JP2014120564A - 成膜装置、基板処理装置及び成膜方法 - Google Patents
成膜装置、基板処理装置及び成膜方法 Download PDFInfo
- Publication number
- JP2014120564A JP2014120564A JP2012273581A JP2012273581A JP2014120564A JP 2014120564 A JP2014120564 A JP 2014120564A JP 2012273581 A JP2012273581 A JP 2012273581A JP 2012273581 A JP2012273581 A JP 2012273581A JP 2014120564 A JP2014120564 A JP 2014120564A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- substrate
- bias electrode
- region
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 title claims abstract description 126
- 239000000758 substrate Substances 0.000 title claims abstract description 75
- 238000000151 deposition Methods 0.000 title 2
- 230000008021 deposition Effects 0.000 title 1
- 230000005684 electric field Effects 0.000 claims abstract description 15
- 230000005672 electromagnetic field Effects 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 168
- 239000010408 film Substances 0.000 claims description 67
- 238000000034 method Methods 0.000 claims description 44
- 230000008569 process Effects 0.000 claims description 35
- 150000002500 ions Chemical class 0.000 claims description 23
- 238000000926 separation method Methods 0.000 claims description 22
- 230000004048 modification Effects 0.000 claims description 18
- 238000012986 modification Methods 0.000 claims description 18
- 239000010409 thin film Substances 0.000 claims description 13
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 8
- 238000005513 bias potential Methods 0.000 claims description 7
- 239000002052 molecular layer Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000009616 inductively coupled plasma Methods 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 75
- 238000006243 chemical reaction Methods 0.000 description 22
- 238000004804 winding Methods 0.000 description 17
- 230000002093 peripheral effect Effects 0.000 description 14
- 238000002407 reforming Methods 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 238000001179 sorption measurement Methods 0.000 description 9
- 238000007789 sealing Methods 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000010926 purge Methods 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- -1 argon ions Chemical class 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CGRVKSPUKAFTBN-UHFFFAOYSA-N N-silylbutan-1-amine Chemical compound CCCCN[SiH3] CGRVKSPUKAFTBN-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- XMIJDTGORVPYLW-UHFFFAOYSA-N [SiH2] Chemical compound [SiH2] XMIJDTGORVPYLW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 210000000746 body region Anatomy 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45536—Use of plasma, radiation or electromagnetic fields
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
