JP2018142599A - 圧電組成物及び圧電素子 - Google Patents
圧電組成物及び圧電素子 Download PDFInfo
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- JP2018142599A JP2018142599A JP2017035353A JP2017035353A JP2018142599A JP 2018142599 A JP2018142599 A JP 2018142599A JP 2017035353 A JP2017035353 A JP 2017035353A JP 2017035353 A JP2017035353 A JP 2017035353A JP 2018142599 A JP2018142599 A JP 2018142599A
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- piezoelectric
- piezoelectric composition
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- 239000000203 mixture Substances 0.000 title claims abstract description 113
- 239000000126 substance Substances 0.000 claims abstract description 32
- 229910002367 SrTiO Inorganic materials 0.000 abstract description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 18
- 230000010287 polarization Effects 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 14
- 239000000843 powder Substances 0.000 description 12
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- 229910052797 bismuth Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
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- 239000002002 slurry Substances 0.000 description 5
- 239000007858 starting material Substances 0.000 description 5
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- 229910002113 barium titanate Inorganic materials 0.000 description 4
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
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- 238000005245 sintering Methods 0.000 description 4
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- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 3
- 238000001354 calcination Methods 0.000 description 3
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- IWOUKMZUPDVPGQ-UHFFFAOYSA-N barium nitrate Chemical compound [Ba+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O IWOUKMZUPDVPGQ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910000416 bismuth oxide Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 2
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- 229910044991 metal oxide Inorganic materials 0.000 description 2
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- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000018 strontium carbonate Inorganic materials 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 229910002902 BiFeO3 Inorganic materials 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
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- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
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- 150000001552 barium Chemical class 0.000 description 1
- ITHZDDVSAWDQPZ-UHFFFAOYSA-L barium acetate Chemical compound [Ba+2].CC([O-])=O.CC([O-])=O ITHZDDVSAWDQPZ-UHFFFAOYSA-L 0.000 description 1
- GXUARMXARIJAFV-UHFFFAOYSA-L barium oxalate Chemical compound [Ba+2].[O-]C(=O)C([O-])=O GXUARMXARIJAFV-UHFFFAOYSA-L 0.000 description 1
- 229940094800 barium oxalate Drugs 0.000 description 1
- 150000001621 bismuth Chemical class 0.000 description 1
- SKKNACBBJGLYJD-UHFFFAOYSA-N bismuth magnesium Chemical compound [Mg].[Bi] SKKNACBBJGLYJD-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- RXPAJWPEYBDXOG-UHFFFAOYSA-N hydron;methyl 4-methoxypyridine-2-carboxylate;chloride Chemical compound Cl.COC(=O)C1=CC(OC)=CC=N1 RXPAJWPEYBDXOG-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002505 iron Chemical class 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 150000003437 strontium Chemical class 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- -1 water and ethanol Chemical compound 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Abstract
Description
x[BimFeO3]−y[BamTiO3]−z[SrmTiO3] (1)
[式(1)中、0.5≦x≦0.8、0.02≦y≦0.4、0.02≦z≦0.2、x+y+z=1、0.96≦m≦1.04。]
x[BimFeO3]−y[BamTiO3]−z[SrmTiO3] (1)
[式(1)中、0.5≦x≦0.8、0.02≦y≦0.4、0.02≦z≦0.2、x+y+z=1、0.96≦m≦1.04。]
(BixBaySrz)m(FexTi(y+z))O3 (2)
[式(2)中、0.5≦x≦0.8、0.02≦y≦0.4、0.02≦z≦0.2、x+y+z=1、0.96≦m≦1.04。]
以下に示す方法により、圧電素子を作製した。圧電組成物の原料として、酸化ビスマス(Bi2O3)、酸化鉄(Fe2O3)、炭酸バリウム(BaCO3)、炭酸ストロンチウム(SrCO3)、酸化チタン(TiO2)の各粉末原料を準備した。本焼成後の焼結体が下記化学式(3)で表される圧電組成物となるように、これら各粉末原料を秤量して配合して、混合原料を調製した。
x[BimFeO3]−y[BamTiO3]−z[SrmTiO3] (3)
上記化学式(3)において、x=0.58、y=0.4、z=0.02、m=1.00である。
実施例1の焼結体の組成を蛍光X線分析法(XRF法)法によって分析した。その結果、実施例1の焼結体の組成は、上記化学式(3)で表されることが確認された。
d33メータを用いて、仮電極を形成する前の実施例1の焼結体(圧電組成物)のd33(単位:pC/N)を測定した。上記d33メータは、JIS R 1696に準拠したベルリンコート法により、d33を測定する。ベルリンコート法では、圧電組成物に振動を与えたときの圧電正効果を利用してd33を測定する。そのため、ベルリンコート法では、圧電組成物に電界を印加したときの圧電逆効果を利用する測定方法とは異なり、電歪の影響がなく、圧電組成物の本来のd33が得られる。実施例1のd33を表1に示す。d33が150pC/N以上である場合、良好である。
実施例1の圧電素子における電極4aと電極4bとの間に直流電圧を印加して、電極4aと電極4bとの間の比抵抗(単位:Ω・cm)を測定した。直流電圧は、40Vであった。実施例1の比抵抗を表1に示す。比抵抗が1.0×109Ω・cm以上である場合、良好である。
上記化学式(3)におけるx、y、z及びmが下記表1又は2に示す値となるように、粉末原料の配合比を変えて混合原料を調製したこと以外は、実施例1と同様の方法により、実施例2〜11及び比較例1〜6の圧電素子をそれぞれ個別に作製した。実施例2〜11及び比較例1〜6それぞれの焼結体の組成を、実施例1と同様の方法により分析した。その結果、実施例2〜11及び比較例1〜6それぞれの焼結体の組成は、表1又は2に示される組成であることが確認された。実施例1と同様の方法により、実施例2〜11及び比較例1〜6のd33をそれぞれ個別に測定した。実施例2〜11及び比較例1〜6のd33を表1又は2に示す。実施例1と同様の方法により、実施例2〜11及び比較例1〜6の比抵抗をそれぞれ個別に測定した。実施例2〜11及び比較例1〜6の比抵抗を表1又は2に示す。なお、比較例5では、分極処理を施した時に焼結体が壊れてしまったため、d33及び比抵抗は測定しなかった。
Claims (2)
- 下記化学式(1)で表される圧電組成物。
x[BimFeO3]−y[BamTiO3]−z[SrmTiO3] (1)
[式(1)中、0.5≦x≦0.8、0.02≦y≦0.4、0.02≦z≦0.2、x+y+z=1、0.96≦m≦1.04。] - 請求項1に記載の圧電組成物を備える圧電素子。
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