JP2014085295A5 - - Google Patents

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Publication number
JP2014085295A5
JP2014085295A5 JP2012236483A JP2012236483A JP2014085295A5 JP 2014085295 A5 JP2014085295 A5 JP 2014085295A5 JP 2012236483 A JP2012236483 A JP 2012236483A JP 2012236483 A JP2012236483 A JP 2012236483A JP 2014085295 A5 JP2014085295 A5 JP 2014085295A5
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JP
Japan
Prior art keywords
light
wafer
measuring apparatus
shape measuring
notch
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Application number
JP2012236483A
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English (en)
Japanese (ja)
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JP6017263B2 (ja
JP2014085295A (ja
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Priority to JP2012236483A priority Critical patent/JP6017263B2/ja
Priority claimed from JP2012236483A external-priority patent/JP6017263B2/ja
Publication of JP2014085295A publication Critical patent/JP2014085295A/ja
Publication of JP2014085295A5 publication Critical patent/JP2014085295A5/ja
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Publication of JP6017263B2 publication Critical patent/JP6017263B2/ja
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JP2012236483A 2012-10-26 2012-10-26 ウェーハの形状測定装置 Active JP6017263B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012236483A JP6017263B2 (ja) 2012-10-26 2012-10-26 ウェーハの形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012236483A JP6017263B2 (ja) 2012-10-26 2012-10-26 ウェーハの形状測定装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016024994A Division JP6016150B2 (ja) 2016-02-12 2016-02-12 研削スリップ条痕観察装置及び研削スリップ条痕観察方法

Publications (3)

Publication Number Publication Date
JP2014085295A JP2014085295A (ja) 2014-05-12
JP2014085295A5 true JP2014085295A5 (enExample) 2015-07-23
JP6017263B2 JP6017263B2 (ja) 2016-10-26

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ID=50788470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012236483A Active JP6017263B2 (ja) 2012-10-26 2012-10-26 ウェーハの形状測定装置

Country Status (1)

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JP (1) JP6017263B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110411378B (zh) * 2019-08-06 2021-02-09 杭州众硅电子科技有限公司 一种晶圆检测装置及其检测方法
CN110608686B (zh) * 2019-10-31 2021-03-26 大连理工大学 一种有倒角零件的视觉测量方法和装置
JP2021143990A (ja) * 2020-03-13 2021-09-24 株式会社東京精密 検査装置及び加工装置
JP7537893B2 (ja) * 2020-03-24 2024-08-21 株式会社東京精密 エッジ部のチッピング検出装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3338080B2 (ja) * 1992-06-02 2002-10-28 株式会社神戸製鋼所 ディスク外周部検査装置
JP3282786B2 (ja) * 1996-07-29 2002-05-20 東芝セラミックス株式会社 ウエハの形状認識装置
JP2001004341A (ja) * 1999-06-16 2001-01-12 Toshiba Ceramics Co Ltd ウェーハ形状測定装置
JP3629244B2 (ja) * 2002-02-19 2005-03-16 本多エレクトロン株式会社 ウエーハ用検査装置
JP4441823B2 (ja) * 2003-11-26 2010-03-31 株式会社東京精密 面取り砥石のツルーイング方法及び面取り装置
JP2005268530A (ja) * 2004-03-18 2005-09-29 Olympus Corp 半導体ウエハのアライメント装置
JP2007303853A (ja) * 2006-05-09 2007-11-22 Nikon Corp 端部検査装置
JP2008014697A (ja) * 2006-07-04 2008-01-24 Nikon Corp 表面検査装置
JP2009020038A (ja) * 2007-07-13 2009-01-29 Nikon Corp 欠陥検査装置
JP2009267306A (ja) * 2008-04-30 2009-11-12 Nikon Corp 検査装置
JP2010181249A (ja) * 2009-02-05 2010-08-19 Kobelco Kaken:Kk 形状測定装置
JP2011145171A (ja) * 2010-01-14 2011-07-28 Nikon Corp 形状検出装置
JP2011196897A (ja) * 2010-03-23 2011-10-06 Nikon Corp 検査装置

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