- C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32651—Shields, e.g. dark space shields, Faraday shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02167—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon carbide not containing oxygen, e.g. SiC, SiC:H or silicon carbonitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02219—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
Abstract
【解決手段】容量結合プラズマを発生させるためのアンテナ83を真空容器1の上方側に設けると共に、このアンテナ83と回転テーブル2上のウエハWとの間に、アンテナ83にて発生する電磁界のうち電界を遮断して磁界を通過させるためのファラデーシールド95を配置する。そして、アンテナ83の下方側且つ回転テーブル2の下方側の位置に、下側バイアス電極120を配置して、これらファラデーシールド95と下側バイアス電極120との間にバイアス空間S3を形成する。
【選択図】図10
Description
特許文献3には、下部電極にバイアス電圧を印加する装置について記載されているが、回転テーブルによりウエハを公転させる技術については記載されていない。
真空容器内にて基板に対して成膜処理を行うための成膜装置において、
基板を載置する基板載置領域を公転させるための回転テーブルと、
前記基板載置領域に処理ガスを供給する処理ガス供給部を含み、前記回転テーブルの回転に伴い基板上に分子層あるいは原子層を順次積層して薄膜を形成するための成膜領域と、
この成膜領域に対して前記回転テーブルの回転方向に離間して設けられたプラズマ発生領域にて、プラズマ発生用ガスのプラズマ化によって生成したプラズマにより前記分子層あるいは原子層を改質処理するためのプラズマ処理部と、
プラズマ中のイオンを基板の表面に引き込むために、前記回転テーブル上の基板の高さ位置よりも下方側に設けられた下側バイアス電極及び前記高さ位置と同じかあるいは当該高さ位置よりも上方側に配置された上側バイアス電極と、
これらバイアス電極の少なくとも一方に接続され、前記下側バイアス電極及び前記上側バイアス電極が前記プラズマ発生領域を介して容量結合されて基板にバイアス電位を形成するための高周波電源部と、
前記真空容器内を排気するための排気機構と、を備えたことを特徴とする。
前記上側バイアス電極は、前記アンテナと前記プラズマ発生領域との間に設けられ、前記アンテナにより形成される電磁界の電界を遮断し、磁界を通過させるために、前記アンテナの伸びる方向と交差するように形成されたスリットをアンテナの長さ方向に沿って複数配列した導電板である構成。
前記処理ガス供給部に対して回転テーブルの回転方向に離間した位置に設けられ、当該処理ガス供給部から供給される処理ガスと反応するガスを供給するための別の処理ガス供給部と、
前記処理ガス供給部及び前記別の処理ガス供給部から夫々ガスが供給される処理領域同士を互いに分離するために、これら処理領域同士の間に設けられた分離領域に対して分離ガスを各々供給するための分離ガス供給部と、を備えた構成。
前記プラズマ処理部は、プラズマ発生用ガスをプラズマ化するためのプラズマ発生用高周波電源を備えており、このプラズマ発生用高周波電源は、前記高周波電源部を兼用している構成。この場合には、前記プラズマ処理部は、前記プラズマ発生領域に容量結合プラズマを発生させるために、互いに対向するように配置された一対の対向電極を備えていても良い。
基板を載置する基板載置領域を公転させるために真空容器内に設けられた回転テーブルと、
プラズマ発生領域にて基板に対してプラズマ処理を行うために、プラズマ発生用ガスをプラズマ化して生成したプラズマを前記基板載置領域に供給するためのプラズマ処理部と、
プラズマ中のイオンを基板の表面に引き込むために、前記回転テーブル上の基板の高さ位置よりも下方側に設けられた下側バイアス電極及び前記高さ位置と同じかあるいは当該高さ位置よりも上方側に配置された上側バイアス電極と、
これらバイアス電極の少なくとも一方に接続され、前記下側バイアス電極及び前記上側バイアス電極が前記プラズマ発生領域を介して容量結合されて基板にバイアス電位を形成するための高周波電源部と、
前記真空容器内を排気するための排気機構と、を備えたことを特徴とする。
真空容器内にて基板に対して成膜処理を行うための成膜方法において、
回転テーブル上の基板載置領域に、表面に凹部が形成された基板を載置すると共に、この基板載置領域を公転させる工程と、
次いで、前記基板載置領域の基板に対して処理ガスを供給して、当該基板上に分子層あるいは原子層を成膜する工程と、
続いて、前記真空容器内のプラズマ発生領域にプラズマ発生用ガスを供給すると共に、このプラズマ発生用ガスをプラズマ化して、プラズマによって前記分子層あるいは原子層の改質処理を行う工程と、
前記回転テーブル上の基板の高さ位置よりも下方側に設けられた下側バイアス電極及び前記高さ位置と同じかあるいは当該高さ位置よりも上方側に配置された上側バイアス電極の少なくとも一方に給電して、前記プラズマ発生領域を介して前記下側バイアス電極及び前記上側バイアス電極を容量結合させて基板にバイアス電位を形成することにより、当該基板の表面にプラズマ中のイオンを引き込む工程と、
前記真空容器内を排気する工程と、を含むことを特徴とする。
また、下側バイアス電極120としては、真空容器1の外側(真空容器1の底面部の下側)に配置しても良い。
(表2)
尚、この表2における「プラズマ+O2」や「プラズマ+O3」とは、例えば第2の処理ガスノズル32の上方側に既述のプラズマ処理部80を設けて、これら酸素ガスやオゾンガスをプラズマ化して用いることを意味している。
(表3)
尚、この表3における「プラズマ」についても、表2と同様に「プラズマ」の用語に続く各ガスをプラズマ化して用いることを意味している。
(表6)
(表7)
尚、この表7において、酸素元素(O)を含むプラズマ、窒素元素(N)を含むプラズマ及び炭素元素(C)を含むプラズマについては、酸化膜、窒化膜及び炭化膜を成膜するプロセスだけに夫々用いても良い。
1 真空容器
2 回転テーブル
P1、P2 処理領域
S3 バイアス空間
10 凹部
31、32、34 ガスノズル
80 プラズマ処理部
83 アンテナ
95 ファラデーシールド
120 下側バイアス電極
85、128 高周波電源
Claims (8)
- 真空容器内にて基板に対して成膜処理を行うための成膜装置において、
基板を載置する基板載置領域を公転させるための回転テーブルと、
前記基板載置領域に処理ガスを供給する処理ガス供給部を含み、前記回転テーブルの回転に伴い基板上に分子層あるいは原子層を順次積層して薄膜を形成するための成膜領域と、
