JP2014505637A - 圧力分配システムにおいて使用するための略円筒形状のライナーおよびその製造方法 - Google Patents
圧力分配システムにおいて使用するための略円筒形状のライナーおよびその製造方法 Download PDFInfo
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Abstract
Description
本開示は、ライナーベースの保管および分配システムに関する。より具体的には、本開示は、略円筒形状のオーバーパックと併用するためのライナーに関し、ライナーは、オーバーパックの内部のサイズおよび形状に実質的に適合するように構成される。より具体的には、本開示は、管状本体部分と、管状本体部分の一つの端部に密閉される底部部分と、管状本体部分の他の端部に密閉される上部部分とを備え、上部部分はまた嵌合部も含む、ライナーに関する。さらに、本開示のライナーの内容物は、浸漬管および/または閉塞防止器の使用の有無を問わず、圧力分配によって分配され得る。
多数の製造プロセスは、酸、溶媒、基剤、フォトレジスト、スラリー、洗浄剤、ドーパント、無機物、有機物、金属有機物、および生物学的溶液、医薬品、ならびに放射性化学物質等の超高純度液体の使用を要求する。そのような用途は、超高純度液体中の粒子の数およびサイズが最小であることを要求する。特に、超高純度液体は、マイクロ電子製造プロセスの多くの側面において使用されるので、半導体製造業者は、プロセス化学物質および化学処理機器のための厳密な粒子濃度仕様を確立している。そのような仕様は、製造プロセスの間、高レベルの粒子または気泡を含有する液体が使用される場合、粒子または気泡がシリコンの固体表面上に堆積され得るので必要とされる。これは、ひいては、製品故障ならびに品質および信頼性低下につながり得る。
浸透性試験のために、2つの4インチ×4インチの膜サンプルが、NS50ならびに市販ライナー1および市販ライナー2の内側と外側層のそれぞれに対して調製された。サンプルはそれぞれ、Mocon Multi−Tran400装置上で行われた。使用された試験ガスは、0%RHのN2であった。搬送ガスは、0%RHの100%ヘリウムであって、試験温度は、23℃、すなわち、室温であった。cc/(100in2/日)あたりのN2透過率が、以下の表に示されるように記録され、
粒子試験は、NS50、市販ライナー1、および市販ライナー2のそれぞれから生成されたサンプル用5.5インチ×11.5インチパウチを使用して実施された。パウチはそれぞれ、DI水で充填され、密閉され、全表面を湿潤させるようにゆっくりと回転させた。粒子濃度は、Rion KS−16液体粒子計測器を使用して測定された。データは、以下のグラフに示され、
全有機体炭素(「TOC」)試験の調製は、前述の粒子試験と同様に実施された。TOCは、試験開始時(T=0)および試験の第7日目(T=7)において、Sievers 900 TOC分析器を使用して測定された。データは、以下のグラフに示され、
微量金属(「TM」)試験の調製もまた、前述の粒子試験と同様に実施された。微量金属は、試験開始時(T=0)、試験の第7日目(T=7)、および試験の第30日目(T=30)に、Agilent 7500 ICP−MS機械を使用して測定された。微量金属試験は、DI水および5%硝酸中で行われた。
T=0、T=7、およびT=30日目のデータは、以下のグラフに示され、
T=0、T=7、およびT=30日目のデータは、以下のグラフに示され、
Claims (21)
- ライナーであって、
該ライナーは、
上部周囲縁および底部周囲縁を有する管状本体部分と、
該底部周囲縁に沿って該管状本体部分に密閉される略円形の底部部分と、
略円形の上部部分であって、該上部部分は、該上部周囲縁に沿って該管状本体部分に密閉され、そこに密閉される嵌合部を含む、略円形の上部部分と
を備える、ライナー。 - 前記管状本体部分は、少なくとも1つの溶接シームを備え、該少なくとも1つの溶接シームは、前記上部周囲縁から前記底部周囲縁まで延在する、請求項1に記載のライナー。
- 前記管状本体部分は、管状本体を形成するように一緒に溶接された2つのシートを備え、該管状本体部分は、したがって、前記上部周囲縁から前記底部周囲縁まで延在する2つの溶接シームを有する、請求項2に記載のライナー。
- 前記ライナーは、前記嵌合部が開口部に隣接して設置された状態において、崩壊状態にある該ライナーを該開口部を通して容器の中へ挿入することによって、3インチ以下の開口部を有する取外し不可能ヘッド容器内に設置されるように構成される、請求項1に記載のライナー。
- 前記ライナー部分の各々は、複数の層を有するライナー壁を備える、請求項4に記載のライナー。
- 前記ライナー壁の厚さは、80ミクロンから280ミクロンまでである、請求項5に記載のライナー。
- 閉塞点の発生を減少させるための手段をさらに備える、請求項1に記載のライナー。
- ライナーベースのシステムであって、
該システムは、
略円筒形状の内部を備え、少なくとも一つの端部に開口部を有するオーバーパックと、
該オーバーパック内に設置された可撓性ライナーと
を備え、該可撓性ライナーは、
上部周囲縁および底部周囲縁を有する管状本体部分と、
該底部周囲縁に沿って該管状本体部分に密閉される略円形の底部部分と、
略円形の上部部分であって、該上部部分は、該上部周囲縁に沿って該管状本体部分に密閉され、そこに密閉される嵌合部を含む、略円形の上部部分と
を備える、システム。 - 前記オーバーパックは、3インチ以下の開口部を有する取外し不可能ヘッド容器である、請求項8に記載のライナーベースのシステム。
- 前記ライナーは、拡張状態において、前記オーバーパックの略円筒形状の内部に実質的に適合する、請求項8に記載のライナーベースのシステム。
- 前記管状本体部分は、前記上部周囲縁から前記底部周囲縁まで延在する少なくとも1つの溶接シームを備える、請求項10に記載のライナーベースのシステム。
- 前記管状本体部分は、管状本体を形成するように一緒に溶接された2つのシートを備え、該管状本体部分は、したがって、前記上部周囲縁から前記底部周囲縁まで延在する2つの溶接シームを有する、請求項11に記載のライナーベースのシステム。
