JP2015204301A5 - - Google Patents
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- Publication number
- JP2015204301A5 JP2015204301A5 JP2014081239A JP2014081239A JP2015204301A5 JP 2015204301 A5 JP2015204301 A5 JP 2015204301A5 JP 2014081239 A JP2014081239 A JP 2014081239A JP 2014081239 A JP2014081239 A JP 2014081239A JP 2015204301 A5 JP2015204301 A5 JP 2015204301A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode film
- type silicon
- silicon substrate
- silicon layer
- titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 25
- 229910052710 silicon Inorganic materials 0.000 claims 25
- 239000010703 silicon Substances 0.000 claims 25
- 239000000758 substrate Substances 0.000 claims 11
- 229910018125 Al-Si Inorganic materials 0.000 claims 2
- 229910018520 Al—Si Inorganic materials 0.000 claims 2
- 229910008332 Si-Ti Inorganic materials 0.000 claims 2
- 229910006749 Si—Ti Inorganic materials 0.000 claims 2
- 230000001681 protective effect Effects 0.000 claims 2
- 229910021341 titanium silicide Inorganic materials 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014081239A JP2015204301A (ja) | 2014-04-10 | 2014-04-10 | 半導体装置および半導体装置の製造方法 |
| US14/585,456 US9755037B2 (en) | 2014-04-10 | 2014-12-30 | Semiconductor device and method of manufacturing semiconductor device |
| DE102015202123.8A DE102015202123B4 (de) | 2014-04-10 | 2015-02-06 | Halbleitervorrichtung und Verfahren zur Herstellung einer Halbleitervorrichtung |
| CN201510160872.9A CN104979179B (zh) | 2014-04-10 | 2015-04-07 | 半导体装置以及半导体装置的制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014081239A JP2015204301A (ja) | 2014-04-10 | 2014-04-10 | 半導体装置および半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015204301A JP2015204301A (ja) | 2015-11-16 |
| JP2015204301A5 true JP2015204301A5 (enExample) | 2016-08-04 |
Family
ID=54193404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014081239A Pending JP2015204301A (ja) | 2014-04-10 | 2014-04-10 | 半導体装置および半導体装置の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9755037B2 (enExample) |
| JP (1) | JP2015204301A (enExample) |
| CN (1) | CN104979179B (enExample) |
| DE (1) | DE102015202123B4 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017103404A (ja) * | 2015-12-04 | 2017-06-08 | シャープ株式会社 | 半導体装置およびその製造方法 |
| WO2017126344A1 (ja) * | 2016-01-19 | 2017-07-27 | 三菱電機株式会社 | 電力用半導体装置および電力用半導体装置を製造する方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55165673A (en) * | 1979-06-12 | 1980-12-24 | Fujitsu Ltd | Semiconductor device |
| JPS6439775A (en) * | 1987-08-06 | 1989-02-10 | Fuji Electric Co Ltd | Formation of electrode film of semiconductor device |
| JPH03183126A (ja) * | 1989-12-13 | 1991-08-09 | Kawasaki Steel Corp | 半導体装置の製造方法 |
| JP3127494B2 (ja) * | 1991-07-17 | 2001-01-22 | 株式会社デンソー | 半導体装置の電極形成方法 |
| DE69223868T2 (de) | 1991-07-17 | 1998-09-03 | Denso Corp | Verfahren zur Herstellung von Elektroden eines Halbleiterbauelements |
| JPH0864799A (ja) * | 1994-08-18 | 1996-03-08 | Toshiba Corp | 半導体チップおよびそれを用いた半導体装置の製造方法 |
| DE19734434C1 (de) * | 1997-08-08 | 1998-12-10 | Siemens Ag | Halbleiterkörper mit Rückseitenmetallisierung und Verfahren zu deren Herstellung |
| JPH11274102A (ja) * | 1998-03-25 | 1999-10-08 | Matsushita Electron Corp | 半導体装置の製造方法及びその製造装置 |
| JP3703435B2 (ja) * | 2002-02-05 | 2005-10-05 | 三菱電機株式会社 | 半導体装置 |
| US8575474B2 (en) * | 2006-03-20 | 2013-11-05 | Heracus Precious Metals North America Conshohocken LLC | Solar cell contacts containing aluminum and at least one of boron, titanium, nickel, tin, silver, gallium, zinc, indium and copper |
| JP4221012B2 (ja) | 2006-06-12 | 2009-02-12 | トヨタ自動車株式会社 | 半導体装置とその製造方法 |
| JP4967472B2 (ja) * | 2006-06-22 | 2012-07-04 | 富士電機株式会社 | 半導体装置 |
| JP5381420B2 (ja) * | 2008-07-22 | 2014-01-08 | 富士電機株式会社 | 半導体装置 |
| JP2010129585A (ja) | 2008-11-25 | 2010-06-10 | Toyota Motor Corp | 半導体装置の製造方法 |
| WO2010109572A1 (ja) * | 2009-03-23 | 2010-09-30 | トヨタ自動車株式会社 | 半導体装置 |
| JP2011049393A (ja) * | 2009-08-27 | 2011-03-10 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| JP4970530B2 (ja) * | 2009-12-28 | 2012-07-11 | 株式会社ノリタケカンパニーリミテド | 太陽電池用ペースト組成物およびその製造方法ならびに太陽電池 |
| JP5585379B2 (ja) * | 2010-10-21 | 2014-09-10 | 富士電機株式会社 | 半導体装置の製造方法およびその製造装置 |
| JP5669780B2 (ja) * | 2012-03-21 | 2015-02-18 | 三菱電機株式会社 | 半導体装置の製造方法 |
| JP5925103B2 (ja) | 2012-10-15 | 2016-05-25 | 株式会社デンソーアイティーラボラトリ | 経路探索装置、ナビゲーション装置、経路探索方法、経路探索プログラム、及びナビゲーションプログラム |
-
2014
- 2014-04-10 JP JP2014081239A patent/JP2015204301A/ja active Pending
- 2014-12-30 US US14/585,456 patent/US9755037B2/en active Active
-
2015
- 2015-02-06 DE DE102015202123.8A patent/DE102015202123B4/de active Active
- 2015-04-07 CN CN201510160872.9A patent/CN104979179B/zh active Active
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