JP2013145766A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2013145766A5 JP2013145766A5 JP2013096260A JP2013096260A JP2013145766A5 JP 2013145766 A5 JP2013145766 A5 JP 2013145766A5 JP 2013096260 A JP2013096260 A JP 2013096260A JP 2013096260 A JP2013096260 A JP 2013096260A JP 2013145766 A5 JP2013145766 A5 JP 2013145766A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode
- light
- forming
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910052751 metal Inorganic materials 0.000 claims 8
- 239000002184 metal Substances 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 150000002894 organic compounds Chemical class 0.000 claims 4
- 238000005192 partition Methods 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000006229 carbon black Substances 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 239000011651 chromium Substances 0.000 claims 2
- 229910017052 cobalt Inorganic materials 0.000 claims 2
- 239000010941 cobalt Substances 0.000 claims 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 229910002804 graphite Inorganic materials 0.000 claims 2
- 239000010439 graphite Substances 0.000 claims 2
- 239000011133 lead Substances 0.000 claims 2
- 229910052750 molybdenum Inorganic materials 0.000 claims 2
- 239000011733 molybdenum Substances 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 239000002952 polymeric resin Substances 0.000 claims 2
- 229920003002 synthetic resin Polymers 0.000 claims 2
- 229910052718 tin Inorganic materials 0.000 claims 2
- 239000011135 tin Substances 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000010937 tungsten Substances 0.000 claims 2
- 229910052725 zinc Inorganic materials 0.000 claims 2
- 239000011701 zinc Substances 0.000 claims 2
- 230000001603 reducing effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013096260A JP2013145766A (ja) | 2008-05-29 | 2013-05-01 | 発光装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008141521 | 2008-05-29 | ||
| JP2008141521 | 2008-05-29 | ||
| JP2013096260A JP2013145766A (ja) | 2008-05-29 | 2013-05-01 | 発光装置の作製方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009131306A Division JP5265451B2 (ja) | 2008-05-29 | 2009-05-29 | 成膜方法および発光装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015005128A Division JP2015092509A (ja) | 2008-05-29 | 2015-01-14 | 発光装置の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013145766A JP2013145766A (ja) | 2013-07-25 |
| JP2013145766A5 true JP2013145766A5 (enExample) | 2013-10-03 |
Family
ID=41380166
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009131306A Expired - Fee Related JP5265451B2 (ja) | 2008-05-29 | 2009-05-29 | 成膜方法および発光装置の作製方法 |
| JP2013096260A Withdrawn JP2013145766A (ja) | 2008-05-29 | 2013-05-01 | 発光装置の作製方法 |
| JP2015005128A Withdrawn JP2015092509A (ja) | 2008-05-29 | 2015-01-14 | 発光装置の作製方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009131306A Expired - Fee Related JP5265451B2 (ja) | 2008-05-29 | 2009-05-29 | 成膜方法および発光装置の作製方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015005128A Withdrawn JP2015092509A (ja) | 2008-05-29 | 2015-01-14 | 発光装置の作製方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8802185B2 (enExample) |
| JP (3) | JP5265451B2 (enExample) |
| KR (1) | KR101629637B1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9653709B2 (en) * | 2012-11-20 | 2017-05-16 | The Regents Of The University Of Michigan | Optoelectronic device formed with controlled vapor flow |
| JP5880679B2 (ja) * | 2014-07-16 | 2016-03-09 | 住友化学株式会社 | 発光素子の製造方法 |
| WO2016204058A1 (ja) * | 2015-06-15 | 2016-12-22 | 住友化学株式会社 | 有機el素子の製造方法 |
