JP2013122950A - Iii族窒化物半導体発光素子 - Google Patents
Iii族窒化物半導体発光素子 Download PDFInfo
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- JP2013122950A JP2013122950A JP2011270029A JP2011270029A JP2013122950A JP 2013122950 A JP2013122950 A JP 2013122950A JP 2011270029 A JP2011270029 A JP 2011270029A JP 2011270029 A JP2011270029 A JP 2011270029A JP 2013122950 A JP2013122950 A JP 2013122950A
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- nitride semiconductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen characterised by the doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
Abstract
【解決手段】III 族窒化物半導体発光素子は、サファイア基板10を有し、サファイア基板10上に、III 族窒化物半導体からなるnコンタクト層11、nクラッド層12、発光層13、pクラッド層14、pコンタクト層15が順に積層された構造を有している。nクラッド層12は、nコンタクト層11側から順に高不純物濃度層120、低不純物濃度層121の2層で構成されていて、低不純物濃度層121が発光層13に接する。低不純物濃度層121は、高不純物濃度層120よりもn型不純物濃度が低い層であり、n型不純物濃度がpクラッド層のp型不純物濃度の1/1000〜1/100であり、厚さが10〜400Åである。
【選択図】図1
Description
11:nコンタクト層
12:nクラッド層
13:発光層
14:pクラッド層
15:pコンタクト層
16:n電極
17:透明電極
18:p電極
120:高不純物濃度層
121:低不純物濃度層
Claims (7)
- 発光層と、前記発光層上にpクラッド層を有したIII 族窒化物半導体発光素子において、
前記発光層の前記pクラッド層側とは反対側に位置し、n型不純物がドープされた高不純物濃度層と、
前記高不純物濃度層と前記発光層との間であって前記発光層に接して位置し、その高不純物濃度層よりもn型不純物濃度が低い低不純物濃度層と、
を有し、
前記低不純物濃度層は、n型不純物濃度が、前記pクラッド層のp型不純物濃度の1/1000〜1/100であり、厚さが10〜400Åである、
ことを特徴とするIII 族窒化物半導体発光素子。 - 前記低不純物濃度層のn型不純物濃度は1×1017〜1×1018/cm3 である、
ことを特徴とする請求項1に記載のIII 族窒化物半導体発光素子。 - 前記低不純物濃度層は、厚さが50〜400Åである、ことを特徴とする請求項1または請求項2に記載のIII 族窒化物半導体発光素子。
- 前記低不純物濃度層は、厚さが150〜350Åである、ことを特徴とする請求項3に記載のIII 族窒化物半導体発光素子。
- 前記低不純物濃度層は、超格子構造である、ことを特徴とする請求項1ないし請求項4のいずれか1項に記載のIII 族窒化物半導体発光素子。
- 前記高不純物濃度層および前記低不純物濃度層は、超格子構造のnクラッド層であることを特徴とする請求項5に記載のIII 族窒化物半導体発光素子。
- 前記超格子構造は、アンドープまたはn型不純物ドープのInGaNとアンドープまたはn型不純物ドープのGaNの少なくとも2層を1単位として、その1単位が繰り返し積層された構造である、ことを特徴とする請求項5または請求項6に記載のIII 族窒化物半導体発光素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011270029A JP2013122950A (ja) | 2011-12-09 | 2011-12-09 | Iii族窒化物半導体発光素子 |
US13/688,105 US8633469B2 (en) | 2011-12-09 | 2012-11-28 | Group III nitride semiconductor light-emitting device |
CN2012105196527A CN103165772A (zh) | 2011-12-09 | 2012-12-06 | Iii族氮化物半导体发光器件 |
Applications Claiming Priority (1)
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JP2011270029A JP2013122950A (ja) | 2011-12-09 | 2011-12-09 | Iii族窒化物半導体発光素子 |
Publications (1)
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JP2013122950A true JP2013122950A (ja) | 2013-06-20 |
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JP2011270029A Pending JP2013122950A (ja) | 2011-12-09 | 2011-12-09 | Iii族窒化物半導体発光素子 |
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Country | Link |
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US (1) | US8633469B2 (ja) |
JP (1) | JP2013122950A (ja) |
CN (1) | CN103165772A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016046411A (ja) * | 2014-08-25 | 2016-04-04 | シャープ株式会社 | 半導体発光素子 |
WO2018142870A1 (ja) * | 2017-02-01 | 2018-08-09 | 日機装株式会社 | 半導体発光素子および半導体発光素子の製造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI626766B (zh) * | 2017-06-01 | 2018-06-11 | 錼創科技股份有限公司 | 發光元件 |
