JP2013062362A5 - - Google Patents

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Publication number
JP2013062362A5
JP2013062362A5 JP2011199622A JP2011199622A JP2013062362A5 JP 2013062362 A5 JP2013062362 A5 JP 2013062362A5 JP 2011199622 A JP2011199622 A JP 2011199622A JP 2011199622 A JP2011199622 A JP 2011199622A JP 2013062362 A5 JP2013062362 A5 JP 2013062362A5
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JP
Japan
Prior art keywords
baffle plates
opening
exhaust
opening dimension
baffle plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011199622A
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English (en)
Japanese (ja)
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JP5728341B2 (ja
JP2013062362A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2011199622A external-priority patent/JP5728341B2/ja
Priority to JP2011199622A priority Critical patent/JP5728341B2/ja
Priority to KR1020120097249A priority patent/KR101538830B1/ko
Priority to US13/608,695 priority patent/US20130061969A1/en
Priority to CN201210335345.3A priority patent/CN102989238B/zh
Priority to TW101133232A priority patent/TWI551721B/zh
Publication of JP2013062362A publication Critical patent/JP2013062362A/ja
Publication of JP2013062362A5 publication Critical patent/JP2013062362A5/ja
Publication of JP5728341B2 publication Critical patent/JP5728341B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011199622A 2011-09-13 2011-09-13 排気トラップ Expired - Fee Related JP5728341B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011199622A JP5728341B2 (ja) 2011-09-13 2011-09-13 排気トラップ
KR1020120097249A KR101538830B1 (ko) 2011-09-13 2012-09-03 배기 트랩
US13/608,695 US20130061969A1 (en) 2011-09-13 2012-09-10 Exhaust trap
CN201210335345.3A CN102989238B (zh) 2011-09-13 2012-09-11 排气捕集器
TW101133232A TWI551721B (zh) 2011-09-13 2012-09-12 排氣阱

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011199622A JP5728341B2 (ja) 2011-09-13 2011-09-13 排気トラップ

Publications (3)

Publication Number Publication Date
JP2013062362A JP2013062362A (ja) 2013-04-04
JP2013062362A5 true JP2013062362A5 (enExample) 2014-04-17
JP5728341B2 JP5728341B2 (ja) 2015-06-03

Family

ID=47828749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011199622A Expired - Fee Related JP5728341B2 (ja) 2011-09-13 2011-09-13 排気トラップ

Country Status (5)

Country Link
US (1) US20130061969A1 (enExample)
JP (1) JP5728341B2 (enExample)
KR (1) KR101538830B1 (enExample)
CN (1) CN102989238B (enExample)
TW (1) TWI551721B (enExample)

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* Cited by examiner, † Cited by third party
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CN103752122B (zh) * 2014-02-11 2015-11-11 江苏佳有环保科技有限公司 漆气氧化洗涤塔装置
JP6468884B2 (ja) 2014-04-21 2019-02-13 東京エレクトロン株式会社 排気システム
US10927457B2 (en) * 2015-03-04 2021-02-23 Toshiba Memory Corporation Semiconductor manufacturing apparatus
TWI624554B (zh) * 2015-08-21 2018-05-21 弗里松股份有限公司 蒸發源
US10982319B2 (en) 2015-08-21 2021-04-20 Flisom Ag Homogeneous linear evaporation source
RU2724260C1 (ru) 2016-10-14 2020-06-22 АйЭйчАй КОРПОРЕЙШН Устройство для отбора повторным нагреванием для газофазного процесса
TWI665019B (zh) * 2017-02-15 2019-07-11 辛耘企業股份有限公司 基板處理裝置
KR102330646B1 (ko) * 2017-03-22 2021-11-23 스미스 아날리티컬 엘엘씨 증류 프로브 및 유체를 샘플링하고 조절하기 위한 방법
JP7258274B2 (ja) * 2018-12-25 2023-04-17 株式会社レゾナック フィルタ装置、化学気相成長装置およびＳｉＣエピタキシャルウェハの製造方法
KR102209205B1 (ko) * 2019-08-21 2021-02-01 주식회사 미래보 반도체 공정용 유로방향 전환식 반응부산물 포집장치
US11282491B2 (en) * 2019-12-17 2022-03-22 Emerson Process Management Regulator Technologies, Inc. Plates and plate assemblies for noise attenuators and other devices and methods making the same
US11562726B2 (en) 2019-12-17 2023-01-24 Emerson Process Management Regulator Technologies, Inc. Plates and plate assemblies for noise attenuators and other devices and methods making the same
TWI889744B (zh) * 2020-01-29 2025-07-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 污染物捕集系統、及擋板堆疊
JP2021186785A (ja) * 2020-06-03 2021-12-13 東京エレクトロン株式会社 トラップ装置及び基板処理装置
US11992835B2 (en) 2020-08-04 2024-05-28 Universal Analyzers Inc. Distillation probes and methods for sampling and conditioning a fluid
KR102442234B1 (ko) * 2021-02-09 2022-09-13 주식회사 저스템 기류 균일화 장치를 구비한 efem
TW202303865A (zh) 2021-05-28 2023-01-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 污染物捕集系統、及擋板堆疊
CN113818012B (zh) * 2021-11-25 2022-04-01 新美光(苏州)半导体科技有限公司 一种化学气相沉积装置

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JP4911980B2 (ja) * 2006-02-02 2012-04-04 東京エレクトロン株式会社 減圧処理装置
JP5036354B2 (ja) * 2006-04-04 2012-09-26 東京エレクトロン株式会社 成膜装置の排気系構造、成膜装置、および排ガスの処理方法
JP5128168B2 (ja) * 2006-04-24 2013-01-23 三菱電線工業株式会社 排気装置
US7866345B2 (en) * 2007-09-28 2011-01-11 Circor Instrumentation Technologies, Inc. Non-clogging flow restriction for pressure based flow control devices
JP5696348B2 (ja) * 2008-08-09 2015-04-08 東京エレクトロン株式会社 金属回収方法、金属回収装置、排気系及びこれを用いた成膜装置
CN201470229U (zh) * 2009-09-01 2010-05-19 中国石油集团西部钻探工程有限公司吐哈钻井工艺研究院 环保抑尘器
CN201589723U (zh) * 2009-12-15 2010-09-22 东莞市环境保护监测站 粒子采样用分级冲撞器

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