JP6585330B2 - ガス精製器 - Google Patents
ガス精製器 Download PDFInfo
- Publication number
- JP6585330B2 JP6585330B2 JP2013023232A JP2013023232A JP6585330B2 JP 6585330 B2 JP6585330 B2 JP 6585330B2 JP 2013023232 A JP2013023232 A JP 2013023232A JP 2013023232 A JP2013023232 A JP 2013023232A JP 6585330 B2 JP6585330 B2 JP 6585330B2
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- JP
- Japan
- Prior art keywords
- purifier
- gas
- bed
- moisture
- ppb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007789 gas Substances 0.000 claims description 228
- 239000002808 molecular sieve Substances 0.000 claims description 75
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 75
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 71
- 229910001868 water Inorganic materials 0.000 claims description 69
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 59
- 239000000463 material Substances 0.000 claims description 54
- 229910052751 metal Inorganic materials 0.000 claims description 52
- 239000002184 metal Substances 0.000 claims description 52
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 49
- 239000011261 inert gas Substances 0.000 claims description 48
- 239000003054 catalyst Substances 0.000 claims description 47
- 229910052760 oxygen Inorganic materials 0.000 claims description 47
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 46
- 239000001301 oxygen Substances 0.000 claims description 46
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 45
- 238000000746 purification Methods 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 34
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 31
- 229910021536 Zeolite Inorganic materials 0.000 claims description 29
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- 150000001340 alkali metals Chemical class 0.000 claims description 16
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
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- 229910002091 carbon monoxide Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 4
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- 230000000717 retained effect Effects 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
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- 239000004215 Carbon black (E152) Substances 0.000 description 3
- -1 but not limited to Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
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- 238000011109 contamination Methods 0.000 description 3
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- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
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- 150000002835 noble gases Chemical class 0.000 description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000002000 scavenging effect Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
