JP2014510842A5 - - Google Patents
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- JP2014510842A5 JP2014510842A5 JP2014505317A JP2014505317A JP2014510842A5 JP 2014510842 A5 JP2014510842 A5 JP 2014510842A5 JP 2014505317 A JP2014505317 A JP 2014505317A JP 2014505317 A JP2014505317 A JP 2014505317A JP 2014510842 A5 JP2014510842 A5 JP 2014510842A5
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- Prior art keywords
- anode
- process electrolyte
- module
- electrochemical deposition
- frame
- Prior art date
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- 230000008569 process Effects 0.000 claims description 488
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- 238000004070 electrodeposition Methods 0.000 claims description 285
- 239000000758 substrate Substances 0.000 claims description 246
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- 230000008021 deposition Effects 0.000 claims description 167
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- 229910007637 SnAg Inorganic materials 0.000 claims description 62
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Images
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161475417P | 2011-04-14 | 2011-04-14 | |
| US61/475,417 | 2011-04-14 | ||
| PCT/US2012/033422 WO2012142352A1 (en) | 2011-04-14 | 2012-04-13 | Electro chemical deposition and replenishment apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014510842A JP2014510842A (ja) | 2014-05-01 |
| JP2014510842A5 true JP2014510842A5 (enExample) | 2015-05-28 |
Family
ID=47009702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014505317A Pending JP2014510842A (ja) | 2011-04-14 | 2012-04-13 | 電気化学堆積装置及び補充装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9017528B2 (enExample) |
| JP (1) | JP2014510842A (enExample) |
| KR (1) | KR101959095B1 (enExample) |
| CN (1) | CN103608490B (enExample) |
| TW (2) | TWI537428B (enExample) |
| WO (1) | WO2012142352A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130095649A1 (en) * | 2011-10-17 | 2013-04-18 | International Business Machines Corporation | Chemical Bath Replenishment |
| US9637836B2 (en) | 2013-07-03 | 2017-05-02 | Tel Nexx, Inc. | Electrochemical deposition apparatus and methods for controlling the chemistry therein |
| US9303329B2 (en) * | 2013-11-11 | 2016-04-05 | Tel Nexx, Inc. | Electrochemical deposition apparatus with remote catholyte fluid management |
| US9481940B2 (en) | 2014-06-26 | 2016-11-01 | International Business Machines Corporation | Electrodeposition system and method incorporating an anode having a back side capacitive element |
| CA2974403A1 (en) * | 2015-02-05 | 2016-08-11 | Forrest A. King | Improved bypass electrolysis system and method |
| JP6408936B2 (ja) * | 2015-03-05 | 2018-10-17 | 株式会社荏原製作所 | めっき装置 |
| US10011919B2 (en) * | 2015-05-29 | 2018-07-03 | Lam Research Corporation | Electrolyte delivery and generation equipment |
| US10227707B2 (en) | 2015-07-17 | 2019-03-12 | Applied Materials, Inc. | Inert anode electroplating processor and replenisher |
| US9765443B2 (en) * | 2015-09-02 | 2017-09-19 | Applied Materials, Inc. | Electroplating processor with current thief electrode |
| US9920448B2 (en) * | 2015-11-18 | 2018-03-20 | Applied Materials, Inc. | Inert anode electroplating processor and replenisher with anionic membranes |
| JP6577404B2 (ja) | 2016-04-05 | 2019-09-18 | ファナック株式会社 | 絞りユニット及びこれを備えた静圧軸受装置並びに溝付きブロックの製造方法 |
| US20170370017A1 (en) * | 2016-06-27 | 2017-12-28 | Tel Nexx, Inc. | Wet processing system and method of operating |
| GB201701166D0 (en) * | 2017-01-24 | 2017-03-08 | Picofluidics Ltd | An apparatus for electrochemically processing semiconductor substrates |
| WO2018162682A1 (de) * | 2017-03-08 | 2018-09-13 | Technische Universität Darmstadt | Anordnung und verfahren zum bereitstellen einer vielzahl von nanodrähten sowie galvanikkapsel |
| WO2020242838A1 (en) * | 2019-05-24 | 2020-12-03 | Lam Research Corporation | Electrochemical deposition system including optical probes |
| US11608563B2 (en) * | 2019-07-19 | 2023-03-21 | Asmpt Nexx, Inc. | Electrochemical deposition systems |
| JP7316908B2 (ja) * | 2019-10-30 | 2023-07-28 | 株式会社荏原製作所 | アノード組立体 |
| US11697887B2 (en) * | 2020-10-23 | 2023-07-11 | Applied Materials, Inc. | Multi-compartment electrochemical replenishment cell |
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| GB293648A (en) | 1928-01-12 | 1928-07-12 | Henry Edward Smith | Improved wallet for containing papers and documents |
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2012
- 2012-04-12 US US13/445,217 patent/US9017528B2/en active Active
- 2012-04-13 KR KR1020137029728A patent/KR101959095B1/ko active Active
- 2012-04-13 TW TW101113198A patent/TWI537428B/zh active
- 2012-04-13 WO PCT/US2012/033422 patent/WO2012142352A1/en not_active Ceased
- 2012-04-13 TW TW105101717A patent/TWI622667B/zh active
- 2012-04-13 JP JP2014505317A patent/JP2014510842A/ja active Pending
- 2012-04-13 CN CN201280018375.XA patent/CN103608490B/zh active Active
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