JP2015119099A - 半導体装置の製造方法 - Google Patents
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- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000011737 fluorine Substances 0.000 claims abstract description 16
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- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 7
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- 238000005513 bias potential Methods 0.000 claims description 5
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- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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Abstract
Description
Claims (14)
- 互いに異なる誘電率を有し、且つ、交互に積層された第1の膜及び第2の膜を含む多層膜を、プラズマ処理装置の処理容器内において、マスクを介してエッチングする半導体装置の製造方法であって、
O2ガス若しくはN2ガス、及び希ガスを含む第1のガスを前記処理容器内に供給し、該第1のガスを励起させる工程と、
フルオロカーボンガス又はフルオロハイドロカーボンガスを含む第2のガスを前記処理容器内に供給し、該第2のガスを励起させる工程と、
HBrガス、フッ素含有ガス、及び、フルオロカーボンガス若しくはフルオロハイドロカーボンガスを含む第3のガスを前記処理容器内に供給し、該第3のガスを励起させる工程と、
を含むシーケンスを繰り返し実行する工程を含む、
半導体装置の製造方法。 - 前記シーケンスを繰り返し実行する工程よりも前に、HBrガス、フッ素含有ガス、及び、フルオロカーボンガス若しくはフルオロハイドロカーボンガスを含む第4のガスを前記処理容器内に供給し、該第4のガスを励起させて、前記多層膜を積層方向の途中位置までエッチングする工程を更に含み、
前記シーケンスを繰り返し実行する工程では、前記途中位置から前記多層膜が積層方向にエッチングされる、
請求項1に記載の半導体装置の製造方法。 - 前記第4のガスは、N2ガス、H2ガス及びCH4ガスのうち少なくとも何れかを更に含む、請求項2に記載の半導体装置の製造方法。
- 前記第3のガスは、N2ガス、H2ガス及びCH4ガスのうち少なくとも何れかを更に含む、請求項1〜3の何れか一項に記載の半導体装置の製造方法。
- 前記フッ素含有ガスは、NF3又はSF6である、請求項1〜4の何れか一項に記載の半導体装置の製造方法。
- 前記シーケンスを繰り返し実行する工程よりも前に、HBrガス及びフルオロカーボンガスを含む第5のガスを前記処理容器内に供給し、該第5のガスを励起させて、炭素を含む反応生成物を前記マスクの表面に堆積させる工程を更に含む、請求項1〜5の何れか一項に記載の半導体装置の製造方法。
- 前記第5のガスは、BCl3ガスを更に含む、請求項6に記載の半導体装置の製造方法。
- 前記反応生成物を前記マスクの表面に堆積させる工程においては、単位面積当たり2.55W/cm2以上の電力が前記多層膜に与えられるように前記多層膜側にバイアス電位を印加する、請求項6又は7に記載の半導体装置の製造方法。
- 前記フルオロカーボンガスは、C3F8ガス、C4F6ガス、又はC4F8ガスである、請求項1〜8の何れか一項に記載の半導体装置の製造方法。
- 前記フルオロハイドロカーボンガスは、CH2F2ガス、CH3Fガス、又はCHF3ガスである、請求項1〜9の何れか一項に記載の半導体装置の製造方法。
- 前記第1の膜は酸化シリコン膜であり、前記第2の膜は窒化シリコン膜である、請求項1〜10の何れか一項に記載の半導体装置の製造方法。
- 前記第1の膜は酸化シリコン膜であり、前記第2の膜はポリシリコン膜である、請求項1〜11の何れか一項に記載の半導体装置の製造方法。
- 前記第1の膜と前記第2の膜は、合計24層以上積層されている、請求項1〜12の何れか一項に記載の半導体装置の製造方法。
- 前記マスクは、アモルファスカーボン製である、請求項1〜13の何れか一項に記載の製造方法。
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JP2013262742A JP6267953B2 (ja) | 2013-12-19 | 2013-12-19 | 半導体装置の製造方法 |
KR1020140178468A KR102320085B1 (ko) | 2013-12-19 | 2014-12-11 | 반도체 장치의 제조 방법 |
TW103143995A TWI621176B (zh) | 2013-12-19 | 2014-12-17 | Semiconductor device manufacturing method |
US14/574,565 US9230824B2 (en) | 2013-12-19 | 2014-12-18 | Method of manufacturing semiconductor device |
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JP2017103388A (ja) * | 2015-12-03 | 2017-06-08 | 東京エレクトロン株式会社 | プラズマエッチング方法 |
JP2017168645A (ja) * | 2016-03-16 | 2017-09-21 | 東芝メモリ株式会社 | 半導体装置の製造方法 |
DE112016002660T5 (de) | 2015-06-12 | 2018-05-24 | Jtekt Corporation | Schmierfettzusammensetzung und Wälzvorrichtung für ein Fahrzeug |
JP2019029561A (ja) * | 2017-08-01 | 2019-02-21 | 東京エレクトロン株式会社 | 多層膜をエッチングする方法 |
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US9234276B2 (en) | 2013-05-31 | 2016-01-12 | Novellus Systems, Inc. | Method to obtain SiC class of films of desired composition and film properties |
US10297442B2 (en) | 2013-05-31 | 2019-05-21 | Lam Research Corporation | Remote plasma based deposition of graded or multi-layered silicon carbide film |
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DE112016002660T5 (de) | 2015-06-12 | 2018-05-24 | Jtekt Corporation | Schmierfettzusammensetzung und Wälzvorrichtung für ein Fahrzeug |
JP2017050529A (ja) * | 2015-08-12 | 2017-03-09 | セントラル硝子株式会社 | ドライエッチング方法 |
WO2017026197A1 (ja) * | 2015-08-12 | 2017-02-16 | セントラル硝子株式会社 | ドライエッチング方法 |
CN107924837A (zh) * | 2015-08-12 | 2018-04-17 | 中央硝子株式会社 | 干式蚀刻方法 |
CN107924837B (zh) * | 2015-08-12 | 2022-02-01 | 中央硝子株式会社 | 干式蚀刻方法 |
US10741406B2 (en) | 2015-08-12 | 2020-08-11 | Central Glass Company, Limited | Dry etching method |
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JP2017103388A (ja) * | 2015-12-03 | 2017-06-08 | 東京エレクトロン株式会社 | プラズマエッチング方法 |
JP2017168645A (ja) * | 2016-03-16 | 2017-09-21 | 東芝メモリ株式会社 | 半導体装置の製造方法 |
JP2019029561A (ja) * | 2017-08-01 | 2019-02-21 | 東京エレクトロン株式会社 | 多層膜をエッチングする方法 |
JPWO2019138654A1 (ja) * | 2018-10-26 | 2020-01-16 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置及びプラズマ処理方法 |
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TWI751423B (zh) * | 2018-10-26 | 2022-01-01 | 日商日立全球先端科技股份有限公司 | 電漿處理裝置及電漿處理方法 |
US11532484B2 (en) | 2018-10-26 | 2022-12-20 | Hitachi High-Tech Corporation | Plasma processing apparatus and plasma processing method |
US12074033B2 (en) | 2020-02-27 | 2024-08-27 | Hitachi High-Tech Corporation | Plasma processing method |
Also Published As
Publication number | Publication date |
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KR20150072342A (ko) | 2015-06-29 |
US20150179466A1 (en) | 2015-06-25 |
TWI621176B (zh) | 2018-04-11 |
TW201537636A (zh) | 2015-10-01 |
KR102320085B1 (ko) | 2021-11-02 |
US9230824B2 (en) | 2016-01-05 |
JP6267953B2 (ja) | 2018-01-24 |
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