JP2014534644A - 補助ガス供給ポートを含む基板処理装置 - Google Patents
補助ガス供給ポートを含む基板処理装置 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 172
- 238000006243 chemical reaction Methods 0.000 claims abstract description 137
- 238000000034 method Methods 0.000 claims abstract description 128
- 239000007789 gas Substances 0.000 claims abstract description 78
- 239000012495 reaction gas Substances 0.000 claims abstract description 39
- 239000006227 byproduct Substances 0.000 claims abstract description 18
- 238000009792 diffusion process Methods 0.000 claims description 36
- 238000000926 separation method Methods 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 description 32
- 238000000407 epitaxy Methods 0.000 description 13
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 229920001296 polysiloxane Polymers 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000007795 chemical reaction product Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 239000013067 intermediate product Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000000197 pyrolysis Methods 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000006213 oxygenation reaction Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Abstract
Description
発明が解決しようとする課題
本発明の目的は,内部反応チューブに提供された反応ガスが下部チャンバに移動することを防止する基板処理装置を提供することにある。
字形状であり,後述する排気ノズルユニット334は排気ポート344を介して第1排気ライン342と連結される。また,補助排気ポート328aは補助排気ライン328bに連結され,下部チャンバ312b内部の積載空間は補助排気ポート328aを介して排気可能である。
Claims (10)
- 基板に対する工程が行われる基板処理装置において,
上部が開放され,一側に前記基板が出入する通路が形成される下部チャンバと,
前記下部チャンバの開放された上部を閉鎖し,前記工程が行われる工程空間を提供する外部反応チューブと,
一つ以上の前記基板が上下方向に積載され,前記基板が積載される積載位置及び前記基板に対する前記工程が行われる工程位置に転換可能な基板ホルダと,
前記外部反応チューブの内部に設置され,前記工程位置に置かれた前記基板ホルダの周りに配置されて前記基板に対する反応領域を区画する内部反応チューブと,
前記外部反応チューブの内壁に沿って配置されて前記反応ガスを吐出する供給口を有する一つ以上の供給ノズルと,
前記外部反応チューブの内壁に沿って配置されて前記工程空間内の未反応ガス及び反応副産物を吸入する排気口を有する一つ以上の排気ノズルと,を含み,
前記下部チャンバは,前記下部チャンバの内部に形成された積載空間に連結される補助ガス供給ポートを有することを特徴とする基板処理装置。 - 前記補助ガス供給ポートは,工程を進行する際に前記積載空間の内部に非活性ガスを供給することを特徴とする請求項1記載の基板処理装置。
- 前記積載空間の内部圧力は前記工程空間の内部圧力より高いことを特徴とする請求項2に記載の基板処理装置。
- 前記基板ホルダは前記積載位置で前記積載空間内に位置し,前記工程位置で前記工程空間内に位置することを特徴とする請求項1記載の基板処理装置。
- 前記基板処理装置は前記排気ノズルに連結されて前記排気口を介して吸入した前記未反応ガス及び前記反応副産物を排出する後方排気ラインを更に含み,
前記下部チャンバは前記排気ノズルと前記後方排気ラインを連結する排気ポート及び前記下部チャンバの内部に形成された積載空間を前記後方排気ラインに連結する補助排気ポートを有することを特徴とする請求項1記載の基板処理装置。 - 前記基板処理装置は,前記補助排気ポートに連結された補助排気ライン及び前記補助排気ラインを開閉する第1補助排気バルブを更に含み,
前記第1補助排気バルブは工程を進行する前に前記補助排気ラインを開放して前記積載空間の内部を排気することを特徴とする請求項5記載の基板処理装置。 - 前記基板処理装置は,
前記補助排気ポートに連結された補助排気ライン及び前記補助排気ラインを開閉する第1補助排気バルブと,
前記排気ポートと前記後方排気ラインを連結する前方排気ラインと,
前記前方排気ラインの上に設置されて前記前方排気ラインの内部をポンプするポンプと,
前記前方排気ラインの上に設置されて前記前方排気ラインを開閉するメイン排気バルブと,
前記第1補助排気バルブの後方に設置されて前記補助排気ラインを開閉する第2補助排気バルブと,
前記補助排気ラインと前記前方排気ラインを連結し,一端が前記第1補助排気バルブと第2補助排気バルブとの間に連結されて他端が前記ポンプの前方に連結される連結ラインと,
前記連結ラインの上に設置されて前記連結ラインを開閉する連結バルブと,を更に含み,
工程を進行する前に前記第1補助排気バルブ及び前記連結バルブ,そして前記メイン排気バルブは開放状態であり,前記第2補助排気バルブは閉鎖状態であることを特徴とする請求項5に記載の基板処理装置。 - 前記基板処理装置は,
前記補助排気ポートに連結された補助排気ライン及び前記補助排気ラインを開閉する第1補助排気バルブと,
前記排気ポートと前記後方排気ラインを連結する前方排気ラインと,
前記前方排気ラインの上に設置されて前記前方排気ラインの内部をポンプするポンプと,
前記前方排気ラインの上に設置されて前記前方排気ラインを開閉するメイン排気バルブと,
前記第1補助排気バルブの後方に設置されて前記補助排気ラインを開閉する第2補助排気バルブと,
前記補助排気ラインと前記前方排気ラインを連結し,一端が前記第1補助排気バルブと第2補助排気バルブとの間に連結されて他端が前記ポンプの前方に連結される連結ラインと,
前記連結ラインの上に設置されて前記連結ラインを開閉する連結バルブと,を更に含み,
工程を進行する際,前記第1及び前記第2補助排気バルブ,そして前記メイン排気バルブは開放状態であり,前記連結バルブは閉鎖状態であることを特徴とする請求項5記載の基板処理装置。 - 前記基板処理装置は前記補助ガス供給ポートの吐出口の上に設置された拡散部材を更に含み,
前記拡散部材は前記補助ガス供給ポートと連結されたバッファ空間及び前記バッファ空間とそれぞれ連結された複数の拡散孔を有することを特徴とする請求項1記載の基板処理装置。 - 前記拡散孔は第1離隔距離を有する第1拡散孔及び前記第1離隔距離より大きい第2離隔距離を有する第2拡散孔を有し,
前記第2拡散孔は前記補助ガス供給ポートに近接するように配置されることを特徴とする請求項9記載の基板処理装置。
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JP2017055105A (ja) * | 2015-09-11 | 2017-03-16 | ユ−ジーン テクノロジー カンパニー.リミテッド | 基板処理装置 |
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CN111058015B (zh) * | 2018-10-16 | 2023-07-25 | 东京毅力科创株式会社 | 基板处理装置、基板的输入方法以及基板处理方法 |
Also Published As
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CN103946956B (zh) | 2016-09-07 |
WO2013073889A1 (ko) | 2013-05-23 |
TW201324661A (zh) | 2013-06-16 |
TWI485795B (zh) | 2015-05-21 |
JP5844919B2 (ja) | 2016-01-20 |
US20150013909A1 (en) | 2015-01-15 |
US9593415B2 (en) | 2017-03-14 |
CN103946956A (zh) | 2014-07-23 |
KR20130054709A (ko) | 2013-05-27 |
KR101408084B1 (ko) | 2014-07-04 |
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