JP2015099828A - 圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置 - Google Patents
圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置 Download PDFInfo
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- JP2015099828A JP2015099828A JP2013238246A JP2013238246A JP2015099828A JP 2015099828 A JP2015099828 A JP 2015099828A JP 2013238246 A JP2013238246 A JP 2013238246A JP 2013238246 A JP2013238246 A JP 2013238246A JP 2015099828 A JP2015099828 A JP 2015099828A
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- Prior art keywords
- piezoelectric
- piezoelectric element
- electrode
- ethylhexanoate
- layer
- Prior art date
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Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
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Abstract
【解決手段】第1電極60と、第1電極上に設けられた圧電体層70と、圧電体層上に設けられた第2電極80とを備えた圧電素子300において、圧電体層70は、ビスマス、バリウム、鉄、チタン及びストロンチウムを含むペロブスカイト構造を有する複合酸化物からなり、バリウムに対するストロンチウムの含有量は、5mol%以上18mol%以下である。
【選択図】図3
Description
図1は、本発明の実施形態1に係る圧電素子を具備する液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、図1の平面図であり、図3は図2のA−A′線断面図である。図1〜図3に示すように、本実施形態の流路形成基板10は、シリコン単結晶基板からなり、その一方の面には二酸化シリコンからなる弾性膜50が形成されている。
(0<x<0.40、0.05≦y≦0.18)
(Bi1−x(Ba1−ySry)x)(Fe1−xTix)O3 (1’)
(0<x<0.40、0.05≦y≦0.18)
なお、圧電体層70の厚さは限定されない。例えば、圧電体層70の厚さは3μm以下、好ましくは0.3μm〜1.5μmである。
まず、図4(a)に示すように、シリコンウェハーである流路形成基板用ウェハー110の表面に弾性膜50を構成する二酸化シリコン(SiO2)等からなる二酸化シリコン膜を熱酸化等で形成する。次いで、図4(b)に示すように、弾性膜50(二酸化シリコン膜)上に、酸化チタン等からなる密着層56を、スパッタリング法や熱酸化等で形成する。
次に、図7(c)に示すように、流路形成基板用ウェハー110の圧電素子300側に、シリコンウェハーであり複数の保護基板30となる保護基板用ウェハー130を接着剤35を介して接合した後に、流路形成基板用ウェハー110を所定の厚さに薄くする。
そして、図8(b)に示すように、流路形成基板用ウェハー110をマスク膜52を介してKOH等のアルカリ溶液を用いた異方性エッチング(ウェットエッチング)することにより、圧電素子300に対応する圧力発生室12、連通部13、インク供給路14及び連通路15等を形成する。
(実施例1)
まず、(110)に配向した単結晶シリコン(Si)基板の表面に熱酸化により膜厚1170nmの二酸化シリコン膜を形成した。次に、二酸化シリコン膜上にRFマグネトロンスパッター法により膜厚40nmのチタン膜を形成し、熱酸化することで酸化チタン膜(密着層56)を形成した。次に、酸化チタン膜上にRFマグネトロンスパッター法により膜厚100nmの白金膜(第1電極60)を形成した。
前駆体溶液として、2−エチルヘキサン酸ビスマス、2−エチルヘキサン酸鉄、2−エチルヘキサン酸マンガン、2−エチルヘキサン酸バリウム、2−エチルヘキサン酸ストロンチウム及び2−エチルヘキサン酸チタンのn−オクタン溶液を、Bi、Fe、Mn、Ba、Sr及びTiのmol比が、Bi:Fe:Mn:Ba:Sr:Ti=75.0:71.25:3.75:23.0:2.0:25.0となるように混合して調製した溶液を用いた以外は、実施例1と同様の操作を行った。これにより、Baに対するSrの含有量が8.70mol%である圧電体層70を具備する圧電素子300を得た。
前駆体溶液として、2−エチルヘキサン酸ビスマス、2−エチルヘキサン酸鉄、2−エチルヘキサン酸マンガン、2−エチルヘキサン酸バリウム、2−エチルヘキサン酸ストロンチウム及び2−エチルヘキサン酸チタンのn−オクタン溶液を、Bi、Fe、Mn、Ba、Sr及びTiのmol比が、Bi:Fe:Mn:Ba:Sr:Ti=75.0:71.25:3.75:22.5:2.5:25.0となるように混合して調製した溶液を用いた以外は、実施例1と同様の操作を行った。これにより、Baに対するSrの含有量が11.11mol%である圧電体層70を具備する圧電素子300を得た。
前駆体溶液として、2−エチルヘキサン酸ビスマス、2−エチルヘキサン酸鉄、2−エチルヘキサン酸マンガン、2−エチルヘキサン酸バリウム、2−エチルヘキサン酸ストロンチウム及び2−エチルヘキサン酸チタンのn−オクタン溶液を、Bi、Fe、Mn、Ba、Sr及びTiのmol比が、Bi:Fe:Mn:Ba:Sr:Ti=75.0:71.25:3.75:22.0:3.0:25.0となるように混合して調製した溶液を用いた以外は、実施例1と同様の操作を行った。これにより、Baに対するSrの含有量が13.63mol%である圧電体層70を具備する圧電素子300を得た。
