JP6074130B2 - 圧電素子の製造方法、圧電素子、液体噴射ヘッド及び液体噴射装置 - Google Patents
圧電素子の製造方法、圧電素子、液体噴射ヘッド及び液体噴射装置 Download PDFInfo
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- 239000007788 liquid Substances 0.000 title claims description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 229910052797 bismuth Inorganic materials 0.000 claims description 39
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 38
- 239000012212 insulator Substances 0.000 claims description 28
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 24
- 229910052726 zirconium Inorganic materials 0.000 claims description 24
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 20
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 17
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 17
- 229910052697 platinum Inorganic materials 0.000 claims description 9
- 238000005204 segregation Methods 0.000 claims description 7
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010408 film Substances 0.000 description 92
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- 239000000463 material Substances 0.000 description 22
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
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- 239000002243 precursor Substances 0.000 description 7
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910002113 barium titanate Inorganic materials 0.000 description 6
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 6
- 238000005238 degreasing Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
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- 239000010703 silicon Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 6
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- 238000001035 drying Methods 0.000 description 5
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- 235000012239 silicon dioxide Nutrition 0.000 description 5
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
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- 229910052748 manganese Inorganic materials 0.000 description 4
- 238000004151 rapid thermal annealing Methods 0.000 description 4
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- HKAASGNXFXHLHR-UHFFFAOYSA-N [Mn](=O)(=O)([O-])[O-].[Fe+2].[Bi+3] Chemical compound [Mn](=O)(=O)([O-])[O-].[Fe+2].[Bi+3] HKAASGNXFXHLHR-UHFFFAOYSA-N 0.000 description 2
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- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 description 2
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- LBSANEJBGMCTBH-UHFFFAOYSA-N manganate Chemical compound [O-][Mn]([O-])(=O)=O LBSANEJBGMCTBH-UHFFFAOYSA-N 0.000 description 2
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- YPQJHZKJHIBJAP-UHFFFAOYSA-N [K].[Bi] Chemical compound [K].[Bi] YPQJHZKJHIBJAP-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- RDQSSKKUSGYZQB-UHFFFAOYSA-N bismuthanylidyneiron Chemical compound [Fe].[Bi] RDQSSKKUSGYZQB-UHFFFAOYSA-N 0.000 description 1
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- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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- 239000002241 glass-ceramic Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002500 ions Chemical group 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