この成膜領域に対して前記回転テーブルの回転方向に離間して設けられたプラズマ発生領域にて、プラズマ発生用ガスのプラズマ化によって生成したプラズマにより前記分子層あるいは原子層を改質処理するためのプラズマ処理部と、
プラズマ中のイオンを基板の表面に引き込むために、前記回転テーブル上の基板の高さ位置よりも下方側に設けられた下側バイアス電極及び前記高さ位置と同じかあるいは当該高さ位置よりも上方側に配置された上側バイアス電極と、
これらバイアス電極の少なくとも一方に接続され、前記下側バイアス電極及び前記上側バイアス電極が前記プラズマ発生領域を介して容量結合されて基板にバイアス電位を形成するための高周波電源部と、
前記真空容器内を排気するための排気機構と、を備えたことを特徴とする成膜装置。 - 前記プラズマ処理部は、プラズマ発生領域に誘導結合プラズマを発生させるために、鉛直軸周りに巻回されると共にプラズマ発生用高周波電源に接続されたアンテナを備えており、
前記上側バイアス電極は、前記アンテナと前記プラズマ発生領域との間に設けられ、前記アンテナにより形成される電磁界の電界を遮断し、磁界を通過させるために、前記アンテナの伸びる方向と交差するように形成されたスリットをアンテナの長さ方向に沿って複数配列した導電板であることを特徴とする請求項1に記載の成膜装置。 - 前記下側バイアス電極及び前記上側バイアス電極は、前記回転テーブル上の基板に対して夫々隙間領域を介して配置されていることを特徴とする請求項1または2に記載の成膜装置。
- 前記処理ガス供給部に対して回転テーブルの回転方向に離間した位置に設けられ、当該処理ガス供給部から供給される処理ガスと反応するガスを供給するための別の処理ガス供給部と、
前記処理ガス供給部及び前記別の処理ガス供給部から夫々ガスが供給される処理領域同士を互いに分離するために、これら処理領域同士の間に設けられた分離領域に対して分離ガスを各々供給するための分離ガス供給部と、を備えていることを特徴とする請求項1ないし3のいずれか一つに記載の成膜装置。 - 前記プラズマ処理部は、プラズマ発生用ガスをプラズマ化するためのプラズマ発生用高周波電源を備えており、このプラズマ発生用高周波電源は、前記高周波電源部を兼用していることを特徴とする請求項1に記載の成膜装置。
- 前記プラズマ処理部は、前記プラズマ発生領域に容量結合プラズマを発生させるために、互いに対向するように配置された一対の対向電極を備えていることを特徴とする請求項5に記載の成膜装置。
- 基板を載置する基板載置領域を公転させるために真空容器内に設けられた回転テーブルと、
プラズマ発生領域にて基板に対してプラズマ処理を行うために、プラズマ発生用ガスをプラズマ化して生成したプラズマを前記基板載置領域に供給するためのプラズマ処理部と、
プラズマ中のイオンを基板の表面に引き込むために、前記回転テーブル上の基板の高さ位置よりも下方側に設けられた下側バイアス電極及び前記高さ位置と同じかあるいは当該高さ位置よりも上方側に配置された上側バイアス電極と、
これらバイアス電極の少なくとも一方に接続され、前記下側バイアス電極及び前記上側バイアス電極が前記プラズマ発生領域を介して容量結合されて基板にバイアス電位を形成するための高周波電源部と、
前記真空容器内を排気するための排気機構と、を備えたことを特徴とする基板処理装置。 - 真空容器内にて基板に対して成膜処理を行うための成膜方法において、
回転テーブル上の基板載置領域に、表面に凹部が形成された基板を載置すると共に、この基板載置領域を公転させる工程と、
次いで、前記基板載置領域の基板に対して処理ガスを供給して、当該基板上に分子層あるいは原子層を成膜する工程と、
続いて、前記真空容器内のプラズマ発生領域にプラズマ発生用ガスを供給すると共に、このプラズマ発生用ガスをプラズマ化して、プラズマによって前記分子層あるいは原子層の改質処理を行う工程と、
前記回転テーブル上の基板の高さ位置よりも下方側に設けられた下側バイアス電極及び前記高さ位置と同じかあるいは当該高さ位置よりも上方側に配置された上側バイアス電極の少なくとも一方に給電して、前記プラズマ発生領域を介して前記下側バイアス電極及び前記上側バイアス電極を容量結合させて基板にバイアス電位を形成することにより、当該基板の表面にプラズマ中のイオンを引き込む工程と、
前記真空容器内を排気する工程と、を含むことを特徴とする成膜方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012273581A JP5939147B2 (ja) | 2012-12-14 | 2012-12-14 | 成膜装置、基板処理装置及び成膜方法 |
US14/100,224 US9583312B2 (en) | 2012-12-14 | 2013-12-09 | Film formation device, substrate processing device, and film formation method |
KR1020130153691A KR101672078B1 (ko) | 2012-12-14 | 2013-12-11 | 성막 장치, 기판 처리 장치 및 성막 방법 |
TW102146010A TWI546407B (zh) | 2012-12-14 | 2013-12-13 | 成膜裝置、基板處理裝置及成膜方法 |
CN201310686986.8A CN103866297B (zh) | 2012-12-14 | 2013-12-13 | 成膜装置、基板处理装置及成膜方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012273581A JP5939147B2 (ja) | 2012-12-14 | 2012-12-14 | 成膜装置、基板処理装置及び成膜方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014120564A true JP2014120564A (ja) | 2014-06-30 |
JP5939147B2 JP5939147B2 (ja) | 2016-06-22 |
Family
ID=50905292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012273581A Active JP5939147B2 (ja) | 2012-12-14 | 2012-12-14 | 成膜装置、基板処理装置及び成膜方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9583312B2 (ja) |
JP (1) | JP5939147B2 (ja) |