KR102432226B1 (ko) * | 2017-12-01 | 2022-08-12 | 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 | 반도체 소자 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007234648A (ja) * | 2006-02-27 | 2007-09-13 | Sharp Corp | 窒化物半導体発光素子の製造方法 |
JP2010232649A (ja) * | 2009-03-06 | 2010-10-14 | Showa Denko Kk | Iii族窒化物半導体発光素子及びその製造方法、並びにランプ |
JP2011228646A (ja) * | 2010-03-31 | 2011-11-10 | Toyoda Gosei Co Ltd | Iii族窒化物半導体発光素子 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3275810B2 (ja) | 1997-11-18 | 2002-04-22 | 日亜化学工業株式会社 | 窒化物半導体発光素子 |
WO1999005728A1 (en) | 1997-07-25 | 1999-02-04 | Nichia Chemical Industries, Ltd. | Nitride semiconductor device |
JP3216596B2 (ja) | 1998-01-08 | 2001-10-09 | 日亜化学工業株式会社 | 窒化ガリウム系化合物半導体発光素子 |
WO1999046822A1 (fr) | 1998-03-12 | 1999-09-16 | Nichia Chemical Industries, Ltd. | Dispositif semi-conducteur electroluminescent au nitrure |
JP3271661B2 (ja) | 1998-12-08 | 2002-04-02 | 日亜化学工業株式会社 | 窒化物半導体素子 |
US7345297B2 (en) * | 2004-02-09 | 2008-03-18 | Nichia Corporation | Nitride semiconductor device |
JP2008244307A (ja) * | 2007-03-28 | 2008-10-09 | Sharp Corp | 半導体発光素子および窒化物半導体発光素子 |
JP2009277882A (ja) * | 2008-05-14 | 2009-11-26 | Showa Denko Kk | Iii族窒化物半導体発光素子の製造方法及びiii族窒化物半導体発光素子、並びにランプ |
WO2011004890A1 (ja) * | 2009-07-10 | 2011-01-13 | 昭和電工株式会社 | 半導体発光素子の製造方法およびランプ、電子機器、及び機械装置 |
JP2011129718A (ja) * | 2009-12-17 | 2011-06-30 | Showa Denko Kk | 基板、テンプレート基板、半導体発光素子、半導体発光素子の製造方法、半導体発光素子を用いた照明装置および電子機器 |
JP2013038394A (ja) * | 2011-07-14 | 2013-02-21 | Rohm Co Ltd | 半導体レーザ素子 |
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2011
- 2011-12-09 JP JP2011270029A patent/JP2013122950A/ja active Pending
-
2012
- 2012-11-28 US US13/688,105 patent/US8633469B2/en not_active Expired - Fee Related
- 2012-12-06 CN CN2012105196527A patent/CN103165772A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007234648A (ja) * | 2006-02-27 | 2007-09-13 | Sharp Corp | 窒化物半導体発光素子の製造方法 |
JP2010232649A (ja) * | 2009-03-06 | 2010-10-14 | Showa Denko Kk | Iii族窒化物半導体発光素子及びその製造方法、並びにランプ |
JP2011228646A (ja) * | 2010-03-31 | 2011-11-10 | Toyoda Gosei Co Ltd | Iii族窒化物半導体発光素子 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016046411A (ja) * | 2014-08-25 | 2016-04-04 | シャープ株式会社 | 半導体発光素子 |
WO2018142870A1 (ja) * | 2017-02-01 | 2018-08-09 | 日機装株式会社 | 半導体発光素子および半導体発光素子の製造方法 |
JP2018125428A (ja) * | 2017-02-01 | 2018-08-09 | 日機装株式会社 | 半導体発光素子および半導体発光素子の製造方法 |
US10944026B2 (en) | 2017-02-01 | 2021-03-09 | Nikkiso Co., Ltd. | Semiconductor light emitting device and method of manufacturing semiconductor light emitting device |
Also Published As
Publication number | Publication date |
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US8633469B2 (en) | 2014-01-21 |
CN103165772A (zh) | 2013-06-19 |
US20130146839A1 (en) | 2013-06-13 |
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