JP2013021166A - 搬送車 - Google Patents
搬送車 Download PDFInfo
- Publication number
- JP2013021166A JP2013021166A JP2011153883A JP2011153883A JP2013021166A JP 2013021166 A JP2013021166 A JP 2013021166A JP 2011153883 A JP2011153883 A JP 2011153883A JP 2011153883 A JP2011153883 A JP 2011153883A JP 2013021166 A JP2013021166 A JP 2013021166A
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- cassette
- mapping sensor
- flat plate
- transport vehicle
- transfer device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
Abstract
【解決手段】搬送車1は、所定の方向に沿って走行可能に設けられた走行台車3と、走行台車3に対して上下方向の軸中心に回転可能に設けられたターンテーブル9と、ターンテーブル9に設置され、カセットWを載置すると共に、カセットWの移動を行う移載装置11と、カセットWにおけるガラス基板Gの収納状態を検出光Lにより検出すると共に、その光軸方向が走行台車3の走行方向に沿い且つターンテーブル9と伴に回転しない位置に設置されたマッピングセンサ13と、移載装置11によりカセットWを取り込み、ターンテーブル9を回転させてカセットWを回転させた後に、マッピングセンサ13がカセットWにおけるガラス基板Gの収納状態を検出するように制御するコントローラ15とを備える。
【選択図】図2
Description
Claims (4)
- 平板状部材を収納した被搬送物を搬送する搬送車であって、
所定の方向に沿って走行可能に設けられた本体部と、
前記本体部に対して上下方向の軸中心に回転可能に設けられた回転部と、
前記回転部に設置され、前記被搬送物を載置すると共に、前記被搬送物を出し入れする移載装置と、
前記被搬送物における前記平板状部材の収納状態を光を用いて検出すると共に、その光軸方向が前記本体部の走行方向に沿い且つ前記回転部と伴に回転しない位置に設置された光学式検出手段と、
前記移載装置により前記被搬送物を取り込み、前記回転部を回転させて前記被搬送物を回転させた後に、前記光学式検出手段が前記被搬送物における前記平板状部材の収納状態を検出するように制御する制御部と、
を備えることを特徴とする搬送車。 - 前記光学式検出手段は、前記被搬送物が回転したときに当該被搬送物と当接しない位置に固定して設置されていることを特徴とする請求項1記載の搬送車。
- 前記平板状部材は、前記被搬送物内に上下方向において互いに対面するように収納されており、
前記光学式検出手段は、前記各平板状部材の収納位置に対応する箇所に複数設置されていることを特徴とする請求項1又は2記載の搬送車。 - 前記被搬送物は、
前記平板状部材を出し入れする開口と、
前記平板状部材を支持する支持部材と、を有し、
前記開口は、前記移載装置によって取り込まれたときに、前記光軸方向に水平面で直交する方向を向いており、
前記支持部材は、前記開口を介して前記平板状部材が出し入れされる方向に沿って延伸する棒状部材であることを特徴とする請求項1〜3のいずれか一項記載の搬送車。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011153883A JP5927791B2 (ja) | 2011-07-12 | 2011-07-12 | 搬送車 |
CN201210128532.4A CN102874530B (zh) | 2011-07-12 | 2012-04-27 | 搬送车 |
KR1020120064950A KR101526436B1 (ko) | 2011-07-12 | 2012-06-18 | 반송차 |
TW101124729A TWI526381B (zh) | 2011-07-12 | 2012-07-10 | Transport car |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011153883A JP5927791B2 (ja) | 2011-07-12 | 2011-07-12 | 搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013021166A true JP2013021166A (ja) | 2013-01-31 |
JP5927791B2 JP5927791B2 (ja) | 2016-06-01 |
Family
ID=47476100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011153883A Expired - Fee Related JP5927791B2 (ja) | 2011-07-12 | 2011-07-12 | 搬送車 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5927791B2 (ja) |
KR (1) | KR101526436B1 (ja) |
CN (1) | CN102874530B (ja) |
TW (1) | TWI526381B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101421573B1 (ko) * | 2013-02-15 | 2014-07-22 | 주식회사 신성에프에이 | 카세트 크레인의 맵핑 모듈 |
CN104952776B (zh) * | 2015-04-24 | 2019-04-26 | 沈阳拓荆科技有限公司 | 一款加热盘检验及拆装时存放专用车 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63271951A (ja) * | 1987-04-28 | 1988-11-09 | Nippon Signal Co Ltd:The | ウエ−ハ搬送装置 |
JPH042036U (ja) * | 1990-04-19 | 1992-01-09 | ||
JPH04113650A (ja) * | 1990-09-03 | 1992-04-15 | Tokyo Electron Sagami Ltd | 熱処理工程におけるアンローディング方法及び熱処理装置 |
