JP2015012174A5 - - Google Patents
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- Publication number
- JP2015012174A5 JP2015012174A5 JP2013137048A JP2013137048A JP2015012174A5 JP 2015012174 A5 JP2015012174 A5 JP 2015012174A5 JP 2013137048 A JP2013137048 A JP 2013137048A JP 2013137048 A JP2013137048 A JP 2013137048A JP 2015012174 A5 JP2015012174 A5 JP 2015012174A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor region
- region
- photoelectric conversion
- gate electrode
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000004065 semiconductor Substances 0.000 claims description 67
- 238000006243 chemical reaction Methods 0.000 claims description 28
- 238000002955 isolation Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims 3
- 239000012535 impurity Substances 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013137048A JP6198485B2 (ja) | 2013-06-28 | 2013-06-28 | 光電変換装置、及び撮像システム |
| US14/316,476 US9196645B2 (en) | 2013-06-28 | 2014-06-26 | Photoelectric conversion device and imaging system |
| CN201410302220.XA CN104253138B (zh) | 2013-06-28 | 2014-06-27 | 光电转换装置和成像系统 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013137048A JP6198485B2 (ja) | 2013-06-28 | 2013-06-28 | 光電変換装置、及び撮像システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015012174A JP2015012174A (ja) | 2015-01-19 |
| JP2015012174A5 true JP2015012174A5 (enExample) | 2016-07-14 |
| JP6198485B2 JP6198485B2 (ja) | 2017-09-20 |
Family
ID=52114733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013137048A Active JP6198485B2 (ja) | 2013-06-28 | 2013-06-28 | 光電変換装置、及び撮像システム |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9196645B2 (enExample) |
| JP (1) | JP6198485B2 (enExample) |
| CN (1) | CN104253138B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8742309B2 (en) | 2011-01-28 | 2014-06-03 | Aptina Imaging Corporation | Imagers with depth sensing capabilities |
| US10015471B2 (en) | 2011-08-12 | 2018-07-03 | Semiconductor Components Industries, Llc | Asymmetric angular response pixels for single sensor stereo |
| US9554115B2 (en) * | 2012-02-27 | 2017-01-24 | Semiconductor Components Industries, Llc | Imaging pixels with depth sensing capabilities |
| US9445018B2 (en) * | 2014-05-01 | 2016-09-13 | Semiconductor Components Industries, Llc | Imaging systems with phase detection pixels |
| KR102171022B1 (ko) * | 2014-05-14 | 2020-10-28 | 삼성전자주식회사 | 픽셀 간 간섭 영향을 개선한 이미지 센서 |
| US9888198B2 (en) | 2014-06-03 | 2018-02-06 | Semiconductor Components Industries, Llc | Imaging systems having image sensor pixel arrays with sub-pixel resolution capabilities |
| US9749556B2 (en) | 2015-03-24 | 2017-08-29 | Semiconductor Components Industries, Llc | Imaging systems having image sensor pixel arrays with phase detection capabilities |
| US10163948B2 (en) * | 2015-07-23 | 2018-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
| JP2017054966A (ja) * | 2015-09-10 | 2017-03-16 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