KR (1) | KR101672078B1 (ja) |
CN (1) | CN103866297B (ja) |
TW (1) | TWI546407B (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016157884A (ja) * | 2015-02-26 | 2016-09-01 | 東京エレクトロン株式会社 | シリコン含有膜の成膜方法 |
KR20170052505A (ko) * | 2015-11-04 | 2017-05-12 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치, 기판 처리 방법 및 기판 보유 지지 부재 |
JP2018041531A (ja) * | 2016-09-05 | 2018-03-15 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
JP2018160507A (ja) * | 2017-03-22 | 2018-10-11 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法およびプログラム |
WO2020027593A1 (ko) * | 2018-08-01 | 2020-02-06 | 한양대학교 산학협력단 | 전자 및 이온 조절을 이용한 박막 증착 방법 |
JP2021528849A (ja) * | 2018-06-18 | 2021-10-21 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 対にされた動的平行板の容量結合プラズマ |
JP2022542271A (ja) * | 2019-07-30 | 2022-09-30 | 江蘇魯▲もん▼儀器有限公司 | 誘導結合プラズマ処理システム |
US11804365B2 (en) | 2019-09-02 | 2023-10-31 | Kokusai Electric Corporation | Substrate processing apparatus, plasma generating apparatus, and method of manufacturing semiconductor device |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9416448B2 (en) * | 2008-08-29 | 2016-08-16 | Tokyo Electron Limited | Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method |
JP5107185B2 (ja) * | 2008-09-04 | 2012-12-26 | 東京エレクトロン株式会社 | 成膜装置、基板処理装置、成膜方法及びこの成膜方法を実行させるためのプログラムを記録した記録媒体 |
US9297072B2 (en) | 2008-12-01 | 2016-03-29 | Tokyo Electron Limited | Film deposition apparatus |
US8869742B2 (en) * | 2010-08-04 | 2014-10-28 | Lam Research Corporation | Plasma processing chamber with dual axial gas injection and exhaust |
JP6262115B2 (ja) | 2014-02-10 | 2018-01-17 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
US9613783B2 (en) * | 2014-07-24 | 2017-04-04 | Applied Materials, Inc. | Method and apparatus for controlling a magnetic field in a plasma chamber |
KR102297567B1 (ko) * | 2014-09-01 | 2021-09-02 | 삼성전자주식회사 | 가스 주입 장치 및 이를 포함하는 박막 증착 장비 |
KR20160028612A (ko) * | 2014-09-03 | 2016-03-14 | 삼성전자주식회사 | 반도체 제조 장치 및 이를 이용한 반도체 소자의 제조 방법 |
JP6361495B2 (ja) * | 2014-12-22 | 2018-07-25 | 東京エレクトロン株式会社 | 熱処理装置 |
JP6548586B2 (ja) | 2016-02-03 | 2019-07-24 | 東京エレクトロン株式会社 | 成膜方法 |
JP6640608B2 (ja) * | 2016-03-02 | 2020-02-05 | 東京エレクトロン株式会社 | 基板処理装置 |
JP6584355B2 (ja) * | 2016-03-29 | 2019-10-02 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US10276426B2 (en) | 2016-05-31 | 2019-04-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | System and method for performing spin dry etching |
JP6733516B2 (ja) | 2016-11-21 | 2020-08-05 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
KR102084296B1 (ko) * | 2016-12-15 | 2020-03-03 | 도쿄엘렉트론가부시키가이샤 | 성막 방법, 붕소 막 및 성막 장치 |
US20190259647A1 (en) * | 2018-02-17 | 2019-08-22 | Applied Materials, Inc. | Deposition ring for processing reduced size substrates |
JP6981356B2 (ja) * | 2018-04-24 | 2021-12-15 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
TW202226897A (zh) * | 2020-11-06 | 2022-07-01 | 日商東京威力科創股份有限公司 | 濾波器電路 |
