JP2014058040A - マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 - Google Patents
マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 Download PDFInfo
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- 239000010936 titanium Substances 0.000 claims description 5
- 229910052726 zirconium Inorganic materials 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 150000001340 alkali metals Chemical group 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052746 lanthanum Inorganic materials 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 3
- 239000000292 calcium oxide Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910000272 alkali metal oxide Inorganic materials 0.000 claims description 2
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 claims description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 150000002910 rare earth metals Chemical class 0.000 claims description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 2
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- 238000000034 method Methods 0.000 description 15
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
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- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
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- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- 238000005240 physical vapour deposition Methods 0.000 description 2
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- 208000032368 Device malfunction Diseases 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- 229910004688 Ti-V Inorganic materials 0.000 description 1
- 229910010968 Ti—V Inorganic materials 0.000 description 1
- 229910007727 Zr V Inorganic materials 0.000 description 1
- 229910003126 Zr–Ni Inorganic materials 0.000 description 1
- VNSWULZVUKFJHK-UHFFFAOYSA-N [Sr].[Bi] Chemical compound [Sr].[Bi] VNSWULZVUKFJHK-UHFFFAOYSA-N 0.000 description 1
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- RZEADQZDBXGRSM-UHFFFAOYSA-N bismuth lanthanum Chemical compound [La].[Bi] RZEADQZDBXGRSM-UHFFFAOYSA-N 0.000 description 1
- 229910002115 bismuth titanate Inorganic materials 0.000 description 1
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- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
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- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
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- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
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- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910002058 ternary alloy Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
- B81C1/00285—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
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- C—CHEMISTRY; METALLURGY
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/26—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device including materials for absorbing or reacting with moisture or other undesired substances, e.g. getters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
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Abstract
【解決手段】本発明は、マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスの製造のための支持体に関する。該支持体(10;60)は、裏打ち要素の機能を有する基板(11;61)を含み、その上に、気体吸収物質が別個の堆積物(13、13’、…;63、63’、…)の形状で堆積され、その堆積物は、該支持体(10;60)の周りに存在する大気に少なくとも一部暴露される。
【選択図】図1
Description
明確に記載するために、図においては、本発明の支持体の高さ-直径の比および、基板上の気体吸収物質堆積物の横方向の寸法は、実際の寸法に関して誇張されている。さらに、図においては、支持体はいつもウエハの幾何学的形態、すなわち低い円盤の物質で示されている。というのは、これは固体デバイスの製造業者に一般的に採用された形態であるからであるが、この形態はまた異なることができ、例えば正方形または長方形であることができる。
Claims (21)
- 機械的支持の機能を有する基板(11;61)を含む、マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスを製造するための支持体(10;60)であって、該基板上に、気体吸収物質が別個の堆積物(13、13’、…;63、63’、…)の形状で堆積され、その堆積物は、該支持体(10;60)の近くに存在する大気に少なくとも一部暴露されることを特徴とする支持体(10;60)。
- 該別個の堆積物(13、13’、…;63、63’、…)が、該支持体(10;60)の近くに存在する大気に完全に暴露されることを特徴とする請求項1記載の支持体(10;60)。
- 該基板(11)が、マイクロエレクトロニクスもしくはマイクロメカニクスのデバイスまたはその部品の製造と適合性の物質の層(14)で被覆され、該層(14)は、該支持体の近くに存在する大気と該堆積物(13、13’、…)をつなぐ通路(15、15’、…)を有することを特徴とする請求項1または2記載の支持体(10)。
- 該基板(61)が、該気体吸収物質の別個の堆積物(63、63’、…)を含むように適合された空洞(65、65’、…)を備えることを特徴とする請求項1または2記載の支持体(60)。