| WO2018210143A1 (zh) * | 2017-05-19 | 2018-11-22 | 中国科学院化学研究所 | 一种激光面板、激光阵列装置及激光显示器 |
Family Cites Families (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3222518B2 (ja) * | 1991-12-26 | 2001-10-29 | キヤノン株式会社 | 液体原料気化装置および薄膜形成装置 |
| JP3034438B2 (ja) * | 1994-03-31 | 2000-04-17 | キヤノン株式会社 | カラーフィルタの製造装置 |
| KR100195175B1 (ko) | 1996-12-23 | 1999-06-15 | 손욱 | 유기전자발광소자 유기박막용 도너필름, 이를 이용한 유기전자발광소자의 제조방법 및 그 방법에 따라 제조된 유기전자발광소자 |
| US6220912B1 (en) * | 1997-05-09 | 2001-04-24 | Canon Kabushiki Kaisha | Method and apparatus for producing electron source using dispenser to produce electron emitting portions |
| US5851709A (en) * | 1997-10-31 | 1998-12-22 | Eastman Kodak Company | Method for selective transfer of a color organic layer |
| JP4547723B2 (ja) | 1998-03-09 | 2010-09-22 | セイコーエプソン株式会社 | 有機el表示装置の製造方法 |
| JP2000195665A (ja) | 1998-12-25 | 2000-07-14 | Toyota Motor Corp | 有機膜の形成方法 |
| US7288420B1 (en) * | 1999-06-04 | 2007-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing an electro-optical device |
| TW512543B (en) * | 1999-06-28 | 2002-12-01 | Semiconductor Energy Lab | Method of manufacturing an electro-optical device |
| TW504941B (en) * | 1999-07-23 | 2002-10-01 | Semiconductor Energy Lab | Method of fabricating an EL display device, and apparatus for forming a thin film |
| TW468283B (en) * | 1999-10-12 | 2001-12-11 | Semiconductor Energy Lab | EL display device and a method of manufacturing the same |
| TW480722B (en) | 1999-10-12 | 2002-03-21 | Semiconductor Energy Lab | Manufacturing method of electro-optical device |
| JP4854840B2 (ja) | 1999-10-12 | 2012-01-18 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| TW471011B (en) | 1999-10-13 | 2002-01-01 | Semiconductor Energy Lab | Thin film forming apparatus |
| JP4590663B2 (ja) * | 1999-10-29 | 2010-12-01 | セイコーエプソン株式会社 | カラーフィルタの製造方法 |
| JP2002075640A (ja) | 2000-08-30 | 2002-03-15 | Dainippon Screen Mfg Co Ltd | 有機el表示装置の製造方法およびその製造装置 |
| US6699597B2 (en) * | 2001-08-16 | 2004-03-02 | 3M Innovative Properties Company | Method and materials for patterning of an amorphous, non-polymeric, organic matrix with electrically active material disposed therein |
| JP2004071554A (ja) * | 2002-07-25 | 2004-03-04 | Sanyo Electric Co Ltd | 有機elパネルおよびその製造方法 |
| JP2004087143A (ja) | 2002-08-22 | 2004-03-18 | Sony Corp | 転写基板、転写装置および転写方法 |
| KR100579174B1 (ko) * | 2003-12-22 | 2006-05-11 | 삼성에스디아이 주식회사 | 레이저 전사용 도너 필름 및 그 필름을 사용하여 제조되는유기 전계 발광 소자 |
| KR100708644B1 (ko) * | 2004-02-26 | 2007-04-17 | 삼성에스디아이 주식회사 | 박막 트랜지스터, 이를 구비한 평판 표시장치, 박막트랜지스터의 제조방법, 평판 표시장치의 제조방법, 및도너 시트의 제조방법 |
| JP2006086069A (ja) * | 2004-09-17 | 2006-03-30 | Three M Innovative Properties Co | 有機エレクトロルミネッセンス素子及びその製造方法 |
| KR100793355B1 (ko) * | 2004-10-05 | 2008-01-11 | 삼성에스디아이 주식회사 | 도너 기판의 제조방법 및 유기전계발광표시장치의 제조방법 |
| KR100667069B1 (ko) * | 2004-10-19 | 2007-01-10 | 삼성에스디아이 주식회사 | 도너 기판 및 그를 사용한 유기전계발광표시장치의 제조방법 |
| JP2006228649A (ja) * | 2005-02-21 | 2006-08-31 | Seiko Epson Corp | 有機el装置の製造方法、蒸着ボート |
| KR20060109373A (ko) * | 2005-04-15 | 2006-10-20 | 삼성전기주식회사 | 유기전자소자 제조방법 |
| JP2006309955A (ja) | 2005-04-26 | 2006-11-09 | Sony Corp | 有機電界発光素子の製造方法および有機電界発光素子 |
| JP2006309995A (ja) * | 2005-04-27 | 2006-11-09 | Sony Corp | 転写用基板および表示装置の製造方法ならびに表示装置 |
| TWI307612B (en) * | 2005-04-27 | 2009-03-11 | Sony Corp | Transfer method and transfer apparatus |
| JPWO2007015465A1 (ja) * | 2005-08-01 | 2009-02-19 | パイオニア株式会社 | 有機膜被熱転写体製造方法、有機膜被熱転写体 |
| JP4449890B2 (ja) * | 2005-11-21 | 2010-04-14 | ソニー株式会社 | 転写用基板および転写方法ならびに表示装置の製造方法 |
| KR101109195B1 (ko) * | 2005-12-19 | 2012-01-30 | 삼성전자주식회사 | 3차원 구조의 발광소자 및 그의 제조방법 |