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- 229910052802 copper Inorganic materials 0.000 description 2
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- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
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- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- 229910052918 calcium silicate Inorganic materials 0.000 description 1
- 239000000378 calcium silicate Substances 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
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- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
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- 229910052707 ruthenium Inorganic materials 0.000 description 1
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Description
1平方インチ当り15ポンドの入口圧力および1標準リットル毎分の窒素の流速において1平方インチ当り0.12(±20%)ポンド、
1平方インチ当り30ポンドの入口圧力および1標準リットル毎分の窒素の流速において1平方インチ当り0.074(±20%)ポンド、
1平方インチ当り60ポンドの入口圧力および1標準リットル毎分の窒素の流速において1平方インチ当り0.035(±20%)ポンド、
1平方インチ当り90ポンドの入口圧力および1標準リットル毎分の窒素の流速において1平方インチ当り0.02(±20%)ポンド、
1平方インチ当り15ポンドの入口圧力および3標準リットル毎分の窒素の流速において1平方インチ当り0.34(±20%)ポンド、
1平方インチ当り30ポンドの入口圧力および3標準リットル毎分の窒素の流速において1平方インチ当り0.24(±20%)ポンド、
1平方インチ当り60ポンドの入口圧力および3標準リットル毎分の窒素の流速において1平方インチ当り0.13(±20%)ポンド、
1平方インチ当り90ポンドの入口圧力および3標準リットル毎分の窒素の流速において1平方インチ当り0.09(±20%)ポンド、
1平方インチ当り15ポンドの入口圧力および10標準リットル毎分の窒素の流速において1平方インチ当り1.3(±20%)ポンド、
1平方インチ当り30ポンドの入口圧力および10標準リットル毎分の窒素の流速において1平方インチ当り0.88(±20%)ポンド、
1平方インチ当り60ポンドの入口圧力および10標準リットル毎分の窒素の流速において1平方インチ当り0.51(±20%)ポンド、または
1平方インチ当り90ポンドの入口圧力および10標準リットル毎分の窒素の流速において1平方インチ当り0.35(±20%)ポンド。
13.5ナノメートルでのEUVリソグラフィー(EUVL)は、水素および窒素ガス等のガスからの水分および炭化水素のような汚染物質の除去、ならびに精製されたガス流を準大気圧下で供給することを含むガス精製器に対する新たな要求を提起する。EUVL画像化は、ベークされていない真空チャンバーで起こる。その結果、EUVリソグラフィーツール中の主要な残留ガスは、水蒸気である。EUV真空環境中の水分および炭化水素汚染は、多層光学素子の稼動寿命の照射によって引き起こされる劣化をもたらし得る。
本発明の1つのバージョンにおけるスキーム1構成は、高表面積担体上の33ミリリットル(ml)のNiのベッドの上流、およびおよそ2.2mmのビーズ(8×12メッシュのビーズ)を有する33mlの13Xゼオライトモレキュラーシーブのベッドの下流である。それぞれのベッドの体積は、全体の精製器の体積の約50%であり、そのベッドの材料は入口および出口を有するハウジング中に収容されている。
材料の複数の別個のベッドまたはそれぞれの層が特定の汚染物質を除去する精製媒体の複数の別個の層を含む精製器による1つの問題は、1つのベッドから隣のベッド中への材料の移動であり得る。間仕切り、フィルター、またはメッシュスクリーンが使用されるときでさえも、それらは使用中に傾斜することがありまたはベッドまたは粒子の1つの層から別の層への移動を可能にする通路をそれらの端部分に有することがある。1つの層から別の層への材料の移動は、下流の精製器媒体が上流の精製器媒体によって部分的に被覆され、それ故、より小さい汚染物除去能力または安定性を有するようになり得るので、精製器の性能を低下させる結果となり得る。
多層精製器中では層の移動の存在は極わずかであること、ならびに隣接する精製媒体層の微小粒子(約0.03ミクロンから10ミクロンのミクロンサイズおよびサブミクロンサイズの粒子)、微粉および粉塵の移動は起こらないまたは精製器の性能にマイナスの影響を及ぼさないことがあらかじめ想定された。
202 下流の媒体
203 ハウジング
204 保持リング
205 膜
206 下流媒体
301 上流フリット
302 上流精製媒体のベッド
303 保持リング
304 膜
305 下流精製媒体のベッド
306 下流フリット
307 ハウジング
Claims (10)
- 流体入口および流体出口を有するハウジングを含むガス精製器であって、前記流体入口および流体出口は、不活性ガスからおよび還元ガスから水分および酸素を除去する前記ハウジング中に収容されている精製器のベッドの中を通って流体接続しており、前記精製器のベッドは、
不活性ガスおよび還元ガスから水分を除去する、0.7ミリメートル±20パーセント未満の最大寸法と0.297mmより大きい最小寸法を有するマクロ細孔物質移動制限アルカリ金属ゼオライト13Xモレキュラーシーブを含む第一の材料ベッド、ならびに
不活性ガスおよび還元ガスから酸素を除去し、還元ガスにさらされると水を放出することができ、かつ、室温で還元ガスによって還元された形に少なくとも部分的に再生される担体担持金属触媒を含む第二の材料ベッド