前駆体溶液として、2−エチルヘキサン酸ビスマス、2−エチルヘキサン酸鉄、2−エチルヘキサン酸マンガン、2−エチルヘキサン酸バリウム、2−エチルヘキサン酸ストロンチウム及び2−エチルヘキサン酸チタンのn−オクタン溶液を、Bi、Fe、Mn、Ba、Sr及びTiのmol比が、Bi:Fe:Mn:Ba:Sr:Ti=75.0:71.25:3.75:21.25:3.75:25.0となるように混合して調製した溶液を用いた以外は、実施例1と同様の操作を行った。これにより、Baに対するSrの含有量が17.65mol%である圧電体層70を具備する圧電素子300を得た。
前駆体溶液として、2−エチルヘキサン酸ビスマス、2−エチルヘキサン酸鉄、2−エチルヘキサン酸マンガン、2−エチルヘキサン酸バリウム及び2−エチルヘキサン酸チタンのn−オクタン溶液を、Bi、Fe、Mn、Ba及びTiのmol比が、Bi:Fe:Mn:Ba:Ti=75.0:71.25:3.75:25.0:25.0となるように混合して調製した溶液を用いた以外は、実施例1と同様の操作を行った。これにより、Srを含有しない圧電体層70を具備する圧電素子300を得た。
前駆体溶液として、2−エチルヘキサン酸ビスマス、2−エチルヘキサン酸鉄、2−エチルヘキサン酸マンガン、2−エチルヘキサン酸ストロンチウム及び2−エチルヘキサン酸チタンのn−オクタン溶液を、Bi、Fe、Mn、Sr及びTiのmol比が、Bi:Fe:Mn:Sr:Ti=75.0:71.25:3.75:25.0:25.0となるように混合して調製した溶液を用いた以外は、実施例1と同様の操作を行った。これにより、Baを含有しない圧電体層70を具備する圧電素子300を得た。
実施例1〜5及び比較例1、2の圧電素子につき、アグザクト社製の変位測定装置(DBLI)を用い室温で、φ=500μmの電極パターンを使用し、周波数1kHzの電圧を印加して、電界誘起歪(変位量)−電圧の関係(バタフライカーブ)を求めた。これらのバタフライカーブから、到達歪から逆到達歪までの圧電体層の最大歪量をそれぞれ求めた。表1に実施例1〜5及び比較例1、2の最大歪量の測定結果をまとめて示す。また、図9に実施例3及び比較例1のバタフライカーブを示し、図10に実施例1〜5及び比較例1、2の最大歪量とSr含有量との関係を示す。また、図11に実施例1〜5及び比較例1の最大歪量とSr含有量との関係をより詳細に示す。
以上、本発明の液体噴射ヘッドの一実施形態を説明したが、本発明の基本的構成は上述したものに限定されるものではない。例えば、上述した実施形態では、流路形成基板10として、シリコン単結晶基板を例示したが、特にこれに限定されず、例えば、SOI基板、ガラス等の材料を用いるようにしてもよい。
上述した実施形態のインクジェット式記録ヘッドは、インクカートリッジ等と連通するインク流路を具備する記録ヘッドユニットの一部を構成して、インクジェット式記録装置などの液体噴射装置に搭載される。図12は、そのインクジェット式記録装置の一例を示す概略図である。
また、本発明に係る圧電素子は、優れた変位特性を示すことから、インクジェット式記録ヘッドに代表される液体噴射ヘッドに限られず、液体噴射装置、超音波センサー、圧電モーター、超音波モーター、圧電トランス、振動式ダスト除去装置、圧力−電気変換機、超音波発信機、圧力センサー、加速度センサーなどに搭載して好適に用いることができる。
また、本発明に係る圧電素子は、良好なエネルギー電気変換能力を示すことから、発電装置に搭載して好適に用いることができる。発電装置としては、圧力電気変換効果を使用した発電装置、光による電子励起(光起電力)を使用した発電装置、熱による電子励起(熱起電力)を使用した発電装置、振動を利用した発電装置などが挙げられる。
Claims (6)
- 第1電極と、前記第1電極上に設けられた圧電体層と、前記圧電体層上に設けられた第2電極とを備えた圧電素子であって、
前記圧電体層は、ビスマス、バリウム、鉄、チタン及びストロンチウムを含むペロブスカイト構造を有する複合酸化物からなり、
前記バリウムに対する前記ストロンチウムの含有量は、5mol%以上18mol%以下であることを特徴とする圧電素子。 - 請求項1に記載する圧電素子を具備することを特徴とする液体噴射ヘッド。
- 請求項2に記載する液体噴射ヘッドと、記録媒体を搬送する搬送部と、前記液体噴射ヘッドから噴射される液体とを具備することを特徴とする液体噴射装置。
- 請求項1に記載する圧電素子と、前記圧電素子を駆動することによって生じる変位を外部に伝える振動部と、発生した圧力波を外部に伝える整合層とを具備することを特徴とする超音波センサー。
- 請求項1に記載する圧電素子と、前記圧電素子を配した振動体と、前記振動体と接触する移動体とを少なくとも具備することを特徴とする圧電モーター。
- 請求項1に記載する圧電素子と、前記圧電素子により生じた電荷を前記第1電極及び前記第2電極の少なくとも一方から取り出す取り出し電極とを具備することを特徴とする発電装置。
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US14/541,828 US9312791B2 (en) | 2013-11-18 | 2014-11-14 | Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generating apparatus |
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US9425379B2 (en) * | 2014-03-24 | 2016-08-23 | Seiko Epson Corporation | Piezoelectric element and piezoelectric element application device |
CN107530006A (zh) * | 2015-04-17 | 2018-01-02 | 太阳诱电株式会社 | 振动波形传感器和波形分析装置 |
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