JP2013228358A - 光学検査装置 - Google Patents
光学検査装置 Download PDFInfo
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- JP2013228358A JP2013228358A JP2012250384A JP2012250384A JP2013228358A JP 2013228358 A JP2013228358 A JP 2013228358A JP 2012250384 A JP2012250384 A JP 2012250384A JP 2012250384 A JP2012250384 A JP 2012250384A JP 2013228358 A JP2013228358 A JP 2013228358A
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- 238000007689 inspection Methods 0.000 title claims abstract description 209
- 230000003287 optical effect Effects 0.000 title claims abstract description 25
- 238000003384 imaging method Methods 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 15
- 238000002347 injection Methods 0.000 claims description 54
- 239000007924 injection Substances 0.000 claims description 54
- 239000007921 spray Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 6
- 230000001678 irradiating effect Effects 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Abstract
【解決手段】本発明は、フレキシブルした材質の検査シートの映像を獲得する過程で、検査シートの上部から圧縮空気を噴射して変形を最小化し、平滑度を保持して、より正確な検査を進行させる光学検査装置に関するものであって、透光材からなって、検査シートがローディングされる検査ステージと、検査ステージに形成されて、検査シートを固定する固定手段と、検査ステージの側面または下面を支持する固定フレームと、検査ステージの下方から検査ステージ上の検査シートに光を照射するバックライトユニットと、検査ステージの上方に配されて、検査ステージにローディングされた検査シートのイメージを獲得する撮像手段と、撮像手段の下方に撮像手段と同軸上に配されて、検査シートに向けて圧縮空気を噴射して、検査シートを検査ステージに密着させるエア噴射部と、を含む。
【選択図】図1
Description
200:固定手段
300:固定フレーム
400:バックライトユニット
500:撮像手段
600:エア噴射部
620:噴射ノズル
630:幅調節部
640:噴射角調節部
650:高さ調節部
700:センサー
800:補助光源
Claims (6)
- 透光材からなって、検査シートがローディングされる検査ステージと、
前記検査ステージに形成されて、前記検査シートを固定する固定手段と、
前記検査ステージの側面または下面を支持する固定フレームと、
前記検査ステージの下方から検査ステージ上の検査シートに光を照射するバックライトユニットと、
前記検査ステージの上方に配されて、前記検査ステージにローディングされた検査シートのイメージを獲得する撮像手段と、
前記撮像手段の下方に前記撮像手段と同軸上に配されて、前記検査シートに向けて圧縮空気を噴射して、検査シートを検査ステージに密着させるエア噴射部と、
を含むことを特徴とする光学検査装置。 - 前記エア噴射部は、圧縮空気を生成させる圧縮空気生成手段と、前記圧縮空気生成手段から生成された圧縮空気を噴射する噴射ノズルとを含むが、前記噴射ノズルは、前記撮像手段の両側に平行に配されて、前記検査シートに集中噴射することを特徴とする請求項1に記載の光学検査装置。
- 前記エア噴射部は、
前記噴射ノズルの間隔を調節する幅調節部と、
前記噴射ノズルの噴射角度を調節する噴射角調節部と、
前記噴射ノズルの高さを調節する高さ調節部と、
を含むことを特徴とする請求項2に記載の光学検査装置。 - 前記エア噴射部は、
前記噴射ノズルに出力される圧縮空気の量を調節する弁がさらに含まれたことを特徴とする請求項2に記載の光学検査装置。 - 前記エア噴射部から噴射された圧縮空気が、前記検査シートの検査が進行する領域に正確に噴射されたか否かを感知するセンサーがさらに装着されたことを特徴とする請求項1に記載の光学検査装置。
- 前記検査ステージの上方から前記検査ステージ上の検査シートに光を照射する補助光源をさらに含むことを特徴とする請求項1に記載の光学検査装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120044005A KR101325761B1 (ko) | 2012-04-26 | 2012-04-26 | 광학 검사장치 |
KR10-2012-0044005 | 2012-04-26 |
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JP2013228358A true JP2013228358A (ja) | 2013-11-07 |
JP5650708B2 JP5650708B2 (ja) | 2015-01-07 |
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JP2012250384A Active JP5650708B2 (ja) | 2012-04-26 | 2012-11-14 | 光学検査装置 |
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JP (1) | JP5650708B2 (ja) |
KR (1) | KR101325761B1 (ja) |
CN (1) | CN103376262B (ja) |
TW (1) | TWI498547B (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015137994A1 (en) * | 2014-03-10 | 2015-09-17 | Cognex Corporation | Air flow mechanism for image capture and vision systems |
KR101830029B1 (ko) | 2016-08-31 | 2018-02-19 | 스미또모 가가꾸 가부시키가이샤 | 비수 전해액 이차 전지용 세퍼레이터의 제조 방법 |
CN108982362A (zh) * | 2018-06-27 | 2018-12-11 | 南京中电熊猫液晶显示科技有限公司 | 一种基板检测支撑装置及其检测方法 |
