JP2013236091A5 - - Google Patents
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- JP2013236091A5 JP2013236091A5 JP2013124321A JP2013124321A JP2013236091A5 JP 2013236091 A5 JP2013236091 A5 JP 2013236091A5 JP 2013124321 A JP2013124321 A JP 2013124321A JP 2013124321 A JP2013124321 A JP 2013124321A JP 2013236091 A5 JP2013236091 A5 JP 2013236091A5
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- JP
- Japan
- Prior art keywords
- spacer
- transistor
- electrode
- liquid crystal
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013124321A JP5593424B2 (ja) | 2000-03-08 | 2013-06-13 | 液晶表示装置 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000064186 | 2000-03-08 | ||
| JP2000064186 | 2000-03-08 | ||
| JP2000063000 | 2000-03-08 | ||
| JP2000063000 | 2000-03-08 | ||
| JP2013124321A JP5593424B2 (ja) | 2000-03-08 | 2013-06-13 | 液晶表示装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012161138A Division JP5483763B2 (ja) | 2000-03-08 | 2012-07-20 | 液晶表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013236091A JP2013236091A (ja) | 2013-11-21 |
| JP2013236091A5 true JP2013236091A5 (enExample) | 2014-04-10 |
| JP5593424B2 JP5593424B2 (ja) | 2014-09-24 |
Family
ID=26586986
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012161138A Expired - Fee Related JP5483763B2 (ja) | 2000-03-08 | 2012-07-20 | 液晶表示装置 |
| JP2013124321A Expired - Fee Related JP5593424B2 (ja) | 2000-03-08 | 2013-06-13 | 液晶表示装置 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012161138A Expired - Fee Related JP5483763B2 (ja) | 2000-03-08 | 2012-07-20 | 液晶表示装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (3) | US7098084B2 (enExample) |
| JP (2) | JP5483763B2 (enExample) |
Families Citing this family (44)
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|---|---|---|---|---|
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| US20020197393A1 (en) * | 2001-06-08 | 2002-12-26 | Hideaki Kuwabara | Process of manufacturing luminescent device |
| TW588570B (en) * | 2001-06-18 | 2004-05-21 | Semiconductor Energy Lab | Light emitting device and method of fabricating the same |
| US6979605B2 (en) * | 2001-11-30 | 2005-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for a semiconductor device using a marker on an amorphous semiconductor film to selectively crystallize a region with a laser light |
| US20030178682A1 (en) * | 2001-12-28 | 2003-09-25 | Takeshi Noda | Semiconductor device and method of manufacturing the semiconductor device |
| KR100702103B1 (ko) * | 2002-04-26 | 2007-04-02 | 도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드 | El 표시 장치의 구동 방법 |
| JP4188188B2 (ja) * | 2003-05-21 | 2008-11-26 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
| US7449397B2 (en) * | 2003-05-27 | 2008-11-11 | Jae-Sang Ro | Method for annealing silicon thin films and polycrystalline silicon thin films prepared therefrom |
| US8248392B2 (en) * | 2004-08-13 | 2012-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device using light emitting element and driving method of light emitting element, and lighting apparatus |
| JP5328083B2 (ja) * | 2006-08-01 | 2013-10-30 | キヤノン株式会社 | 酸化物のエッチング方法 |
| US7738050B2 (en) * | 2007-07-06 | 2010-06-15 | Semiconductor Energy Laboratory Co., Ltd | Liquid crystal display device |
| TWI464510B (zh) * | 2007-07-20 | 2014-12-11 | Semiconductor Energy Lab | 液晶顯示裝置 |
| JP5548351B2 (ja) * | 2007-11-01 | 2014-07-16 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| KR101803264B1 (ko) | 2008-09-19 | 2017-12-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| KR101761108B1 (ko) | 2008-10-03 | 2017-07-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| US8304045B2 (en) | 2010-02-26 | 2012-11-06 | Guardian Industries Corp. | Articles including anticondensation coatings and/or methods of making the same |
| JP5752412B2 (ja) * | 2010-12-27 | 2015-07-22 | 株式会社アルバック | 薄膜リチウム二次電池の製造方法及び薄膜リチウム二次電池 |
| TWI495091B (zh) * | 2012-02-16 | 2015-08-01 | Au Optronics Corp | 陣列基板及多晶矽層的製作方法 |
| US9223124B2 (en) * | 2012-04-26 | 2015-12-29 | Xerox Corporation | Time resolved optical microscopy (“TROM”) process for measuring the rate of crystallization of solid inks |
