JP2014116597A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2014116597A JP2014116597A JP2013235539A JP2013235539A JP2014116597A JP 2014116597 A JP2014116597 A JP 2014116597A JP 2013235539 A JP2013235539 A JP 2013235539A JP 2013235539 A JP2013235539 A JP 2013235539A JP 2014116597 A JP2014116597 A JP 2014116597A
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- oxide
- layer
- electrode layer
- oxide semiconductor
- transistor
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 437
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 75
- 239000011701 zinc Substances 0.000 claims description 91
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 82
- 239000001301 oxygen Substances 0.000 claims description 82
- 229910052760 oxygen Inorganic materials 0.000 claims description 82
- 238000010438 heat treatment Methods 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 229910052738 indium Inorganic materials 0.000 claims description 20
- 229910052733 gallium Inorganic materials 0.000 claims description 18
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- 229910052721 tungsten Inorganic materials 0.000 claims description 12
- 229910052746 lanthanum Inorganic materials 0.000 claims description 11
- 229910052684 Cerium Inorganic materials 0.000 claims description 10
- 229910052718 tin Inorganic materials 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052726 zirconium Inorganic materials 0.000 claims description 9
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 8
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 229910052707 ruthenium Inorganic materials 0.000 claims description 6
- 229910052735 hafnium Inorganic materials 0.000 claims description 5
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- 238000009413 insulation Methods 0.000 abstract 6
- 239000010410 layer Substances 0.000 description 831
- 239000010408 film Substances 0.000 description 315
- 230000015654 memory Effects 0.000 description 117
- 108091006146 Channels Proteins 0.000 description 82
- 239000013078 crystal Substances 0.000 description 54
- 239000000463 material Substances 0.000 description 53
- 238000000034 method Methods 0.000 description 52
- 239000003990 capacitor Substances 0.000 description 44
- 239000000758 substrate Substances 0.000 description 41
- 239000012535 impurity Substances 0.000 description 35
- 125000004429 atom Chemical group 0.000 description 30
- 230000006870 function Effects 0.000 description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 229910052710 silicon Inorganic materials 0.000 description 25
- 239000010703 silicon Substances 0.000 description 25
- 238000004544 sputter deposition Methods 0.000 description 25
- 229910052739 hydrogen Inorganic materials 0.000 description 21
- 239000001257 hydrogen Substances 0.000 description 21
- 239000007789 gas Substances 0.000 description 19
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 17
- 239000004020 conductor Substances 0.000 description 14
- 230000007547 defect Effects 0.000 description 14
- 238000001514 detection method Methods 0.000 description 12
- 239000000203 mixture Substances 0.000 description 12
- 238000012360 testing method Methods 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 11