- 前記ライナー部分の各々は、複数の層を有するライナー壁を備える、請求項11に記載のライナー。
- 前記ライナー壁の厚さは、80ミクロンから280ミクロンまでである、請求項13に記載のライナー。
- 前記ライナーは、拡張状態において、上部周囲密閉部に対する応力を減少させるように構成される、請求項8に記載のライナーベースのシステム。
- 前記オーバーパックは、該オーバーパックと前記ライナーとの間の環状空間と連通している流体入口をさらに備え、該流体入口は、ガスまたは流体が該環状空間の中へ導入されることを可能にし、該ライナーの崩壊と、その中の内容物の前記嵌合部を通しての分配とを生じさせる、請求項10に記載のライナーベースのシステム。
- ライナーベースのシステムから内容物を分配するための方法であって、
該方法は、
圧力源をオーバーパックの流体入口に連結することであって、該オーバーパックは、
略円筒形状の内部であって、該内部は、少なくとも一つの端部に開口部を有する、略円筒形状の内部と、
該内部内に設置された可撓性ライナーであって、該可撓性ライナーは、
上部周囲縁および底部周囲縁を有する管状本体部分と、
該底部周囲縁に沿って該管状本体部分に密閉される略円形の底部部分と、
略円形の上部部分であって、該上部部分は、該上部周囲縁に沿って該管状本体部分に密閉され、そこに密閉される嵌合部を含む、略円形の上部部分と
を備える、可撓性ライナーと
を備え、該流体入口は、該オーバーパックと該ライナーとの間の環状空間と連通している、ことと、
ガスまたは流体を圧力源から該流体入口を介して該環状空間の中へ導入し、それによって、該ライナーを崩壊させ、その中の内容物の該嵌合部を通しての分配を生じさせることによって、該ライナーの内容物を分配することと
を備える、方法。 - 前記分配される内容物を受容するために、分配コネクタを前記ライナーの前記嵌合部に接続することをさらに備え、該分配コネクタは、管を備えるプローブを有し、該管は、該嵌合部を通って該ライナーの内部の中へただ比較的短い距離だけ延在する、請求項17に記載の方法。
- 前記ライナーの内容物の分配に先立って、頭隙ガスを除去することをさらに備える、請求項18に記載の方法。
- 前記ライナーが空に近づくときを決定するために、分配圧力を監視することをさらに備える、請求項18に記載の方法。
- 前記管状本体部分は、前記上部周囲縁から前記底部周囲縁まで延在する少なくとも1つの溶接シームを備える、請求項17に記載の方法。
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- 2011-12-09 SG SG10201510159XA patent/SG10201510159XA/en unknown
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- 2011-12-09 KR KR1020137017971A patent/KR102131114B1/ko active IP Right Grant
- 2011-12-09 CN CN2011800599807A patent/CN103261042A/zh active Pending
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JP2016068959A (ja) * | 2014-09-26 | 2016-05-09 | 大日本印刷株式会社 | 液体収納容器 |
WO2016133200A1 (ja) * | 2015-02-20 | 2016-08-25 | セメダイン株式会社 | 長尺状流路部材、並びにプラスチック容器、及び粘性液体吐出装置 |
JP6090710B2 (ja) * | 2015-02-20 | 2017-03-08 | セメダイン株式会社 | 長尺状流路部材、並びにプラスチック容器、及び粘性液体吐出装置 |
JPWO2016133200A1 (ja) * | 2015-02-20 | 2017-04-27 | セメダイン株式会社 | 長尺状流路部材、並びにプラスチック容器、及び粘性液体吐出装置 |
CN107428454A (zh) * | 2015-02-20 | 2017-12-01 | 思美定株式会社 | 长条状流路构件、塑料容器以及粘性液体排出装置 |
CN107428454B (zh) * | 2015-02-20 | 2020-01-10 | 思美定株式会社 | 长条状流路构件、塑料容器以及粘性液体排出装置 |
Also Published As
Publication number | Publication date |
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KR102131114B1 (ko) | 2020-07-07 |
CN103261042A (zh) | 2013-08-21 |
SG10201510159XA (en) | 2016-01-28 |
US20160159519A1 (en) | 2016-06-09 |
KR20180112080A (ko) | 2018-10-11 |
KR20130126956A (ko) | 2013-11-21 |
TWI601675B (zh) | 2017-10-11 |
JP6397625B2 (ja) | 2018-09-26 |
WO2012078977A2 (en) | 2012-06-14 |
US20140034671A1 (en) | 2014-02-06 |
TW201236946A (en) | 2012-09-16 |
EP2648990A4 (en) | 2014-05-21 |
SG191080A1 (en) | 2013-07-31 |
EP2648990A2 (en) | 2013-10-16 |
WO2012078977A3 (en) | 2012-10-04 |
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