KR101629637B1 - 성막방법 및 발광장치의 제조방법 - Google Patents
성막방법 및 발광장치의 제조방법 Download PDFInfo
- Publication number
- KR101629637B1 KR101629637B1 KR1020090045754A KR20090045754A KR101629637B1 KR 101629637 B1 KR101629637 B1 KR 101629637B1 KR 1020090045754 A KR1020090045754 A KR 1020090045754A KR 20090045754 A KR20090045754 A KR 20090045754A KR 101629637 B1 KR101629637 B1 KR 101629637B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- substrate
- light
- organic compound
- light absorbing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2008-141521 | 2008-05-29 | ||
| JP2008141521 | 2008-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20090124948A KR20090124948A (ko) | 2009-12-03 |
| KR101629637B1 true KR101629637B1 (ko) | 2016-06-13 |
Family
ID=41380166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020090045754A Expired - Fee Related KR101629637B1 (ko) | 2008-05-29 | 2009-05-26 | 성막방법 및 발광장치의 제조방법 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8802185B2 (enExample) |
| JP (3) | JP5265451B2 (enExample) |
| KR (1) | KR101629637B1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9653709B2 (en) * | 2012-11-20 | 2017-05-16 | The Regents Of The University Of Michigan | Optoelectronic device formed with controlled vapor flow |
| JP5880679B2 (ja) * | 2014-07-16 | 2016-03-09 | 住友化学株式会社 | 発光素子の製造方法 |
| KR101775315B1 (ko) * | 2015-06-15 | 2017-09-05 | 스미또모 가가꾸 가부시키가이샤 | 유기 el 소자의 제조 방법 |
| WO2018210143A1 (zh) * | 2017-05-19 | 2018-11-22 | 中国科学院化学研究所 | 一种激光面板、激光阵列装置及激光显示器 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006228649A (ja) * | 2005-02-21 | 2006-08-31 | Seiko Epson Corp | 有機el装置の製造方法、蒸着ボート |
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| JP3222518B2 (ja) * | 1991-12-26 | 2001-10-29 | キヤノン株式会社 | 液体原料気化装置および薄膜形成装置 |
| JP3034438B2 (ja) | 1994-03-31 | 2000-04-17 | キヤノン株式会社 | カラーフィルタの製造装置 |
| KR100195175B1 (ko) | 1996-12-23 | 1999-06-15 | 손욱 | 유기전자발광소자 유기박막용 도너필름, 이를 이용한 유기전자발광소자의 제조방법 및 그 방법에 따라 제조된 유기전자발광소자 |
| US6220912B1 (en) | 1997-05-09 | 2001-04-24 | Canon Kabushiki Kaisha | Method and apparatus for producing electron source using dispenser to produce electron emitting portions |
| US5851709A (en) * | 1997-10-31 | 1998-12-22 | Eastman Kodak Company | Method for selective transfer of a color organic layer |
| JP4547723B2 (ja) | 1998-03-09 | 2010-09-22 | セイコーエプソン株式会社 | 有機el表示装置の製造方法 |
| JP2000195665A (ja) | 1998-12-25 | 2000-07-14 | Toyota Motor Corp | 有機膜の形成方法 |
| US7288420B1 (en) | 1999-06-04 | 2007-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing an electro-optical device |
| TW512543B (en) | 1999-06-28 | 2002-12-01 | Semiconductor Energy Lab | Method of manufacturing an electro-optical device |
| TW504941B (en) | 1999-07-23 | 2002-10-01 | Semiconductor Energy Lab | Method of fabricating an EL display device, and apparatus for forming a thin film |
| JP4854840B2 (ja) | 1999-10-12 | 2012-01-18 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| TW468283B (en) | 1999-10-12 | 2001-12-11 | Semiconductor Energy Lab | EL display device and a method of manufacturing the same |
| TW480722B (en) | 1999-10-12 | 2002-03-21 | Semiconductor Energy Lab | Manufacturing method of electro-optical device |
| TW471011B (en) | 1999-10-13 | 2002-01-01 | Semiconductor Energy Lab | Thin film forming apparatus |
| JP4590663B2 (ja) | 1999-10-29 | 2010-12-01 | セイコーエプソン株式会社 | カラーフィルタの製造方法 |
| JP2002075640A (ja) | 2000-08-30 | 2002-03-15 | Dainippon Screen Mfg Co Ltd | 有機el表示装置の製造方法およびその製造装置 |
| US6699597B2 (en) | 2001-08-16 | 2004-03-02 | 3M Innovative Properties Company | Method and materials for patterning of an amorphous, non-polymeric, organic matrix with electrically active material disposed therein |
| JP2004071554A (ja) | 2002-07-25 | 2004-03-04 | Sanyo Electric Co Ltd | 有機elパネルおよびその製造方法 |
| JP2004087143A (ja) | 2002-08-22 | 2004-03-18 | Sony Corp | 転写基板、転写装置および転写方法 |
| KR100579174B1 (ko) | 2003-12-22 | 2006-05-11 | 삼성에스디아이 주식회사 | 레이저 전사용 도너 필름 및 그 필름을 사용하여 제조되는유기 전계 발광 소자 |
| KR100625999B1 (ko) | 2004-02-26 | 2006-09-20 | 삼성에스디아이 주식회사 | 도너 시트, 상기 도너 시트의 제조방법, 상기 도너 시트를이용한 박막 트랜지스터의 제조방법, 및 상기 도너 시트를이용한 평판 표시장치의 제조방법 |
