JP2014145973A - 半導体光変調器及び光通信モジュール - Google Patents
半導体光変調器及び光通信モジュール Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 79
- 239000004065 semiconductor Substances 0.000 title claims abstract description 65
- 239000010410 layer Substances 0.000 claims description 123
- 238000009792 diffusion process Methods 0.000 claims description 22
- 239000012790 adhesive layer Substances 0.000 claims description 17
- 230000002265 prevention Effects 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 9
- 239000010931 gold Substances 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 238000005336 cracking Methods 0.000 description 9
- 238000000605 extraction Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Lasers (AREA)
Abstract
【解決手段】電気信号に従ってレーザー光を変調する半導体光変調器1は、半導体光変調器1の少なくとも一部の埋込層と活性層の上方に設けられた、電気信号が伝送される電極300を備え、電極300のうち、電気信号を伝送するボンディングワイヤ8と接続されるボンディングパッド電極部11の周縁部の少なくとも一部に段差構造を設けた。
【選択図】 図1
Description
Claims (9)
- 電気信号に従ってレーザー光を変調する半導体光変調器であって、
前記半導体光変調器の少なくとも一部の埋込層と活性層の上方に設けられた、前記電気信号が伝送される電極を備え、
前記電極のうち、前記電気信号を伝送するワイヤと接続されるパッド電極部の周縁部の少なくとも一部に段差構造を設けた
ことを特徴とする半導体光変調器。 - 前記電極は、前記埋込層と活性層に近い順に、接着層、拡散防止層、通電層を積層して構成され、
前記パッド電極部の通電層の外側に、前記パッド電極部の拡散防止層と接着層とがはみ出すように前記段差構造を設けた
ことを特徴とする請求項1に記載の半導体光変調器。 - 前記埋込層の上に設けられた絶縁層を備え、
前記パッド電極部は、前記絶縁層の上に設けられ、
前記電極のうち、前記活性層の上方に設けられたメサストライプ電極部と、前記パッド電極部と前記メサストライプ電極部とを接続する引き出し電極部と、には前記段差構造を設けない
ことを特徴とする請求項1又は2に記載の半導体光変調器。 - 前記パッド電極部のうち、前記引き出し電極部との接続側とは反対の周縁部に前記段差構造を設けた
ことを特徴とする請求項3に記載の半導体光変調器。 - 前記パッド電極部のうち、前記絶縁層の端部であって前記引き出し電極の下方にある端部から所定範囲にある領域以外に前記段差構造を設けた
ことを特徴とする請求項4に記載の半導体光変調器。 - 前記所定範囲は、5〜10μm以内である
ことを特徴とする請求項5に記載の半導体光変調器。 - 前記接着層は、チタンを含み形成される層であり、
前記拡散防止層は、白金を含み形成される層であり、
前記通電層は、金を含み形成される層である
ことを特徴とする請求項2に記載の半導体光変調器。 - 前記パッド電極部の面積が、1500〜2200μm2である
ことを特徴とする請求項1乃至7のいずれかに記載の半導体光変調器。 - レーザー光を発光する光共振器と、
前記光共振器から発光されたレーザー光を、電気信号に従って変調する半導体光変調器と、を備え、
前記半導体光変調器は、
前記半導体光変調器の少なくとも一部の埋込層と活性層の上方に設けられた、前記電気信号が伝送される電極を備え、
前記電極のうち、前記電気信号を伝送するワイヤと接続されるパッド電極部の周縁部の少なくとも一部に段差構造を設けた
ことを特徴とする光通信モジュール。
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109747A (ja) * | 1987-10-22 | 1989-04-26 | Mitsubishi Electric Corp | 半導体装置 |
JP2004071713A (ja) * | 2002-08-02 | 2004-03-04 | Sumitomo Electric Ind Ltd | 光デバイスおよびその製造方法 |
JP2005175382A (ja) * | 2003-12-15 | 2005-06-30 | Opnext Japan Inc | 半導体光素子の製造方法および半導体光素子 |
JP2008021849A (ja) * | 2006-07-13 | 2008-01-31 | Oki Electric Ind Co Ltd | 半導体装置 |
US20080029759A1 (en) * | 2004-11-22 | 2008-02-07 | Nam Eun S | Optoelectronic transmitter integrated circuit and method of fabricating the same using selective growth process |
JP2008244414A (ja) * | 2007-02-27 | 2008-10-09 | Opnext Japan Inc | 半導体光装置 |
JP2010124002A (ja) * | 2010-03-08 | 2010-06-03 | Hitachi Ltd | 半導体レーザ素子 |
JP2011061186A (ja) * | 2009-08-13 | 2011-03-24 | Sk Link:Kk | 半導体装置及びその製造方法 |
JP2012019053A (ja) * | 2010-07-07 | 2012-01-26 | Opnext Japan Inc | 半導体光素子、光送信モジュール、光送受信モジュール、及び、光伝送装置 |
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Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109747A (ja) * | 1987-10-22 | 1989-04-26 | Mitsubishi Electric Corp | 半導体装置 |
JP2004071713A (ja) * | 2002-08-02 | 2004-03-04 | Sumitomo Electric Ind Ltd | 光デバイスおよびその製造方法 |
JP2005175382A (ja) * | 2003-12-15 | 2005-06-30 | Opnext Japan Inc | 半導体光素子の製造方法および半導体光素子 |
US20080029759A1 (en) * | 2004-11-22 | 2008-02-07 | Nam Eun S | Optoelectronic transmitter integrated circuit and method of fabricating the same using selective growth process |
JP2008021849A (ja) * | 2006-07-13 | 2008-01-31 | Oki Electric Ind Co Ltd | 半導体装置 |
JP2008244414A (ja) * | 2007-02-27 | 2008-10-09 | Opnext Japan Inc | 半導体光装置 |
JP2011061186A (ja) * | 2009-08-13 | 2011-03-24 | Sk Link:Kk | 半導体装置及びその製造方法 |
JP2010124002A (ja) * | 2010-03-08 | 2010-06-03 | Hitachi Ltd | 半導体レーザ素子 |
JP2012019053A (ja) * | 2010-07-07 | 2012-01-26 | Opnext Japan Inc | 半導体光素子、光送信モジュール、光送受信モジュール、及び、光伝送装置 |
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