JP2013541854A5 - - Google Patents
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- Publication number
- JP2013541854A5 JP2013541854A5 JP2013537237A JP2013537237A JP2013541854A5 JP 2013541854 A5 JP2013541854 A5 JP 2013541854A5 JP 2013537237 A JP2013537237 A JP 2013537237A JP 2013537237 A JP2013537237 A JP 2013537237A JP 2013541854 A5 JP2013541854 A5 JP 2013541854A5
- Authority
- JP
- Japan
- Prior art keywords
- vecsel
- optical
- mirror
- array
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 21
- 239000000758 substrate Substances 0.000 claims 8
- 230000005855 radiation Effects 0.000 claims 5
- 125000006850 spacer group Chemical group 0.000 claims 5
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000002310 reflectometry Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP10189788 | 2010-11-03 | ||
| EP10189788.2 | 2010-11-03 | ||
| PCT/IB2011/054850 WO2012059864A1 (en) | 2010-11-03 | 2011-11-01 | Optical element for vertical external-cavity surface-emitting laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013541854A JP2013541854A (ja) | 2013-11-14 |
| JP2013541854A5 true JP2013541854A5 (enExample) | 2014-12-18 |
Family
ID=45370528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013537237A Pending JP2013541854A (ja) | 2010-11-03 | 2011-11-01 | 垂直外部キャビティ面発光レーザに対する光学素子 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9112330B2 (enExample) |
| EP (1) | EP2636111B8 (enExample) |
| JP (1) | JP2013541854A (enExample) |
| CN (1) | CN103181040B (enExample) |
| WO (1) | WO2012059864A1 (enExample) |
Families Citing this family (43)
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| ES2726541T3 (es) * | 2012-03-05 | 2019-10-07 | Nanoprecision Products Inc | Dispositivo de acoplamiento que tiene una superficie reflectante estructurada para acoplar la entrada/salida de una fibra óptica |
| CN103412406B (zh) * | 2013-07-30 | 2015-12-09 | 中国科学院半导体研究所 | 一种用于激光显示的红光半导体面阵光源装置 |
| JP2015219422A (ja) * | 2014-05-19 | 2015-12-07 | Nltテクノロジー株式会社 | 光学部材及び表示装置 |
| US10177527B2 (en) | 2015-05-28 | 2019-01-08 | Vixar Inc. | VCSELS and VCSEL arrays designed for improved performance as illumination sources and sensors |
| US10153615B2 (en) | 2015-07-30 | 2018-12-11 | Optipulse, Inc. | Rigid high power and high speed lasing grid structures |
| US10630053B2 (en) | 2015-07-30 | 2020-04-21 | Optipulse Inc. | High power laser grid structure |
| US9864145B2 (en) * | 2015-08-12 | 2018-01-09 | Nanoprecision Products, Inc. | Multiplexer/demultiplexer using stamped optical bench with micro mirrors |
| US9880366B2 (en) | 2015-10-23 | 2018-01-30 | Nanoprecision Products, Inc. | Hermetic optical subassembly |
| DE102017105997A1 (de) | 2017-03-21 | 2018-09-27 | Valeo Schalter Und Sensoren Gmbh | Sendeeinrichtung für eine optische Erfassungseinrichtung eines Kraftfahrzeugs mit einem spezifischen Vormontagemodul, optische Erfassungseinrichtung sowie Kraftfahrzeug |
| CN110770986A (zh) * | 2017-04-05 | 2020-02-07 | 维克萨股份有限公司 | 显示器的vcsel的新型图案化、感测和成像 |
| EP3633807B1 (en) | 2017-05-31 | 2021-12-29 | Sony Group Corporation | Light-emitting element and light-emitting element manufacturing method |
| DE102017112235A1 (de) * | 2017-06-02 | 2018-12-06 | Osram Opto Semiconductors Gmbh | Laserdiode und Verfahren zum Herstellen einer Laserdiode |
| JP7078045B2 (ja) * | 2017-07-18 | 2022-05-31 | ソニーグループ株式会社 | 発光素子及び発光素子アレイ |
| WO2019033120A1 (en) * | 2017-08-11 | 2019-02-14 | Optipulse Inc. | HIGH POWER LASER GRID STRUCTURE |
