JP2014073679A5 - - Google Patents
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- Publication number
- JP2014073679A5 JP2014073679A5 JP2013149492A JP2013149492A JP2014073679A5 JP 2014073679 A5 JP2014073679 A5 JP 2014073679A5 JP 2013149492 A JP2013149492 A JP 2013149492A JP 2013149492 A JP2013149492 A JP 2013149492A JP 2014073679 A5 JP2014073679 A5 JP 2014073679A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- manufacturing
- liquid
- head according
- photosensitive resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 26
- 238000004519 manufacturing process Methods 0.000 claims 18
- 239000011347 resin Substances 0.000 claims 13
- 229920005989 resin Polymers 0.000 claims 13
- 238000000034 method Methods 0.000 claims 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 4
- 229910052731 fluorine Inorganic materials 0.000 claims 4
- 239000011737 fluorine Substances 0.000 claims 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims 3
- -1 perfluoroalkyl ester Chemical class 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 206010034972 Photosensitivity reaction Diseases 0.000 claims 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 2
- 230000036211 photosensitivity Effects 0.000 claims 2
- 239000004094 surface-active agent Substances 0.000 claims 2
- 239000004925 Acrylic resin Substances 0.000 claims 1
- 229920000178 Acrylic resin Polymers 0.000 claims 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims 1
- 206010034960 Photophobia Diseases 0.000 claims 1
- 239000004952 Polyamide Substances 0.000 claims 1
- 239000004642 Polyimide Substances 0.000 claims 1
- 239000013256 coordination polymer Substances 0.000 claims 1
- 238000007766 curtain coating Methods 0.000 claims 1
- 239000003822 epoxy resin Substances 0.000 claims 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 1
- 208000013469 light sensitivity Diseases 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- YFSUTJLHUFNCNZ-UHFFFAOYSA-N perfluorooctane-1-sulfonic acid Chemical compound OS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F YFSUTJLHUFNCNZ-UHFFFAOYSA-N 0.000 claims 1
- SNGREZUHAYWORS-UHFFFAOYSA-N perfluorooctanoic acid Chemical compound OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F SNGREZUHAYWORS-UHFFFAOYSA-N 0.000 claims 1
- 229920002647 polyamide Polymers 0.000 claims 1
- 229920000647 polyepoxide Polymers 0.000 claims 1
- 229920000139 polyethylene terephthalate Polymers 0.000 claims 1
- 239000005020 polyethylene terephthalate Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims 1
- 239000008096 xylene Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013149492A JP6270363B2 (ja) | 2012-09-11 | 2013-07-18 | 液体吐出ヘッドの製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012199388 | 2012-09-11 | ||
| JP2012199388 | 2012-09-11 | ||
| JP2013149492A JP6270363B2 (ja) | 2012-09-11 | 2013-07-18 | 液体吐出ヘッドの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014073679A JP2014073679A (ja) | 2014-04-24 |
| JP2014073679A5 true JP2014073679A5 (enExample) | 2016-08-25 |
| JP6270363B2 JP6270363B2 (ja) | 2018-01-31 |
Family
ID=50231731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013149492A Expired - Fee Related JP6270363B2 (ja) | 2012-09-11 | 2013-07-18 | 液体吐出ヘッドの製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9421773B2 (enExample) |
| JP (1) | JP6270363B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016038468A (ja) * | 2014-08-07 | 2016-03-22 | キヤノン株式会社 | 感光性樹脂層のパターニング方法 |
| JP6395518B2 (ja) * | 2014-09-01 | 2018-09-26 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| JP2016221866A (ja) | 2015-06-01 | 2016-12-28 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| JP6719911B2 (ja) * | 2016-01-19 | 2020-07-08 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| US9855566B1 (en) * | 2016-10-17 | 2018-01-02 | Funai Electric Co., Ltd. | Fluid ejection head and process for making a fluid ejection head structure |
| JP6873836B2 (ja) | 2017-06-19 | 2021-05-19 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| JP7187199B2 (ja) * | 2018-07-19 | 2022-12-12 | キヤノン株式会社 | 部材の転写方法及び液体吐出ヘッドの製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2694054B2 (ja) | 1990-12-19 | 1997-12-24 | キヤノン株式会社 | 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置 |
| ATE158754T1 (de) | 1990-12-19 | 1997-10-15 | Canon Kk | Herstellungsverfahren für flüssigkeitsausströmenden aufzeichnungskopf |
| JP2001347671A (ja) * | 2000-06-07 | 2001-12-18 | Casio Comput Co Ltd | インクジェットプリンタヘッドの製造方法 |
| JP4183236B2 (ja) * | 2001-09-04 | 2008-11-19 | キヤノン株式会社 | 画像記録方法 |
| JP2004342988A (ja) * | 2003-05-19 | 2004-12-02 | Shinko Electric Ind Co Ltd | 半導体パッケージの製造方法、及び半導体装置の製造方法 |
| US7523553B2 (en) | 2006-02-02 | 2009-04-28 | Canon Kabushiki Kaisha | Method of manufacturing ink jet recording head |
| JP2007230234A (ja) | 2006-02-02 | 2007-09-13 | Canon Inc | インクジェット記録ヘッドの製造方法 |
| JP2011235533A (ja) * | 2010-05-10 | 2011-11-24 | Seiko Epson Corp | 液滴吐出ヘッドおよび液滴吐出装置 |
-
2013
- 2013-07-18 JP JP2013149492A patent/JP6270363B2/ja not_active Expired - Fee Related
- 2013-08-01 US US13/956,607 patent/US9421773B2/en not_active Expired - Fee Related
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