CN113718223A (zh) * | 2021-08-27 | 2021-11-30 | 北京北方华创微电子装备有限公司 | 下电极装置及半导体工艺设备 |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08213378A (ja) * | 1994-11-09 | 1996-08-20 | Hitachi Electron Eng Co Ltd | プラズマcvd装置及び酸化膜の成膜方法 |
JPH098014A (ja) * | 1995-06-15 | 1997-01-10 | Tokyo Electron Ltd | プラズマ成膜方法及びその装置 |
JPH11251303A (ja) * | 1997-10-20 | 1999-09-17 | Tokyo Electron Yamanashi Ltd | プラズマ処理装置 |
JP2008130651A (ja) * | 2006-11-17 | 2008-06-05 | Matsushita Electric Ind Co Ltd | プラズマエッチング装置 |
JP2008251830A (ja) * | 2007-03-30 | 2008-10-16 | Matsushita Electric Ind Co Ltd | プラズマ処理装置 |
JP2010518259A (ja) * | 2007-02-12 | 2010-05-27 | 東京エレクトロン株式会社 | 原子層堆積システム及び方法 |
JP4503702B2 (ja) * | 2008-06-17 | 2010-07-14 | 株式会社シンクロン | バイアススパッタ装置 |
JP4550113B2 (ja) * | 2005-04-28 | 2010-09-22 | キヤノンアネルバ株式会社 | エッチング方法、低誘電率誘電体膜の製造方法、多孔性部材の製造方法並びにエッチング装置及び薄膜作製装置 |
JP2010239102A (ja) * | 2008-06-27 | 2010-10-21 | Tokyo Electron Ltd | 成膜装置、成膜方法及び記憶媒体 |
JP2011040574A (ja) * | 2009-08-11 | 2011-02-24 | Tokyo Electron Ltd | 成膜装置、成膜方法及び記憶媒体 |
US20110132874A1 (en) * | 2009-12-03 | 2011-06-09 | Richard Gottscho | Small plasma chamber systems and methods |
JP2011146464A (ja) * | 2010-01-13 | 2011-07-28 | Panasonic Corp | プラズマ処理装置 |
JP2011151343A (ja) * | 2009-12-25 | 2011-08-04 | Tokyo Electron Ltd | プラズマ処理装置 |
Family Cites Families (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6024826A (en) * | 1996-05-13 | 2000-02-15 | Applied Materials, Inc. | Plasma reactor with heated source of a polymer-hardening precursor material |
US5234529A (en) | 1991-10-10 | 1993-08-10 | Johnson Wayne L | Plasma generating apparatus employing capacitive shielding and process for using such apparatus |
JP3144664B2 (ja) | 1992-08-29 | 2001-03-12 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
US5309063A (en) | 1993-03-04 | 1994-05-03 | David Sarnoff Research Center, Inc. | Inductive coil for inductively coupled plasma production apparatus |
US5619103A (en) * | 1993-11-02 | 1997-04-08 | Wisconsin Alumni Research Foundation | Inductively coupled plasma generating devices |
US5540800A (en) | 1994-06-23 | 1996-07-30 | Applied Materials, Inc. | Inductively coupled high density plasma reactor for plasma assisted materials processing |
TW279240B (en) | 1995-08-30 | 1996-06-21 | Applied Materials Inc | Parallel-plate icp source/rf bias electrode head |
US6000360A (en) | 1996-07-03 | 1999-12-14 | Tokyo Electron Limited | Plasma processing apparatus |
TW403959B (en) | 1996-11-27 | 2000-09-01 | Hitachi Ltd | Plasma treatment device |
US6042687A (en) | 1997-06-30 | 2000-03-28 | Lam Research Corporation | Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing |
US6149760A (en) * | 1997-10-20 | 2000-11-21 | Tokyo Electron Yamanashi Limited | Plasma processing apparatus |
US6213050B1 (en) * | 1998-12-01 | 2001-04-10 | Silicon Genesis Corporation | Enhanced plasma mode and computer system for plasma immersion ion implantation |