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- 230000002093 peripheral effect Effects 0.000 description 1
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- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- H10N30/00—Piezoelectric or electrostrictive devices
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- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
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- H10N30/00—Piezoelectric or electrostrictive devices
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- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/1051—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/10513—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
- H10N30/10516—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description
かかる態様では、密着層としてジルコニウム層を設けることにより、絶縁体層と第1電極との密着性が確保できると共に圧電体層から拡散したビスマスの偏析の問題もなく、圧電体層への密着層からの拡散による圧電特性の低下もないので、膜剥がれ等の問題がなく、圧電特性の劣化のない圧電素子が製造できる。
かかる態様では、密着層としてジルコニウムを含む層を設けることにより、絶縁体膜と第1電極との密着性が確保できると共に圧電体層から拡散したビスマスの偏析の問題もなく、圧電体層への密着層からの拡散による圧電特性の低下もないので、膜剥がれ等の問題がなく、圧電特性の劣化のない圧電素子が実現できる。
かかる態様では、密着層としてジルコニウムを含む層を設けることにより、絶縁体膜と第1電極との密着性が確保できると共に圧電体層から拡散したビスマスの偏析の問題もなく、圧電体層への密着層からの拡散による圧電特性の低下もないので、膜剥がれ等の問題がなく、圧電特性の劣化のない圧電素子を具備する液体噴射ヘッドが実現できる。
かかる態様では、膜剥がれ等の問題がなく、圧電特性の劣化のない圧電素子を具備する液体噴射ヘッドを備える液体噴射装置が実現できる。
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、図1の平面図であり、図3は図2のA−A′線断面図及びその要部拡大図である。図1〜図3に示すように、本実施形態の流路形成基板10は、シリコン単結晶基板からなり、その一方の面には二酸化シリコンからなる弾性膜50が形成されている。
面方位(110)の単結晶シリコン基板を熱酸化して二酸化シリコンからなる弾性膜50を厚さ1300nmで形成した。次いで、弾性膜50上にジルコニウム(Zr)をスパッタリング法により形成した後、ジルコニウムを約900℃で加熱することで熱酸化して厚さが400nmの酸化ジルコニウムからなる絶縁体膜55を形成した。
実施例と同様に、単結晶シリコン基板上に、弾性膜及び絶縁体膜を形成した。
次に、絶縁体膜55上に、DCスパッタ法でTiからなる膜を20nmの厚さで形成し、その上にDCスパッタ法で130nmのPtからなる第1電極を成膜した。
次に、実施例と同様の方法で圧電薄層を作製した。
実施例と同様に、単結晶シリコン基板上に、弾性膜及び絶縁体膜を形成した。
次に、絶縁体膜55上に、DCスパッタ法でTiからなる膜を20nmの厚さで形成し、700℃の熱酸化処理にて厚さ40nmのTiOx膜を作製した。その上にDCスパッタ法で130nmのPtからなる第1電極を成膜した。
次に、実施例と同様の方法で圧電薄層を作製した。
実施例及び各比較例について、二次イオン質量分析計(SIMS:カメカ インスツルメンツ(株)社製IMS−7f)を用いて、深さ組成プロファイルを測定した。結果を図9〜図11に示す。なお、この深さ組成プロファイルは133Csにより規格化したものである。
実施例と比較例2について、膜剥がれを走査型電子顕微鏡(SEM)で観察した結果を図12及び図13に示す。
以上、本発明の一実施形態を説明したが、本発明の基本的構成は上述したものに限定されるものではない。例えば、上述した実施形態では、流路形成基板10として、シリコン単結晶基板を例示したが、特にこれに限定されず、例えば、SOI基板、ガラス等の材料を用いるようにしてもよい。
Claims (8)
- 酸化ジルコニウムからなる絶縁体膜上にジルコニウムからなる密着層を形成する工程と、
前記密着層上に第1電極を形成する工程と、
前記第1電極上に、鉛を含有せずビスマスを含む複合酸化物からなる圧電体層を形成し、前記密着層が前記ビスマスの偏析を防止する工程と、
前記圧電体層上に第2電極を形成する工程と、
を具備することを特徴とする圧電素子の製造方法。 - 前記密着層は、10〜20nmの厚さで形成することを特徴とする請求項1記載の圧電素子の製造方法。
- 前記第1電極を、白金及びイリジウムの少なくとも一方で形成することを特徴とする請求項1又は2記載の圧電素子の製造方法。
- 第1電極と、
前記第1電極上に設けられ、鉛を含有せずビスマスを含む複合酸化物からなる圧電体層と、
前記圧電体層上に設けられた第2電極と、
前記第1電極の下に設けられ、前記圧電体層から拡散したビスマスの偏析を防止する、
ジルコニウムを含む密着層と、
前記密着層の下に設けられ酸化ジルコニウムからなる絶縁体層とを具備することを特徴とする圧電素子。 - 前記密着層が、ジルコニウム及び酸化ジルコニウムを含むことを特徴とする請求項4記載の圧電素子。
- 前記密着層が、ジルコニウム及び酸化ジルコニウムと、ビスマスとを含むことを特徴とする請求項4記載の圧電素子。
- 請求項4〜6の何れか一項に記載の圧電素子を備えることを特徴とする液体噴射ヘッド。
- 請求項7に記載の液体噴射ヘッドを備えることを特徴とする液体噴射装置。
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US13/429,103 US8746855B2 (en) | 2011-03-24 | 2012-03-23 | Method for manufacturing piezoelectric element, piezoelectric element, liquid ejecting head, and liquid ejecting apparatus |
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WO2018088093A1 (ja) * | 2016-11-11 | 2018-05-17 | 信越化学工業株式会社 | 複合基板、表面弾性波デバイスおよび複合基板の製造方法 |
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