- 該基板(11;61)が実現される物質が、金属、セラミック、ガラスまたは半導体の中から選択されることを特徴とする請求項1または2記載の支持体。
- 該物質がシリコンであることを特徴とする請求項5記載の支持体。
- 該気体吸収物質がゲッター物質であることを特徴とする請求項1または2記載の支持体。
- 該ゲッター物質が、金属Zr、Ti、Nb、Ta、V、これらの金属間の合金または、これらの金属と、Cr、Mn、Fe、Co、Ni、Al、Y、Laおよび希土類の中から選ばれる1種以上の元素との間の合金から選択される請求項7記載の支持体。
- 該ゲッター物質がチタンであることを特徴とする請求項8記載の支持体。
- 該ゲッター物質がジルコニウムであることを特徴とする請求項8記載の支持体。
- 該ゲッター物質が、Zr84%-Al16%の重量百分率組成を有する合金であることを特徴とする請求項8記載の支持体。
- 該ゲッター物質が、Zr70%-V24.6%-Fe5.4%の重量百分率組成を有する合金であることを特徴とする請求項8記載の支持体。
- 該ゲッター物質が、Zr80.8%-Co14.2%-TR5%の重量百分率組成を有する合金であり、TRは希土類、イットリウム、ランタンまたはこれらの混合物を意味することを特徴とする請求項8記載の支持体。
- 該気体吸収物質が乾燥剤物質であることを特徴とする請求項1または2記載の支持体。
- 該乾燥剤物質が、アルカリ金属もしくはアルカリ土類金属の酸化物の中から選択されることを特徴とする請求項14記載の支持体。
- 該乾燥剤物質が酸化カルシウムであることを特徴とする請求項15記載の支持体。
- 気体吸収物質の該別個の堆積物(13、13’、…;63、63’、…)が、0.1〜5μmの範囲内の厚みを有することを特徴とする請求項3または4記載の支持体。
- 該マイクロエレクトロニクス、マイクロオプトエレクトロニクスもしくはマイクロメカニクスのデバイスまたはその部品の製造と適合性の物質が半導体物質である請求項3記載の支持体。
- 該物質がシリコンである請求項14記載の支持体。
- マイクロエレクトロニクス、マイクロオプトエレクトロニクスもしくはマイクロメカニクスのデバイスまたはその部品の製造と適合性の物質の該層が、1〜20μmの範囲内の厚みを有する請求項3記載の支持体。
- 請求項1記載の支持体を、マイクロメカニクスのデバイスの製造において被覆要素として使用する方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI2001A001558 | 2001-07-20 | ||
IT2001MI001558A ITMI20011558A1 (it) | 2001-07-20 | 2001-07-20 | Supporto per dispositivi microelettronici microoptoelettronici o micromeccanici |
ITMI2002A000688 | 2002-04-03 | ||
IT2002MI000688A ITMI20020688A1 (it) | 2002-04-03 | 2002-04-03 | Supporto per dispositivi microelettronici microoptoelettronici o micromeccanici |
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JP2011229923A Division JP2012051106A (ja) | 2001-07-20 | 2011-10-19 | マイクロマシーン |
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JP2015240035A Division JP6140259B2 (ja) | 2001-07-20 | 2015-12-09 | マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 |
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JP2003514572A Expired - Lifetime JP4068555B2 (ja) | 2001-07-20 | 2002-07-16 | マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 |
JP2007295918A Withdrawn JP2008118147A (ja) | 2001-07-20 | 2007-11-14 | マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 |
JP2011229923A Withdrawn JP2012051106A (ja) | 2001-07-20 | 2011-10-19 | マイクロマシーン |
JP2013257638A Pending JP2014058040A (ja) | 2001-07-20 | 2013-12-13 | マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 |
JP2015240035A Expired - Lifetime JP6140259B2 (ja) | 2001-07-20 | 2015-12-09 | マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 |
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JP2003514572A Expired - Lifetime JP4068555B2 (ja) | 2001-07-20 | 2002-07-16 | マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 |
JP2007295918A Withdrawn JP2008118147A (ja) | 2001-07-20 | 2007-11-14 | マイクロエレクトロニクス、マイクロオプトエレクトロニクスまたはマイクロメカニクスのデバイスのための支持体 |
JP2011229923A Withdrawn JP2012051106A (ja) | 2001-07-20 | 2011-10-19 | マイクロマシーン |
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US (5) | US6897551B2 (ja) |
EP (1) | EP1412550B1 (ja) |
JP (5) | JP4068555B2 (ja) |
KR (1) | KR100611134B1 (ja) |
CN (1) | CN100503879C (ja) |
AT (1) | ATE426688T1 (ja) |
AU (1) | AU2002321832A1 (ja) |
CA (1) | CA2450412C (ja) |
DE (1) | DE60231715D1 (ja) |
DK (1) | DK1412550T3 (ja) |
ES (1) | ES2321913T3 (ja) |
HK (1) | HK1073336A1 (ja) |
MY (1) | MY135763A (ja) |
TW (1) | TW533188B (ja) |
WO (1) | WO2003009318A2 (ja) |
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- 2002-07-16 ES ES02755628T patent/ES2321913T3/es not_active Expired - Lifetime
- 2002-07-16 JP JP2003514572A patent/JP4068555B2/ja not_active Expired - Lifetime
- 2002-07-16 AU AU2002321832A patent/AU2002321832A1/en not_active Abandoned
- 2002-07-16 DK DK02755628T patent/DK1412550T3/da active
- 2002-07-16 DE DE60231715T patent/DE60231715D1/de not_active Expired - Lifetime
- 2002-07-16 CN CNB028147103A patent/CN100503879C/zh not_active Expired - Lifetime
- 2002-07-16 AT AT02755628T patent/ATE426688T1/de active
- 2002-07-16 WO PCT/IT2002/000466 patent/WO2003009318A2/en active Application Filing
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2005
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