JP2014513429A5 - - Google Patents

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Publication number
JP2014513429A5
JP2014513429A5 JP2014506911A JP2014506911A JP2014513429A5 JP 2014513429 A5 JP2014513429 A5 JP 2014513429A5 JP 2014506911 A JP2014506911 A JP 2014506911A JP 2014506911 A JP2014506911 A JP 2014506911A JP 2014513429 A5 JP2014513429 A5 JP 2014513429A5
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JP
Japan
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substrate
unit
nth
robot
clamped
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JP2014506911A
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Japanese (ja)
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JP5805851B2 (ja
JP2014513429A (ja
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Priority claimed from PCT/EP2012/057955 external-priority patent/WO2012146788A1/en
Publication of JP2014513429A publication Critical patent/JP2014513429A/ja
Publication of JP2014513429A5 publication Critical patent/JP2014513429A5/ja
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Publication of JP5805851B2 publication Critical patent/JP5805851B2/ja
Expired - Fee Related legal-status Critical Current
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JP2014506911A 2011-04-28 2012-05-01 リソグラフィシステムにおいて基板を処理する方法 Expired - Fee Related JP5805851B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161480163P 2011-04-28 2011-04-28
US61/480,163 2011-04-28
PCT/EP2012/057955 WO2012146788A1 (en) 2011-04-28 2012-05-01 Method of processing a substrate in a lithography system

Publications (3)

Publication Number Publication Date
JP2014513429A JP2014513429A (ja) 2014-05-29
JP2014513429A5 true JP2014513429A5 (OSRAM) 2015-03-12
JP5805851B2 JP5805851B2 (ja) 2015-11-10

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ID=46017897

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2014506911A Expired - Fee Related JP5805851B2 (ja) 2011-04-28 2012-05-01 リソグラフィシステムにおいて基板を処理する方法
JP2014506912A Active JP5787331B2 (ja) 2011-04-28 2012-05-01 リソグラフィシステムにおいて基板を搬送するための装置

Family Applications After (1)

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JP2014506912A Active JP5787331B2 (ja) 2011-04-28 2012-05-01 リソグラフィシステムにおいて基板を搬送するための装置

Country Status (7)

Country Link
US (4) US8936994B2 (OSRAM)
EP (1) EP2702452B1 (OSRAM)
JP (2) JP5805851B2 (OSRAM)
KR (4) KR101892460B1 (OSRAM)
CN (3) CN106896650A (OSRAM)
TW (2) TWI486723B (OSRAM)
WO (2) WO2012146788A1 (OSRAM)

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