reactor
layer
component
polymer composition
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Pending
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JP2014554925A
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English (en)
Japanese (ja)
Inventor
ジェイソン ウェルナー ブラッド
ジェイソン ウェルナー ブラッド
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Hemlock Semiconductor Operations LLC
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Hemlock Semiconductor Corp
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Publication of JP2015506834A publication Critical patent/JP2015506834A/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0209—Multistage baking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/50—Multilayers
    • B05D7/52—Two layers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/16—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00002—Chemical plants
    • B01J2219/00018—Construction aspects
    • B01J2219/00024—Revamping, retrofitting or modernisation of existing plants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00245—Avoiding undesirable reactions or side-effects
    • B01J2219/00272—Addition of reaction inhibitor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
    • B01J2219/0236—Metal based
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2518/00—Other type of polymers
    • B05D2518/10—Silicon-containing polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2518/00—Other type of polymers
    • B05D2518/10—Silicon-containing polymers
    • B05D2518/12—Ceramic precursors (polysiloxanes, polysilazanes)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254—After-treatment
    • B05D3/0272—After-treatment with ovens
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0486—Operating the coating or treatment in a controlled atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/005—Repairing damaged coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Silicon Polymers (AREA)
  • Ceramic Products (AREA)
  • Paints Or Removers (AREA)
JP2014554925A 2012-01-30 2013-01-28 反応器内の表面を補修及び／又は保護する方法 Pending JP2015506834A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261592037P 2012-01-30 2012-01-30
US61/592,037 2012-01-30
PCT/US2013/023412 WO2013116146A1 (fr) 2012-01-30 2013-01-28 Procédé de réparation et/ou de protection d'une surface dans un réacteur

Publications (1)

Publication Number Publication Date
JP2015506834A true JP2015506834A (ja) 2015-03-05

Family

ID=47714563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014554925A Pending JP2015506834A (ja) 2012-01-30 2013-01-28 反応器内の表面を補修及び／又は保護する方法

Country Status (8)

Country Link
US (1) US9687876B2 (fr)
EP (1) EP2809455B1 (fr)
JP (1) JP2015506834A (fr)
KR (1) KR20140125404A (fr)
CN (1) CN104136138B (fr)
MY (1) MY171572A (fr)
TW (1) TWI573845B (fr)
WO (1) WO2013116146A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020097225A (ja) * 2018-10-25 2020-06-25 ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ ポリシラザン及び炭素繊維強化ポリマーの積層板

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US9533918B2 (en) * 2011-09-30 2017-01-03 United Technologies Corporation Method for fabricating ceramic material
US9828672B2 (en) 2015-03-26 2017-11-28 Lam Research Corporation Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
JP2016204487A (ja) 2015-04-20 2016-12-08 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ 被膜形成用組成物およびそれを用いた被膜形成方法
DE102016203082A1 (de) * 2016-02-26 2017-08-31 Wacker Chemie Ag Verfahren zur Abscheidung einer In Situ-Beschichtung auf thermisch und chemisch beanspruchten Bauteilen eines Wirbelschichtreaktors zur Herstellung von hochreinem Polysilicium
CN105921390B (zh) * 2016-04-28 2018-03-06 安徽瑞联节能科技有限公司 一种防堵塞出料枪管的制造方法
CN109963645B (zh) 2016-11-23 2022-03-11 瓦克化学股份公司 用于氢化四氯化硅的方法
DE102017000528A1 (de) * 2017-01-20 2018-07-26 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co. Verfahren zur Bearbeitung einer Halteplatte, insbesondere für einen Clamp zur Waferhalterung
WO2019113351A1 (fr) 2017-12-07 2019-06-13 Lam Research Corporation Couche protectrice résistante à l'oxydation dans un conditionnement de chambre
US10760158B2 (en) 2017-12-15 2020-09-01 Lam Research Corporation Ex situ coating of chamber components for semiconductor processing
KR101952306B1 (ko) * 2018-04-06 2019-02-26 박범준 도로용 돌출 차선 조성물 및 이를 이용한 돌출 차선 시공방법
US20210340670A1 (en) * 2018-10-19 2021-11-04 Lam Research Corporation In situ protective coating of chamber components for semiconductor processing

