JP2014083797A - 液体噴射ヘッド、液体噴射装置及び圧電素子 - Google Patents
液体噴射ヘッド、液体噴射装置及び圧電素子 Download PDFInfo
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
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- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
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Abstract
【解決手段】振動板50上に設けられた第1電極60と、第1電極60上に設けられた圧電体層70と、圧電体層70上に設けられた第2電極80と、を有する圧電素子300を具備し、圧電体層70は、第1電極60と第2電極80とで挟まれた能動部320を複数有し、第2電極80が複数の能動部320に亘って連続して設けられた共通電極を構成し、圧電体層70は、第1電極60の端部の外側に延設されて設けられており、振動板50は、第1電極60に対向する第1領域P1と、圧電体層70の第1電極60よりも外側に延設された部分に対向する第2領域P2と、圧電体層70よりも外側に設けられた第3領域P3と、を具備し、第2領域P2は、第1領域P1と実質的に同等又はそれ以上の厚さであり、第3領域P3は、第1領域P1よりも厚さが薄い。
【選択図】図3
Description
かかる態様では、振動板の第3領域の厚さを第1領域の厚さよりも薄くすることで、圧電素子の変位特性を向上することができる。また、振動板の第2領域の厚さを第1領域と実質的に同等又はそれ以上とすることで、圧電素子の変形時に振動板にクラック等の破壊が発生するのを抑制することができる。
かかる態様では、破壊を抑制して変位特性を向上した圧電素子を具備する液体噴射装置を実現できる。
かかる態様では、振動板の第3領域の厚さを第1領域の厚さよりも薄くすることで、圧電素子の変位特性を向上することができる。また、振動板の第2領域の厚さを第1領域と実質的に同等又はそれ以上とすることで、圧電素子の変形時に振動板にクラック等の破壊が発生するのを抑制することができる。
(実施形態1)
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの斜視図であり、図2は、インクジェット式記録ヘッドの平面図及び断面図であり、図3は、要部を拡大した断面図である。
以上、本発明の一実施形態について説明したが、本発明の基本的な構成は上述したものに限定されるものではない。
Claims (6)
- 振動板上に設けられた第1電極と、
該第1電極上に設けられた圧電体層と、
前記圧電体層上に設けられた第2電極と、を有する圧電素子を具備し、
前記圧電体層は、前記第1電極と前記第2電極とで挟まれた能動部を複数有し、
前記第2電極が複数の前記能動部に亘って連続して設けられた共通電極を構成し、
前記圧電体層は、前記第1電極の端部の外側に延設されて設けられており、
前記振動板は、前記第1電極に対向する第1領域と、
前記圧電体層の前記第1電極よりも外側に延設された部分に対向する第2領域と、
前記圧電体層よりも外側に設けられた第3領域と、を具備し、
前記第2領域は、前記第1領域と実質的に同等又はそれ以上の厚さであり、
前記第3領域は、前記第1領域よりも厚さが薄いことを特徴とする液体噴射ヘッド。 - 前記振動板が、第1振動板と、該第1振動板の前記第1電極側に設けられた第2振動板と、を具備することを特徴とする請求項1記載の液体噴射ヘッド。
- 前記第2振動板の前記第2領域の前記第1領域に対する厚さの差は、前記第2振動板の前記第1領域の厚さの10%以下であることを特徴とする請求項2記載の液体噴射ヘッド。
- 前記第2振動板の前記第3領域の厚さは、前記第2振動板の前記第1領域の厚さの20〜80%であることを特徴とする請求項2又は3記載の液体噴射ヘッド。
- 請求項1〜4の何れか一項に記載の液体噴射ヘッドを具備することを特徴とする液体噴射装置。
- 振動板上に設けられた第1電極と、
該第1電極上に設けられた圧電体層と、
前記圧電体層上に設けられた第2電極と、を具備し、
前記圧電体層は、前記第1電極と前記第2電極とで挟まれた能動部を複数有し、
前記第2電極が複数の前記能動部に亘って連続して設けられた共通電極を構成し、
前記圧電体層は、前記第1電極の端部の外側に延設されて設けられており、
前記振動板は、前記第1電極に対向する第1領域と、
前記圧電体層の前記第1電極よりも外側に延設された部分に対向する第2領域と、
前記圧電体層よりも外側に設けられた第3領域と、を具備し、
前記第2領域は、前記第1領域と実質的に同等又はそれ以上の厚さであり、
前記第3領域は、前記第1領域よりも厚さが薄いことを特徴とする圧電素子。
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