を含み、第一の材料ベッドが第二の材料ベッドの下流である、ガス精製器。 - 10億分の1体積部(1ppbv/v)から20ppbv/vの間の酸素および1ppbv/vから20ppbv/vの間の水分を含有する窒素ガスを、26.66kPa(200トル)の圧力および2標準リットル毎分(slpm)のガス流で6時間にわたってガス精製器の中に流した後、26.66kPa(200トル)の圧力での2slpmの水素ガス流に切り替えてガス精製器に流して、この水素ガス流中の流体出口における水分濃度が5ppbv/v以下であることを特徴とする、請求項1に記載のガス精製器。
- 第一の材料ベッドが、精製器のベッドの30体積パーセントから70体積パーセントであり、第二の材料ベッドが、精製器のベッドの70体積パーセントから30体積パーセントである、請求項1または2に記載のガス精製器。
- 第一の材料ベッドが、精製器のベッドの50±5体積パーセントであり、第二の材料ベッドが、精製器のベッドの50±5体積パーセントである、請求項3に記載のガス精製器。
- 第一の材料ベッドが、精製器のベッドの30体積パーセントから40体積パーセントであり、第二の材料ベッドが、精製器のベッドの70体積パーセントから60体積パーセントである、請求項3に記載のガス精製器。
- 100万分の12体積部の水分を含有する不活性ガスを10標準リットル毎分の流速で精製器の中に流した後、4000分後に流体出口における水分濃度が1兆分の100体積部以下であることをさらに特徴とする、請求項1から5のいずれか一項に記載の精製器。
- 金属触媒が、ニッケルを含有する、請求項1から6のいずれか一項に記載の精製器。
- 精製器のベッドが、不活性ガスおよび還元ガスから水分および酸素を準大気圧で除去する、請求項1から7のいずれか一項に記載の精製器。
- 精製器のベッドが、不活性ガスおよび還元ガスから水分および酸素を大気圧で除去する、請求項1から7のいずれか一項に記載の精製器。
- チャンバーをパージする方法であって、
前記チャンバーを請求項1から9のいずれか一項に記載のガス精製器により精製された不活性ガスで第一の時間帯の間パージするステップ、ならびに
前記チャンバーを前記ガス精製器により精製された還元ガスで第二の時間帯の間パージするステップ
を含む方法。
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Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108097036A (zh) | 2012-02-10 | 2018-06-01 | 恩特格里斯公司 | 气体纯化器 |
US10159927B2 (en) | 2014-04-18 | 2018-12-25 | Entegris, Inc. | High purity gas purifier |
JP6344764B2 (ja) * | 2014-09-30 | 2018-06-20 | 国立大学法人山口大学 | イソプロピルアルコールの保管方法および充填体 |
US9782766B2 (en) | 2015-12-18 | 2017-10-10 | Corning Incorporated | Regeneration process for metal catalyst based gas purifiers |
KR102539338B1 (ko) * | 2017-09-14 | 2023-06-02 | 가부시키가이샤 세이부 기켄 | 가스 치환용 드라이룸 |
CN108069407B (zh) * | 2017-12-28 | 2020-11-17 | 江西石华精细化工科技协同创新有限公司 | 一种绝氧气体的脱水除氧方法 |
FR3083717B1 (fr) * | 2018-07-11 | 2020-06-26 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Dispositif permettant de limiter ou supprimer la migration de particules entre deux couches |
FR3083718B1 (fr) * | 2018-07-11 | 2020-07-03 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Dispositif en toile permettant de limiter ou supprimer la migration de particules entre deux couches |
CN110759323A (zh) * | 2018-07-27 | 2020-02-07 | 隆基绿能科技股份有限公司 | 一种气体纯化反应器及气体纯化方法 |
CN114173962A (zh) * | 2019-05-24 | 2022-03-11 | 埃奎斯费雷斯公司 | 在低杂质气体气氛和系统中的金属粉末基制造方法 |
JP7453781B2 (ja) | 2019-12-13 | 2024-03-21 | 三菱重工業株式会社 | 製造装置用ガス供給装置、アトマイズ装置、3d積層造形装置、及び積層造形システム |
JP7428632B2 (ja) | 2020-12-14 | 2024-02-06 | 信越化学工業株式会社 | 多孔質ガラス母材の製造方法及び製造装置 |
CN118286824B (zh) * | 2024-06-06 | 2024-10-01 | 宏芯气体(上海)有限公司 | 一种氦气纯化装置及纯化方法 |
Family Cites Families (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3497069A (en) | 1968-11-01 | 1970-02-24 | Corning Glass Works | Apparatus for water purification by ion exchange |
US3969481A (en) * | 1972-11-03 | 1976-07-13 | Isotopes, Inc. | Process for generating ultra high purity H2 or O2 |