| EP3665793A4 (en) | 2017-08-11 | 2021-05-12 | Optipulse Inc. | LASER GRID STRUCTURES FOR WIRELESS HIGH SPEED DATA TRANSMISSION |
| KR102329408B1 (ko) * | 2017-08-14 | 2021-11-19 | 루멘텀 오퍼레이션즈 엘엘씨 | 표면 장착 호환식 vcsel 어레이 |
| US10374705B2 (en) | 2017-09-06 | 2019-08-06 | Optipulse Inc. | Method and apparatus for alignment of a line-of-sight communications link |
| DE102017122325A1 (de) * | 2017-09-26 | 2019-03-28 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Halbleiterbauelement und Verfahren zur Herstellung von strahlungsemittierenden Halbleiterbauelementen |
| US11156497B2 (en) | 2017-09-29 | 2021-10-26 | Apple Inc. | Connected epitaxial optical sensing systems comprising a second epitaxial chip with a second light source and a second detector to detect light of a first light source |
| CN108490633A (zh) * | 2018-03-12 | 2018-09-04 | 广东欧珀移动通信有限公司 | 结构光投射器、深度相机和电子设备 |
| CN108303757B (zh) * | 2018-03-12 | 2020-07-10 | Oppo广东移动通信有限公司 | 激光投射模组、深度相机和电子装置 |
| US10897122B2 (en) * | 2018-04-20 | 2021-01-19 | Hewlett Packard Enterprise Development Lp | Optical apparatus for optical transceivers |
| US11303355B2 (en) | 2018-05-30 | 2022-04-12 | Apple Inc. | Optical structures in directional free-space optical communication systems for portable electronic devices |
| EP3598591A1 (en) * | 2018-07-17 | 2020-01-22 | Koninklijke Philips N.V. | Laser arrangement with reduced building height |
| US11178392B2 (en) * | 2018-09-12 | 2021-11-16 | Apple Inc. | Integrated optical emitters and applications thereof |
| CN109346922B (zh) * | 2018-11-29 | 2020-11-17 | 西安工业大学 | 一种输出均匀偏振光的微型激光器及其制备方法 |
| DE102018130562A1 (de) * | 2018-11-30 | 2020-06-04 | Osram Opto Semiconductors Gmbh | Optoelektronisches halbleiter-bauelement mit stromverteilungsschicht und verfahren zur herstellung des optoelektronischen halbleiter-bauelements |
| EP3888204B1 (en) | 2019-02-04 | 2022-12-14 | Apple Inc. | Vertical emitters with integral microlenses |
| WO2020246280A1 (ja) * | 2019-06-04 | 2020-12-10 | ソニー株式会社 | 発光素子、発光素子アレイ及び発光素子アレイの製造方法 |
| US11549799B2 (en) | 2019-07-01 | 2023-01-10 | Apple Inc. | Self-mixing interference device for sensing applications |
| JP2021114556A (ja) * | 2020-01-20 | 2021-08-05 | ソニーセミコンダクタソリューションズ株式会社 | 発光装置およびその製造方法 |
| JP2023037044A (ja) * | 2020-02-19 | 2023-03-15 | ソニーセミコンダクタソリューションズ株式会社 | 発光装置およびその製造方法 |
| US12218478B2 (en) | 2020-05-10 | 2025-02-04 | Apple Inc. | Folded optical conjugate lens |
| CN115943534A (zh) * | 2020-08-20 | 2023-04-07 | 苹果公司 | 集成的边缘生成的垂直发射激光器 |
| US12372724B2 (en) | 2020-09-23 | 2025-07-29 | Apple Inc. | Light splitting device |
| JP2024004502A (ja) * | 2020-11-20 | 2024-01-17 | ソニーセミコンダクタソリューションズ株式会社 | 発光装置およびその製造方法 |
| US11994694B2 (en) | 2021-01-17 | 2024-05-28 | Apple Inc. | Microlens array with tailored sag profile |
| CN116868458A (zh) * | 2021-02-22 | 2023-10-10 | 索尼集团公司 | 激光元件、激光元件阵列以及激光元件的制造方法 |
| CN115117735A (zh) * | 2021-03-17 | 2022-09-27 | 上海禾赛科技有限公司 | 激光器、光源模组及激光雷达 |
| US12413043B2 (en) | 2021-09-21 | 2025-09-09 | Apple Inc. | Self-mixing interference device with tunable microelectromechanical system |
| US20250079798A1 (en) * | 2022-01-27 | 2025-03-06 | Sony Group Corporation | Surface emitting device, light source device, and method for manufacturing surface emitting device |
| US20240088629A1 (en) * | 2022-09-13 | 2024-03-14 | Ii-Vi Delaware, Inc. | Micro-optics on vcsel-based flood illuminator |
