JP2013508997A5 - - Google Patents

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Publication number
JP2013508997A5
JP2013508997A5 JP2012536726A JP2012536726A JP2013508997A5 JP 2013508997 A5 JP2013508997 A5 JP 2013508997A5 JP 2012536726 A JP2012536726 A JP 2012536726A JP 2012536726 A JP2012536726 A JP 2012536726A JP 2013508997 A5 JP2013508997 A5 JP 2013508997A5
Authority
JP
Japan
Prior art keywords
latch
lower housing
base
housing
wafer container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012536726A
Other languages
English (en)
Japanese (ja)
Other versions
JP5727495B2 (ja
JP2013508997A (ja
Filing date
Publication date
Priority claimed from US12/606,921 external-priority patent/US8813964B2/en
Application filed filed Critical
Publication of JP2013508997A publication Critical patent/JP2013508997A/ja
Publication of JP2013508997A5 publication Critical patent/JP2013508997A5/ja
Application granted granted Critical
Publication of JP5727495B2 publication Critical patent/JP5727495B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012536726A 2009-10-27 2010-06-28 凹型ラッチを用いたウェーハコンテナ Active JP5727495B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/606,921 US8813964B2 (en) 2009-08-26 2009-10-27 Wafer container with recessed latch
US12/606,921 2009-10-27
PCT/MY2010/000108 WO2011053109A1 (en) 2009-10-27 2010-06-28 Wafer container with recessed latch

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015075651A Division JP2015149498A (ja) 2009-10-27 2015-04-02 凹型ラッチを用いたウェーハコンテナ

Publications (3)

Publication Number Publication Date
JP2013508997A JP2013508997A (ja) 2013-03-07
JP2013508997A5 true JP2013508997A5 (https=) 2013-08-15
JP5727495B2 JP5727495B2 (ja) 2015-06-03

Family

ID=43922293

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012536726A Active JP5727495B2 (ja) 2009-10-27 2010-06-28 凹型ラッチを用いたウェーハコンテナ
JP2015075651A Pending JP2015149498A (ja) 2009-10-27 2015-04-02 凹型ラッチを用いたウェーハコンテナ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015075651A Pending JP2015149498A (ja) 2009-10-27 2015-04-02 凹型ラッチを用いたウェーハコンテナ

Country Status (9)

Country Link
US (2) US8813964B2 (https=)
EP (1) EP2470455A4 (https=)
JP (2) JP5727495B2 (https=)
KR (1) KR20120115207A (https=)
CN (1) CN102666314B (https=)
MY (1) MY159558A (https=)
SG (1) SG10201500640YA (https=)
TW (1) TWI402205B (https=)
WO (1) WO2011053109A1 (https=)

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TWI515160B (zh) 2010-10-19 2016-01-01 安堤格里斯公司 具自動凸緣之前開式晶圓容器
CN103303587B (zh) * 2013-06-20 2014-12-17 芜湖美的厨卫电器制造有限公司 下包装结构
US10153187B2 (en) * 2014-11-11 2018-12-11 Applied Materials, Inc. Methods and apparatus for transferring a substrate
JP6427674B2 (ja) * 2014-12-08 2018-11-21 インテグリス・インコーポレーテッド 基板格納用の一体型コーナースプリングを備える水平基板コンテナ
KR101547177B1 (ko) * 2015-04-03 2015-08-27 (주)상아프론테크 웨이퍼 보관 용기
DE102015105330A1 (de) * 2015-04-08 2016-10-13 Ujet Vehicles S.À.R.L. Batteriebaugruppe und Motorroller mit einer Batteriebaugruppe
US10020213B1 (en) * 2016-12-30 2018-07-10 Sunpower Corporation Semiconductor wafer carriers
TWI697979B (zh) * 2017-02-07 2020-07-01 日商阿基里斯股份有限公司 基板收容容器
US11658059B2 (en) 2018-02-28 2023-05-23 Ii-Vi Delaware, Inc. Thin material handling carrier
JP6952627B2 (ja) * 2018-03-09 2021-10-20 株式会社ジェーイーエル 基板収納容器のロック解除機構
KR102595526B1 (ko) * 2021-09-07 2023-10-30 주식회사 삼에스코리아 웨이퍼 이송 박스
KR102595523B1 (ko) * 2021-09-07 2023-10-30 주식회사 삼에스코리아 웨이퍼 이송 박스
US12271110B2 (en) * 2021-09-09 2025-04-08 Entegris, Inc. Reticle pod having latch including ramped surface
US12255085B2 (en) 2022-03-10 2025-03-18 Innoscience (suzhou) Semiconductor Co., Ltd. Wafer holder and operating method of the same
JP7788905B2 (ja) * 2022-03-25 2025-12-19 アキレス株式会社 半導体ウェーハ搬送容器
US12159799B2 (en) * 2022-03-30 2024-12-03 Achilles Corporation Container for transporting semiconductor wafer
WO2024216456A1 (en) * 2023-04-17 2024-10-24 Viavi Solutions Suzhou Co., Ltd. Cover for a wafer

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FR2735754B1 (fr) 1995-06-20 1998-07-17 Astra Plastique Pot, notamment pour le conditionnement de produits alimentaires
US5553711A (en) * 1995-07-03 1996-09-10 Taiwan Semiconductor Manufacturing Company Storage container for integrated circuit semiconductor wafers
JPH09129719A (ja) 1995-08-30 1997-05-16 Achilles Corp 半導体ウエハの収納構造および半導体ウエハの収納・取出し方法
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US6039186A (en) * 1997-04-16 2000-03-21 Fluoroware, Inc. Composite transport carrier
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US6341695B1 (en) 1998-05-07 2002-01-29 Texas Instruments Incorporated Containment device for retaining semiconductor wafers
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US6988621B2 (en) 2003-06-17 2006-01-24 Illinois Tool Works Inc. Reduced movement wafer box
US6915906B2 (en) * 2003-07-14 2005-07-12 Peak Plastic & Metal Products (International) Limited Wafer storage container with wafer positioning posts
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US7621714B2 (en) * 2003-10-23 2009-11-24 Tdk Corporation Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
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FI20050541A7 (fi) 2005-05-23 2006-11-24 Prevex Ab Oy CD-rasia vaihtelevalle määrälle CD-levyjä
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US20070187286A1 (en) * 2006-02-16 2007-08-16 Pylant James D Wafer storage container and apparatus
CN101888957B (zh) * 2007-10-12 2013-01-02 大元半导体包装产业有限公司 带有交错壁结构的晶圆容器

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