JPH10289939A (ja) * | 1997-04-14 | 1998-10-27 | Shinko Electric Co Ltd | 無人搬送台車 |
US6019563A (en) * | 1997-04-14 | 2000-02-01 | Shinko Electric Co., Ltd. | Automated guided vehicle |
JP2000238904A (ja) * | 1999-02-18 | 2000-09-05 | Sumitomo Heavy Ind Ltd | スタッカクレーン |
JP2001274224A (ja) * | 2000-03-27 | 2001-10-05 | Mitsubishi Electric Corp | 基板カセット装置 |
JP2003170378A (ja) * | 2001-12-03 | 2003-06-17 | Tokyo Electron Ltd | 移載装置 |
JP2003237941A (ja) * | 2002-02-15 | 2003-08-27 | Tokyo Electron Ltd | 無人搬送車 |
JP2006290549A (ja) * | 2005-04-11 | 2006-10-26 | Murata Mach Ltd | 搬送車及び物品の移載方法 |
JP2008118014A (ja) * | 2006-11-07 | 2008-05-22 | Toshiba Matsushita Display Technology Co Ltd | 基板収容カセット |
JP2009051307A (ja) * | 2007-08-24 | 2009-03-12 | Asyst Technologies Japan Inc | 無人搬送車、該無人搬送車を備えた搬送移載システム、及び搬送移載方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100825363B1 (ko) * | 2001-09-18 | 2008-04-28 | 무라타 기카이 가부시키가이샤 | 무인반송차 |
JP4502127B2 (ja) * | 2005-04-01 | 2010-07-14 | 株式会社ダイフク | カセット保管及び被処理板の処理設備 |
JP4297145B2 (ja) * | 2006-09-21 | 2009-07-15 | 村田機械株式会社 | 移載装置 |
-
2011
- 2011-07-12 JP JP2011153883A patent/JP5927791B2/ja not_active Expired - Fee Related
-
2012
- 2012-04-27 CN CN201210128532.4A patent/CN102874530B/zh not_active Expired - Fee Related
- 2012-06-18 KR KR1020120064950A patent/KR101526436B1/ko not_active IP Right Cessation
- 2012-07-10 TW TW101124729A patent/TWI526381B/zh not_active IP Right Cessation
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63271951A (ja) * | 1987-04-28 | 1988-11-09 | Nippon Signal Co Ltd:The | ウエ−ハ搬送装置 |
JPH042036U (ja) * | 1990-04-19 | 1992-01-09 | ||
JPH04113650A (ja) * | 1990-09-03 | 1992-04-15 | Tokyo Electron Sagami Ltd | 熱処理工程におけるアンローディング方法及び熱処理装置 |
JPH10289939A (ja) * | 1997-04-14 | 1998-10-27 | Shinko Electric Co Ltd | 無人搬送台車 |
US6019563A (en) * | 1997-04-14 | 2000-02-01 | Shinko Electric Co., Ltd. | Automated guided vehicle |
JP2000238904A (ja) * | 1999-02-18 | 2000-09-05 | Sumitomo Heavy Ind Ltd | スタッカクレーン |
JP2001274224A (ja) * | 2000-03-27 | 2001-10-05 | Mitsubishi Electric Corp | 基板カセット装置 |
JP2003170378A (ja) * | 2001-12-03 | 2003-06-17 | Tokyo Electron Ltd | 移載装置 |
JP2003237941A (ja) * | 2002-02-15 | 2003-08-27 | Tokyo Electron Ltd | 無人搬送車 |
JP2006290549A (ja) * | 2005-04-11 | 2006-10-26 | Murata Mach Ltd | 搬送車及び物品の移載方法 |
JP2008118014A (ja) * | 2006-11-07 | 2008-05-22 | Toshiba Matsushita Display Technology Co Ltd | 基板収容カセット |
JP2009051307A (ja) * | 2007-08-24 | 2009-03-12 | Asyst Technologies Japan Inc | 無人搬送車、該無人搬送車を備えた搬送移載システム、及び搬送移載方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102874530B (zh) | 2016-11-02 |
KR20130008456A (ko) | 2013-01-22 |
KR101526436B1 (ko) | 2015-06-05 |
TW201305032A (zh) | 2013-02-01 |
CN102874530A (zh) | 2013-01-16 |
JP5927791B2 (ja) | 2016-06-01 |
TWI526381B (zh) | 2016-03-21 |
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