| DE102023133477A1 (de) * | 2023-11-30 | 2025-06-05 | Trumpf Photonic Components Gmbh | VCSEL und Verfahren zum Herstellen eines VCSEL |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08321660A (ja) * | 1995-05-25 | 1996-12-03 | Nichia Chem Ind Ltd | 窒化物半導体レーザ素子 |
| US6026111A (en) * | 1997-10-28 | 2000-02-15 | Motorola, Inc. | Vertical cavity surface emitting laser device having an extended cavity |
| US6888871B1 (en) * | 2000-07-12 | 2005-05-03 | Princeton Optronics, Inc. | VCSEL and VCSEL array having integrated microlenses for use in a semiconductor laser pumped solid state laser system |
| JP3618655B2 (ja) | 2000-09-12 | 2005-02-09 | 株式会社西建設 | 蓄熱式電気暖房装置を用いた暖房方法 |
| JP4437376B2 (ja) * | 2001-03-27 | 2010-03-24 | 株式会社リコー | 面発光レーザ素子の製造方法 |
| FR2824188B1 (fr) * | 2001-04-25 | 2003-12-12 | Commissariat Energie Atomique | Dispositif optique comportant une pluralite de cavites resonantes de longueurs differentes associees a differentes longueurs d'ondes |
| JP2003060299A (ja) * | 2001-06-07 | 2003-02-28 | Ricoh Opt Ind Co Ltd | 光出力素子・光出力素子アレイおよびレンズ素子・レンズ素子アレイ |
| JP2005537643A (ja) * | 2002-09-02 | 2005-12-08 | ヘンツェ−リソチェンコ パテントフェルヴァルトゥングス ゲーエムベーハー ウント コー.カーゲー | 半導体レーザ装置 |
| US7502392B2 (en) * | 2003-09-12 | 2009-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Laser oscillator |
| US7449724B2 (en) * | 2003-09-12 | 2008-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
| US7260135B2 (en) * | 2003-09-26 | 2007-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
| JP2006066538A (ja) | 2004-08-25 | 2006-03-09 | Hamamatsu Photonics Kk | 面発光レーザ光源の製造方法及び面発光レーザ光源 |
| US20070002922A1 (en) * | 2005-06-30 | 2007-01-04 | Intel Corporation | Retro-reflecting lens for external cavity optics |
| CN101321686A (zh) | 2005-10-07 | 2008-12-10 | 佛罗里达大学研究基金会有限公司 | 用于多路信号传递和光编码的多组分纳米颗粒 |
| EP1793269B1 (de) * | 2005-12-01 | 2011-04-27 | LIMO Patentverwaltung GmbH & Co. KG | Vorrichtung zur Beeinflussung von Licht |
| US7968839B2 (en) | 2006-07-26 | 2011-06-28 | Ecole Polytechnique Federale De Lausanne (Epfl) | Miniaturized optical tweezers based on high-NA micro-mirrors |
| KR100811032B1 (ko) * | 2006-10-17 | 2008-03-06 | 삼성전기주식회사 | 모노리틱 조명장치 |
| US7786808B2 (en) | 2007-01-31 | 2010-08-31 | Teledyne Scientific & Imaging, Llc | Micro-structured optic apparatus |
| US7777956B2 (en) | 2007-05-29 | 2010-08-17 | University Of Utah Research Foundation | Micro-lens arrays and curved surface fabrication techniques |
| KR101338354B1 (ko) | 2007-12-28 | 2013-12-16 | 광주과학기술원 | 마이크로렌즈의 제조방법 |
| IT1391530B1 (it) | 2008-07-31 | 2012-01-11 | Cyanagen S R L | Particelle attive per applicazioni bio-analitiche e metodi per la loro preparazione |
| AU2009278007B2 (en) | 2008-07-31 | 2015-08-27 | Alma Mater Studiorum - Universita' Di Bologna | Active particles for bio-analytical applications and methods for their preparation |
| WO2010067261A1 (en) | 2008-12-10 | 2010-06-17 | Philips Intellectual Property & Standards Gmbh | High power vcsel with improved spatial mode |
| US8111730B2 (en) * | 2009-08-20 | 2012-02-07 | International Business Machines Corporation | 3D optoelectronic packaging |
-
2011
- 2011-11-01 EP EP11797357.8A patent/EP2636111B8/en active Active
- 2011-11-01 CN CN201180053163.0A patent/CN103181040B/zh not_active Expired - Fee Related
- 2011-11-01 WO PCT/IB2011/054850 patent/WO2012059864A1/en not_active Ceased
- 2011-11-01 JP JP2013537237A patent/JP2013541854A/ja active Pending
- 2011-11-01 US US13/882,998 patent/US9112330B2/en not_active Expired - Fee Related
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