- 229910052799 carbon Inorganic materials 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- 230000006866 deterioration Effects 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 230000005684 electric field Effects 0.000 description 9
- 238000005530 etching Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 239000000523 sample Substances 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 229910052725 zinc Inorganic materials 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 7
- 238000000231 atomic layer deposition Methods 0.000 description 7
- 239000000969 carrier Substances 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 5
- 239000000470 constituent Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000002003 electron diffraction Methods 0.000 description 5
- 230000005669 field effect Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229910001868 water Inorganic materials 0.000 description 5
- 229910018137 Al-Zn Inorganic materials 0.000 description 4
- 229910018573 Al—Zn Inorganic materials 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 238000009616 inductively coupled plasma Methods 0.000 description 4
- 229910001416 lithium ion Inorganic materials 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000001451 molecular beam epitaxy Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000005477 sputtering target Methods 0.000 description 4
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 4
- 229910052727 yttrium Inorganic materials 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 3
- 229910001195 gallium oxide Inorganic materials 0.000 description 3
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 3
- 229910000449 hafnium oxide Inorganic materials 0.000 description 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 3
- 230000014759 maintenance of location Effects 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 3
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000003381 stabilizer Substances 0.000 description 3
- 229910001936 tantalum oxide Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 description 3
- 229910018120 Al-Ga-Zn Inorganic materials 0.000 description 2
- 102100040844 Dual specificity protein kinase CLK2 Human genes 0.000 description 2
- 101000749291 Homo sapiens Dual specificity protein kinase CLK2 Proteins 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 241000156302 Porcine hemagglutinating encephalomyelitis virus Species 0.000 description 2
- 229910020868 Sn-Ga-Zn Inorganic materials 0.000 description 2
- 229910020994 Sn-Zn Inorganic materials 0.000 description 2
- 229910009069 Sn—Zn Inorganic materials 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 229910007541 Zn O Inorganic materials 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000012916 structural analysis Methods 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 2
- 238000002042 time-of-flight secondary ion mass spectrometry Methods 0.000 description 2
- 238000004402 ultra-violet photoelectron spectroscopy Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 102100040862 Dual specificity protein kinase CLK1 Human genes 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 235000015842 Hesperis Nutrition 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 101000749294 Homo sapiens Dual specificity protein kinase CLK1 Proteins 0.000 description 1