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06293511A (ja) * 1992-06-01 1994-10-21 Hemlock Semiconductor Corp クロロシランおよび水素の反応器
JPH11130552A (ja) * 1997-10-27 1999-05-18 Japan Atom Energy Res Inst 放射線不融化によるセラミック複合材料の製造方法
JP2004262753A (ja) * 2003-03-03 2004-09-24 Hemlock Semiconductor Corp 高温のガスと接触するための装置
JP2007091587A (ja) * 2005-09-29 2007-04-12 Wacker Chemie Ag クロロシランを水素化する方法および装置
JP2008117665A (ja) * 2006-11-06 2008-05-22 Fujikura Ltd 電子基板にハンダ付けされるフラット配線用コネクタ
JP2012523963A (ja) * 2009-04-20 2012-10-11 エーイー ポリシリコン コーポレーション ケイ化物がコーティングされた金属表面を有する反応器

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JP3215407B2 (ja) 1989-07-18 2001-10-09 ヘムロツク・セミコンダクター・コーポレーシヨン 高温反応器
TW353663B (en) 1991-04-06 1999-03-01 Hoechst Ag Process for the preparation of phosphorus-containing L-amino acids, their derivatives and intermediates for this process
US5582861A (en) 1991-09-24 1996-12-10 Southwest Research Institute Method for repair of coatings on carbon - carbon composites
US5422088A (en) 1994-01-28 1995-06-06 Hemlock Semiconductor Corporation Process for hydrogenation of tetrachlorosilane
US7033561B2 (en) 2001-06-08 2006-04-25 Dow Corning Corporation Process for preparation of polycrystalline silicon
US6874713B2 (en) 2002-08-22 2005-04-05 Dow Corning Corporation Method and apparatus for improving silicon processing efficiency
CN1304638C (zh) * 2003-12-23 2007-03-14 清华大学 制备核反应堆用石墨表面抗氧化涂层材料碳化硅的方法
US7628878B2 (en) 2005-01-24 2009-12-08 Coi Ceramics, Inc. Ceramic material suitable for repair of a space vehicle component in a microgravity and vacuum environment, method of making same, and method of repairing a space vehicle component
US7935327B2 (en) 2006-08-30 2011-05-03 Hemlock Semiconductor Corporation Silicon production with a fluidized bed reactor integrated into a siemens-type process
EP2130943B1 (fr) * 2007-03-27 2019-09-11 Central Research Institute of Electric Power Industry Procédé pour empêcher la corrosion par le sulfure, élément haute température avec une résistance à la corrosion par le sulfure
US7927984B2 (en) 2008-11-05 2011-04-19 Hemlock Semiconductor Corporation Silicon production with a fluidized bed reactor utilizing tetrachlorosilane to reduce wall deposition

Patent Citations (7)

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Publication number Priority date Publication date Assignee Title
JPH06293511A (ja) * 1992-06-01 1994-10-21 Hemlock Semiconductor Corp クロロシランおよび水素の反応器
JP3781439B2 (ja) * 1992-06-01 2006-05-31 ヘムロック・セミコンダクター・コーポレーション クロロシランおよび水素の反応器
JPH11130552A (ja) * 1997-10-27 1999-05-18 Japan Atom Energy Res Inst 放射線不融化によるセラミック複合材料の製造方法
JP2004262753A (ja) * 2003-03-03 2004-09-24 Hemlock Semiconductor Corp 高温のガスと接触するための装置
JP2007091587A (ja) * 2005-09-29 2007-04-12 Wacker Chemie Ag クロロシランを水素化する方法および装置
JP2008117665A (ja) * 2006-11-06 2008-05-22 Fujikura Ltd 電子基板にハンダ付けされるフラット配線用コネクタ
JP2012523963A (ja) * 2009-04-20 2012-10-11 エーイー ポリシリコン コーポレーション ケイ化物がコーティングされた金属表面を有する反応器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020097225A (ja) * 2018-10-25 2020-06-25 ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ ポリシラザン及び炭素繊維強化ポリマーの積層板
JP7466286B2 (ja) 2018-10-25 2024-04-12 ザ・ボーイング・カンパニー ポリシラザン及び炭素繊維強化ポリマーの積層板

Also Published As

Publication number Publication date
TWI573845B (zh) 2017-03-11
CN104136138A (zh) 2014-11-05
US20150017335A1 (en) 2015-01-15
US9687876B2 (en) 2017-06-27
KR20140125404A (ko) 2014-10-28
CN104136138B (zh) 2018-03-20
WO2013116146A1 (fr) 2013-08-08
EP2809455A1 (fr) 2014-12-10
EP2809455B1 (fr) 2018-04-04
MY171572A (en) 2019-10-21
TW201350549A (zh) 2013-12-16

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