US4135896A (en) | 1975-12-11 | 1979-01-23 | Cvi Corporation | Gas purifier having rechargeable adsorber filter with removeable rechargeable sample canister |
DE7602442U1 (de) | 1976-01-27 | 1976-10-28 | Delbag-Luftfilter Gmbh, 1000 Berlin | Drosselbare, rohrfoermige bypass-messstrecke mit wartungsschutz und kontinuierlicher stroemungsgeschwindigkeitsabtastung an schuettgutanlagen der kerntechnik |
US4216198A (en) * | 1977-12-19 | 1980-08-05 | Billings Energy Corporation | Self-regenerating method and system of removing oxygen and water impurities from hydrogen gas |
JPS54108484U (ja) | 1978-01-18 | 1979-07-31 | ||
US4320004A (en) | 1978-10-16 | 1982-03-16 | Rubin Schecter | Anti-rust water treatment apparatus |
US4248832A (en) * | 1979-06-11 | 1981-02-03 | United States Steel Corporation | Waste gas purification reactor including packing holder and catalyst leveler support |
JPS5610318A (en) | 1979-07-06 | 1981-02-02 | Nippon Soken Inc | Canister |
JPS5664735U (ja) * | 1979-10-24 | 1981-05-30 | ||
JPS59107910A (ja) | 1982-12-10 | 1984-06-22 | Toshiba Corp | アルゴンガスの精製方法 |
DE3518367A1 (de) * | 1985-05-22 | 1986-11-27 | Linde Ag, 6200 Wiesbaden | Adsorbereinheit |
JPS621450A (ja) * | 1985-06-25 | 1987-01-07 | Mitsubishi Heavy Ind Ltd | セラミツクス製スリ−ブの插入取付け方法 |
US5655358A (en) | 1985-08-16 | 1997-08-12 | Kolmes; Nathaniel H. | Cut resistant support yarn suitable for wrapping with an additional yarn covering |
JPS6245314A (ja) | 1985-08-16 | 1987-02-27 | ヘルス テクノロジ−ズ,インコ−ポレイテツド | 分子ふるいを用いる混合ガス分離法及び分離装置 |
US4713224A (en) | 1986-03-31 | 1987-12-15 | The Boc Group, Inc. | One-step process for purifying an inert gas |
JPS63185437A (ja) * | 1987-01-28 | 1988-08-01 | Mitsubishi Heavy Ind Ltd | 触媒反応器 |
US4826510A (en) | 1988-01-13 | 1989-05-02 | The John Bunn Company | Portable low profile DC oxygen concentrator |
KR920002205B1 (ko) * | 1989-08-18 | 1992-03-19 | 삼성전자 주식회사 | 전자교환 시스템에 있어서 시험용 호출신호 발생회로 |
US4964888A (en) | 1989-12-27 | 1990-10-23 | Uop | Multiple zone adsorption process |
US5110569A (en) * | 1990-01-19 | 1992-05-05 | The Boc Group, Inc. | Low temperature purification of gases |
CA2037985A1 (en) | 1990-03-23 | 1991-09-24 | Robert C. Gmelin | Economical air separator |
US5204075A (en) | 1991-05-30 | 1993-04-20 | The Boc Group, Inc. | Process for the purification of the inert gases |
DE69202014T2 (de) | 1991-07-17 | 1995-08-31 | Japan Pionics | Verfahren zur Reinigung von gasförmigen organometallischen Verbindungen. |
JPH0576717A (ja) * | 1991-09-20 | 1993-03-30 | Hitachi Ltd | 吸着塔 |
JPH05220347A (ja) * | 1992-02-12 | 1993-08-31 | Babcock Hitachi Kk | 脱硝触媒装置 |
US5391358A (en) * | 1992-08-21 | 1995-02-21 | Praxair Technology, Inc. | Gas purification system |
RU2123971C1 (ru) * | 1993-04-29 | 1998-12-27 | Саес Геттерс С.П.А. | Способ удаления газообразных примесей из потока водорода и устройство для его осуществления |
