JP2017519222A5 - - Google Patents
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- Publication number
- JP2017519222A5 JP2017519222A5 JP2017510765A JP2017510765A JP2017519222A5 JP 2017519222 A5 JP2017519222 A5 JP 2017519222A5 JP 2017510765 A JP2017510765 A JP 2017510765A JP 2017510765 A JP2017510765 A JP 2017510765A JP 2017519222 A5 JP2017519222 A5 JP 2017519222A5
- Authority
- JP
- Japan
- Prior art keywords
- gradation
- filter
- optical system
- neutralizing
- beam guiding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 24
- 230000003472 neutralizing effect Effects 0.000 claims 11
- 230000005540 biological transmission Effects 0.000 claims 8
- 230000007935 neutral effect Effects 0.000 claims 5
- 238000000034 method Methods 0.000 claims 2
- 238000010276 construction Methods 0.000 claims 1
- 238000010606 normalization Methods 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014208792.9A DE102014208792A1 (de) | 2014-05-09 | 2014-05-09 | System und Verfahren zur Analyse eines von einer Strahlführungsoptik geführten Lichtstrahls |
| DE102014208792.9 | 2014-05-09 | ||
| PCT/EP2015/060145 WO2015169937A1 (de) | 2014-05-09 | 2015-05-08 | System und verfahren zur analyse eines von einer strahlführungsoptik geführten lichtstrahls |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017519222A JP2017519222A (ja) | 2017-07-13 |
| JP2017519222A5 true JP2017519222A5 (enExample) | 2018-06-21 |
| JP6576435B2 JP6576435B2 (ja) | 2019-09-18 |
Family
ID=53267309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017510765A Active JP6576435B2 (ja) | 2014-05-09 | 2015-05-08 | ビーム誘導光学系から誘導される光線を分析するためのシステム及び方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9823119B2 (enExample) |
| EP (1) | EP3140628B9 (enExample) |
| JP (1) | JP6576435B2 (enExample) |
| DE (1) | DE102014208792A1 (enExample) |
| ES (1) | ES2961538T3 (enExample) |
| PL (1) | PL3140628T3 (enExample) |
| WO (1) | WO2015169937A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015211999A1 (de) * | 2015-06-29 | 2016-12-29 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Laserbearbeitungskopf und Laserbearbeitungsmaschine damit |
| WO2017163345A1 (ja) * | 2016-03-23 | 2017-09-28 | ギガフォトン株式会社 | 極端紫外光生成装置及び極端紫外光の重心位置の制御方法 |
| DE102017102998A1 (de) * | 2017-02-15 | 2018-02-08 | Carl Zeiss Smt Gmbh | Anordnung und Verfahren zur Charakterisierung eines transparenten Substrats |
| JP7324751B2 (ja) * | 2017-11-29 | 2023-08-10 | エーエスエムエル ネザーランズ ビー．ブイ． | レーザビームモニタリングシステム |
| EP3620763A1 (en) * | 2018-09-07 | 2020-03-11 | Boegli-Gravures S.A. | Adaptive laser-beam shaping |
| DE102018124342A1 (de) | 2018-10-02 | 2020-04-02 | Carl Zeiss Smt Gmbh | Vorrichtung und Verfahren zur Strahlwinkelmessung eines von einer Strahlführungsoptik geführten Lichtstrahls |
| DE102018124396A1 (de) * | 2018-10-02 | 2020-04-02 | Carl Zeiss Smt Gmbh | Metrologiesystem und Verfahren zur Vermessung eines Anregungs-Laserstrahls in einer EUV-Plasmaquelle |
| CN113960804B (zh) * | 2021-10-21 | 2023-08-08 | 四川大学 | 一种连续光谱色温合成装置及合成方法 |
| DE102023108855A1 (de) * | 2023-04-06 | 2024-10-10 | TRUMPF Lasersystems for Semiconductor Manufacturing SE | Beobachtungseinrichtung für ein EUV-Lichtsystem und entsprechendes EUV-Lichtsystem |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3538335A (en) * | 1968-11-27 | 1970-11-03 | Gen Electric | Light intensity controller for photosensitive pickup tubes |
| JPS5230799B2 (enExample) * | 1972-10-27 | 1977-08-10 | ||
| GB1434304A (en) * | 1973-05-16 | 1976-05-05 | Ciba Geigy Ag | Optical apparatus |
| US4037959A (en) * | 1975-12-15 | 1977-07-26 | The United States Of America As Represented By The Secretary Of The Navy | Means for real-time laser source characterization |
| FR2470397A1 (fr) * | 1979-11-21 | 1981-05-29 | Thomson Csf | Attenuateur optique a attenuation controlee |
| JPH0640023B2 (ja) * | 1986-09-25 | 1994-05-25 | 株式会社神戸製鋼所 | 光入力の位置・分散検出方法および装置 |
| US5329350A (en) | 1992-05-21 | 1994-07-12 | Photon, Inc. | Measuring laser beam parameters using non-distorting attenuation and multiple simultaneous samples |
| DE19822924C2 (de) * | 1998-05-22 | 2000-06-15 | Daimler Chrysler Ag | Verfahren und Vorrichtung zur Messung der Verteilung der Energiefeldichte eines Laserstrahls |
| US8237922B2 (en) | 2010-04-08 | 2012-08-07 | Haas Laser Technologies, Inc. | Laser beam analysis apparatus |
| DE102010053323B3 (de) * | 2010-12-02 | 2012-05-24 | Xtreme Technologies Gmbh | Verfahren zur räumlich aufgelösten Messung von Parametern in einem Querschnitt eines Strahlenbündels energiereicher Strahlung mit hoher Intensität |
| DE102012204674B4 (de) * | 2012-03-23 | 2014-11-27 | Carl Zeiss Smt Gmbh | Strahlregelungsvorrichtung für einen EUV-Beleuchtungsstrahl |
| DE102013224583A1 (de) | 2013-11-29 | 2015-06-03 | Carl Zeiss Smt Gmbh | Messanordnung zur Verwendung bei der Trajektorienbestimmung fliegender Objekte |
| DE102014201779B4 (de) | 2014-01-31 | 2016-12-15 | Carl Zeiss Smt Gmbh | Strahlpropagationskamera und Verfahren zur Lichtstrahlanalyse |
-
2014
- 2014-05-09 DE DE102014208792.9A patent/DE102014208792A1/de not_active Ceased
-
2015
- 2015-05-08 JP JP2017510765A patent/JP6576435B2/ja active Active
- 2015-05-08 EP EP15724539.0A patent/EP3140628B9/de active Active
- 2015-05-08 PL PL15724539.0T patent/PL3140628T3/pl unknown
- 2015-05-08 ES ES15724539T patent/ES2961538T3/es active Active
- 2015-05-08 WO PCT/EP2015/060145 patent/WO2015169937A1/de not_active Ceased
-
2016
- 2016-11-09 US US15/347,348 patent/US9823119B2/en active Active
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