US6232236B1 (en) * | 1999-08-03 | 2001-05-15 | Applied Materials, Inc. | Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system |
US6322661B1 (en) | 1999-11-15 | 2001-11-27 | Lam Research Corporation | Method and apparatus for controlling the volume of a plasma |
US6451161B1 (en) | 2000-04-10 | 2002-09-17 | Nano-Architect Research Corporation | Method and apparatus for generating high-density uniform plasma |
KR100367662B1 (ko) | 2000-05-02 | 2003-01-10 | 주식회사 셈테크놀러지 | 하이퍼서멀 중성입자 발생 장치 및 이를 채용하는 중성입자 처리 장치 |
JP2002237486A (ja) | 2001-02-08 | 2002-08-23 | Tokyo Electron Ltd | プラズマ処理装置およびプラズマ処理方法 |
US6417626B1 (en) * | 2001-03-01 | 2002-07-09 | Tokyo Electron Limited | Immersed inductively—coupled plasma source |
US6685799B2 (en) | 2001-03-14 | 2004-02-03 | Applied Materials Inc. | Variable efficiency faraday shield |
JP3903730B2 (ja) | 2001-04-04 | 2007-04-11 | 松下電器産業株式会社 | エッチング方法 |
US6869641B2 (en) | 2002-07-03 | 2005-03-22 | Unaxis Balzers Ltd. | Method and apparatus for ALD on a rotary susceptor |
US20040058293A1 (en) | 2002-08-06 | 2004-03-25 | Tue Nguyen | Assembly line processing system |
US7153542B2 (en) | 2002-08-06 | 2006-12-26 | Tegal Corporation | Assembly line processing method |
KR100497748B1 (ko) * | 2002-09-17 | 2005-06-29 | 주식회사 무한 | 반도체소자 제조용 원자층 증착 장치 및 원자층 증착 방법 |
US20040163595A1 (en) | 2003-02-26 | 2004-08-26 | Manabu Edamura | Plasma processing apparatus |
US7232767B2 (en) | 2003-04-01 | 2007-06-19 | Mattson Technology, Inc. | Slotted electrostatic shield modification for improved etch and CVD process uniformity |
US7625460B2 (en) * | 2003-08-01 | 2009-12-01 | Micron Technology, Inc. | Multifrequency plasma reactor |
US20070218702A1 (en) | 2006-03-15 | 2007-09-20 | Asm Japan K.K. | Semiconductor-processing apparatus with rotating susceptor |
US7524750B2 (en) | 2006-04-17 | 2009-04-28 | Applied Materials, Inc. | Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD |
US8187679B2 (en) | 2006-07-29 | 2012-05-29 | Lotus Applied Technology, Llc | Radical-enhanced atomic layer deposition system and method |
JP4875527B2 (ja) | 2007-03-29 | 2012-02-15 | 三菱重工業株式会社 | プラズマ発生装置およびこれを用いた薄膜形成装置 |
JP2008288437A (ja) | 2007-05-18 | 2008-11-27 | Toshiba Corp | プラズマ処理装置及びプラズマ処理方法 |
JP5098882B2 (ja) | 2007-08-31 | 2012-12-12 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP2010126797A (ja) | 2008-11-28 | 2010-06-10 | Tokyo Electron Ltd | 成膜装置、半導体製造装置、これらに用いられるサセプタ、プログラム、およびコンピュータ可読記憶媒体 |
JP4621287B2 (ja) | 2009-03-11 | 2011-01-26 | 株式会社イー・エム・ディー | プラズマ処理装置 |
JP5141607B2 (ja) | 2009-03-13 | 2013-02-13 | 東京エレクトロン株式会社 | 成膜装置 |
JP5131240B2 (ja) | 2009-04-09 | 2013-01-30 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
US8758512B2 (en) | 2009-06-08 | 2014-06-24 | Veeco Ald Inc. | Vapor deposition reactor and method for forming thin film |
WO2011022612A2 (en) | 2009-08-21 | 2011-02-24 | Mattson Technology, Inc. | Inductive plasma source |
