JP2015144253A5 - - Google Patents

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Publication number
JP2015144253A5
JP2015144253A5 JP2014253287A JP2014253287A JP2015144253A5 JP 2015144253 A5 JP2015144253 A5 JP 2015144253A5 JP 2014253287 A JP2014253287 A JP 2014253287A JP 2014253287 A JP2014253287 A JP 2014253287A JP 2015144253 A5 JP2015144253 A5 JP 2015144253A5
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JP
Japan
Prior art keywords
cleaning
substrate
flow path
supply line
fluid flow
Prior art date
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Application number
JP2014253287A
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English (en)
Japanese (ja)
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JP2015144253A (ja
JP6205341B2 (ja
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Priority to JP2014253287A priority Critical patent/JP6205341B2/ja
Priority claimed from JP2014253287A external-priority patent/JP6205341B2/ja
Publication of JP2015144253A publication Critical patent/JP2015144253A/ja
Publication of JP2015144253A5 publication Critical patent/JP2015144253A5/ja
Application granted granted Critical
Publication of JP6205341B2 publication Critical patent/JP6205341B2/ja
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JP2014253287A 2013-12-25 2014-12-15 基板洗浄装置および基板処理装置 Active JP6205341B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014253287A JP6205341B2 (ja) 2013-12-25 2014-12-15 基板洗浄装置および基板処理装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013267679 2013-12-25
JP2013267679 2013-12-25
JP2014253287A JP6205341B2 (ja) 2013-12-25 2014-12-15 基板洗浄装置および基板処理装置

Publications (3)

Publication Number Publication Date
JP2015144253A JP2015144253A (ja) 2015-08-06
JP2015144253A5 true JP2015144253A5 (enExample) 2017-07-20
JP6205341B2 JP6205341B2 (ja) 2017-09-27

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ID=53400831

Family Applications (1)

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JP2014253287A Active JP6205341B2 (ja) 2013-12-25 2014-12-15 基板洗浄装置および基板処理装置

Country Status (3)

Country Link
US (1) US9466512B2 (enExample)
JP (1) JP6205341B2 (enExample)
KR (3) KR20150075357A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6543534B2 (ja) 2015-08-26 2019-07-10 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6684191B2 (ja) * 2016-09-05 2020-04-22 株式会社Ｓｃｒｅｅｎホールディングス 基板洗浄装置およびそれを備える基板処理装置
JP2018049926A (ja) * 2016-09-21 2018-03-29 株式会社Ｓｃｒｅｅｎホールディングス ブラシ収納容器、洗浄ブラシを収納したブラシ収納容器、および基板処理装置
JP6920849B2 (ja) * 2017-03-27 2021-08-18 株式会社荏原製作所 基板処理方法および装置
EP3396707B1 (en) * 2017-04-28 2021-11-03 Ebara Corporation Apparatus and method for cleaning a back surface of a substrate
US10651057B2 (en) 2017-05-01 2020-05-12 Ebara Corporation Apparatus and method for cleaning a back surface of a substrate
KR102686065B1 (ko) * 2019-10-29 2024-07-17 주식회사 케이씨텍 기판의 다단계 세정 장치
JP2024069889A (ja) * 2022-11-10 2024-05-22 株式会社荏原製作所 基板洗浄装置、および基板洗浄方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3114156B2 (ja) 1994-06-28 2000-12-04 株式会社荏原製作所 洗浄方法および装置
US5471726A (en) * 1994-11-28 1995-12-05 Kaiser; Richard A. Buffing pad cleaning apparatus
DE19544328B4 (de) * 1994-11-29 2014-03-20 Ebara Corp. Poliervorrichtung
TW316995B (enExample) * 1995-01-19 1997-10-01 Tokyo Electron Co Ltd
JPH08238463A (ja) * 1995-03-03 1996-09-17 Ebara Corp 洗浄方法及び洗浄装置
JP3447869B2 (ja) * 1995-09-20 2003-09-16 株式会社荏原製作所 洗浄方法及び装置
US5778480A (en) * 1995-10-10 1998-07-14 Nittinger; Susan R. Dental hygienist's device
JPH10109074A (ja) 1996-10-02 1998-04-28 Ebara Corp 洗浄部材の洗浄方法及び装置
JP3420046B2 (ja) * 1996-11-19 2003-06-23 東京エレクトロン株式会社 洗浄装置
JPH11219930A (ja) * 1998-01-30 1999-08-10 Ebara Corp 洗浄装置
JP4127926B2 (ja) * 1999-04-08 2008-07-30 株式会社荏原製作所 ポリッシング方法
JP2002052370A (ja) * 2000-08-09 2002-02-19 Ebara Corp 基板洗浄装置
TW495416B (en) * 2000-10-24 2002-07-21 Ebara Corp Polishing apparatus
JP3865602B2 (ja) * 2001-06-18 2007-01-10 大日本スクリーン製造株式会社 基板洗浄装置
JP4090247B2 (ja) * 2002-02-12 2008-05-28 株式会社荏原製作所 基板処理装置
JP4033709B2 (ja) * 2002-05-17 2008-01-16 大日本スクリーン製造株式会社 基板洗浄方法及びその装置
JP4255702B2 (ja) * 2003-01-28 2009-04-15 株式会社荏原製作所 基板処理装置及び方法
JP4540981B2 (ja) * 2003-12-25 2010-09-08 株式会社荏原製作所 めっき方法
US7736474B2 (en) * 2004-01-29 2010-06-15 Ebara Corporation Plating apparatus and plating method
JP5009101B2 (ja) * 2006-10-06 2012-08-22 株式会社荏原製作所 基板研磨装置
US7828001B2 (en) * 2007-01-23 2010-11-09 Lamb Douglas R Pad washing system with splash guard
US8893734B2 (en) * 2011-05-26 2014-11-25 Lake Country Manufacturing, Inc. Buffing pad washer for use with multiple types of power drivers

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