DE4424329A1 (de) | 1993-10-14 | 1995-04-20 | Engelhard Process Chem Gmbh | Mit organischen Farbstoffen modifizierte Adsorbenzien auf Basis anorganischer Oxide |
JP2600105B2 (ja) * | 1994-06-17 | 1997-04-16 | 工業技術院長 | SiC膜の形成方法 |
JPH0859214A (ja) | 1994-08-24 | 1996-03-05 | Ebara Corp | オゾン発生装置 |
GB9505091D0 (en) | 1995-03-14 | 1995-05-03 | Permutit Co Ltd | Apparatus for purification of liquid |
US5676826A (en) | 1995-04-19 | 1997-10-14 | Advanced Separation Technologies Incorporated | Fluid-solid contacting apparatus |
WO1996034677A1 (en) * | 1995-05-03 | 1996-11-07 | Pall Corporation | Devices and methods related to the filtration and/or purification of fluids |
IT1277458B1 (it) | 1995-08-07 | 1997-11-10 | Getters Spa | Processo per la rimozione di ossigeno da ammoniaca a temperatura ambiente |
US5902561A (en) | 1995-09-29 | 1999-05-11 | D.D.I. Limited | Low temperature inert gas purifier |
US5728198A (en) | 1996-09-30 | 1998-03-17 | The Boc Group. Inc. | Process and apparatus for gas purification |
US5769928A (en) | 1996-12-12 | 1998-06-23 | Praxair Technology, Inc. | PSA gas purifier and purification process |
JPH10272333A (ja) * | 1997-01-31 | 1998-10-13 | Japan Organo Co Ltd | ガス精製方法、空気浄化方法、及びそれらの装置 |
US6017633A (en) | 1997-03-18 | 2000-01-25 | Ucar Carbon Technology Corporation | Flexible graphite composite sheet and method |
TW385298B (en) | 1997-04-04 | 2000-03-21 | Ucar Carbon Tech | Oxidation and corrosion resistant flexible graphite composite sheet and method |
FR2766735B1 (fr) * | 1997-07-31 | 1999-09-03 | Air Liquide | Procede et dispositif pour la production de gaz inerte ultra-pur |
DE29800319U1 (de) | 1998-01-10 | 1998-04-09 | Leybold Vakuum GmbH, 50968 Köln | Filter für den Einsatz in gasführenden Leitungen oder Kreisläufen |
DE19850576C2 (de) * | 1998-11-03 | 2002-06-27 | Freudenberg Carl Kg | Filterpatronenanordnung |
US6521192B1 (en) | 1999-08-06 | 2003-02-18 | Saes Pure Gas, Inc. | Rejuvenable ambient temperature purifier |
US6334889B1 (en) * | 1999-09-01 | 2002-01-01 | Praxair Technology, Inc. | Bed restraint for an adsorber |
JP2001149731A (ja) * | 1999-11-30 | 2001-06-05 | Liquid Gas Co Ltd | ガス精製装置 |
EP1176120A1 (en) | 2000-07-28 | 2002-01-30 | Japan Pionics Co., Ltd. | Process for purifying ammonia |
US6478850B2 (en) | 2000-08-02 | 2002-11-12 | Wearair Oxygen Inc. | Miniaturized wearable oxygen concentrator |
JP4504528B2 (ja) * | 2000-08-04 | 2010-07-14 | 富士重工業株式会社 | 金属担体の保持構造 |
CA2433511A1 (en) * | 2001-02-08 | 2002-08-22 | Pall Corporation | Purifier |
US20050002836A1 (en) * | 2001-04-13 | 2005-01-06 | Hardesty Jeffrey B. | Gas treatment device, and methods of making and using the same |
US6605135B2 (en) | 2001-09-26 | 2003-08-12 | Air Products And Chemicals, Inc. | Granular bed restraint system |
US6723155B2 (en) * | 2002-04-29 | 2004-04-20 | Air Products And Chemicals, Inc. | Purification of gas streams |