| JP7005125B2 (ja) * | 2016-04-22 | 2022-01-21 | キヤノン株式会社 | 撮像素子、撮像システム、および撮像素子の製造方法 |
| JP6776079B2 (ja) * | 2016-09-27 | 2020-10-28 | 東芝情報システム株式会社 | 固体撮像素子及びその製造方法 |
| KR102778807B1 (ko) * | 2017-05-29 | 2025-03-12 | 소니 세미컨덕터 솔루션즈 가부시키가이샤 | 고체 촬상 장치 및 전자 기기 |
| JP2021101491A (ja) * | 2021-03-31 | 2021-07-08 | ソニーセミコンダクタソリューションズ株式会社 | 光検出装置及び電子機器 |
| US20230387173A1 (en) * | 2022-05-27 | 2023-11-30 | Canon Kabushiki Kaisha | Photoelectric conversion device having expanded dynamic range and transfer electrodes |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001250931A (ja) * | 2000-03-07 | 2001-09-14 | Canon Inc | 固体撮像装置およびこれを用いた撮像システム |
| JP4500434B2 (ja) * | 2000-11-28 | 2010-07-14 | キヤノン株式会社 | 撮像装置及び撮像システム、並びに撮像方法 |
| JP3795843B2 (ja) * | 2002-08-01 | 2006-07-12 | 富士通株式会社 | 半導体受光装置 |
| JP2004319837A (ja) * | 2003-04-17 | 2004-11-11 | Canon Inc | 固体撮像装置 |
| JP2004349430A (ja) | 2003-05-21 | 2004-12-09 | Sharp Corp | 固体撮像素子とその駆動方法 |
| US7605415B2 (en) | 2004-06-07 | 2009-10-20 | Canon Kabushiki Kaisha | Image pickup device comprising photoelectric conversation unit, floating diffusion region and guard ring |
| JP5230058B2 (ja) | 2004-06-07 | 2013-07-10 | キヤノン株式会社 | 固体撮像装置およびカメラ |
| JP4703163B2 (ja) | 2004-10-19 | 2011-06-15 | 株式会社東芝 | 固体撮像装置 |
| JP2006135252A (ja) * | 2004-11-09 | 2006-05-25 | Renesas Technology Corp | 固体撮像素子 |
| JP4742661B2 (ja) | 2005-04-25 | 2011-08-10 | ソニー株式会社 | 固体撮像素子の製造方法 |
| WO2006117725A1 (en) * | 2005-04-29 | 2006-11-09 | Koninklijke Philips Electronics N.V. | Semiconductor device with an image sensor and method for the manufacture of such a device |
| JP2007067379A (ja) | 2005-08-03 | 2007-03-15 | Matsushita Electric Ind Co Ltd | 固体撮像装置 |
| US7667183B2 (en) | 2006-03-10 | 2010-02-23 | Samsung Electronics Co., Ltd. | Image sensor with high fill factor pixels and method for forming an image sensor |
| JP4710660B2 (ja) * | 2006-03-10 | 2011-06-29 | 株式会社ニコン | 固体撮像素子及びこれを用いた電子カメラ |
| JP2007335673A (ja) * | 2006-06-15 | 2007-12-27 | Matsushita Electric Ind Co Ltd | 固体撮像装置とその製造方法 |
| JP4110192B1 (ja) * | 2007-02-23 | 2008-07-02 | キヤノン株式会社 | 光電変換装置及び光電変換装置を用いた撮像システム |
| JP4350768B2 (ja) | 2007-04-16 | 2009-10-21 | キヤノン株式会社 | 光電変換装置及び撮像装置 |
| JP4337906B2 (ja) * | 2007-05-10 | 2009-09-30 | ソニー株式会社 | 固体撮像素子およびカメラシステム |
| JP5539105B2 (ja) * | 2009-09-24 | 2014-07-02 | キヤノン株式会社 | 光電変換装置およびそれを用いた撮像システム |
| JP5818452B2 (ja) * | 2011-02-09 | 2015-11-18 | キヤノン株式会社 | 固体撮像装置 |
| US20140191290A1 (en) * | 2011-08-24 | 2014-07-10 | Sharp Kabushiki Kaisha | Solid-state imaging element |
| JP5935287B2 (ja) * | 2011-10-21 | 2016-06-15 | ソニー株式会社 | 撮像装置および撮像表示システム |
| JP5413481B2 (ja) | 2012-04-09 | 2014-02-12 | 株式会社ニコン | 光電変換部の連結／分離構造、固体撮像素子及び撮像装置 |
| KR101989567B1 (ko) * | 2012-05-31 | 2019-06-14 | 삼성전자주식회사 | 이미지 센서 |
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2013
- 2013-06-28 JP JP2013137048A patent/JP6198485B2/ja active Active
-
2014
- 2014-06-26 US US14/316,476 patent/US9196645B2/en active Active
- 2014-06-27 CN CN201410302220.XA patent/CN104253138B/zh active Active