- 235000012633 Iberis amara Nutrition 0.000 description 1
- 240000002329 Inga feuillei Species 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 1
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 241001591005 Siga Species 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910020833 Sn-Al-Zn Inorganic materials 0.000 description 1
- 229910020944 Sn-Mg Inorganic materials 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 229910009369 Zn Mg Inorganic materials 0.000 description 1
- 229910007573 Zn-Mg Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052800 carbon group element Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000000502 dialysis Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 230000037406 food intake Effects 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- -1 lanthanum (La) Chemical class 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002159 nanocrystal Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- FRNOGLGSGLTDKL-UHFFFAOYSA-N thulium atom Chemical compound [Tm] FRNOGLGSGLTDKL-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
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Abstract
【解決手段】第1の絶縁膜と、第1の絶縁膜上に形成され、チャネル形成領域を含む酸化物半導体層と、酸化物半導体層を覆うように形成される第2の絶縁膜と、酸化物半導体層と電気的に接続されるソース電極及びドレイン電極と、を有し、第1の絶縁膜を挟んで形成され、チャネル形成領域に重畳する第1のゲート電極層と、第2の絶縁膜を挟んで形成され、チャネル形成領域に重畳する第2のゲート電極層と、第2の絶縁膜を挟んで形成され、酸化物半導体層のチャネル幅方向の側面に重畳する第3のゲート電極層と、を有する。
【選択図】図1
Description
本実施の形態では、実施の形態1で説明した図1に示す半導体装置の作製方法について図2乃至図4を用いて説明する。
本実施の形態では、実施の形態1で説明したトランジスタとは異なる構造のトランジスタについて図5乃至図9を用いて説明する。
本実施の形態では、実施の形態3に示す図5で説明したトランジスタの変形例について、図10を用いて説明を行う。
本実施の形態では、上記実施の形態における半導体装置の一例として、半導体記憶装置の例について説明する。
本実施の形態では、実施の形態1乃至5で説明した半導体装置を用いることのできる電子機器及び電気機器の例について説明する。
酸化物半導体(OS)層を用いたトランジスタの信頼性を高めるためには、信頼性に影響を与える要因を明らかにすることが重要である。そこで、酸化物半導体層を用いたトランジスタの信頼性を高めるために、以下のような劣化機構のモデルを立てた。
104 第1のゲート電極層
105 絶縁膜
106 第1の絶縁膜
107 n型領域
108 酸化物半導体層
109 導電膜
110 ソース電極層
110a ソース電極層
110b ソース電極層
111 導電膜
112 ドレイン電極層
112a ドレイン電極層
112b ドレイン電極層
114 第2の絶縁膜
115 導電膜
116 第2のゲート電極層
118 第3のゲート電極層
118a 第3のゲート電極層
118b 第3のゲート電極層
120 第3の絶縁膜
207 n型領域
208 酸化物積層
208a 第1の酸化物層
208b 酸化物半導体層
208c 第2の酸化物層
208d 第3の酸化物層
210 ソース電極層
210a ソース電極層
210b ソース電極層
212 ドレイン電極層
212a ドレイン電極層
212b ドレイン電極層
258 酸化物積層
300 メモリセル
301 サブメモリセル
301_1 サブメモリセル
301_2 サブメモリセル
308 酸化物積層
308a 第1の酸化物層
308b 酸化物半導体層
308c 第2の酸化物層
308d 第3の酸化物層
311 トランジスタ
312 容量素子
313 トランジスタ
500 マイクロコンピュータ
501 直流電源
502 バスライン
503 パワーゲートコントローラ
504 パワーゲート
505 CPU
506 揮発性記憶部
507 不揮発性記憶部
508 インターフェース
509 検出部
511 光センサ
512 アンプ
513 ADコンバータ
530 発光素子
1141 スイッチング素子
1142 メモリセル
1143 メモリセル群
1189 ROMインターフェース
1190 基板
1191 ALU
1192 ALUコントローラ
1193 インストラクションデコーダ
1194 インタラプトコントローラ
1195 タイミングコントローラ
1196 レジスタ
1197 レジスタコントローラ
1198 バスインターフェース
1199 ROM
3000 基板
3106 酸化物半導体層
3108 酸化物半導体層
3108_1 ソース電極層
3108_2 ソース電極層
3108a_1 ソース電極層
3108a_2 ソース電極層
3108b_1 ソース電極層
3108b_2 ソース電極層
3110_1 ドレイン電極層
3110_2 ドレイン電極層
3110a_1 ドレイン電極層
3110a_2 ドレイン電極層
3110b_1 ドレイン電極層
3110b_2 ドレイン電極層
3112 第2の絶縁膜
3114_1 ゲート電極層
3114_2 ゲート電極層
3114a_1 ゲート電極層
3114a_2 ゲート電極層
3116 第3の絶縁膜
3117_1 容量電極層
3117_2 容量電極層
3200_1 トランジスタ
3200_2 トランジスタ
3205_1 容量素子
3205_2 容量素子
3220 第1の絶縁膜
3240 ゲート電極層
3300 素子分離絶縁層
8100 警報装置
8101 マイクロコンピュータ
8200 室内機
8201 筐体
8202 送風口
8203 CPU
8204 室外機
8300 電気冷凍冷蔵庫
8301 筐体
8302 冷蔵室用扉
8303 冷凍室用扉
8304 CPU
9700 電気自動車
9701 二次電池
9702 制御回路
9703 駆動装置
9704 処理装置
Claims (11)
- 第1の絶縁膜と、
