JP2018119991A5 - - Google Patents

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Publication number
JP2018119991A5
JP2018119991A5 JP2018090906A JP2018090906A JP2018119991A5 JP 2018119991 A5 JP2018119991 A5 JP 2018119991A5 JP 2018090906 A JP2018090906 A JP 2018090906A JP 2018090906 A JP2018090906 A JP 2018090906A JP 2018119991 A5 JP2018119991 A5 JP 2018119991A5
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JP
Japan
Prior art keywords
measurement beam
detector
lens unit
optical interference
measuring apparatus
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Application number
JP2018090906A
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English (en)
Japanese (ja)
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JP2018119991A (ja
JP6631978B2 (ja
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Priority claimed from DE102011085599A external-priority patent/DE102011085599B3/de
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Publication of JP2018119991A5 publication Critical patent/JP2018119991A5/ja
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Publication of JP6631978B2 publication Critical patent/JP6631978B2/ja
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JP2018090906A 2011-11-02 2018-05-09 物体の光干渉測定装置および光干渉測定方法 Active JP6631978B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011085599.8 2011-11-02
DE102011085599A DE102011085599B3 (de) 2011-11-02 2011-11-02 Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012242650A Division JP2013096997A (ja) 2011-11-02 2012-11-02 物体の光干渉測定装置および光干渉測定方法

Publications (3)

Publication Number Publication Date
JP2018119991A JP2018119991A (ja) 2018-08-02
JP2018119991A5 true JP2018119991A5 (enExample) 2019-01-31
JP6631978B2 JP6631978B2 (ja) 2020-01-15

Family

ID=47137545

Family Applications (2)

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JP2012242650A Pending JP2013096997A (ja) 2011-11-02 2012-11-02 物体の光干渉測定装置および光干渉測定方法
JP2018090906A Active JP6631978B2 (ja) 2011-11-02 2018-05-09 物体の光干渉測定装置および光干渉測定方法

Family Applications Before (1)

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JP2012242650A Pending JP2013096997A (ja) 2011-11-02 2012-11-02 物体の光干渉測定装置および光干渉測定方法

Country Status (6)

Country Link
US (1) US10018460B2 (enExample)
EP (1) EP2589924B1 (enExample)
JP (2) JP2013096997A (enExample)
CN (1) CN103090786B (enExample)
DE (1) DE102011085599B3 (enExample)
SG (1) SG189672A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9829373B1 (en) * 2014-09-19 2017-11-28 The United States Of America As Represented By The Secretary Of The Army Apparatus and method for improving detection precision in laser vibrometric studies
DE102015003019A1 (de) * 2015-03-06 2016-09-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur optischen Detektion einer Bewegung in einer biologischen Probe mit räumlicher Ausdehnung
DE102018111921B4 (de) 2018-05-17 2023-11-23 Technische Universität Clausthal Kontaktloser optischer Dehnungsmesssensor
CN108548506A (zh) * 2018-05-24 2018-09-18 郑州辰维科技股份有限公司 一种利用光学标志对高精度平面进行平面度测量的方法
CN108548489A (zh) * 2018-05-24 2018-09-18 郑州辰维科技股份有限公司 一种利用光学标志对固面天线进行精度测量的方法
CN111307268B (zh) * 2020-03-11 2021-01-01 北京理工大学 激光共焦/差动共焦振动参数测量方法
JP7571616B2 (ja) * 2021-02-26 2024-10-23 セイコーエプソン株式会社 レーザー干渉計
DE102024131662B3 (de) * 2024-10-30 2025-11-13 Technische Universität Clausthal, Körperschaft des öffentlichen Rechts Vorrichtung und Verfahren zum kontaktlosen Messen einer Dehnungsänderung eines Messobjekts

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CA2007190C (en) * 1990-01-04 1998-11-24 National Research Council Of Canada Laser optical ultrasound detection
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JPH07297248A (ja) 1994-04-20 1995-11-10 Hitachi Ltd 結晶欠陥計測装置および半導体装置の製造方法
FR2750215B1 (fr) * 1996-06-25 1998-09-11 Sextant Avionique Sonde velocimetrique optique
US5883714A (en) * 1996-10-07 1999-03-16 Phase Metrics Method and apparatus for detecting defects on a disk using interferometric analysis on reflected light
JPH10227617A (ja) 1997-02-12 1998-08-25 Nikon Corp 微小線幅測定方法及び微小線幅測定装置
US6137585A (en) * 1998-05-15 2000-10-24 Laser Diagnostic Technologies, Inc. Method and apparatus for recording three-dimensional distribution of light backscattering potential in transparent and semi-transparent structures
US6320665B1 (en) * 1998-12-29 2001-11-20 Bryan Kok Ann Ngoi Acousto optic scanning laser vibrometer for determining the dynamic properties of an object
JP3245135B2 (ja) * 1999-08-26 2002-01-07 科学技術振興事業団 光計測装置
JP2001208974A (ja) * 2000-01-24 2001-08-03 Nikon Corp 共焦点型顕微鏡及び一括照明型顕微鏡
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JP4409331B2 (ja) * 2004-03-30 2010-02-03 株式会社トプコン 光画像計測装置
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DE102007010389B4 (de) * 2007-03-03 2011-03-10 Polytec Gmbh Vorrichtung zur optischen Vermessung eines Objekts
DE102007010387B4 (de) * 2007-03-03 2013-02-21 Polytec Gmbh Interferometer zur optischen Vermessung eines Objekts
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