JP2012514199A5 - - Google Patents

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JP2012514199A5
JP2012514199A5 JP2011543545A JP2011543545A JP2012514199A5 JP 2012514199 A5 JP2012514199 A5 JP 2012514199A5 JP 2011543545 A JP2011543545 A JP 2011543545A JP 2011543545 A JP2011543545 A JP 2011543545A JP 2012514199 A5 JP2012514199 A5 JP 2012514199A5
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Japan
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criteria
generate
movement
signal
periodic
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JP2011543545A
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JP5592397B2 (ja
JP2012514199A (ja
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Priority claimed from PCT/US2009/066945 external-priority patent/WO2010077592A2/en
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Publication of JP2012514199A5 publication Critical patent/JP2012514199A5/ja
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JP2011543545A 2008-12-29 2009-12-07 ウェブ基準を使用して位相固定したウェブ位置信号 Expired - Fee Related JP5592397B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14112808P 2008-12-29 2008-12-29
US61/141,128 2008-12-29
PCT/US2009/066945 WO2010077592A2 (en) 2008-12-29 2009-12-07 Phase-locked web position signal using web fiducials

Publications (3)

Publication Number Publication Date
JP2012514199A JP2012514199A (ja) 2012-06-21
JP2012514199A5 true JP2012514199A5 (enExample) 2012-12-13
JP5592397B2 JP5592397B2 (ja) 2014-09-17

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ID=42310482

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JP2011543545A Expired - Fee Related JP5592397B2 (ja) 2008-12-29 2009-12-07 ウェブ基準を使用して位相固定したウェブ位置信号

Country Status (8)

Country Link
US (2) US8847185B2 (enExample)
EP (1) EP2380067B1 (enExample)
JP (1) JP5592397B2 (enExample)
KR (1) KR101667071B1 (enExample)
CN (1) CN102317882B (enExample)
BR (1) BRPI0918689A2 (enExample)
SG (1) SG172349A1 (enExample)
WO (1) WO2010077592A2 (enExample)

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JP6985136B2 (ja) * 2017-12-27 2021-12-22 株式会社Screenホールディングス 基材処理装置および基材処理方法

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