JP2015121823A5 - - Google Patents

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Publication number
JP2015121823A5
JP2015121823A5 JP2015052908A JP2015052908A JP2015121823A5 JP 2015121823 A5 JP2015121823 A5 JP 2015121823A5 JP 2015052908 A JP2015052908 A JP 2015052908A JP 2015052908 A JP2015052908 A JP 2015052908A JP 2015121823 A5 JP2015121823 A5 JP 2015121823A5
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JP
Japan
Prior art keywords
absorbing material
thickness
radiation absorbing
projection system
structures
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2015052908A
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English (en)
Japanese (ja)
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JP6298418B2 (ja
JP2015121823A (ja
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Publication of JP2015121823A publication Critical patent/JP2015121823A/ja
Publication of JP2015121823A5 publication Critical patent/JP2015121823A5/ja
Application granted granted Critical
Publication of JP6298418B2 publication Critical patent/JP6298418B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015052908A 2012-01-17 2015-03-17 リソグラフィマスク、リソグラフィ装置及び方法 Expired - Fee Related JP6298418B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201261587587P 2012-01-17 2012-01-17
US61/587,587 2012-01-17
US201261587941P 2012-01-18 2012-01-18
US61/587,941 2012-01-18
US201261589027P 2012-01-20 2012-01-20
US61/589,027 2012-01-20

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2013003300A Division JP2013148898A (ja) 2012-01-17 2013-01-11 リソグラフィマスク、リソグラフィ装置及び方法

Publications (3)

Publication Number Publication Date
JP2015121823A JP2015121823A (ja) 2015-07-02
JP2015121823A5 true JP2015121823A5 (enExample) 2016-01-28
JP6298418B2 JP6298418B2 (ja) 2018-03-20

Family

ID=48754783

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013003300A Pending JP2013148898A (ja) 2012-01-17 2013-01-11 リソグラフィマスク、リソグラフィ装置及び方法
JP2015052908A Expired - Fee Related JP6298418B2 (ja) 2012-01-17 2015-03-17 リソグラフィマスク、リソグラフィ装置及び方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2013003300A Pending JP2013148898A (ja) 2012-01-17 2013-01-11 リソグラフィマスク、リソグラフィ装置及び方法

Country Status (6)

Country Link
US (2) US8974989B2 (enExample)
JP (2) JP2013148898A (enExample)
KR (1) KR101538995B1 (enExample)
CN (1) CN103207516B (enExample)
NL (1) NL2010025A (enExample)
TW (1) TWI467319B (enExample)

Families Citing this family (12)

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Publication number Priority date Publication date Assignee Title
US8793626B2 (en) * 2012-03-23 2014-07-29 Texas Instruments Incorporated Computational lithography with feature upsizing
CN104570589B (zh) * 2013-10-12 2018-08-07 北大方正集团有限公司 掩模板及利用掩模板进行光刻和测量步进精度的方法
CN104635418B (zh) * 2013-11-07 2018-01-02 北大方正集团有限公司 一种掩模版及一种测量光刻机的版旋转偏差的方法
US10437157B2 (en) 2014-12-09 2019-10-08 Asml Netherlands B.V. Method and apparatus for image analysis
US10607334B2 (en) * 2014-12-09 2020-03-31 Asml Netherlands B.V. Method and apparatus for image analysis
JP2018508048A (ja) * 2015-03-12 2018-03-22 レイヴ リミテッド ライアビリティ カンパニー 間接的表面清浄化装置および方法
CN116909086A (zh) * 2017-02-25 2023-10-20 Asml荷兰有限公司 图案形成装置及其制造方法、设计方法以及计算机程序产品
CN110361936B (zh) * 2018-03-26 2021-03-12 上海微电子装备（集团）股份有限公司 掩模版厚度检测装置、存储机构、传输机构及光刻系统
US11733615B2 (en) 2019-01-03 2023-08-22 Asml Netherlands B.V. Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
CN110442172B (zh) * 2019-07-24 2021-02-19 昆明理工大学 一种基于嵌入式cps的工业危险品临时存储的实时监控装置
CN113031390B (zh) * 2021-03-15 2024-09-27 广东省大湾区集成电路与系统应用研究院 激光直写及其仿真的方法、装置
US20230280644A1 (en) * 2022-03-03 2023-09-07 International Business Machines Corporation Method of making euv mask with an absorber layer

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07199447A (ja) * 1993-12-28 1995-08-04 Sony Corp 単層ハーフトーン方式位相シフトマスク及びその作製方法
JP3178516B2 (ja) * 1997-11-05 2001-06-18 日本電気株式会社 位相シフトマスク
TW512424B (en) 2000-05-01 2002-12-01 Asml Masktools Bv Hybrid phase-shift mask
US6593041B2 (en) * 2001-07-31 2003-07-15 Intel Corporation Damascene extreme ultraviolet lithography (EUVL) photomask and method of making
JP2002268201A (ja) * 2002-03-11 2002-09-18 Dainippon Printing Co Ltd 位相シフトフォトマスク及び位相シフトフォトマスク用ブランクスの製造方法
US7029802B2 (en) 2003-06-16 2006-04-18 Taiwan Semiconductor Manufacturing Company Embedded bi-layer structure for attenuated phase shifting mask
US8252487B2 (en) 2003-12-17 2012-08-28 Asml Netherlands B.V. Device manufacturing method and mask for use therein
JP4588368B2 (ja) * 2004-06-15 2010-12-01 富士通セミコンダクター株式会社 露光計測方法及び装置、並びに半導体装置の製造方法
EP1804119A1 (en) 2005-12-27 2007-07-04 Interuniversitair Microelektronica Centrum Method for manufacturing attenuated phase- shift masks and devices obtained therefrom
JP2007271712A (ja) * 2006-03-30 2007-10-18 Toshiba Corp フォトマスク、露光装置及びパターン形成方法
JP2009122566A (ja) * 2007-11-19 2009-06-04 Dainippon Printing Co Ltd 低反射型フォトマスクブランクスおよびフォトマスク
JP2009139632A (ja) * 2007-12-06 2009-06-25 Elpida Memory Inc マスクパターン補正方法及び露光用マスク
JP5295553B2 (ja) * 2007-12-07 2013-09-18 株式会社東芝 反射型マスク
JP2009259976A (ja) * 2008-04-15 2009-11-05 Toshiba Corp 露光方法およびそれを用いた半導体デバイスの製造方法
KR100948770B1 (ko) * 2008-06-27 2010-03-24 주식회사 에스앤에스텍 블랭크 마스크, 포토마스크 및 이의 제조 방법
WO2010040696A1 (en) * 2008-10-06 2010-04-15 Asml Netherlands B.V. Lithographic focus and dose measurement using a 2-d target
JP2013003300A (ja) 2011-06-15 2013-01-07 Mitsubishi Rayon Co Ltd マイクロレンズシートの製造方法

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