JP2015076459A5 - - Google Patents

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Publication number
JP2015076459A5
JP2015076459A5 JP2013210656A JP2013210656A JP2015076459A5 JP 2015076459 A5 JP2015076459 A5 JP 2015076459A5 JP 2013210656 A JP2013210656 A JP 2013210656A JP 2013210656 A JP2013210656 A JP 2013210656A JP 2015076459 A5 JP2015076459 A5 JP 2015076459A5
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JP
Japan
Prior art keywords
gas
dry etching
etching method
layer
plasma
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JP2013210656A
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English (en)
Japanese (ja)
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JP2015076459A (ja
JP6138653B2 (ja
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Priority claimed from JP2013210656A external-priority patent/JP6138653B2/ja
Priority to JP2013210656A priority Critical patent/JP6138653B2/ja
Application filed filed Critical
Priority to TW103122642A priority patent/TWI667707B/zh
Priority to KR20140091132A priority patent/KR20150041567A/ko
Priority to US14/447,681 priority patent/US20150099368A1/en
Publication of JP2015076459A publication Critical patent/JP2015076459A/ja
Priority to US15/196,284 priority patent/US11018014B2/en
Priority to KR1020160102185A priority patent/KR101826642B1/ko
Publication of JP2015076459A5 publication Critical patent/JP2015076459A5/ja
Publication of JP6138653B2 publication Critical patent/JP6138653B2/ja
Application granted granted Critical
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JP2013210656A 2013-10-08 2013-10-08 ドライエッチング方法 Active JP6138653B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2013210656A JP6138653B2 (ja) 2013-10-08 2013-10-08 ドライエッチング方法
TW103122642A TWI667707B (zh) 2013-10-08 2014-07-01 Dry etching method
KR20140091132A KR20150041567A (ko) 2013-10-08 2014-07-18 드라이 에칭 방법
US14/447,681 US20150099368A1 (en) 2013-10-08 2014-07-31 Dry etching method
US15/196,284 US11018014B2 (en) 2013-10-08 2016-06-29 Dry etching method
KR1020160102185A KR101826642B1 (ko) 2013-10-08 2016-08-11 드라이 에칭 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013210656A JP6138653B2 (ja) 2013-10-08 2013-10-08 ドライエッチング方法

Publications (3)

Publication Number Publication Date
JP2015076459A JP2015076459A (ja) 2015-04-20
JP2015076459A5 true JP2015076459A5 (enExample) 2016-08-25
JP6138653B2 JP6138653B2 (ja) 2017-05-31

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Family Applications (1)

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JP2013210656A Active JP6138653B2 (ja) 2013-10-08 2013-10-08 ドライエッチング方法

Country Status (4)

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US (2) US20150099368A1 (enExample)
JP (1) JP6138653B2 (enExample)
KR (2) KR20150041567A (enExample)
TW (1) TWI667707B (enExample)

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JP6516542B2 (ja) * 2015-04-20 2019-05-22 東京エレクトロン株式会社 被エッチング層をエッチングする方法
US10388729B2 (en) * 2016-05-16 2019-08-20 Globalfoundries Inc. Devices and methods of forming self-aligned, uniform nano sheet spacers
JP6619703B2 (ja) * 2016-06-28 2019-12-11 株式会社Ｓｃｒｅｅｎホールディングス エッチング方法
US10043674B1 (en) * 2017-08-04 2018-08-07 Applied Materials, Inc. Germanium etching systems and methods
US10600889B2 (en) 2017-12-22 2020-03-24 International Business Machines Corporation Nanosheet transistors with thin inner spacers and tight pitch gate
JP6928548B2 (ja) * 2017-12-27 2021-09-01 東京エレクトロン株式会社 エッチング方法
US11011383B2 (en) 2018-01-22 2021-05-18 Tokyo Electron Limited Etching method
JP7145740B2 (ja) * 2018-01-22 2022-10-03 東京エレクトロン株式会社 エッチング方法
US10892158B2 (en) * 2019-04-01 2021-01-12 Hitachi High-Tech Corporation Manufacturing method of a semiconductor device and a plasma processing apparatus
KR102258361B1 (ko) * 2019-09-10 2021-05-28 포항공과대학교 산학협력단 펄스형 전력을 사용한 플라즈마 활성종 생성방법
JP7345334B2 (ja) * 2019-09-18 2023-09-15 東京エレクトロン株式会社 エッチング方法及び基板処理システム
WO2021085158A1 (ja) * 2019-10-29 2021-05-06 東京エレクトロン株式会社 基板処理方法、基板処理装置及びナノワイヤ又はナノシートのトランジスタの製造方法
WO2021181613A1 (ja) * 2020-03-12 2021-09-16 株式会社日立ハイテク プラズマ処理方法
JP7360979B2 (ja) * 2020-03-19 2023-10-13 東京エレクトロン株式会社 基板処理方法及び基板処理装置
IL296563A (en) 2020-04-21 2022-11-01 Praxair Technology Inc Novel methods for gas phase selective etching of silicon-germanium layers
US11527414B2 (en) 2020-08-18 2022-12-13 Applied Materials, Inc. Methods for etching structures with oxygen pulsing
US11658042B2 (en) 2020-08-18 2023-05-23 Applied Materials, Inc. Methods for etching structures and smoothing sidewalls
US11538690B2 (en) * 2021-02-09 2022-12-27 Tokyo Electron Limited Plasma etching techniques
KR102631665B1 (ko) 2021-06-17 2024-02-01 주식회사 히타치하이테크 플라스마 처리 방법 및 반도체 장치의 제조 방법
US20230260802A1 (en) * 2022-02-17 2023-08-17 Applied Materials, Inc. Highly selective silicon etching
US12272558B2 (en) * 2022-05-09 2025-04-08 Tokyo Electron Limited Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification
JP2024083014A (ja) * 2022-12-09 2024-06-20 東京エレクトロン株式会社 基板処理方法及び基板処理装置
US20240282585A1 (en) * 2023-02-21 2024-08-22 Applied Materials, Inc. Treatments to improve etched silicon-and-germanium-containing material surface roughness
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