| US10464172B2 (en) | 2013-02-21 | 2019-11-05 | Nlight, Inc. | Patterning conductive films using variable focal plane to control feature size |
| WO2014130089A1 (en) * | 2013-02-21 | 2014-08-28 | Nlight Photonics Corporation | Non-ablative laser patterning |
| US9842665B2 (en) | 2013-02-21 | 2017-12-12 | Nlight, Inc. | Optimization of high resolution digitally encoded laser scanners for fine feature marking |
| WO2014130895A1 (en) | 2013-02-21 | 2014-08-28 | Nlight Photonics Corporation | Laser patterning multi-layer structures |
| US10069271B2 (en) | 2014-06-02 | 2018-09-04 | Nlight, Inc. | Scalable high power fiber laser |
| US10618131B2 (en) | 2014-06-05 | 2020-04-14 | Nlight, Inc. | Laser patterning skew correction |
| US10310201B2 (en) | 2014-08-01 | 2019-06-04 | Nlight, Inc. | Back-reflection protection and monitoring in fiber and fiber-delivered lasers |
| US9837783B2 (en) | 2015-01-26 | 2017-12-05 | Nlight, Inc. | High-power, single-mode fiber sources |
| US10050404B2 (en) | 2015-03-26 | 2018-08-14 | Nlight, Inc. | Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss |
| WO2017008022A1 (en) | 2015-07-08 | 2017-01-12 | Nlight, Inc. | Fiber with depressed central index for increased beam parameter product |
| US11179807B2 (en) | 2015-11-23 | 2021-11-23 | Nlight, Inc. | Fine-scale temporal control for laser material processing |
| WO2017091606A1 (en) | 2015-11-23 | 2017-06-01 | Nlight, Inc. | Predictive modification of laser diode drive current waveform in high power laser systems |
| EP3380266B1 (en) | 2015-11-23 | 2021-08-11 | NLIGHT, Inc. | Fine-scale temporal control for laser material processing |
| WO2017127573A1 (en) | 2016-01-19 | 2017-07-27 | Nlight, Inc. | Method of processing calibration data in 3d laser scanner systems |
| US10730785B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Optical fiber bending mechanisms |
| JP7094946B2 (ja) * | 2016-09-29 | 2022-07-04 | コーニング インコーポレイテッド | レーザ加熱によるガラス物品の組成変更およびその製造方法 |
| US10423015B2 (en) | 2016-09-29 | 2019-09-24 | Nlight, Inc. | Adjustable beam characteristics |
| US10732439B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Fiber-coupled device for varying beam characteristics |
| EP3607389B1 (en) | 2017-04-04 | 2023-06-07 | Nlight, Inc. | Optical fiducial generation for galvanometric scanner calibration |
| JP7262210B2 (ja) * | 2018-11-21 | 2023-04-21 | 東京エレクトロン株式会社 | 凹部の埋め込み方法 |
| CN109742042B (zh) * | 2019-01-10 | 2020-07-31 | 京东方科技集团股份有限公司 | 低温多晶硅的激光退火装置和退火方法 |
Family Cites Families (49)
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| JPS5638008A (en) * | 1979-09-06 | 1981-04-13 | Canon Inc | Display cell |
| GB8909011D0 (en) | 1989-04-20 | 1989-06-07 | Friend Richard H | Electroluminescent devices |
| JPH03146927A (ja) * | 1989-11-02 | 1991-06-21 | Casio Comput Co Ltd | Tftアクティブマトリックス型液晶表示パネルおよびその製造方法 |
| JP2584117B2 (ja) | 1990-09-21 | 1997-02-19 | 松下電器産業株式会社 | 薄膜トランジスタの製造方法 |
| JPH05165060A (ja) * | 1991-12-17 | 1993-06-29 | Sony Corp | 液晶表示装置 |
| JPH05289109A (ja) * | 1992-04-08 | 1993-11-05 | Sony Corp | 液晶表示装置 |
| JP3562588B2 (ja) * | 1993-02-15 | 2004-09-08 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
| CN1052110C (zh) * | 1993-02-15 | 2000-05-03 | 株式会社半导体能源研究所 | 制造半导体器件的方法 |
| TW278219B (enExample) * | 1993-03-12 | 1996-06-11 | Handotai Energy Kenkyusho Kk | |
| KR100355938B1 (ko) * | 1993-05-26 | 2002-12-16 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치제작방법 |
| US5488000A (en) * | 1993-06-22 | 1996-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating a thin film transistor using a nickel silicide layer to promote crystallization of the amorphous silicon layer |
| TW357415B (en) * | 1993-07-27 | 1999-05-01 | Semiconductor Engrgy Lab | Semiconductor device and process for fabricating the same |
| JPH07335904A (ja) * | 1994-06-14 | 1995-12-22 | Semiconductor Energy Lab Co Ltd | 薄膜半導体集積回路 |
| TW264575B (enExample) * | 1993-10-29 | 1995-12-01 | Handotai Energy Kenkyusho Kk | |
| US5923962A (en) | 1993-10-29 | 1999-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