| KR20070073457A (ko) * | 2006-01-05 | 2007-07-10 | 삼성에스디아이 주식회사 | 유기 전계 발광소자용 도너 필름의 제조 방법 및 이를이용한 유기 전계 발광소자의 제조 방법 |
| JP5016831B2 (ja) * | 2006-03-17 | 2012-09-05 | キヤノン株式会社 | 酸化物半導体薄膜トランジスタを用いた発光素子及びこれを用いた画像表示装置 |
| JP5013048B2 (ja) * | 2006-04-06 | 2012-08-29 | ソニー株式会社 | 赤色有機発光素子およびこれを備えた表示装置 |
| TWI412079B (zh) * | 2006-07-28 | 2013-10-11 | Semiconductor Energy Lab | 製造顯示裝置的方法 |
| TWI427702B (zh) * | 2006-07-28 | 2014-02-21 | Semiconductor Energy Lab | 顯示裝置的製造方法 |
| US7994021B2 (en) * | 2006-07-28 | 2011-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
| WO2008023630A1 (en) * | 2006-08-24 | 2008-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing display device |
| US8563431B2 (en) * | 2006-08-25 | 2013-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP2008059824A (ja) * | 2006-08-30 | 2008-03-13 | Fuji Electric Holdings Co Ltd | アクティブマトリックス型有機elパネルおよびその製造方法 |
| US8148259B2 (en) * | 2006-08-30 | 2012-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP4245054B2 (ja) * | 2007-01-26 | 2009-03-25 | セイコーエプソン株式会社 | 画素内機能液の形態測定方法、画素内機能液の形態測定装置および液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器 |
| KR101563237B1 (ko) * | 2007-06-01 | 2015-10-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 제조장치 및 발광장치 제작방법 |
| KR20090028413A (ko) * | 2007-09-13 | 2009-03-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광장치 제작방법 및 증착용 기판 |
| US8153201B2 (en) * | 2007-10-23 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing light-emitting device, and evaporation donor substrate |
| KR20090041316A (ko) * | 2007-10-23 | 2009-04-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막 방법 및 발광 장치의 제작 방법 |
| KR20090041314A (ko) * | 2007-10-23 | 2009-04-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 증착용 기판 및 발광장치의 제조방법 |
| US8425974B2 (en) * | 2007-11-29 | 2013-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Evaporation donor substrate and method for manufacturing light-emitting device |
| KR101689519B1 (ko) * | 2007-12-26 | 2016-12-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 증착용 기판, 증착용 기판의 제조방법, 및 발광장치의 제조방법 |
| US8080811B2 (en) * | 2007-12-28 | 2011-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing evaporation donor substrate and light-emitting device |
-
2009
- 2009-05-26 KR KR1020090045754A patent/KR101629637B1/ko not_active Expired - Fee Related
- 2009-05-27 US US12/472,562 patent/US8802185B2/en not_active Expired - Fee Related
- 2009-05-29 JP JP2009131306A patent/JP5265451B2/ja not_active Expired - Fee Related
-
2013
- 2013-05-01 JP JP2013096260A patent/JP2013145766A/ja not_active Withdrawn
-
2015
- 2015-01-14 JP JP2015005128A patent/JP2015092509A/ja not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2012253013A5 (ja) | 発光素子 | |
| JP2013251255A5 (enExample) | ||
| JP2015015232A5 (ja) | 発光装置の作製方法 | |
| JP2012124175A5 (enExample) | ||
| JP2011211705A5 (enExample) | ||
| JP2011077512A5 (ja) | 発光装置の作製方法 | |
| CN103972422B (zh) | 有机电致发光器件的封装结构及封装方法、显示装置 | |
| JP2010062543A5 (ja) | 半導体装置 | |
| JP2014056815A5 (enExample) | ||
| JP2009283455A5 (enExample) | ||
| JP2013179097A5 (ja) | 表示装置 | |
| JP2013042154A5 (enExample) | ||
| JP2012209275A5 (ja) | 自発光装置の作製方法 | |
| JP2013038399A5 (ja) | 半導体装置 | |
| JP2013062529A5 (enExample) | ||
| WO2014082061A8 (en) | Nanowire-modified graphene and methods of making and using same | |
| JP2013118179A5 (ja) | 発光モジュール | |
| JP2010171406A5 (ja) | 半導体装置 | |
| JP2015061952A5 (enExample) | ||
| JP2011233880A5 (ja) | 半導体装置 | |
| JP2010153813A5 (ja) | 発光装置 | |
| JP2012160477A5 (enExample) | ||
| JP2010245032A5 (enExample) | ||
| JP2015005731A5 (ja) | 酸化物半導体膜 | |
| JP2010117710A5 (ja) | 発光装置 |