| JP2006086069A (ja) | 2004-09-17 | 2006-03-30 | Three M Innovative Properties Co | 有機エレクトロルミネッセンス素子及びその製造方法 |
| KR100793355B1 (ko) | 2004-10-05 | 2008-01-11 | 삼성에스디아이 주식회사 | 도너 기판의 제조방법 및 유기전계발광표시장치의 제조방법 |
| KR100667069B1 (ko) | 2004-10-19 | 2007-01-10 | 삼성에스디아이 주식회사 | 도너 기판 및 그를 사용한 유기전계발광표시장치의 제조방법 |
| KR20060109373A (ko) | 2005-04-15 | 2006-10-20 | 삼성전기주식회사 | 유기전자소자 제조방법 |
| JP2006309955A (ja) | 2005-04-26 | 2006-11-09 | Sony Corp | 有機電界発光素子の製造方法および有機電界発光素子 |
| TWI307612B (en) | 2005-04-27 | 2009-03-11 | Sony Corp | Transfer method and transfer apparatus |
| JP2006309995A (ja) | 2005-04-27 | 2006-11-09 | Sony Corp | 転写用基板および表示装置の製造方法ならびに表示装置 |
| CN101277822B (zh) | 2005-08-01 | 2012-01-25 | 日本先锋公司 | 有机膜热转印于其上的转印体的制造方法、有机膜热转印于其上的转印体 |
| JP4449890B2 (ja) | 2005-11-21 | 2010-04-14 | ソニー株式会社 | 転写用基板および転写方法ならびに表示装置の製造方法 |
| KR101109195B1 (ko) * | 2005-12-19 | 2012-01-30 | 삼성전자주식회사 | 3차원 구조의 발광소자 및 그의 제조방법 |
| KR20070073457A (ko) * | 2006-01-05 | 2007-07-10 | 삼성에스디아이 주식회사 | 유기 전계 발광소자용 도너 필름의 제조 방법 및 이를이용한 유기 전계 발광소자의 제조 방법 |
| JP5016831B2 (ja) * | 2006-03-17 | 2012-09-05 | キヤノン株式会社 | 酸化物半導体薄膜トランジスタを用いた発光素子及びこれを用いた画像表示装置 |
| JP5013048B2 (ja) | 2006-04-06 | 2012-08-29 | ソニー株式会社 | 赤色有機発光素子およびこれを備えた表示装置 |
| US7994021B2 (en) | 2006-07-28 | 2011-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
| TWI427702B (zh) | 2006-07-28 | 2014-02-21 | Semiconductor Energy Lab | 顯示裝置的製造方法 |
| TWI412079B (zh) | 2006-07-28 | 2013-10-11 | Semiconductor Energy Lab | 製造顯示裝置的方法 |
| KR101346246B1 (ko) | 2006-08-24 | 2013-12-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시장치 제작방법 |
| US8563431B2 (en) | 2006-08-25 | 2013-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| US8148259B2 (en) | 2006-08-30 | 2012-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP2008059824A (ja) * | 2006-08-30 | 2008-03-13 | Fuji Electric Holdings Co Ltd | アクティブマトリックス型有機elパネルおよびその製造方法 |
| JP4245054B2 (ja) * | 2007-01-26 | 2009-03-25 | セイコーエプソン株式会社 | 画素内機能液の形態測定方法、画素内機能液の形態測定装置および液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器 |
| KR101563237B1 (ko) | 2007-06-01 | 2015-10-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 제조장치 및 발광장치 제작방법 |
| KR20090028413A (ko) | 2007-09-13 | 2009-03-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광장치 제작방법 및 증착용 기판 |
| KR20090041316A (ko) | 2007-10-23 | 2009-04-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막 방법 및 발광 장치의 제작 방법 |
| US8153201B2 (en) | 2007-10-23 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing light-emitting device, and evaporation donor substrate |
| KR20090041314A (ko) | 2007-10-23 | 2009-04-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 증착용 기판 및 발광장치의 제조방법 |
| US8425974B2 (en) | 2007-11-29 | 2013-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Evaporation donor substrate and method for manufacturing light-emitting device |
| KR101689519B1 (ko) | 2007-12-26 | 2016-12-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 증착용 기판, 증착용 기판의 제조방법, 및 발광장치의 제조방법 |
| US8080811B2 (en) | 2007-12-28 | 2011-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing evaporation donor substrate and light-emitting device |
-
2009
- 2009-05-26 KR KR1020090045754A patent/KR101629637B1/ko not_active Expired - Fee Related
- 2009-05-27 US US12/472,562 patent/US8802185B2/en not_active Expired - Fee Related
- 2009-05-29 JP JP2009131306A patent/JP5265451B2/ja not_active Expired - Fee Related
-
2013
- 2013-05-01 JP JP2013096260A patent/JP2013145766A/ja not_active Withdrawn
-
2015
- 2015-01-14 JP JP2015005128A patent/JP2015092509A/ja not_active Withdrawn
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006228649A (ja) * | 2005-02-21 | 2006-08-31 | Seiko Epson Corp | 有機el装置の製造方法、蒸着ボート |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20090124948A (ko) | 2009-12-03 |
| JP2013145766A (ja) | 2013-07-25 |
| JP5265451B2 (ja) | 2013-08-14 |
| US20090297694A1 (en) | 2009-12-03 |
| JP2015092509A (ja) | 2015-05-14 |
| JP2010010127A (ja) | 2010-01-14 |
| US8802185B2 (en) | 2014-08-12 |
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