| JP3431041B2 (ja) | 1993-11-12 | 2003-07-28 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| TW279275B (enExample) | 1993-12-27 | 1996-06-21 | Sharp Kk | |
| JP3221473B2 (ja) * | 1994-02-03 | 2001-10-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP3254072B2 (ja) * | 1994-02-15 | 2002-02-04 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JPH07270826A (ja) * | 1994-03-30 | 1995-10-20 | Casio Comput Co Ltd | アクティブマトリックス型液晶表示素子 |
| JP3621151B2 (ja) * | 1994-06-02 | 2005-02-16 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JPH07335547A (ja) | 1994-06-14 | 1995-12-22 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
| TW406861U (en) * | 1994-07-28 | 2000-09-21 | Semiconductor Energy Lab | Laser processing system |
| JP3514891B2 (ja) * | 1994-10-07 | 2004-03-31 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
| JP3778456B2 (ja) * | 1995-02-21 | 2006-05-24 | 株式会社半導体エネルギー研究所 | 絶縁ゲイト型薄膜半導体装置の作製方法 |
| JP3295679B2 (ja) * | 1995-08-04 | 2002-06-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US6465287B1 (en) * | 1996-01-27 | 2002-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating a semiconductor device using a metal catalyst and high temperature crystallization |
| US6043559A (en) * | 1996-09-09 | 2000-03-28 | Intel Corporation | Integrated circuit package which contains two in plane voltage busses and a wrap around conductive strip that connects a bond finger to one of the busses |
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| JP3976828B2 (ja) * | 1997-02-17 | 2007-09-19 | 株式会社半導体エネルギー研究所 | 結晶性珪素膜の作製方法 |
| JPH10339889A (ja) * | 1997-06-09 | 1998-12-22 | Semiconductor Energy Lab Co Ltd | 電気光学装置およびその製造方法 |
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| JP4159633B2 (ja) | 1997-09-19 | 2008-10-01 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法並びに電子機器 |
| KR19990058636A (ko) * | 1997-12-30 | 1999-07-15 | 구자홍 | 레이저 조사 방법 |
| US6541918B1 (en) * | 1998-03-12 | 2003-04-01 | Seiko Epson Corporation | Active-matrix emitting apparatus and fabrication method therefor |
| US6312979B1 (en) * | 1998-04-28 | 2001-11-06 | Lg.Philips Lcd Co., Ltd. | Method of crystallizing an amorphous silicon layer |
| US6313481B1 (en) | 1998-08-06 | 2001-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and a method of manufacturing the same |
| JP3452808B2 (ja) | 1998-10-08 | 2003-10-06 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP4362882B2 (ja) * | 1999-01-13 | 2009-11-11 | ソニー株式会社 | 液晶パネル、液晶パネルの製造方法および液晶表示装置 |
| KR100524622B1 (ko) * | 1999-04-03 | 2005-11-01 | 엘지.필립스 엘시디 주식회사 | 폴리실리콘 반도체층을 포함한 박막트랜지스터 제조방법 |
| US6461899B1 (en) * | 1999-04-30 | 2002-10-08 | Semiconductor Energy Laboratory, Co., Ltd. | Oxynitride laminate “blocking layer” for thin film semiconductor devices |
| TW487959B (en) | 1999-08-13 | 2002-05-21 | Semiconductor Energy Lab | Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device |
| US7098084B2 (en) * | 2000-03-08 | 2006-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| JP2001326363A (ja) | 2000-03-08 | 2001-11-22 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
| US6916693B2 (en) * | 2000-03-08 | 2005-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| JP2001326178A (ja) | 2000-03-08 | 2001-11-22 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
| US20050099615A1 (en) * | 2003-06-03 | 2005-05-12 | Fusao Ishii | System for fabricating electronic modules on substrates having arbitrary and unexpected dimensional changes |
| KR100685396B1 (ko) * | 2004-07-22 | 2007-02-22 | 삼성에스디아이 주식회사 | 반도체 장치의 제조 방법 및 이 방법에 의하여 제조되는반도체 장치 |
-
2001
- 2001-03-07 US US09/800,627 patent/US7098084B2/en not_active Expired - Fee Related
-
2005
- 2005-06-08 US US11/148,400 patent/US7183145B2/en not_active Expired - Fee Related
-
2007
- 2007-02-23 US US11/710,658 patent/US7638377B2/en not_active Expired - Fee Related
-
2012
- 2012-07-20 JP JP2012161138A patent/JP5483763B2/ja not_active Expired - Fee Related
-
2013
- 2013-06-13 JP JP2013124321A patent/JP5593424B2/ja not_active Expired - Fee Related
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