前記第1の絶縁膜上に形成され、チャネル形成領域を含む酸化物半導体層と、
前記酸化物半導体層を覆うように形成される第2の絶縁膜と、
前記酸化物半導体層と電気的に接続されるソース電極層及びドレイン電極層と、を有し、
前記第1の絶縁膜を挟んで形成され、前記チャネル形成領域に重畳する第1のゲート電極層と、
前記第2の絶縁膜を挟んで形成され、前記チャネル形成領域に重畳する第2のゲート電極層と、
前記第2の絶縁膜を挟んで形成され、前記酸化物半導体層のチャネル幅方向に垂直な側面に重畳する第3のゲート電極層と、を有する
ことを特徴とする半導体装置。 - 第1の絶縁膜と、
前記第1の絶縁膜上に形成される第1の酸化物層と、
前記第1の酸化物層上に形成され、チャネル形成領域を含む酸化物半導体層と、
前記酸化物半導体層上に形成される第2の酸化物層と、
前記第1の酸化物層、前記酸化物半導体層、及び前記第2の酸化物層を覆うように形成される第2の絶縁膜と、
前記酸化物半導体層と電気的に接続されるソース電極層及びドレイン電極層と、を有し、
前記第1の絶縁膜を挟んで形成され、前記チャネル形成領域に重畳する第1のゲート電極層と、
前記第2の絶縁膜を挟んで形成され、前記チャネル形成領域に重畳する第2のゲート電極層と、
前記第2の絶縁膜を挟んで形成され、前記酸化物半導体層のチャネル幅方向に垂直な側面に重畳する第3のゲート電極層と、を有する
ことを特徴とする半導体装置。 - 請求項1または請求項2において、
前記第3のゲート電極層が、
前記酸化物半導体層のチャネル幅方向に垂直な側面に対向して形成される
ことを特徴とする半導体装置。 - 請求項1または請求項2において、
前記ソース電極層は、第1のソース電極層と、
前記第1のソース電極層を覆うように形成された第2のソース電極層と、を有し、
前記ドレイン電極層は、第1のドレイン電極層と、
前記第1のドレイン電極層を覆うように形成された第2のドレイン電極層と、を有する
ことを特徴とする半導体装置。 - 請求項1または請求項2において、
前記第1の絶縁膜は、加熱により酸素放出が可能な酸化物絶縁膜である
ことを特徴とする半導体装置。 - 請求項1乃至請求項3のいずれか一において、
前記酸化物半導体層は、
インジウム(In)、亜鉛(Zn)及びM(Mは、Al、Ga、Ge、Y、Zr、Sn、La、CeまたはHfの金属元素)を含むIn−M−Zn酸化物である
ことを特徴とする半導体装置。 - 請求項2において、
前記第1の酸化物層及び前記第2の酸化物層は、
前記酸化物半導体層よりも伝導帯下端のエネルギーが0.05eV以上2eV以下の範囲で真空準位に近いことを特徴とする半導体装置。 - 請求項2または請求項7において、
前記第1の酸化物層及び前記第2の酸化物層は、
インジウム(In)、亜鉛(Zn)及びM(Mは、Al、Ga、Ge、Y、Zr、Sn、La、CeまたはHfの金属元素)を含むIn−M−Zn酸化物であり、且つInに対するMの原子数比が前記酸化物半導体層よりも大きい
ことを特徴とする半導体装置。 - 請求項4において、
前記第1のソース電極層及び前記第1のドレイン電極層は、
Al、Cr、Cu、Ta、Ti、Mo、W、またはこれらを主成分とする合金材料であることを特徴とする半導体装置。 - 請求項4において、
前記第2のソース電極層及び前記第2のドレイン電極層は、
窒化タンタル、窒化チタン、ルテニウム、またはこれらを主成分とする合金材料であることを特徴とする半導体装置。 - 請求項1または請求項2において、
前記第1のゲート電極層は、
窒化タンタル、窒化チタン、ルテニウム、またはこれらを主成分とする合金材料であることを特徴とする半導体装置。
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JP2016178279A (ja) * | 2014-11-28 | 2016-10-06 | 株式会社半導体エネルギー研究所 | 半導体装置、及び該半導体装置を有する表示装置 |
JP2017168838A (ja) * | 2016-03-10 | 2017-09-21 | 株式会社半導体エネルギー研究所 | トランジスタ、電子機器 |
WO2018074324A1 (ja) * | 2016-10-19 | 2018-04-26 | シャープ株式会社 | アクティブマトリクス基板およびその製造方法 |
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JP6204145B2 (ja) | 2012-10-23 | 2017-09-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
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TWI605593B (zh) * | 2012-11-15 | 2017-11-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
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JP6220641B2 (ja) | 2012-11-15 | 2017-10-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI605593B (zh) * | 2012-11-15 | 2017-11-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
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2013
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- 2014-11-26 US US14/554,208 patent/US9190529B2/en active Active
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JP2017168838A (ja) * | 2016-03-10 | 2017-09-21 | 株式会社半導体エネルギー研究所 | トランジスタ、電子機器 |
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US10825843B2 (en) | 2016-10-19 | 2020-11-03 | Sharp Kabushiki Kaisha | Active matrix substrate and method for producing same |
Also Published As
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US20140131700A1 (en) | 2014-05-15 |
US20150155392A1 (en) | 2015-06-04 |
KR20140063430A (ko) | 2014-05-27 |
TW201427015A (zh) | 2014-07-01 |
US8901558B2 (en) | 2014-12-02 |
US9190529B2 (en) | 2015-11-17 |
TWI605593B (zh) | 2017-11-11 |
JP6285153B2 (ja) | 2018-02-28 |
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