CN108982547A (zh) * | 2018-05-02 | 2018-12-11 | 芜湖立普德机械科技有限公司 | 一种用于检测玻璃基板凹陷的装置 |
JPWO2020208747A1 (ja) * | 2019-04-10 | 2020-10-15 | ||
KR102435450B1 (ko) * | 2022-02-14 | 2022-08-24 | (주)넥스캠 | 포장지를 위한 ocr 검사장치 |
Families Citing this family (8)
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CN104729433A (zh) * | 2013-12-23 | 2015-06-24 | 珠海格力电器股份有限公司 | 产品端面平整度的检验装置及方法 |
JP6040197B2 (ja) * | 2014-05-26 | 2016-12-07 | Ckd株式会社 | 検査装置及びptp包装機 |
KR101659048B1 (ko) * | 2014-07-28 | 2016-09-23 | 한국기계연구원 | 플렉시블 디바이스 와피지 패널 표면 검사 장치 및 방법 |
KR101961707B1 (ko) * | 2017-03-15 | 2019-03-25 | 주식회사 태루 | 바이오 메디컬용 인식칩의 포장각도 검사장치 |
CN107328359B (zh) * | 2017-07-03 | 2021-12-03 | 京东方科技集团股份有限公司 | 用于检测墨滴的装置和方法 |
CN113433134A (zh) * | 2021-06-24 | 2021-09-24 | 深圳中科飞测科技股份有限公司 | 检测方法、检测设备及计算机可读存储介质 |
KR102439071B1 (ko) | 2022-04-06 | 2022-09-01 | 주식회사 니코메디칼 | 드레싱 밴드의 불량품 선별 장치 |
KR102443758B1 (ko) | 2022-04-06 | 2022-09-16 | 주식회사 니코메디칼 | 드레싱 밴드 검사 장치 |
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JPS6136904B2 (ja) * | 1984-02-27 | 1986-08-21 | Koasa Shoji Kk | |
JPH08142313A (ja) * | 1994-11-18 | 1996-06-04 | Mitsubishi Heavy Ind Ltd | 印刷品質検査装置の照明装置 |
JPH1164232A (ja) * | 1997-08-25 | 1999-03-05 | Nippon Makushisu:Kk | 水晶基板用載置台及び水晶基板の傷検査装置 |
JP2000304515A (ja) * | 1999-04-16 | 2000-11-02 | Rengo Co Ltd | 加工シートの検査装置 |
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- 2012-04-26 KR KR1020120044005A patent/KR101325761B1/ko active IP Right Grant
- 2012-10-08 TW TW101137140A patent/TWI498547B/zh active
- 2012-11-14 JP JP2012250384A patent/JP5650708B2/ja active Active
- 2012-11-16 CN CN201210465046.1A patent/CN103376262B/zh active Active
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JPH08142313A (ja) * | 1994-11-18 | 1996-06-04 | Mitsubishi Heavy Ind Ltd | 印刷品質検査装置の照明装置 |
JPH1164232A (ja) * | 1997-08-25 | 1999-03-05 | Nippon Makushisu:Kk | 水晶基板用載置台及び水晶基板の傷検査装置 |
JP2000304515A (ja) * | 1999-04-16 | 2000-11-02 | Rengo Co Ltd | 加工シートの検査装置 |
JP2004294739A (ja) * | 2003-03-27 | 2004-10-21 | Pentax Corp | 光学処理装置、基板固定装置および基板固定方法 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015137994A1 (en) * | 2014-03-10 | 2015-09-17 | Cognex Corporation | Air flow mechanism for image capture and vision systems |
US9908158B2 (en) | 2014-03-10 | 2018-03-06 | Ametek, Inc. | Air flow mechanism for image capture and vision systems |
KR101830029B1 (ko) | 2016-08-31 | 2018-02-19 | 스미또모 가가꾸 가부시키가이샤 | 비수 전해액 이차 전지용 세퍼레이터의 제조 방법 |
CN108982547A (zh) * | 2018-05-02 | 2018-12-11 | 芜湖立普德机械科技有限公司 | 一种用于检测玻璃基板凹陷的装置 |
CN108982362A (zh) * | 2018-06-27 | 2018-12-11 | 南京中电熊猫液晶显示科技有限公司 | 一种基板检测支撑装置及其检测方法 |
JPWO2020208747A1 (ja) * | 2019-04-10 | 2020-10-15 | ||
WO2020208747A1 (ja) * | 2019-04-10 | 2020-10-15 | 堺ディスプレイプロダクト株式会社 | フレキシブルディスプレイの色ムラ検査装置 |
KR102435450B1 (ko) * | 2022-02-14 | 2022-08-24 | (주)넥스캠 | 포장지를 위한 ocr 검사장치 |
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Publication number | Publication date |
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CN103376262A (zh) | 2013-10-30 |
TWI498547B (zh) | 2015-09-01 |
CN103376262B (zh) | 2016-04-27 |
KR101325761B1 (ko) | 2013-11-08 |
KR20130120831A (ko) | 2013-11-05 |
JP5650708B2 (ja) | 2015-01-07 |
TW201344181A (zh) | 2013-11-01 |
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