JP5444961B2 (ja) | 2009-09-01 | 2014-03-19 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
JP5482196B2 (ja) | 2009-12-25 | 2014-04-23 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
US20110204023A1 (en) | 2010-02-22 | 2011-08-25 | No-Hyun Huh | Multi inductively coupled plasma reactor and method thereof |
WO2012012381A1 (en) | 2010-07-22 | 2012-01-26 | Synos Technology, Inc. | Treating surface of substrate using inert gas plasma in atomic layer deposition |
JP5635367B2 (ja) | 2010-10-29 | 2014-12-03 | 株式会社イー・エム・ディー | プラズマ処理装置 |
US9398680B2 (en) | 2010-12-03 | 2016-07-19 | Lam Research Corporation | Immersible plasma coil assembly and method for operating the same |
US9490106B2 (en) | 2011-04-28 | 2016-11-08 | Lam Research Corporation | Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil |
JP5602711B2 (ja) | 2011-05-18 | 2014-10-08 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
-
2012
- 2012-12-14 JP JP2012273581A patent/JP5939147B2/ja active Active
-
2013
- 2013-12-09 US US14/100,224 patent/US9583312B2/en active Active
- 2013-12-11 KR KR1020130153691A patent/KR101672078B1/ko active IP Right Grant
- 2013-12-13 TW TW102146010A patent/TWI546407B/zh active
- 2013-12-13 CN CN201310686986.8A patent/CN103866297B/zh active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08213378A (ja) * | 1994-11-09 | 1996-08-20 | Hitachi Electron Eng Co Ltd | プラズマcvd装置及び酸化膜の成膜方法 |
JPH098014A (ja) * | 1995-06-15 | 1997-01-10 | Tokyo Electron Ltd | プラズマ成膜方法及びその装置 |
JPH11251303A (ja) * | 1997-10-20 | 1999-09-17 | Tokyo Electron Yamanashi Ltd | プラズマ処理装置 |
JP4550113B2 (ja) * | 2005-04-28 | 2010-09-22 | キヤノンアネルバ株式会社 | エッチング方法、低誘電率誘電体膜の製造方法、多孔性部材の製造方法並びにエッチング装置及び薄膜作製装置 |
JP2008130651A (ja) * | 2006-11-17 | 2008-06-05 | Matsushita Electric Ind Co Ltd | プラズマエッチング装置 |
JP2010518259A (ja) * | 2007-02-12 | 2010-05-27 | 東京エレクトロン株式会社 | 原子層堆積システム及び方法 |
JP2008251830A (ja) * | 2007-03-30 | 2008-10-16 | Matsushita Electric Ind Co Ltd | プラズマ処理装置 |
JP4503702B2 (ja) * | 2008-06-17 | 2010-07-14 | 株式会社シンクロン | バイアススパッタ装置 |
JP2010239102A (ja) * | 2008-06-27 | 2010-10-21 | Tokyo Electron Ltd | 成膜装置、成膜方法及び記憶媒体 |
JP2011040574A (ja) * | 2009-08-11 | 2011-02-24 | Tokyo Electron Ltd | 成膜装置、成膜方法及び記憶媒体 |
US20110132874A1 (en) * | 2009-12-03 | 2011-06-09 | Richard Gottscho | Small plasma chamber systems and methods |
JP2011151343A (ja) * | 2009-12-25 | 2011-08-04 | Tokyo Electron Ltd | プラズマ処理装置 |
JP2011146464A (ja) * | 2010-01-13 | 2011-07-28 | Panasonic Corp | プラズマ処理装置 |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101991550B1 (ko) * | 2015-02-26 | 2019-06-20 | 도쿄엘렉트론가부시키가이샤 | 실리콘 함유막의 성막 방법 |
KR20160104562A (ko) * | 2015-02-26 | 2016-09-05 | 도쿄엘렉트론가부시키가이샤 | 실리콘 함유막의 성막 방법 |
JP2016157884A (ja) * | 2015-02-26 | 2016-09-01 | 東京エレクトロン株式会社 | シリコン含有膜の成膜方法 |
KR20170052505A (ko) * | 2015-11-04 | 2017-05-12 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치, 기판 처리 방법 및 기판 보유 지지 부재 |