JP2004149393A (ja) | 2002-11-01 | 2004-05-27 | Japan Pionics Co Ltd | 不活性ガスの精製方法 |
US6918953B2 (en) | 2003-07-09 | 2005-07-19 | H2Gen Innovations, Inc. | Modular pressure swing adsorption process and apparatus |
US7160359B2 (en) | 2004-07-02 | 2007-01-09 | Air Products And Chemicals, Inc. | Built in purifier for reactive gases |
US7918923B2 (en) | 2005-05-16 | 2011-04-05 | Saes Getters S.P.A. | Gas purification with carbon based materials |
JP4685523B2 (ja) | 2005-06-28 | 2011-05-18 | シーケーディ株式会社 | 循環精製装置 |
US7228850B2 (en) | 2005-08-12 | 2007-06-12 | Stant Manufacturing Inc. | Fuel vapor recovery canister |
KR101597061B1 (ko) * | 2006-10-30 | 2016-02-24 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 아민 민감성 함침제 및 아민 민감성 기재와의 상용성이 향상된 시아노-함유 오염물을 제거하는 데 효과적인 여과제를 포함하는 필터 매체 제조방법 |
JP4674199B2 (ja) | 2006-11-28 | 2011-04-20 | 大阪瓦斯株式会社 | Psa装置 |
DE102007020421A1 (de) * | 2007-04-27 | 2008-10-30 | Rwe Power Ag | Verfahren zur Herstellung von mit Elementarschwefel dotierten kohlenstoffhaltigen Adsorptionsmitteln sowie Verfahren zur Abgasreinigung unter Verwendung solcher Adsorptionsmittel |
US8033304B2 (en) | 2007-07-13 | 2011-10-11 | Donaldson Company, Inc. | Contaminant control filter with fill port |
KR101078118B1 (ko) * | 2008-05-19 | 2011-10-31 | 한국화학연구원 | 초고순도 비활성가스 제조용 흡착제 |
US8721776B2 (en) * | 2009-01-14 | 2014-05-13 | Mektech Composites Inc. | Manufacturing systems with reactor units |
JP5232686B2 (ja) | 2009-02-24 | 2013-07-10 | 大陽日酸株式会社 | ガスの精製方法および精製装置 |
CN101941684A (zh) * | 2009-07-10 | 2011-01-12 | 琳德股份公司 | 氦纯化方法 |
US8691159B2 (en) | 2011-03-16 | 2014-04-08 | Exxonmobil Research And Engineering Company | Modular catalyst bed support |
CN202212103U (zh) | 2011-09-26 | 2012-05-09 | 涂志龙 | 空气净化器 |
CN108097036A (zh) | 2012-02-10 | 2018-06-01 | 恩特格里斯公司 | 气体纯化器 |
JP2015533635A (ja) * | 2012-09-10 | 2015-11-26 | インテグリス・インコーポレーテッド | 層状ベッド浄化装置におけるミクロ粒子及び粉塵の移動を防止するための装置 |
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2013
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CN108097036A (zh) | 2018-06-01 |
EP3207976A1 (en) | 2017-08-23 |
EP2812101A1 (en) | 2014-12-17 |
KR20140123581A (ko) | 2014-10-22 |
US10245554B2 (en) | 2019-04-02 |
JP6480483B2 (ja) | 2019-03-13 |
US20170333841A1 (en) | 2017-11-23 |
KR20170010074A (ko) | 2017-01-25 |
KR101961048B1 (ko) | 2019-07-15 |
US9694319B2 (en) | 2017-07-04 |
TWI592205B (zh) | 2017-07-21 |
SG11201404783SA (en) | 2014-10-30 |
SG10201702197PA (en) | 2017-04-27 |
WO2013119883A1 (en) | 2013-08-15 |
JP2013166144A (ja) | 2013-08-29 |
JP2017119277A (ja) | 2017-07-06 |
TW201345598A (zh) | 2013-11-16 |
US20150056113A1 (en) | 2015-02-26 |
TW201714660A (zh) | 2017-05-01 |
EP3207976B1 (en) | 2021-06-30 |
TWI617344B (zh) | 2018-03-11 |
CN107008142A (zh) | 2017-08-04 |
KR102043480B1 (ko) | 2019-11-11 |
CN104245090A (zh) | 2014-12-24 |
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