JP2015207716A5 - - Google Patents
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- Publication number
- JP2015207716A5 JP2015207716A5 JP2014088557A JP2014088557A JP2015207716A5 JP 2015207716 A5 JP2015207716 A5 JP 2015207716A5 JP 2014088557 A JP2014088557 A JP 2014088557A JP 2014088557 A JP2014088557 A JP 2014088557A JP 2015207716 A5 JP2015207716 A5 JP 2015207716A5
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- solid
- insulating member
- state imaging
- imaging device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims description 29
- 238000003384 imaging method Methods 0.000 claims description 24
- 239000012535 impurity Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims 8
- 238000005530 etching Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014088557A JP6393070B2 (ja) | 2014-04-22 | 2014-04-22 | 固体撮像装置、その製造方法およびカメラ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014088557A JP6393070B2 (ja) | 2014-04-22 | 2014-04-22 | 固体撮像装置、その製造方法およびカメラ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015207716A JP2015207716A (ja) | 2015-11-19 |
| JP2015207716A5 true JP2015207716A5 (enExample) | 2017-06-01 |
| JP6393070B2 JP6393070B2 (ja) | 2018-09-19 |
Family
ID=54604291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014088557A Active JP6393070B2 (ja) | 2014-04-22 | 2014-04-22 | 固体撮像装置、その製造方法およびカメラ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6393070B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7193907B2 (ja) * | 2017-01-23 | 2022-12-21 | キヤノン株式会社 | 固体撮像装置 |
| JP7171170B2 (ja) * | 2017-06-29 | 2022-11-15 | キヤノン株式会社 | 撮像装置、撮像システム、移動体、撮像装置の製造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3467013B2 (ja) * | 1999-12-06 | 2003-11-17 | キヤノン株式会社 | 固体撮像装置 |
| JP2001284629A (ja) * | 2000-03-29 | 2001-10-12 | Sharp Corp | 回路内蔵受光素子 |
| JP4083553B2 (ja) * | 2002-11-28 | 2008-04-30 | 松下電器産業株式会社 | 光半導体装置 |
| JP2006073736A (ja) * | 2004-09-01 | 2006-03-16 | Canon Inc | 光電変換装置、固体撮像装置及び固体撮像システム |
| JP4631723B2 (ja) * | 2006-01-27 | 2011-02-16 | ソニー株式会社 | 固体撮像装置 |
| JP5111157B2 (ja) * | 2008-02-27 | 2012-12-26 | キヤノン株式会社 | 光電変換装置及び光電変換装置を用いた撮像システム |
| JP2010212288A (ja) * | 2009-03-06 | 2010-09-24 | Renesas Electronics Corp | 撮像装置 |
| JP2010273095A (ja) * | 2009-05-21 | 2010-12-02 | Renesas Electronics Corp | 撮像装置 |
| JP2012199301A (ja) * | 2011-03-18 | 2012-10-18 | Panasonic Corp | 固体撮像装置 |
| WO2012144196A1 (ja) * | 2011-04-22 | 2012-10-26 | パナソニック株式会社 | 固体撮像装置 |
| JP5930650B2 (ja) * | 2011-10-07 | 2016-06-08 | キヤノン株式会社 | 半導体装置の製造方法 |
| JP5936364B2 (ja) * | 2012-01-18 | 2016-06-22 | キヤノン株式会社 | 撮像装置、及び撮像装置を含む撮像システム |
| JP6053505B2 (ja) * | 2012-01-18 | 2016-12-27 | キヤノン株式会社 | 固体撮像装置 |
-
2014
- 2014-04-22 JP JP2014088557A patent/JP6393070B2/ja active Active
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