JP2017092093A (ja) * | 2015-11-04 | 2017-05-25 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び基板保持部材 |
KR102106666B1 (ko) * | 2015-11-04 | 2020-05-04 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치, 기판 처리 방법 및 기판 보유 지지 부재 |
JP2018041531A (ja) * | 2016-09-05 | 2018-03-15 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
US11094509B2 (en) | 2016-09-05 | 2021-08-17 | Hitachi High-Tech Corporation | Plasma processing apparatus |
JP2018160507A (ja) * | 2017-03-22 | 2018-10-11 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法およびプログラム |
JP2021528849A (ja) * | 2018-06-18 | 2021-10-21 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 対にされた動的平行板の容量結合プラズマ |
JP7078762B2 (ja) | 2018-06-18 | 2022-05-31 | アプライド マテリアルズ インコーポレイテッド | 対にされた動的平行板の容量結合プラズマ |
JP2022122897A (ja) * | 2018-06-18 | 2022-08-23 | アプライド マテリアルズ インコーポレイテッド | 対にされた動的平行板の容量結合プラズマ |
JP7422807B2 (ja) | 2018-06-18 | 2024-01-26 | アプライド マテリアルズ インコーポレイテッド | 対にされた動的平行板の容量結合プラズマ |
WO2020027593A1 (ko) * | 2018-08-01 | 2020-02-06 | 한양대학교 산학협력단 | 전자 및 이온 조절을 이용한 박막 증착 방법 |
JP2022542271A (ja) * | 2019-07-30 | 2022-09-30 | 江蘇魯▲もん▼儀器有限公司 | 誘導結合プラズマ処理システム |
JP7364288B2 (ja) | 2019-07-30 | 2023-10-18 | 江蘇魯▲もん▼儀器股▲ふん▼有限公司 | 誘導結合プラズマ処理システム |
US11804365B2 (en) | 2019-09-02 | 2023-10-31 | Kokusai Electric Corporation | Substrate processing apparatus, plasma generating apparatus, and method of manufacturing semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
TW201441413A (zh) | 2014-11-01 |
US20140170859A1 (en) | 2014-06-19 |
CN103866297B (zh) | 2017-06-09 |
KR20140077841A (ko) | 2014-06-24 |
US9583312B2 (en) | 2017-02-28 |
CN103866297A (zh) | 2014-06-18 |
JP5939147B2 (ja) | 2016-06-22 |
TWI546407B (zh) | 2016-08-21 |
KR101672078B1 (ko) | 2016-11-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5939147B2 (ja) | 成膜装置、基板処理装置及び成膜方法 | |
JP5971144B2 (ja) | 基板処理装置及び成膜方法 | |
JP6011417B2 (ja) | 成膜装置、基板処理装置及び成膜方法 | |
JP6040609B2 (ja) | 成膜装置及び成膜方法 | |
KR101563773B1 (ko) | 성막 장치, 성막 방법 및 기억 매체 | |
JP5803714B2 (ja) | 成膜装置 | |
JP2015165549A (ja) | 基板処理方法及び基板処理装置 | |
TWI569692B (zh) | 電漿處理裝置及電漿處理方法 | |
JP2013045903A (ja) | 成膜装置、基板処理装置及びプラズマ発生装置 | |
JP2015090916A (ja) | 基板処理装置及び基板処理方法 | |
KR102198727B1 (ko) | 보호막 형성 방법 | |
JP2015220293A (ja) | プラズマ処理方法及びプラズマ処理装置 | |
JP2017107963A (ja) | プラズマ処理装置及び成膜方法 | |
KR101802022B1 (ko) | 플라즈마 처리 장치 및 플라즈마 처리 방법 | |
KR102460932B1 (ko) | 기판 처리 장치 | |
US20210351005A1 (en) | Plasma processing apparatus and plasma processing method | |
KR102658168B1 (ko) | 성막 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150421 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20151225 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160119 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160322 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160419 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160502 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5939147 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |