JP2013166144A5 - - Google Patents
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- Publication number
- JP2013166144A5 JP2013166144A5 JP2013023232A JP2013023232A JP2013166144A5 JP 2013166144 A5 JP2013166144 A5 JP 2013166144A5 JP 2013023232 A JP2013023232 A JP 2013023232A JP 2013023232 A JP2013023232 A JP 2013023232A JP 2013166144 A5 JP2013166144 A5 JP 2013166144A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- bed
- purifier
- gas purifier
- purifier according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 37
- 239000000463 material Substances 0.000 claims 15
- 239000012528 membrane Substances 0.000 claims 13
- 239000002808 molecular sieve Substances 0.000 claims 10
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 6
- 239000012530 fluid Substances 0.000 claims 6
- 239000011261 inert gas Substances 0.000 claims 6
- 239000001301 oxygen Substances 0.000 claims 6
- 229910052760 oxygen Inorganic materials 0.000 claims 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 5
- 229910021536 Zeolite Inorganic materials 0.000 claims 4
- 229910052783 alkali metal Inorganic materials 0.000 claims 4
- 150000001340 alkali metals Chemical class 0.000 claims 4
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims 4
- 238000000746 purification Methods 0.000 claims 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 4
- 239000010457 zeolite Substances 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 239000002245 particle Substances 0.000 claims 3
- 238000010926 purge Methods 0.000 claims 3
- 239000003054 catalyst Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 229910001092 metal group alloy Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 239000004033 plastic Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261597230P | 2012-02-10 | 2012-02-10 | |
| US61/597,230 | 2012-02-10 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017004859A Division JP6480483B2 (ja) | 2012-02-10 | 2017-01-16 | ガス精製器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013166144A JP2013166144A (ja) | 2013-08-29 |
| JP2013166144A5 true JP2013166144A5 (enExample) | 2016-03-24 |
| JP6585330B2 JP6585330B2 (ja) | 2019-10-02 |
Family
ID=47747837
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013023232A Active JP6585330B2 (ja) | 2012-02-10 | 2013-02-08 | ガス精製器 |
| JP2017004859A Active JP6480483B2 (ja) | 2012-02-10 | 2017-01-16 | ガス精製器 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017004859A Active JP6480483B2 (ja) | 2012-02-10 | 2017-01-16 | ガス精製器 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9694319B2 (enExample) |
| EP (2) | EP2812101A1 (enExample) |
| JP (2) | JP6585330B2 (enExample) |
| KR (2) | KR102043480B1 (enExample) |
| CN (3) | CN107008142A (enExample) |
| SG (2) | SG11201404783SA (enExample) |
| TW (2) | TWI592205B (enExample) |
| WO (1) | WO2013119883A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9694319B2 (en) | 2012-02-10 | 2017-07-04 | Entegris, Inc. | Gas purifier |
| WO2015161245A1 (en) * | 2014-04-18 | 2015-10-22 | Entegris, Inc. | High purity gas purifier |
| JP6344764B2 (ja) * | 2014-09-30 | 2018-06-20 | 国立大学法人山口大学 | イソプロピルアルコールの保管方法および充填体 |
| US9782766B2 (en) | 2015-12-18 | 2017-10-10 | Corning Incorporated | Regeneration process for metal catalyst based gas purifiers |
| KR102539338B1 (ko) * | 2017-09-14 | 2023-06-02 | 가부시키가이샤 세이부 기켄 | 가스 치환용 드라이룸 |
| CN108069407B (zh) * | 2017-12-28 | 2020-11-17 | 江西石华精细化工科技协同创新有限公司 | 一种绝氧气体的脱水除氧方法 |
| FR3083718B1 (fr) * | 2018-07-11 | 2020-07-03 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Dispositif en toile permettant de limiter ou supprimer la migration de particules entre deux couches |
| FR3083717B1 (fr) * | 2018-07-11 | 2020-06-26 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Dispositif permettant de limiter ou supprimer la migration de particules entre deux couches |
| CN110759323A (zh) * | 2018-07-27 | 2020-02-07 | 隆基绿能科技股份有限公司 | 一种气体纯化反应器及气体纯化方法 |
| CN114173962A (zh) * | 2019-05-24 | 2022-03-11 | 埃奎斯费雷斯公司 | 在低杂质气体气氛和系统中的金属粉末基制造方法 |
| JP7453781B2 (ja) | 2019-12-13 | 2024-03-21 | 三菱重工業株式会社 | 製造装置用ガス供給装置、アトマイズ装置、3d積層造形装置、及び積層造形システム |
| JP7428632B2 (ja) * | 2020-12-14 | 2024-02-06 | 信越化学工業株式会社 | 多孔質ガラス母材の製造方法及び製造装置 |
| CN118286824B (zh) * | 2024-06-06 | 2024-10-01 | 宏芯气体(上海)有限公司 | 一种氦气纯化装置及纯化方法 |
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-
2013
- 2013-02-08 US US14/377,656 patent/US9694319B2/en active Active
- 2013-02-08 WO PCT/US2013/025239 patent/WO2013119883A1/en not_active Ceased
- 2013-02-08 CN CN201710110078.2A patent/CN107008142A/zh active Pending
- 2013-02-08 JP JP2013023232A patent/JP6585330B2/ja active Active
- 2013-02-08 KR KR1020147025171A patent/KR102043480B1/ko active Active
- 2013-02-08 TW TW102105145A patent/TWI592205B/zh active
- 2013-02-08 KR KR1020177001128A patent/KR101961048B1/ko active Active
- 2013-02-08 TW TW106103055A patent/TWI617344B/zh active
- 2013-02-08 SG SG11201404783SA patent/SG11201404783SA/en unknown
- 2013-02-08 EP EP13705688.3A patent/EP2812101A1/en not_active Withdrawn
- 2013-02-08 CN CN201380018992.4A patent/CN104245090A/zh active Pending
- 2013-02-08 CN CN201711135083.5A patent/CN108097036A/zh active Pending
- 2013-02-08 EP EP17159140.7A patent/EP3207976B1/en active Active
- 2013-02-08 SG SG10201702197PA patent/SG10201702197PA/en unknown
-
2017
- 2017-01-16 JP JP2017004859A patent/JP6480483B2/ja active Active
- 2017-06-05 US US15/614,409 patent/US10245554B2/en active Active
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